Patents Assigned to Oxford Instruments Asylum Research, Inc.
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Patent number: 12055560Abstract: An atomic force microscope is provided having a controller configured to store one or more positional parameters output by a sensor assembly when a light spot is located at a first preset position on the surface of the cantilever. The controller is further configured to operate an actuator assembly so as to induce movement of the spot away from the first preset position, to detect said movement of the first spot based on a change in the one or more positional parameters output by the sensor assembly, and to operate an optical assembly in response to the detected movement of the first spot to return the first spot to the first preset position.Type: GrantFiled: March 21, 2023Date of Patent: August 6, 2024Assignee: Oxford Instruments Asylum Research, Inc.Inventors: Jason Bemis, David Aue, Aleksander Labuda
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Patent number: 11644478Abstract: An atomic force microscope is provided having a controller configured to store one or more positional parameters output by a sensor assembly when a light spot is located at a first preset position on the surface of the cantilever. The controller is further configured to operate an actuator assembly so as to induce movement of the spot away from the first preset position, to detect said movement of the first spot based on a change in the one or more positional parameters output by the sensor assembly, and to operate an optical assembly in response to the detected movement of the first spot to return the first spot to the first preset position.Type: GrantFiled: February 2, 2022Date of Patent: May 9, 2023Assignee: Oxford Instruments Asylum Research, Inc.Inventors: Jason Bemis, David Aue, Aleksander Labuda
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Patent number: 11519935Abstract: An atomic force microscope (“AFM”) based interferometer, uses a light source, and a splitting optical interface, splitting the light beam into a signal light beam and a reference light beam. Both the signal and reference light beams are focused in the vicinity of an AFM cantilever. A beam displacer introduces a lateral displacement between the signal light beam and reference light beam, the lateral displacement being such that, in at least one plane between the beam displacer and the focusing lens structure, the center of the signal light beam is separated from the center of the reference light beam by more than half a sum of their beam diameters on that plane. A detector operates to determine differences in optical path length between the signal light beam and reference light beam to determine information about movement of the cantilever.Type: GrantFiled: August 18, 2020Date of Patent: December 6, 2022Assignee: Oxford Instruments Asylum Research, Inc.Inventors: Aleks Labuda, Basile Pottier, Ludovic Bellon
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Patent number: 10556793Abstract: Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information from piezoelectric, polymer and other materials using contact resonance with multiple excitation signals are also described.Type: GrantFiled: March 28, 2017Date of Patent: February 11, 2020Assignee: Oxford Instruments Asylum Research IncInventors: Roger Proksch, Anil Gannepalli
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Patent number: 10557865Abstract: The imaging mode presented here combines the features and benefits of amplitude modulated (AM) atomic force microscopy (AFM), sometimes called AC mode AFM, with frequency modulated (FM) AFM. In AM-FM imaging, the topographic feedback from the first resonant drive frequency operates in AM mode while the second resonant drive frequency operates in FM mode and is adjusted to keep the phase at 90 degrees, on resonance. With this approach, frequency feedback on the second resonant mode and topographic feedback on the first are decoupled, allowing much more stable, robust operation.Type: GrantFiled: July 3, 2017Date of Patent: February 11, 2020Assignee: Oxford Instruments Asylum Research, IncInventors: Roger B Proksch, Jason Bemis
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Patent number: 10444258Abstract: Apparatus and techniques presented combine the features and benefits of amplitude modulated (AM) atomic force microscopy (AFM), sometimes called AC mode AFM, with frequency modulated (FM) AFM. In AM-FM imaging, the topographic feedback from the first resonant drive frequency operates in AM mode while the phase feedback from second resonant drive frequency operates in FM mode. In particular the first or second frequency may be used to measure the loss tangent, a dimensionless parameter which measures the ratio of energy dissipated to energy stored in a cycle of deformation.Type: GrantFiled: December 11, 2017Date of Patent: October 15, 2019Assignee: Oxford Instruments Asylum Research IncInventors: Roger Proksch, Jason Bemis, Aleksander Labuda
