Patents Assigned to Oxford Instruments Asylum Research, Inc.
  • Patent number: 11644478
    Abstract: An atomic force microscope is provided having a controller configured to store one or more positional parameters output by a sensor assembly when a light spot is located at a first preset position on the surface of the cantilever. The controller is further configured to operate an actuator assembly so as to induce movement of the spot away from the first preset position, to detect said movement of the first spot based on a change in the one or more positional parameters output by the sensor assembly, and to operate an optical assembly in response to the detected movement of the first spot to return the first spot to the first preset position.
    Type: Grant
    Filed: February 2, 2022
    Date of Patent: May 9, 2023
    Assignee: Oxford Instruments Asylum Research, Inc.
    Inventors: Jason Bemis, David Aue, Aleksander Labuda
  • Patent number: 11519935
    Abstract: An atomic force microscope (“AFM”) based interferometer, uses a light source, and a splitting optical interface, splitting the light beam into a signal light beam and a reference light beam. Both the signal and reference light beams are focused in the vicinity of an AFM cantilever. A beam displacer introduces a lateral displacement between the signal light beam and reference light beam, the lateral displacement being such that, in at least one plane between the beam displacer and the focusing lens structure, the center of the signal light beam is separated from the center of the reference light beam by more than half a sum of their beam diameters on that plane. A detector operates to determine differences in optical path length between the signal light beam and reference light beam to determine information about movement of the cantilever.
    Type: Grant
    Filed: August 18, 2020
    Date of Patent: December 6, 2022
    Assignee: Oxford Instruments Asylum Research, Inc.
    Inventors: Aleks Labuda, Basile Pottier, Ludovic Bellon
  • Patent number: 10557865
    Abstract: The imaging mode presented here combines the features and benefits of amplitude modulated (AM) atomic force microscopy (AFM), sometimes called AC mode AFM, with frequency modulated (FM) AFM. In AM-FM imaging, the topographic feedback from the first resonant drive frequency operates in AM mode while the second resonant drive frequency operates in FM mode and is adjusted to keep the phase at 90 degrees, on resonance. With this approach, frequency feedback on the second resonant mode and topographic feedback on the first are decoupled, allowing much more stable, robust operation.
    Type: Grant
    Filed: July 3, 2017
    Date of Patent: February 11, 2020
    Assignee: Oxford Instruments Asylum Research, Inc
    Inventors: Roger B Proksch, Jason Bemis
  • Patent number: 10556793
    Abstract: Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information from piezoelectric, polymer and other materials using contact resonance with multiple excitation signals are also described.
    Type: Grant
    Filed: March 28, 2017
    Date of Patent: February 11, 2020
    Assignee: Oxford Instruments Asylum Research Inc
    Inventors: Roger Proksch, Anil Gannepalli
  • Patent number: 10444258
    Abstract: Apparatus and techniques presented combine the features and benefits of amplitude modulated (AM) atomic force microscopy (AFM), sometimes called AC mode AFM, with frequency modulated (FM) AFM. In AM-FM imaging, the topographic feedback from the first resonant drive frequency operates in AM mode while the phase feedback from second resonant drive frequency operates in FM mode. In particular the first or second frequency may be used to measure the loss tangent, a dimensionless parameter which measures the ratio of energy dissipated to energy stored in a cycle of deformation.
    Type: Grant
    Filed: December 11, 2017
    Date of Patent: October 15, 2019
    Assignee: Oxford Instruments Asylum Research Inc
    Inventors: Roger Proksch, Jason Bemis, Aleksander Labuda
  • Patent number: 10416190
    Abstract: A modular Atomic Force Microscope that allows ultra-high resolution imaging and measurements in a wide variety of environmental conditions is described. The instrument permits such imaging and measurements in environments ranging from ambient to liquid or gas or extremely high or extremely low temperatures.
    Type: Grant
    Filed: February 28, 2017
    Date of Patent: September 17, 2019
    Assignee: Oxford Instruments Asylum Research Inc
    Inventors: Mario Viani, Roger Proksch, Maarten Rutgers, Jason Cleveland, Jim Hodgson
  • Patent number: 10338096
    Abstract: This invention relates to a metrological scanning probe microscope system combining an SPM which employs an optical lever arrangement to measure displacement of the probe indirectly with another SPM which measures the displacement of the probe directly through the use of an interferometric detection scheme.
