Patents Assigned to Orbotech
  • Patent number: 7177458
    Abstract: A method for automatically optically inspecting an electrical circuit (12), comprising: acquiring at least one optical image of an electrical circuit (12); generating at least one first inspection image from the at least one image and determining regions of candidate defects (236) therefrom; generating at least one additional inspection image for regions surrounding candidate defects (236), said at least one additional inspection image at least partially including optical information not included in the at least one first inspection image; and determining whether the candidate defect (236) is a specious defect by inspecting the at least one additional inspection image.
    Type: Grant
    Filed: September 10, 2000
    Date of Patent: February 13, 2007
    Assignee: Orbotech Ltd.
    Inventors: Nissim Savareigo, Dan Shalom, Nur Arad
  • Patent number: 7170542
    Abstract: An illumination system includes a plurality of solid state light emitters and a scanner operative to sequentially receive light from the plurality of solid state light emitters and to provide a time-multiplexed light output. The solid state light emitters are each operated in pulse mode to increase their brightness relative to the light output of similar emitters operating in continuous mode. The time multiplexed light output is a generally continuous output having a brightness that is greater than the brightness of the output of similar emitters operating in continuous mode. The time multiplexed light output is useful in photolithography and machine vision applications.
    Type: Grant
    Filed: January 23, 2004
    Date of Patent: January 30, 2007
    Assignee: Orbotech Ltd.
    Inventors: Golan Hanina, Boris Kling
  • Patent number: 7166848
    Abstract: A pixelated detector assembly comprising a stack of thin detector crystals, each detector crystal having a pair of planar surfaces bound by edges substantially thinner than the dimensions of the surfaces. The stack is disposed such that the radiation to be detected is incident on one set of edges of the stack of detector crystals. The dimension of the planar surfaces in the general direction of incidence of the radiation incidence is sufficient to ensure that substantially all of the high energy photons to be detected are absorbed within the depth of the detector assembly. Each of the detector crystals has a two-dimensional pixelated anode array formed on one of its planar surfaces. A cathode is formed on its opposite planar surface, preferably covering substantially all of the surface.
    Type: Grant
    Filed: June 25, 2002
    Date of Patent: January 23, 2007
    Assignee: Orbotech Medical Solutions Ltd.
    Inventors: Uri El-Hanany, Arie Shahar, Shimon Klier, Alex Tsigelman, Eldan Halberthal
  • Publication number: 20070012865
    Abstract: An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report.
    Type: Application
    Filed: September 18, 2006
    Publication date: January 18, 2007
    Applicant: ORBOTECH LTD.
    Inventors: Yigal KATZIR, Itay GUR-ARIE, Yacov MALINOVICH
  • Patent number: 7129509
    Abstract: An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report.
    Type: Grant
    Filed: September 14, 2005
    Date of Patent: October 31, 2006
    Assignee: Orbotech, Ltd.
    Inventors: Yigal Katzir, Itay Gur-Arie, Yacov Malinovich
  • Patent number: 7127099
    Abstract: An image of an article to be inspected is divided into image portions, and a search engine makes a comparison with the image portion and a library of reference images. The reference images have predetermined labels that indicate whether each indicates a defect or no defect. The one of the reference images that most closely matches the image portion is determined, and the label associated with the reference image is taken as indicating whether the image portion corresponds to a location with a defect or no defect. Locations indicated as being defective are considered candidate defects and may subsequently be inspected in more detail.
    Type: Grant
    Filed: May 10, 2002
    Date of Patent: October 24, 2006
    Assignee: Orbotech Ltd.
    Inventor: Amir Noy
  • Publication number: 20060213885
    Abstract: A system for delivering energy to a substrate includes a laser energy source providing at least two laser beams, wherein each of the beams is steered to an independently selectable location on a target, and is independently focused onto the target.
    Type: Application
    Filed: May 25, 2006
    Publication date: September 28, 2006
    Applicant: ORBOTECH LTD
    Inventors: Abraham GROSS, Zvi KOTLER, Eliezer LIPMAN, Dan ALON
  • Patent number: 7092000
    Abstract: Apparatus far transmitting information at a data rate, such as for recording an image on a photosensitive surface, including a pulsed light source that produces pulsed light having a pulsed repetition rate and a modulator that asynchronously modulates the pulsed light at the data rate, wherein the data rate is higher than pulse repetition rate.
