Abstract: A method of detecting an end point of polishing arranged to perform CMP polishing with which an insulating layer of a wafer incorporating a substrate having a metal-containing permalloy layer formed thereon and the insulating layer formed on the metal-containing permalloy layer is chemimechanically polished to expose the flat permalloy layer, the method of detecting an end point of polishing, having the steps of: collecting abrasive material slurry on a surface plate for polishing as a continuous flow from the start or during CMP polishing; continuously mixing a color developing reagent with the collected continuous flow to prepare a specimen for the continuos flow; reading the color of the specimen as a digital value (Ii) by a color identifying sensor; and determining a moment of time at which the digital value (Ii) reaches a digital value (Io) of a specimen of a waste flow of the abrasive material slurry at the end of polishing to be the end of CMP polishing.

Abstract: A method for rotating a machining portion of an electrodischarge machine, in which a tool electrode holder mounted to a clamp holder to hold a tool electrode is rotated by virtue of a reaction force induced by the jet of a machining fluid to thereby rotate the tool electrode with respect to a workpiece. More specifically, the machining fluid is allowed to flow in the interior of the tool electrode holder and is conducted toward the outer peripheral surface of the tool electrode holder, then is further conducted in an inclined direction relative to the radial direction from the outer peripheral surface of the tool electrode holder and is jetted. Thus, the tool electrode holder is rotated by the force of reaction based on the jet of the machining fluid.

Abstract: In an arrangement of the present invention, a connecting member is coupled with a belt attached to a saddle, and then a table is arranged on the saddle so that both ends thereof on its underside are connected with both ends of the connecting member. Thus, all the parts are connected with each other without being interfered with by the saddle or the like.