Abstract: A modular Atomic Force Microscope that allows ultra-high resolution imaging and measurements in a wide variety of environmental conditions is described. The instrument permits such imaging and measurements in environments ranging from ambient to liquid or gas or extremely high or extremely low temperatures.
Type:
Application
Filed:
November 25, 2013
Publication date:
May 28, 2015
Applicant:
Oxford Instruments Asylum Research, Inc.
Inventors:
Mario Viani, Roger Proksch, Maarten Rutgers, Jason Cleveland, Jim Hodgeson