Patents Assigned to Orbotech, Ltd.
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Publication number: 20020168099Abstract: An image of an article to be inspected is divided into image portions, and a search engine makes a comparison with the image portion and a library of reference images. The reference images have predetermined labels that indicate whether each indicates a defect or no defect. The one of the reference images that most closely matches the image portion is determined, and the label associated with the reference image is taken as indicating whether the image portion corresponds to a location with a defect or no defect. Locations indicated as being defective are considered candidate defects and may subsequently be inspected in more detail.Type: ApplicationFiled: May 10, 2002Publication date: November 14, 2002Applicant: ORBOTECH LTDInventor: Amir Noy
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Publication number: 20020166983Abstract: A scanner system acquires images of articles using a sensor acquiring an image of a portion of an article and defining a field of view, a displacer operative to provide mutual relative displacement between the article the sensor at a generally uniform rate of displacement, and a field of view freezer operative to provide a generally motionless image during image acquisition. The scanner system is particularly useful in the field of automated optical inspection.Type: ApplicationFiled: May 10, 2002Publication date: November 14, 2002Applicant: ORBOTECH LTDInventors: Yigal Katzir, Avraham Adler, Itay Gur-Arie
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Publication number: 20020163348Abstract: An automated optical inspection system is operative to convey an electrical circuit to be inspected in a first direction. While the electrical circuit is being conveyed a laser beam scanner scans a laser beam in second direction, generally perpendicular to the first direction, and a fluorescence detector detects fluorescence produced by impingement of the laser beam on portions of the electrical circuit. The fluorescence detector receives fluorescence sequentially from portions of the electrical circuit illuminated by the laser beam as a result of both conveying of the electrical circuit and scanning of the laser beam in the second direction.Type: ApplicationFiled: May 1, 2001Publication date: November 7, 2002Applicant: ORBOTECH LTD.Inventors: Eyal Harel, Yehoshua Dollberg, Ben-Zion Lavi
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Publication number: 20020154810Abstract: A system and method of inspecting electrical circuits with multiple optical inputs, including: obtaining first and second image data that are generally spatially coincidental but which each include some image data that is different, modifying one of the images by employing the other image so as to produce an enhanced representation of the electrical circuit, and inspecting the enhanced representation for defects.Type: ApplicationFiled: February 13, 2001Publication date: October 24, 2002Applicant: ORBOTECH LTD.Inventors: Saki Itzhak Hakim, Zeev Smilansky
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Patent number: 6437312Abstract: An illumination system including at least one reflector subtending an angle with respect to a location on a surface of an article, and first and second light sources, the first and second light sources each providing a light output, the light outputs from both of the first and second light sources being directed to impinge on the location on the surface of an article within the angle, at least one of the light outputs being reflected by the reflector.Type: GrantFiled: May 5, 2000Date of Patent: August 20, 2002Assignee: Orbotech, Ltd.Inventors: Avraham Adler, Moshe Ben Shlomo
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Publication number: 20020096555Abstract: A system and method for forming bumps on an integrated circuit including a scanning direct laser imager employed to selectably expose a photosensitive layer deposited on an integrated circuit substrate, thereby to define regions overlying selected portions of the substrate, a developer developing said photosensitive layer to form apertures in the photosensitive layer at the defined regions, and a solder applicator applying a solder composition to the apertures to define solder bumps on the integrated circuit at selected portions thereof.Type: ApplicationFiled: January 23, 2001Publication date: July 25, 2002Applicant: ORBOTECH LTD.Inventors: Scott Steven Waxler, Dan Zemer
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Publication number: 20020093650Abstract: An optical inspection system has a topology sensing assembly. A height detector detects whether a region of a circuit has a height different from a height of the surface, and provides height data. A topology representation of the circuit, based on the height data, forms the basis for a reduced representation of the topology, and subsequent defect analysis.Type: ApplicationFiled: December 31, 2001Publication date: July 18, 2002Applicant: Orbotech Ltd.Inventors: Dan Zemer, Michael Faibisch
