Patents Assigned to Orbotech, Ltd.
  • Publication number: 20020168099
    Abstract: An image of an article to be inspected is divided into image portions, and a search engine makes a comparison with the image portion and a library of reference images. The reference images have predetermined labels that indicate whether each indicates a defect or no defect. The one of the reference images that most closely matches the image portion is determined, and the label associated with the reference image is taken as indicating whether the image portion corresponds to a location with a defect or no defect. Locations indicated as being defective are considered candidate defects and may subsequently be inspected in more detail.
    Type: Application
    Filed: May 10, 2002
    Publication date: November 14, 2002
    Applicant: ORBOTECH LTD
    Inventor: Amir Noy
  • Publication number: 20020166983
    Abstract: A scanner system acquires images of articles using a sensor acquiring an image of a portion of an article and defining a field of view, a displacer operative to provide mutual relative displacement between the article the sensor at a generally uniform rate of displacement, and a field of view freezer operative to provide a generally motionless image during image acquisition. The scanner system is particularly useful in the field of automated optical inspection.
    Type: Application
    Filed: May 10, 2002
    Publication date: November 14, 2002
    Applicant: ORBOTECH LTD
    Inventors: Yigal Katzir, Avraham Adler, Itay Gur-Arie
  • Publication number: 20020163348
    Abstract: An automated optical inspection system is operative to convey an electrical circuit to be inspected in a first direction. While the electrical circuit is being conveyed a laser beam scanner scans a laser beam in second direction, generally perpendicular to the first direction, and a fluorescence detector detects fluorescence produced by impingement of the laser beam on portions of the electrical circuit. The fluorescence detector receives fluorescence sequentially from portions of the electrical circuit illuminated by the laser beam as a result of both conveying of the electrical circuit and scanning of the laser beam in the second direction.
    Type: Application
    Filed: May 1, 2001
    Publication date: November 7, 2002
    Applicant: ORBOTECH LTD.
    Inventors: Eyal Harel, Yehoshua Dollberg, Ben-Zion Lavi
  • Publication number: 20020154810
    Abstract: A system and method of inspecting electrical circuits with multiple optical inputs, including: obtaining first and second image data that are generally spatially coincidental but which each include some image data that is different, modifying one of the images by employing the other image so as to produce an enhanced representation of the electrical circuit, and inspecting the enhanced representation for defects.
    Type: Application
    Filed: February 13, 2001
    Publication date: October 24, 2002
    Applicant: ORBOTECH LTD.
    Inventors: Saki Itzhak Hakim, Zeev Smilansky
  • Patent number: 6437312
    Abstract: An illumination system including at least one reflector subtending an angle with respect to a location on a surface of an article, and first and second light sources, the first and second light sources each providing a light output, the light outputs from both of the first and second light sources being directed to impinge on the location on the surface of an article within the angle, at least one of the light outputs being reflected by the reflector.
    Type: Grant
    Filed: May 5, 2000
    Date of Patent: August 20, 2002
    Assignee: Orbotech, Ltd.
    Inventors: Avraham Adler, Moshe Ben Shlomo
  • Publication number: 20020096555
    Abstract: A system and method for forming bumps on an integrated circuit including a scanning direct laser imager employed to selectably expose a photosensitive layer deposited on an integrated circuit substrate, thereby to define regions overlying selected portions of the substrate, a developer developing said photosensitive layer to form apertures in the photosensitive layer at the defined regions, and a solder applicator applying a solder composition to the apertures to define solder bumps on the integrated circuit at selected portions thereof.
    Type: Application
    Filed: January 23, 2001
    Publication date: July 25, 2002
    Applicant: ORBOTECH LTD.
    Inventors: Scott Steven Waxler, Dan Zemer
  • Publication number: 20020093650
    Abstract: An optical inspection system has a topology sensing assembly. A height detector detects whether a region of a circuit has a height different from a height of the surface, and provides height data. A topology representation of the circuit, based on the height data, forms the basis for a reduced representation of the topology, and subsequent defect analysis.
    Type: Application
    Filed: December 31, 2001
    Publication date: July 18, 2002
    Applicant: Orbotech Ltd.
    Inventors: Dan Zemer, Michael Faibisch
  • Publication number: 20020092833
    Abstract: A laser micromachining system improve the utilization of laser energy by using multiple spectral components or time-altered pulses.