    Type: Grant
    Filed: December 13, 2000
    Date of Patent: August 15, 2006
    Assignee: Orbotech Ltd.
    Inventors: Yigal Katzir, Boris Kling, Avraham Gross, Wolfgang Retschke
  • Patent number: 7078650
    Abstract: A system for delivering energy to a substrate includes a laser energy source providing at least two laser beams, wherein each of the beams is steered to an independently selectable location on a target, and is independently focused onto the target.
    Type: Grant
    Filed: December 23, 2003
    Date of Patent: July 18, 2006
    Assignee: Orbotech LTD
    Inventors: Abraham Gross, Zvi Kotler, Eliezer Lipman, Dan Alon
  • Publication number: 20060146395
    Abstract: A system for micromachining a substrate, including at least one source of pulsed radiant energy providing at least one pulsed beam of radiation along an optical axis, the at least one pulsed beam including multiple pulses separated by a temporal pulse separation; and a changeable output beam propagator disposed between the at least one source of radiant energy and the substrate and being operative to output a plurality of output beams each output beam being output at a selected angle relative to the optical axis, the angle being changeable in an amount of time that is less than the temporal pulse separation.
    Type: Application
    Filed: February 24, 2006
    Publication date: July 6, 2006
    Applicant: ORBOTECH LTD
    Inventors: Abraham GROSS, Zvi KOTLER, Eliezer LIPMAN
  • Patent number: 7064338
    Abstract: A two-dimensional, pixellated, monolithic semiconductor radiation detector, in which each detector pixel is essentially a perpendicular mode detector. This is achieved by an arrangement of anode spots, one for each pixel located on the flux-exposed front surface of the detector substrate, surrounding by a cathode array preferably in the form of a network of lines, such that the field between the anodes and cathodes on this front surface has a major component in the direction parallel to the surface, and hence perpendicular to the incident photon flux. The conductivity of the substrate is high near this front surface, since this is where the highest level of absorption of photons takes place, and a significant photoconductive current is thus generated between cathodes and anodes. The conductivity is proportional to the incoming photon flux, and decays exponentially with depth into the detector.
    Type: Grant
    Filed: July 5, 2005
    Date of Patent: June 20, 2006
    Assignee: Orbotech LTD
    Inventors: Uri El-Hanany, Arie Shahar
  • Patent number: 7062354
    Abstract: A method for aligning an image to be recorded by a direct image scanner on an upper layer of a printed circuit board with an image recorded on a lower layer thereof, the method comprising visually imaging a portion of the image on the lower layer and recording a pattern on the upper layer, referenced to coordinates of the visual image of the portion.
    Type: Grant
    Filed: November 6, 2001
    Date of Patent: June 13, 2006
    Assignee: Orbotech Ltd.
    Inventors: Amnot Ganot, Hanan Gino, Golan Hanina, Zeev Kantor, Boris Kling, Shabtay Spinzi, Barry Ben-Ezra
  • Patent number: 7058474
    Abstract: A method for aligning an image to be recorded by a direct image scanner on an upper layer of a printed circuit board with an image recorded on a lower layer thereof, the method comprising: visually imaging a portion of the image on the lower layer; and recording a pattern on the upper layer, referenced to coordinates of the visual image of the portion.
    Type: Grant
    Filed: October 4, 2002
    Date of Patent: June 6, 2006
    Assignee: Orbotech Ltd.
    Inventors: Amnon Ganot, Hanan Gino, Golan Hanina, Zeev Kantor, Boris Kling, Shabtay Spinzi, Barry Ben-Ezra
  • Publication number: 20060103719
    Abstract: Apparatus for transmitting information at a data rate, such as for recording an image on a photosensitive surface, including a pulsed light source that produces pulsed light having a pulsed repetition rate and a modulator that asynchronously modulates the pulsed light at the date rate, wherein the data rate is higher than pulse repetition rate.
    Type: Application
    Filed: December 31, 2005
    Publication date: May 18, 2006
    Applicant: ORBOTECH LTD.