    Type: Grant
    Filed: October 31, 2017
    Date of Patent: July 2, 2019
    Assignee: Oxford Instruments Asylum Research Inc
    Inventors: Aleksander Labuda, Deron Walters, Jason Cleveland, Roger Proksch
  • Patent number: 10054612
    Abstract: An optical light beam positioning system that enables the combination of two or more light beams of different wavelengths to be focused onto a probe or sample of a scientific instrument, such as an atomic force microscope, for a number of specific uses typical to AFMs, like measuring the deflection or oscillation of the probe and illuminating an object for optical imaging, and less traditional ones like photothermal excitation of the probe, photothermal activated changes in the sample, photothermal cleaning of the probe and photochemical, photovoltaic, photothermal and other light beam induced changes in the sample. The focused light beams may be independently positioned relative to each other.
    Type: Grant
    Filed: July 5, 2016
    Date of Patent: August 21, 2018
    Assignee: Oxford Instruments Asylum Research Inc
    Inventors: Aleksander Labuda, Jason Cleveland, Deron Walters, Roger Proksch
  • Patent number: 9921242
    Abstract: Improvements for rapidly calibrating and automatically operating a scanning probe microscope are disclosed. A central component of the SPM is the force transducer, typically a consumable cantilever element. By automatically calibrating transducer characteristics along with other instrumental parameters, scanning parameters can be rapidly and easily optimized, resulting in high-throughput, repeatable and accurate measurements. In contrast to dynamic optimization schemes, this can be accomplished before the surface is contacted, avoiding tip or sample damage from the beginning of the measurement process.
    Type: Grant
    Filed: July 5, 2016
    Date of Patent: March 20, 2018
    Assignee: OXFORD INSTRUMENTS ASYLUM RESEARCH INC
    Inventors: Roger Proksch, Roger C. Callahan, Frank Stetter, Ted Limpoco, Sophia Hohlbauch, Jason Bemis, Jason Cleveland, Nicholas Geiss
  • Patent number: 9841436
    Abstract: Apparatus and techniques presented combine the features and benefits of amplitude modulated (AM) atomic force microscopy (AFM), sometimes called AC mode AFM, with frequency modulated (FM) AFM. In AM-FM imaging, the topographic feedback from the first resonant drive frequency operates in AM mode while the phase feedback from second resonant drive frequency operates in FM mode. In particular the first or second frequency may be used to measure the loss tangent, a dimensionless parameter which measures the ratio of energy dissipated to energy stored in a cycle of deformation.
    Type: Grant
    Filed: September 26, 2016
    Date of Patent: December 12, 2017
    Assignee: Oxford Instruments Asylum Research Inc
    Inventors: Roger Proksch, Jason Bemis, Aleksander Labuda
  • Patent number: 9804193
    Abstract: This invention relates to a metrological scanning probe microscope system combining an SPM which employs an optical lever arrangement to measure displacement of the probe indirectly with another SPM which measures the displacement of the probe directly through the use of an interferometric detection scheme.
    Type: Grant
    Filed: November 3, 2015
    Date of Patent: October 31, 2017
    Assignee: Oxford Instruments Asylum Research, Inc
    Inventors: Aleksander Labuda, Deron Walters, Jason Cleveland, Roger Proksch
  • Patent number: 9604846
    Abstract: Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information from piezoelectric, polymer and other materials using contact resonance with multiple excitation signals are also described.
    Type: Grant
    Filed: March 25, 2014
    Date of Patent: March 28, 2017
    Assignee: Oxford Instruments Asylum Research Inc
    Inventors: Roger Proksch, Anil Gannepalli
  • Patent number: 9581616
    Abstract: A modular Atomic Force Microscope that allows ultra-high resolution imaging and measurements in a wide variety of environmental conditions is described. The instrument permits such imaging and measurements in environments ranging from ambient to liquid or gas or extremely high or extremely low temperatures.