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Publication number: 20020092833Abstract: A laser micromachining system improve the utilization of laser energy by using multiple spectral components or time-altered pulses.Type: ApplicationFiled: December 31, 2001Publication date: July 18, 2002Applicant: Orbotech Ltd.Inventors: Eliezer Lipman, Yehiam Prior, Abraham Gross
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Patent number: 6419148Abstract: A system and method for forming bumps on an integrated circuit including a scanning direct laser imager employed to selectably expose a photosensitive layer deposited on an integrated circuit substrate, thereby to define regions overlying selected portions of the substrate, a developer developing said photosensitive layer to form apertures in the photosensitive layer at the defined regions, and a solder applicator applying a solder composition to the apertures to define solder bumps on the integrated circuit at selected portions thereof.Type: GrantFiled: January 23, 2001Date of Patent: July 16, 2002Assignee: Orbotech Ltd.Inventors: Scott Steven Waxler, Dan Zemer
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Patent number: 6367609Abstract: This invention discloses a conveyor table, including a supporting construction having a first supporting surface for supporting articles to be conveyed, a plurality of conveyor elements mounted to the supporting construction and defining a second supporting surface for supporting the articles to be conveyed, an actuator for selectively moving one of the supporting surfaces with respect to the other to selectively enable either the first supporting surface defined by the supporting construction to support the articles, or the second supporting surface defined by the conveyor elements to support the articles, and a drive for driving the conveyor elements to convey the articles in a predetermined direction when the articles are supported by the second supporting surface defined by the conveyor elements.Type: GrantFiled: March 13, 2001Date of Patent: April 9, 2002Assignee: Orbotech Ltd.Inventors: Amiram Caspi, Zamir Halutz
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Publication number: 20020038510Abstract: An automated optical inspection method detects width defects by employing locally applied width information. A defect determination is based on proximal width information of nearby parts of a conductor. Automated optical inspection systems inspect the surfaces of patterned objects for line width defects, employing line width data that is at least partially obtained automatically from analyzing a reference image of a non-defective patterned object.Type: ApplicationFiled: October 3, 2001Publication date: April 4, 2002Applicant: ORBOTECH, LTDInventors: Nissim Savareigo, Hila Shteinberg
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Publication number: 20020039182Abstract: Surface dimension and footprint dimension values are determined by scanning a printed circuit board with a laser. Exposed substrate parts of the printed circuit board fluoresce significantly, emitting detectable luminance, while conductors do not. Conductors reflect the laser light much more strongly than the exposed substrate, especially at the substantially flat part of the top surface. Luminescence and reflectivity collectors provide signals indicative of the footprint and surface dimensions. This cross-sectional information is used in making adjustment determinations in the manufacturing process, and also decisions relating to repair or discard operations.Type: ApplicationFiled: August 28, 2001Publication date: April 4, 2002Applicant: ORBOTECH, LTD.Inventors: Nissim Savareigo, Igor Markov
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Publication number: 20020013667Abstract: Apparatus for electrical testing of electrical circuits includes an array of probes arranged for selective engagement with portions of electrical circuits to be tested, testing circuitry associated with the array of probes for sensing electrical characteristics of the electrical circuits engaged by the array of probes, and control circuitry associated with the array of probes for causing engagement between selected ones of the array of probes with selected ones of the portions of electrical circuits to be tested. The array of probes includes at least two static probe assemblies arranged in a fixed array, and the static probe assemblies include a selectively positionable probe element and a probe element positioner. The apparatus is employed to test electrical circuits during fabrication.Type: ApplicationFiled: July 18, 2001Publication date: January 31, 2002Applicant: Orbotech, Ltd.Inventors: Dan Zemer, Eyal Harel
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Publication number: 20010035267Abstract: Apparatus and method for post etching inspection of electrical circuits including an optical inspection assembly viewing an electrical circuit at various regions thereon and providing output indications of etching characteristics of the electrical circuit at the various regions and output circuitry receiving the output indications of etching characteristics of the electrical circuit at the various regions and providing an output indication of variations in the etching characteristics between at least some of the various regions.Type: ApplicationFiled: April 2, 2001Publication date: November 1, 2001Applicant: ORBOTECH LTD.Inventor: Nissim Savareigo
