Abstract: A system and method for verifying defects in electrical circuit patterns including supplying a plurality of like electrical circuit patterns to a defect verification assembly after identification of candidate defects at an automated inspection assembly; verifying selected candidate defects as being one of: an actual defect, other than an actual defect; and marking a candidate defect in response to a recurrence of a given candidate defect at substantially corresponding locations on at least two electrical circuit patterns.
Abstract: System and corresponding method for plotting an image on a thin material having variations in thickness. System (40) includes: a plotter unit (46), for plotting the image on a surface (48) of thin material (42); a control unit (50), for controlling plotter unit (46), for effecting the plotting; and a thickness measuring device (52), for measuring thickness (44) of thin material (42). Control unit (50) receives measured thickness values from thickness measuring device (52), and uses measured thickness values for adjusting plotting of the image via plotter unit (46), to compensate for variations in thickness (44) of thin material (42).
Abstract: A method of manufacturing includes depositing a material on a surface of a substrate in a liquid form using an inkjet process, whereby the material dries in an initial shape on the substrate. A photolithographic process is applied using a mask that is separate from the substrate in order to modify the initial shape.
Abstract: A method of manufacturing includes depositing a material on a surface of a substrate in a liquid form using an inkjet process, whereby the material dries in an initial shape on the substrate. A photolithographic process is applied using a mask that is separate from the substrate in order to modify the initial shape.
Abstract: A system comprising automatic apparatus for automatic optical inspection (AOI), verification and correction of defects in an article, and a processor operative to select between AOI, verification and correction for performing on the article.
Type:
Grant
Filed:
February 27, 2007
Date of Patent:
November 13, 2007
Assignee:
Orbotech Ltd.
Inventors:
Michael Levi, Bernard Solomon, Doron Aspir, Elad Fridman
Abstract: A method for aligning an image to be recorded by a direct image scanner on an upper layer of a printed circuit board with an image recorded on a lower layer thereof, the method comprising: visually imaging a portion of the image on the lower layer; and recording a pattern on the upper layer, referenced to coordinates of the visual image of the portion.
Type:
Grant
Filed:
November 7, 2001
Date of Patent:
October 16, 2007
Assignee:
Orbotech, Ltd.
Inventors:
Amnon Ganot, Hanan Gino, Golan Hanina, Zeev Kantor, Boris Kling, Shabtay Spinzi, Barry Ben-Ezra
Abstract: This invention discloses an electrical circuit inspection system including an optical subsystem for optically inspecting an electrical circuit and providing an inspection output identifying more than two different types of regions and an analysis subsystem for analyzing the inspection output, the analyzing including comparing the inspection output with a computer file reference identifying more than two different types of regions. A method for inspecting an electrical circuit inspection is also disclosed.
Abstract: A system and method for selectable area laser treatment of a substrate, such as thin film transistors, the system including a holder holding a substrate in proximity to reactant, and laser beams each addressing independently selectable mutually set apart locations on the substrate to induce a reaction between the substrate and the reactant.
Abstract: Apparatus for sensing information regarding a surface including a first plurality of optical elements arranged to acquire two dimensional information about a surface, a second plurality of optical elements arranged to acquire topographical information about the surface, wherein the first plurality and the second plurality of optical elements are arranged to simultaneously provide the two dimensional information and the topographical information to at least partially non-overlapping portions of a single sensor array.
Type:
Grant
Filed:
January 9, 2004
Date of Patent:
August 7, 2007
Assignee:
Orbotech Ltd.
Inventors:
Gregory Toker, Andrei Brunfeld, Ilia Lutsker
Abstract: A method for automatically optically inspecting an electrical circuit, comprising: acquiring at least one optical image of an electrical circuit; generating at least one first inspection image from the at least one image and determining regions of candidate defects therefrom; generating at least one additional inspection image for regions surrounding candidate defects, said at least one additional inspection image at least partially including optical information not included in the at least one first inspection image; and determining whether the candidate defect is a specious defect by inspecting the at least one additional inspection image.
Abstract: A system comprising automatic apparatus for automatic optical inspection (AOI), verification and correction of defects in an article, and a processor operative to select between AOI, verification and correction for performing on the article.