    Inventors: Yigal KATZIR, Boris KLING, Avraham GROSS, Wolfgang RETSCHKE
  • Patent number: 7009163
    Abstract: An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report.
    Type: Grant
    Filed: June 21, 2002
    Date of Patent: March 7, 2006
    Assignee: Orbotech Ltd.
    Inventors: Yigal Katzir, Itay Gur-Arie, Yacov Malinovich
  • Patent number: 7006212
    Abstract: A first inspection functionality is provided to obtain information about a first attribute at a conductor location on an electrical circuit. A second inspection functionality is provided to obtain information about a second attribute at the conductor location. A combination of first attribute information and second attribute information is analyzed to determine an inspection attribute of the conductor at the conductor location. Attribute information may relate to one or more of: reflectance, fluorescence or height.
    Type: Grant
    Filed: January 28, 2005
    Date of Patent: February 28, 2006
    Assignee: Orbotech Ltd.
    Inventors: Nissim Savareigo, Igor Markov, Dan Zemer
  • Patent number: 6990227
    Abstract: This invention discloses a method for printed circuit board (PCB) inspection, including providing a multiplicity of PCBs placed on an inspection panel, defining each non-identical PCB in terms of geometry and features which are to be inspected, grouping the PCBs into at least one cluster, the at least one cluster being defined in terms of an amount, location and orientation of the PCBs in the at least one cluster, creating a reference image for the panel defined by a location and orientation of the at least one cluster on the panel and inspecting the panel by comparing sensed information with the reference image.
    Type: Grant
    Filed: December 5, 2000
    Date of Patent: January 24, 2006
    Assignee: Orbotech LTD
    Inventors: Anat Greenberg, Gregory Gutarts, Anna Yaari, Michael Barel, Jacob Nadivi
  • Patent number: 6973406
    Abstract: Apparatus for electrical testing of electrical circuits includes an array of probes arranged for selective engagement with portions of electrical circuits to be tested, testing circuitry associated with the array of probes for sensing electrical characteristics of the electrical circuits engaged by the array of probes, and control circuitry associated with the array of probes for causing engagement between selected ones of the array of probes with selected ones of the portions of electrical circuits to be tested. The array of probes includes at least two static probe assemblies arranged in a fixed array, and the static probe assemblies include a selectively positionable probe element and a probe element positioner. The apparatus is employed to test electrical circuits during fabrication.
    Type: Grant
    Filed: December 18, 2003
    Date of Patent: December 6, 2005
    Assignee: Orbotech Ltd.
    Inventors: Dan Zemer, Eyal Harel
  • Patent number: 6946660
    Abstract: A two-dimensional, pixellated, monolithic semiconductor radiation detector, in which each detector pixel is essentially a perpendicular mode detector. This is achieved by an arrangement of anode spots, one for each pixel located on the flux-exposed front surface of the detector substrate, surrounding by a cathode array preferably in the form of a network of lines, such that the field between the anodes and cathodes on this front surface has a major component in the direction parallel to the surface, and hence perpendicular to the incident photon flux. The conductivity of the substrate is high near this front surface, since this is where the highest level of absorption of photons takes place, and a significant photoconductive current is thus generated between cathodes and anodes. The conductivity is proportional to the incoming photon flux, and decays exponentially with depth into the detector.
    Type: Grant
    Filed: October 3, 2002
    Date of Patent: September 20, 2005
    Assignee: Orbotech Medical Solutions Ltd.
    Inventors: Uri El-Hanany, Arie Shahar
  • Patent number: 6911620
    Abstract: A system for unveiling embedded targets in printed circuit board substrates includes a micro-machining device, a sensor, and a controller. The micro-machining device removes portions of an opaque layer overlaying an alignment target in a general region in which the target should be located, and the sensor senses whether the alignment target is located at selected locations where portions of the opaque layer have been removed. In response to sensing the presence or absence of an alignment target at the selected locations, the controller directs the micro-machining device to remove additional portions of the opaque layer.
    Type: Grant
    Filed: August 9, 2002
    Date of Patent: June 28, 2005
    Assignee: Orbotech, Ltd.
    Inventors: Eliezer Lipman, Zvi Kotler, Yehiam Prior