Abstract: A system for delivering energy to a substrate including a dynamically directable source of radiant energy providing a plurality of beams of radiation, each propagating in a dynamically selectable direction. Independently positionable beam steering elements in a plurality of beam steering elements are operative to receive the beams and direct them to selectable locations on the substrate.

Abstract: A method of recording aligned images on two sides of a printed circuit board substrate, including: recording an image of an electrical circuit pattern on a first side of a printed circuit board substrate; forming an alignment pattern on a side of the printed circuit board substrate, wherein the alignment pattern has a known spatial relationship to said image of an electrical circuit pattern; determining a location of the alignment pattern on the printed circuit board substrate; and recording an image of an electrical circuit pattern on a second side of the printed circuit board substrate in response to the determined location of the alignment pattern.

Abstract: A laser micromachining system improve the utilization of laser energy by using multiple spectral components or time-altered pulses.

Abstract: Apparatus and method for post etching inspection of electrical circuits including an optical inspection assembly viewing an electrical circuit at various regions thereon and providing output indications of etching characteristics of the electrical circuit at the various regions and output circuitry receiving the output indications of etching characteristics of the electrical circuit at the various regions and providing an output indication of variations in the etching characteristics between at least some of the various regions.

Abstract: An optical inspection system has a topology sensing assembly. A height detector detects whether a region of a circuit has a height different from a height of the surface, and provides height data. A topology representation of the circuit, based on the height data, forms the basis for a reduced representation of the topology, and subsequent defect analysis.

Abstract: A method for the inspection of electrical circuit patterns including carrying out an initial inspection of a sequentially acquired image of an electrical circuit pattern to determine potential defects in the electrical circuit pattern; upon identifying a potential defect in the electrical circuit pattern in the course of the initial inspection, interrupting the initial inspection and carrying out a secondary evaluation of a portion of the sequentially acquired image including the potential defect; and following completion of the secondary inspection, resuming the initial inspection.

Abstract: An automated optical inspection system including a source of electromagnetic radiation for delivering a radiation beam on an article to be inspected, a plurality of sensors arranged with respect to the radiation beam for sensing a plurality of radiation properties associated with the radiation beam impinging at least at a zone of impingement on a substance found on the article to be inspected, the plurality of sensors including a luminescence sensor for sensing luminescence of the substance due to the beam impinging thereon and a reflectance sensor for sensing reflectance of the beam from the substance the sensors transmitting information signals based on the radiation properties sensed by the sensors and a processor in communication with the sensors operative to receive the information signals for a plurality of zones of impingement, to combine the signals from the sensors and to analyze them, and to generate an output indicating the presence of defects based on the analysis.

Abstract: A system and method for micromachining substrates containing glass employing a UV laser beam generated by outputting a sub-1000 nm pulsed laser beam that is frequency converted by third harmonic generation to have a wavelength within the range of 285 nm to 333 nm.

Abstract: A system and methodology for conveying generally planar substrates such as printed circuit board, flat panel display and interconnect device substrates, in a levitated state, to and from a scanning or imaging location, including an air flow conveyor having a substrate flattening functionality, and a scanning or imaging device, and scanning and imaging systems and methodologies employing such article conveying systems and methodologies.

Abstract: An automated optical inspection system including a source of electromagnetic radiation for delivering a radiation beam on an article to be inspected, a plurality of sensors arranged with respect to the radiation beam for sensing a plurality of radiation properties associated with the radiation beam impinging at least at a zone of impingement on a substance found on the article to be inspected, the plurality of sensors including a luminescence sensor for sensing luminescence of the substance due to the beam impinging thereon and a reflectance sensor for sensing reflectance of the beam from the substance the sensors transmitting information signals based on the radiation properties sensed by the sensors and a processor in communication with the sensors operative to receive the information signals for a plurality of zones of impingement, to combine the signals from the sensors and to analyze them, and to generate an output indicating the presence of defects based on the analysis.

Abstract: A system for unveiling embedded targets in printed circuit board substrates includes a micro-machining device, a sensor, and a controller. The micro-machining device removes portions of an opaque layer overlaying an alignment target in a general region in which the target should be located, and the sensor senses whether the alignment target is located at selected locations where portions of the opaque layer have been removed. In response to sensing the presence or absence of an alignment target at the selected locations, the controller directs the micro-machining device to remove additional portions of the opaque layer.

Abstract: A system for delivering energy to a substrate including a dynamically directable source of radiant energy providing a plurality of beams of radiation, each propagating in a dynamically selectable direction. Independently positionable beam steering elements in a plurality of beam steering elements are operative to receive the beams and direct them to selectable locations on the substrate.

Abstract: A system for delivering energy to a substrate including a dynamically directable source of radiant energy providing a plurality of beams of radiation, each propagating in a dynamically selectable direction. Independently positionable beam steering elements in a plurality of beam steering elements are operative to receive the beams and direct them to selectable locations on the substrate.

Abstract: A system for delivering energy to a substrate including a dynamically directable source of radiant energy providing a plurality of beams of radiation, each propagating in a dynamically selectable direction. Independently positionable beam steering elements in a plurality of beam steering elements are operative to receive the beams and direct them to selectable locations on the substrate.

Abstract: A system for delivering energy to a substrate including a dynamically directable source of radiant energy providing a plurality of beams of radiation, each propagating in a dynamically selectable direction. Independently positionable beam steering elements in a plurality of beam steering elements are operative to receive the beams and direct them to selectable locations on the substrate.

Abstract: An automated optical inspection system including a source of electromagnetic radiation for delivering a radiation beam on an article to be inspected, a plurality of sensors arranged with respect to the radiation beam for sensing a plurality of radiation properties associated with the radiation beam impinging at least at a zone of impingement on a substance found on the article to be inspected, the plurality of sensors including a luminescence sensor for sensing luminescence of the substance due to the beam impinging thereon and a reflectance sensor for sensing reflectance of the beam from the substance the sensors transmitting information signals based on the radiation properties sensed by the sensors and a processor in communication with the sensors operative to receive the information signals for a plurality of zones of impingement, to combine the signals from the sensors and to analyze them, and to generate an output indicating the presence of defects based on the analysis.

Abstract: A system for delivering energy to a substrate including a dynamically directable source of radiant energy providing a plurality of beams of radiation, each propagating in a dynamically selectable direction. Independently positionable beam steering elements in a plurality of beam steering elements are operative to receive the beams and direct them to selectable locations on the substrate.

Abstract: A first inspection functionality is provided to obtain information about a first attribute at a conductor location on an electrical circuit. A second inspection functionality is provided to obtain information about a second attribute at the conductor location. A combination of first attribute information and second attribute information is analyzed to determine an inspection attribute of the conductor at the conductor location. Attribute information may relate to one or more of: reflectance, fluorescence or height.

Abstract: An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report.

Abstract: An illumination system including at least one reflector subtending an angle with respect to a location on a surface of an article, and first and second light sources, the first and second light sources each providing a light output, the light outputs from both of the first and second light sources being directed to impinge on the location on the surface of an article within the angle, at least one of the light outputs being reflected by the reflector.