Type:
Application
Filed:
February 27, 2007
Publication date:
July 5, 2007
Applicant:
ORBOTECH LTD
Inventors:
Michael Levi, Bernard Solomon, Doron Aspir, Elad Fridman
Abstract: A system and method of inspecting electrical circuits with multiple optical inputs, including: obtaining first and second image data that are generally spatially coincidental but which each include some image data that is different, modifying one of the images by employing the other image so as to produce an enhanced representation of the electrical circuit, and inspecting the enhanced representation for defects.
Abstract: This invention discloses an electrical circuit inspection system including an optical subsystem for optically inspecting an electrical circuit and providing an inspection output identifying more than two different types of regions and an analysis subsystem for analyzing the inspection output, the analyzing including comparing the inspection output with a computer file reference identifying more than two different types of regions. A method for inspecting an electrical circuit inspection is also disclosed.
Abstract: Illuminating apparatus for illuminating a workpiece during visual inspection thereof, including a first light source emitting light over a continuous angle of illumination toward the workpiece, blocking element arranged to block light over a portion of the continuous angle such that two portions of the illumination, separated by a blocked angle, illuminate the workpiece from the source, and a second light source arranged to illuminate the workpiece over the blocked angle.
Abstract: A pixelated detector assembly comprising a stack of thin detector crystals, each detector crystal having a pair of planar surfaces bound by edges substantially thinner than the dimensions of the surfaces. The stack is disposed such that the radiation to be detected is incident on one set of edges of the stack of detector crystals. The dimension of the planar surfaces in the general direction of incidence of the radiation incidence is sufficient to ensure that substantially all of the high energy photons to be detected are absorbed within the depth of the detector assembly. Each of the detector crystals has a two-dimensional pixelated anode array formed on one of its planar surfaces. A cathode is formed on its opposite planar surface, preferably covering substantially all of the surface.
Type:
Grant
Filed:
May 9, 2006
Date of Patent:
April 24, 2007
Assignee:
Orbotech Medical Solutions Ltd.
Inventors:
Uri El-Hanany, Arie Shahar, Shimon Klier, Alex Tsigelman, Eldan Halberthal
Abstract: A method for inspecting objects comprising: creating a reference image for a representative object, the reference image comprising an at least partially vectorized first representation of boundaries representing the representative object; acquiring an image of an object under inspection comprising a second representation of boundaries representing the object under inspection; and comparing a location of at least some boundaries in the second representation of boundaries to a location of corresponding boundaries in the at least partially vectorized first representation of boundaries, thereby to identify defects.
Abstract: A system comprising automatic apparatus for automatic optical inspection (AOI), verification and correction of defects in an article, and a processor operative to select between AOI, verification and correction for performing on the article.
Type:
Grant
Filed:
December 24, 2002
Date of Patent:
April 10, 2007
Assignee:
Orbotech Ltd.
Inventors:
Michael Levi, Bernard Solomon, Doron Aspir, Elad Fridman
Abstract: This invention discloses a method for determining a location of a border in a color image, the image comprising at least two color populations, between a first color region associated with a first one of the two color populations and a second color region associated with a second one of the two color populations, both the first color region and the second color region being comprised in the color image, the method includes identifying an approximate border location between the first color region and the second color region, determining a plurality of candidate border locations between the first color region and the second color region, each of the plurality of candidate border locations being determined by applying a corresponding border location method chosen from among a plurality of border location methods, choosing one method from among the plurality of border location methods as a preferred method, and determining a location of a border between the first color region and the second color region by design
Type:
Grant
Filed:
July 23, 2000
Date of Patent:
April 3, 2007
Assignee:
Orbotech Ltd.
Inventors:
Uri Gold, Eli Parente, Tally Gilat-Bernshtein, Edward Baranovsky, Tamir Margalit
Abstract: A method for inspecting electrical circuits, and a system for carrying out the method, generating a representation of boundaries of elements in an image of an electrical circuit which is under inspection, and analyzing at least some locations of at least some boundaries in the representation of boundaries of elements to identify defects in the electrical circuit.
Abstract: A system for delivering energy to a substrate including a dynamically directable source of radiant energy providing a plurality of beams of radiation, each propagating in a dynamically selectable direction. Independently positionable beam steering elements in a plurality of beam steering elements are operative to receive the beams and direct them to selectable locations on the substrate.
Type:
Grant
Filed:
October 7, 2002
Date of Patent:
February 13, 2007
Assignee:
Orbotech Ltd
Inventors:
Abraham Gross, Zvi Kotler, Eliezer Lipman