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Patent number: 10416190Abstract: A modular Atomic Force Microscope that allows ultra-high resolution imaging and measurements in a wide variety of environmental conditions is described. The instrument permits such imaging and measurements in environments ranging from ambient to liquid or gas or extremely high or extremely low temperatures.Type: GrantFiled: February 28, 2017Date of Patent: September 17, 2019Assignee: Oxford Instruments Asylum Research IncInventors: Mario Viani, Roger Proksch, Maarten Rutgers, Jason Cleveland, Jim Hodgson
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Patent number: 10338096Abstract: This invention relates to a metrological scanning probe microscope system combining an SPM which employs an optical lever arrangement to measure displacement of the probe indirectly with another SPM which measures the displacement of the probe directly through the use of an interferometric detection scheme.Type: GrantFiled: October 31, 2017Date of Patent: July 2, 2019Assignee: Oxford Instruments Asylum Research IncInventors: Aleksander Labuda, Deron Walters, Jason Cleveland, Roger Proksch
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Patent number: 10054612Abstract: An optical light beam positioning system that enables the combination of two or more light beams of different wavelengths to be focused onto a probe or sample of a scientific instrument, such as an atomic force microscope, for a number of specific uses typical to AFMs, like measuring the deflection or oscillation of the probe and illuminating an object for optical imaging, and less traditional ones like photothermal excitation of the probe, photothermal activated changes in the sample, photothermal cleaning of the probe and photochemical, photovoltaic, photothermal and other light beam induced changes in the sample. The focused light beams may be independently positioned relative to each other.Type: GrantFiled: July 5, 2016Date of Patent: August 21, 2018Assignee: Oxford Instruments Asylum Research IncInventors: Aleksander Labuda, Jason Cleveland, Deron Walters, Roger Proksch
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Patent number: 9921242Abstract: Improvements for rapidly calibrating and automatically operating a scanning probe microscope are disclosed. A central component of the SPM is the force transducer, typically a consumable cantilever element. By automatically calibrating transducer characteristics along with other instrumental parameters, scanning parameters can be rapidly and easily optimized, resulting in high-throughput, repeatable and accurate measurements. In contrast to dynamic optimization schemes, this can be accomplished before the surface is contacted, avoiding tip or sample damage from the beginning of the measurement process.Type: GrantFiled: July 5, 2016Date of Patent: March 20, 2018Assignee: OXFORD INSTRUMENTS ASYLUM RESEARCH INCInventors: Roger Proksch, Roger C. Callahan, Frank Stetter, Ted Limpoco, Sophia Hohlbauch, Jason Bemis, Jason Cleveland, Nicholas Geiss
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Patent number: 9841436Abstract: Apparatus and techniques presented combine the features and benefits of amplitude modulated (AM) atomic force microscopy (AFM), sometimes called AC mode AFM, with frequency modulated (FM) AFM. In AM-FM imaging, the topographic feedback from the first resonant drive frequency operates in AM mode while the phase feedback from second resonant drive frequency operates in FM mode. In particular the first or second frequency may be used to measure the loss tangent, a dimensionless parameter which measures the ratio of energy dissipated to energy stored in a cycle of deformation.Type: GrantFiled: September 26, 2016Date of Patent: December 12, 2017Assignee: Oxford Instruments Asylum Research IncInventors: Roger Proksch, Jason Bemis, Aleksander Labuda
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Patent number: 9804193Abstract: This invention relates to a metrological scanning probe microscope system combining an SPM which employs an optical lever arrangement to measure displacement of the probe indirectly with another SPM which measures the displacement of the probe directly through the use of an interferometric detection scheme.Type: GrantFiled: November 3, 2015Date of Patent: October 31, 2017Assignee: Oxford Instruments Asylum Research, IncInventors: Aleksander Labuda, Deron Walters, Jason Cleveland, Roger Proksch
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Patent number: 9604846Abstract: Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information from piezoelectric, polymer and other materials using contact resonance with multiple excitation signals are also described.Type: GrantFiled: March 25, 2014Date of Patent: March 28, 2017Assignee: Oxford Instruments Asylum Research IncInventors: Roger Proksch, Anil Gannepalli