    Type: Application
    Filed: December 31, 2001
    Publication date: July 18, 2002
    Applicant: Orbotech Ltd.
    Inventors: Eliezer Lipman, Yehiam Prior, Abraham Gross
  • Patent number: 6419148
    Abstract: A system and method for forming bumps on an integrated circuit including a scanning direct laser imager employed to selectably expose a photosensitive layer deposited on an integrated circuit substrate, thereby to define regions overlying selected portions of the substrate, a developer developing said photosensitive layer to form apertures in the photosensitive layer at the defined regions, and a solder applicator applying a solder composition to the apertures to define solder bumps on the integrated circuit at selected portions thereof.
    Type: Grant
    Filed: January 23, 2001
    Date of Patent: July 16, 2002
    Assignee: Orbotech Ltd.
    Inventors: Scott Steven Waxler, Dan Zemer
  • Patent number: 6367609
    Abstract: This invention discloses a conveyor table, including a supporting construction having a first supporting surface for supporting articles to be conveyed, a plurality of conveyor elements mounted to the supporting construction and defining a second supporting surface for supporting the articles to be conveyed, an actuator for selectively moving one of the supporting surfaces with respect to the other to selectively enable either the first supporting surface defined by the supporting construction to support the articles, or the second supporting surface defined by the conveyor elements to support the articles, and a drive for driving the conveyor elements to convey the articles in a predetermined direction when the articles are supported by the second supporting surface defined by the conveyor elements.
    Type: Grant
    Filed: March 13, 2001
    Date of Patent: April 9, 2002
    Assignee: Orbotech Ltd.
    Inventors: Amiram Caspi, Zamir Halutz
  • Publication number: 20020038510
    Abstract: An automated optical inspection method detects width defects by employing locally applied width information. A defect determination is based on proximal width information of nearby parts of a conductor. Automated optical inspection systems inspect the surfaces of patterned objects for line width defects, employing line width data that is at least partially obtained automatically from analyzing a reference image of a non-defective patterned object.
    Type: Application
    Filed: October 3, 2001
    Publication date: April 4, 2002
    Applicant: ORBOTECH, LTD
    Inventors: Nissim Savareigo, Hila Shteinberg
  • Publication number: 20020039182
    Abstract: Surface dimension and footprint dimension values are determined by scanning a printed circuit board with a laser. Exposed substrate parts of the printed circuit board fluoresce significantly, emitting detectable luminance, while conductors do not. Conductors reflect the laser light much more strongly than the exposed substrate, especially at the substantially flat part of the top surface. Luminescence and reflectivity collectors provide signals indicative of the footprint and surface dimensions. This cross-sectional information is used in making adjustment determinations in the manufacturing process, and also decisions relating to repair or discard operations.
    Type: Application
    Filed: August 28, 2001
    Publication date: April 4, 2002
    Applicant: ORBOTECH, LTD.
    Inventors: Nissim Savareigo, Igor Markov
  • Publication number: 20020013667
    Abstract: Apparatus for electrical testing of electrical circuits includes an array of probes arranged for selective engagement with portions of electrical circuits to be tested, testing circuitry associated with the array of probes for sensing electrical characteristics of the electrical circuits engaged by the array of probes, and control circuitry associated with the array of probes for causing engagement between selected ones of the array of probes with selected ones of the portions of electrical circuits to be tested. The array of probes includes at least two static probe assemblies arranged in a fixed array, and the static probe assemblies include a selectively positionable probe element and a probe element positioner. The apparatus is employed to test electrical circuits during fabrication.
    Type: Application
    Filed: July 18, 2001
    Publication date: January 31, 2002
    Applicant: Orbotech, Ltd.
    Inventors: Dan Zemer, Eyal Harel
  • Publication number: 20010035267
    Abstract: Apparatus and method for post etching inspection of electrical circuits including an optical inspection assembly viewing an electrical circuit at various regions thereon and providing output indications of etching characteristics of the electrical circuit at the various regions and output circuitry receiving the output indications of etching characteristics of the electrical circuit at the various regions and providing an output indication of variations in the etching characteristics between at least some of the various regions.
    Type: Application
    Filed: April 2, 2001
    Publication date: November 1, 2001
    Applicant: ORBOTECH LTD.