    Type: Grant
    Filed: August 4, 2015
    Date of Patent: February 28, 2017
    Assignee: Oxford Instruments Asylum Research, Inc
    Inventors: Mario Viani, Roger Proksch, Maarten Rutgers, Jason Cleveland, Jim Hodgson
  • Patent number: 9518814
    Abstract: A single housing with a non-ferromagnetic piezo-driven flexure has primary and secondary coil forms of different diameters, one coaxially inside the other, integrated in the flexure. The cylinders defining the planes of the primary and secondaries do not spatially overlap. The secondary coil forms may be wound in opposite directions and wired to provide a transformer device. Movement of the primary relative to the secondaries in the direction of the central axis of the coils can be differentially detected with high precision.
    Type: Grant
    Filed: August 6, 2013
    Date of Patent: December 13, 2016
    Assignee: Oxford Instruments Asylum Research Inc
    Inventors: Roger Proksch, Dan Bocek, Jason Cleveland, Matthew Longmire, Matthew Klonowski
  • Patent number: 9453857
    Abstract: Apparatus and techniques presented combine the features and benefits of amplitude modulated (AM) atomic force microscopy (AFM), sometimes called AC mode AFM, with frequency modulated (FM) AFM. In AM-FM imaging, the topographic feedback from the first resonant drive frequency operates in AM mode while the phase feedback from second resonant drive frequency operates in FM mode. In particular the first or second frequency may be used to measure the loss tangent, a dimensionless parameter which measures the ratio of energy dissipated to energy stored in a cycle of deformation.
    Type: Grant
    Filed: April 23, 2015
    Date of Patent: September 27, 2016
    Assignee: Oxford Instruments Asylum Research, Inc
    Inventors: Roger Proksch, Jason Bemis, Aleksander Labuda
  • Patent number: 9383388
    Abstract: Improvements for rapidly calibrating and automatically operating a scanning probe microscope are disclosed. A central component of the SPM is the force transducer, typically a consumable cantilever element. By automatically calibrating transducer characteristics along with other instrumental parameters, scanning parameters can be rapidly and easily optimized, resulting in high-throughput, repeatable and accurate measurements. In contrast to dynamic optimization schemes, this can be accomplished before the surface is contacted, avoiding tip or sample damage from the beginning of the measurement process.
    Type: Grant
    Filed: April 21, 2015
    Date of Patent: July 5, 2016
    Assignee: Oxford Instruments Asylum Research, Inc
    Inventors: Roger Proksch, Roger C. Callahan, Frank Stetter, Ted Limpoco, Sophia Hohlbach, Jason Bemis, Jason Cleveland
  • Patent number: 9383386
    Abstract: This invention relates to an optical light beam positioning system that enables the combination of two or more light beams of different wavelengths to be focused onto a probe or sample of a scientific instrument, such as an atomic force microscope, for a number of specific uses typical to AFMs, like measuring the deflection or oscillation of the probe and illuminating an object for optical imaging, and less traditional ones like photothermal excitation of the probe, photothermal activated changes in the sample, photothermal cleaning of the probe and photochemical, photovoltaic, photothermal and other light beam induced changes in the sample. The focused light beams may be independently positioned relative to each other.
    Type: Grant
    Filed: March 12, 2014
    Date of Patent: July 5, 2016
    Assignee: OXFORD INSTRUMENTS ASYLUM RESEARCH, INC.
    Inventors: Aleksander Labuda, Jason Cleveland, Deron Walters, Roger Proksch
  • Patent number: 9097737
    Abstract: A modular Atomic Force Microscope that allows ultra-high resolution imaging and measurements in a wide variety of environmental conditions is described. The instrument permits such imaging and measurements in environments ranging from ambient to liquid or gas or extremely high or extremely low temperatures.
    Type: Grant
    Filed: November 25, 2013
    Date of Patent: August 4, 2015
    Assignee: Oxford Instruments Asylum Research, Inc.
    Inventors: Mario Viani, Roger Proksch, Maarten Rutgers, Jason Cleveland, Jim Hodgson
  • Publication number: 20150150163
    Abstract: A modular Atomic Force Microscope that allows ultra-high resolution imaging and measurements in a wide variety of environmental conditions is described. The instrument permits such imaging and measurements in environments ranging from ambient to liquid or gas or extremely high or extremely low temperatures.
    Type: Application
    Filed: November 25, 2013
    Publication date: May 28, 2015
    Applicant: Oxford Instruments Asylum Research, Inc.
    Inventors: Mario Viani, Roger Proksch, Maarten Rutgers, Jason Cleveland, Jim Hodgeson