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Patent number: 9581616Abstract: A modular Atomic Force Microscope that allows ultra-high resolution imaging and measurements in a wide variety of environmental conditions is described. The instrument permits such imaging and measurements in environments ranging from ambient to liquid or gas or extremely high or extremely low temperatures.Type: GrantFiled: August 4, 2015Date of Patent: February 28, 2017Assignee: Oxford Instruments Asylum Research, IncInventors: Mario Viani, Roger Proksch, Maarten Rutgers, Jason Cleveland, Jim Hodgson
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Patent number: 9518814Abstract: A single housing with a non-ferromagnetic piezo-driven flexure has primary and secondary coil forms of different diameters, one coaxially inside the other, integrated in the flexure. The cylinders defining the planes of the primary and secondaries do not spatially overlap. The secondary coil forms may be wound in opposite directions and wired to provide a transformer device. Movement of the primary relative to the secondaries in the direction of the central axis of the coils can be differentially detected with high precision.Type: GrantFiled: August 6, 2013Date of Patent: December 13, 2016Assignee: Oxford Instruments Asylum Research IncInventors: Roger Proksch, Dan Bocek, Jason Cleveland, Matthew Longmire, Matthew Klonowski
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Patent number: 9453857Abstract: Apparatus and techniques presented combine the features and benefits of amplitude modulated (AM) atomic force microscopy (AFM), sometimes called AC mode AFM, with frequency modulated (FM) AFM. In AM-FM imaging, the topographic feedback from the first resonant drive frequency operates in AM mode while the phase feedback from second resonant drive frequency operates in FM mode. In particular the first or second frequency may be used to measure the loss tangent, a dimensionless parameter which measures the ratio of energy dissipated to energy stored in a cycle of deformation.Type: GrantFiled: April 23, 2015Date of Patent: September 27, 2016Assignee: Oxford Instruments Asylum Research, IncInventors: Roger Proksch, Jason Bemis, Aleksander Labuda
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Patent number: 9383388Abstract: Improvements for rapidly calibrating and automatically operating a scanning probe microscope are disclosed. A central component of the SPM is the force transducer, typically a consumable cantilever element. By automatically calibrating transducer characteristics along with other instrumental parameters, scanning parameters can be rapidly and easily optimized, resulting in high-throughput, repeatable and accurate measurements. In contrast to dynamic optimization schemes, this can be accomplished before the surface is contacted, avoiding tip or sample damage from the beginning of the measurement process.Type: GrantFiled: April 21, 2015Date of Patent: July 5, 2016Assignee: Oxford Instruments Asylum Research, IncInventors: Roger Proksch, Roger C. Callahan, Frank Stetter, Ted Limpoco, Sophia Hohlbach, Jason Bemis, Jason Cleveland
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Patent number: 9383386Abstract: This invention relates to an optical light beam positioning system that enables the combination of two or more light beams of different wavelengths to be focused onto a probe or sample of a scientific instrument, such as an atomic force microscope, for a number of specific uses typical to AFMs, like measuring the deflection or oscillation of the probe and illuminating an object for optical imaging, and less traditional ones like photothermal excitation of the probe, photothermal activated changes in the sample, photothermal cleaning of the probe and photochemical, photovoltaic, photothermal and other light beam induced changes in the sample. The focused light beams may be independently positioned relative to each other.Type: GrantFiled: March 12, 2014Date of Patent: July 5, 2016Assignee: OXFORD INSTRUMENTS ASYLUM RESEARCH, INC.Inventors: Aleksander Labuda, Jason Cleveland, Deron Walters, Roger Proksch
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Patent number: 9097737Abstract: A modular Atomic Force Microscope that allows ultra-high resolution imaging and measurements in a wide variety of environmental conditions is described. The instrument permits such imaging and measurements in environments ranging from ambient to liquid or gas or extremely high or extremely low temperatures.Type: GrantFiled: November 25, 2013Date of Patent: August 4, 2015Assignee: Oxford Instruments Asylum Research, Inc.Inventors: Mario Viani, Roger Proksch, Maarten Rutgers, Jason Cleveland, Jim Hodgson
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Patent number: RE49997Abstract: This invention relates to a metrological scanning probe microscope system combining an SPM which employs an optical lever arrangement to measure displacement of the probe indirectly with another SPM which measures the displacement of the probe directly through the use of an interferometric detection scheme.Type: GrantFiled: July 1, 2021Date of Patent: June 4, 2024Assignee: Oxford Instruments Asylum Research, Inc.Inventors: Aleksander Labuda, Deron Walters, Jason Cleveland, Roger Proksch