    Inventor: Nissim Savareigo
  • Publication number: 20010028454
    Abstract: An automated optical inspection system including a source of electromagnetic radiation for delivering a radiation beam on an article to be inspected, a plurality of sensors arranged with respect to the radiation beam for sensing a plurality of radiation properties associated with the radiation beam impinging at least at a zone of impingement on a substance found on the article to be inspected, the plurality of sensors including a luminescence sensor for sensing luminescence of the substance due to the beam impinging thereon and a reflectance sensor for sensing reflectance of the beam from the substance the sensors transmitting information signals based on the radiation properties sensed by the sensors and a processor in communication with the sensors operative to receive the information signals for a plurality of zones of impingement, to combine the signals from the sensors and to analyze them, and to generate an output indicating the presence of defects based on the analysis.
    Type: Application
    Filed: April 3, 2001
    Publication date: October 11, 2001
    Applicant: ORBOTECH LTD.
    Inventor: Nissim Savareigo
  • Patent number: 6275514
    Abstract: Apparatus for producing high repetition rate optical pulses, including: a beam generator that produces an initial pulsed light beam having an initial pulse repetition rate; a pulse repetition rate multiplier, which receives the initial pulsed light beam and produces at least one pulsed light beam having a higher pulse repetition rate than the initial rate.
    Type: Grant
    Filed: November 19, 1998
    Date of Patent: August 14, 2001
    Assignee: Orbotech Ltd.
    Inventors: Yigal Katzir, Boris Kling, Paul Fenster, Avraham Gross
  • Publication number: 20010010283
    Abstract: This invention discloses a conveyor table, including a supporting construction having a first supporting surface for supporting articles to be conveyed, a plurality of conveyor elements mounted to the supporting construction and defining a second supporting surface for supporting the articles to be conveyed, an actuator for selectively moving one of the supporting surfaces with respect to the other to selectively enable either the first supporting surface defined by the supporting construction to support the articles, or the second supporting surface defined by the conveyor elements to support the articles, and a drive for driving the conveyor elements to convey the articles in a predetermined direction when the articles are supported by the second supporting surface defined by the conveyor elements.
    Type: Application
    Filed: March 13, 2001
    Publication date: August 2, 2001
    Applicant: ORBOTECH LTD.
    Inventors: Amiram Caspi, Zamir Halutz
  • Publication number: 20010002935
    Abstract: This invention discloses a method for printed circuit board (PCB) inspection, including providing a multiplicity of PCBs placed on an inspection panel, defining each non-identical PCB in terms of geometry and features which are to be inspected, grouping the PCBs into at least one cluster, the at least one cluster being defined in terms of an amount, location and orientation of the PCBs in the at least one cluster, creating a reference image for the panel defined by a location and orientation of the at least one cluster on the panel and inspecting the panel by comparing sensed information with the reference image.
    Type: Application
    Filed: December 5, 2000
    Publication date: June 7, 2001
    Applicant: ORBOTECH LTD.
    Inventors: Anat Greenberg, Gregory Gutarts, Anna Yaari, Michael Barel, Jacob Nadivi
  • Patent number: 6223880
    Abstract: This invention discloses a conveyor table, including a supporting construction having a first supporting surface for supporting articles to be conveyed, a plurality of conveyor elements mounted to the supporting construction and defining a second supporting surface for supporting the articles to be conveyed, an actuator for selectively moving one of the supporting surfaces with respect to the other to selectively enable either the first supporting surface defined by the supporting construction to support the articles, or the second supporting surface defined by the conveyor elements to support the articles, and a drive for driving the conveyor elements to convey the articles in a predetermined direction when the articles are supported by the second supporting surface defined by the conveyor elements.
    Type: Grant
    Filed: February 20, 1997
    Date of Patent: May 1, 2001
    Assignee: Orbotech Ltd.
    Inventors: Amiram Caspi, Zamir Halutz
  • Patent number: 6215895
    Abstract: A system for inspecting a display panel including a plurality of pixels, the system including a selective pixel actuator which causes only some of the plurality of pixels to be actuated, a sensor for acquiring an image of a pattern which is generated on the panel, and an image processor operative to identify nonuniformities in the intensities of pixels of the panel.
    Type: Grant
    Filed: June 18, 1998
    Date of Patent: April 10, 2001
    Assignee: Orbotech Ltd.
    Inventors: Erez Sali, Yigal Katzir, Noam Dotan, Abraham Gross