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Publication number: 20010028454Abstract: An automated optical inspection system including a source of electromagnetic radiation for delivering a radiation beam on an article to be inspected, a plurality of sensors arranged with respect to the radiation beam for sensing a plurality of radiation properties associated with the radiation beam impinging at least at a zone of impingement on a substance found on the article to be inspected, the plurality of sensors including a luminescence sensor for sensing luminescence of the substance due to the beam impinging thereon and a reflectance sensor for sensing reflectance of the beam from the substance the sensors transmitting information signals based on the radiation properties sensed by the sensors and a processor in communication with the sensors operative to receive the information signals for a plurality of zones of impingement, to combine the signals from the sensors and to analyze them, and to generate an output indicating the presence of defects based on the analysis.Type: ApplicationFiled: April 3, 2001Publication date: October 11, 2001Applicant: ORBOTECH LTD.Inventor: Nissim Savareigo
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Patent number: 6275514Abstract: Apparatus for producing high repetition rate optical pulses, including: a beam generator that produces an initial pulsed light beam having an initial pulse repetition rate; a pulse repetition rate multiplier, which receives the initial pulsed light beam and produces at least one pulsed light beam having a higher pulse repetition rate than the initial rate.Type: GrantFiled: November 19, 1998Date of Patent: August 14, 2001Assignee: Orbotech Ltd.Inventors: Yigal Katzir, Boris Kling, Paul Fenster, Avraham Gross
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Publication number: 20010010283Abstract: This invention discloses a conveyor table, including a supporting construction having a first supporting surface for supporting articles to be conveyed, a plurality of conveyor elements mounted to the supporting construction and defining a second supporting surface for supporting the articles to be conveyed, an actuator for selectively moving one of the supporting surfaces with respect to the other to selectively enable either the first supporting surface defined by the supporting construction to support the articles, or the second supporting surface defined by the conveyor elements to support the articles, and a drive for driving the conveyor elements to convey the articles in a predetermined direction when the articles are supported by the second supporting surface defined by the conveyor elements.Type: ApplicationFiled: March 13, 2001Publication date: August 2, 2001Applicant: ORBOTECH LTD.Inventors: Amiram Caspi, Zamir Halutz
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Publication number: 20010002935Abstract: This invention discloses a method for printed circuit board (PCB) inspection, including providing a multiplicity of PCBs placed on an inspection panel, defining each non-identical PCB in terms of geometry and features which are to be inspected, grouping the PCBs into at least one cluster, the at least one cluster being defined in terms of an amount, location and orientation of the PCBs in the at least one cluster, creating a reference image for the panel defined by a location and orientation of the at least one cluster on the panel and inspecting the panel by comparing sensed information with the reference image.Type: ApplicationFiled: December 5, 2000Publication date: June 7, 2001Applicant: ORBOTECH LTD.Inventors: Anat Greenberg, Gregory Gutarts, Anna Yaari, Michael Barel, Jacob Nadivi
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Patent number: 6223880Abstract: This invention discloses a conveyor table, including a supporting construction having a first supporting surface for supporting articles to be conveyed, a plurality of conveyor elements mounted to the supporting construction and defining a second supporting surface for supporting the articles to be conveyed, an actuator for selectively moving one of the supporting surfaces with respect to the other to selectively enable either the first supporting surface defined by the supporting construction to support the articles, or the second supporting surface defined by the conveyor elements to support the articles, and a drive for driving the conveyor elements to convey the articles in a predetermined direction when the articles are supported by the second supporting surface defined by the conveyor elements.Type: GrantFiled: February 20, 1997Date of Patent: May 1, 2001Assignee: Orbotech Ltd.Inventors: Amiram Caspi, Zamir Halutz
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Patent number: 6215895Abstract: A system for inspecting a display panel including a plurality of pixels, the system including a selective pixel actuator which causes only some of the plurality of pixels to be actuated, a sensor for acquiring an image of a pattern which is generated on the panel, and an image processor operative to identify nonuniformities in the intensities of pixels of the panel.Type: GrantFiled: June 18, 1998Date of Patent: April 10, 2001Assignee: Orbotech Ltd.Inventors: Erez Sali, Yigal Katzir, Noam Dotan, Abraham Gross