Abstract: A motor assembly comprises a composite housing having a core of sprayed magnetic particles and a winding on the core; and a rotor having a magnet located thereon, the rotor being rotatably mounted within the winding. The core of sprayed magnetic particles comprises particles of an iron-containing material that when deposited results in an aggregate of small micro-domains separated by insulation boundaries.

Abstract: An apparatus including a plurality of robot arm links movably connected to one another, where a first one of the robot arm links includes a frame, where the frame has a first end movably connected onto a second one of the robot arm links; and at least one vibration damper arrangement on the frame of the first robot arm link, where the at least one vibration damper arrangement includes at least one viscoelastic element connected to the frame of the first robot arm link by a connection such that, as the frame of the first robot arm link experiences vibrations, the at least one viscoelastic element dampens the vibrations in the frame of the first robot arm link based upon viscoelasticity and the connection of the at least one viscoelastic element to the frame of the first robot arm link.

Abstract: An apparatus has a frame and a plurality of clamps connected to the frame. At least one of the clamps is movable to releasably clamp a sheet of material on the apparatus. The plurality of clamps are configured and located on the frame to be limited to clamp on the sheet of material at least two edges of the sheet of material.

Abstract: A material comprises at least one layer of a plurality of domains, each domain being flattened in a first direction and elongated in a second direction normal to the first direction. The flattened and elongated domains define an anisotropic microstructure that facilitates a magnetic flux flow in the second direction.

Abstract: An apparatus including a robot drive having motors and coaxial drive shafts connected to the motors; and a robot arm connected to the robot drive. The robot arm includes two upper arms, a first set of forearms connected to a first one of the upper arms, a second set of forearms connected to a second one of the upper arms and end effectors connected to respective ones of the forearms. The first and second upper arms are connected to respective first and second ones of the coaxial drive shafts. The first set of the forearms is mounted on the first upper arm and connected to a third one of the coaxial drive shafts by respective first and second drive belt assemblies. The second set of the forearms is mounted to the second upper arm and connected to a fourth one of the coaxial drive shafts by respective third and fourth drive belt assemblies.

Abstract: An apparatus including a frame, an optical sensor connected to the frame, and an environment separation barrier. The frame is configured to be attached to a housing of a motor assembly proximate an aperture which extends through the housing. The optical sensor comprises a camera. The environment separation barrier is configured to be connected to the housing at the aperture, where the environment separation barrier is at least partially transparent and located relative to the camera to allow the camera to view an image inside the housing through the environment separation barrier and the aperture.

Abstract: A transport apparatus including a drive; a first arm connected to the drive, where the first arm includes a first link, a second link and an end effector connected in series with the drive, where the first link and the second link have different effective lengths; and a system for limiting rotation of the end effector relative to the second link to provide substantially only straight movement of the end effector relative to the drive when the first arm is extended or retracted.

Abstract: An apparatus including a drive; a movable arm assembly; a plurality of sets of end effectors; and a controller. The end effectors are connected to the drive by the movable arm assembly. A first one of the sets of end effectors includes at least two of the end effectors, where the drive and the movable arm assembly are configured to move the at least two end effectors substantially in unison from a retracted position towards an extended position towards two different respective target locations. The at least two end effectors are at least partially independently movable relative to each other on the moveable arm assembly. The controller is configured to detect an offset of respective substrates on the at least two end effectors and adjust movement of the at least two end effectors relative to each other prior to placement of the substrates at the respective target locations.

Abstract: A multi-phase motor including a rotor and a stator including at least one core. The stator includes a plurality of phase sections. Each phase section is configured to provide a phase of the multi-phase motor. Each phase section includes at least one of the core(s), at least two ring magnets having polarity facing in a substantially same direction, and a winding between the at least two ring magnets. The winding is configured to be energized to direct flux through the at least one core at a first portion associated with a first one of the ring magnets, and to be differently energized to direct flux through the at least one core at a second portion associated with a second one of the ring magnets.

Abstract: An apparatus including a stator configured to be stationarily connected to a housing; and a rotor configured to have a robot arm connected thereto. The rotor includes a shaft and an robot arm mount adjustably connected to the shaft. The stator and the rotor include mechanical reference locators to temporarily stationarily locate the robot arm mount to the stator for subsequently stationarily fixing the robot arm mount to the shaft.

Abstract: A substrate transport arm including a plurality of links rotatably connected to each other in series; and a system for maintaining radial orientation of a third one of the links regardless of a rotational angle of first and second ones of the links relative to each other. The system for maintaining radial orientation includes a four-bar linkage.

Abstract: An apparatus including a robot arm comprising a wrist, and an end effector. The wrist includes a frame member. The frame member includes a first material having a first coefficient of thermal expansion. The end effector is connected to the wrist at a connection. The end effector is configured to support a substrate thereon. The end effector includes a first member and a second member. At least one of the first and second members has a different second material with a different second coefficient of thermal expansion. The connection includes the first and second members being stationarily attached to each other with a portion of the frame member sandwiched therebetween. The connection is configured to substantially prevent the different respective coefficients of thermal expansion to deflect the end effector relative to the wrist when the end effector and wrist are heated and/or cooled.

Abstract: An apparatus including at least one processor; and at least one non-transitory memory including computer program code, the at least one memory and the computer program code configured to, with the at least one processor, cause the apparatus to: determine locations of at least two substrates on respective end effectors of the apparatus while the substrates are being moved by the end effectors in substantial unison towards respective target locations for the substrates; and while the end effectors are being moved towards the respective target locations, and based upon the determined locations of the substrates, adjust a position of at least a first one of the end effectors on the apparatus relative to a second one of the end effectors, where the position of the first end effector is adjusted relative to the second end effector while the apparatus is moving the substrates in substantial unison towards the respective target locations and prior to reaching the target locations.

Abstract: An apparatus including a frame, a first position sensor, a drive and a chamber. The frame has at least three members including at least two links forming a movable arm and an end effector. The end effector and the links are connected by movable joints. The end effector is configured to support a substrate thereon. The first position sensor is on the frame proximate a first one of the joints. The first position sensor is configured to sense a position of two of the members relative to each other. The drive is connected to the frame. The drive is configured to move the movable arm. The frame is located in the chamber, and the drive extends through a wall in the chamber.

Abstract: A method of determining a robot place location for a robot, the robot adapted to transport a substrate. The method comprises moving a calibration fixture past one or more edge sensors along a calibration path offset from and substantially parallel to a nominal transport path; determining robot locations when an edge of the calibration fixture changes a state of the one or more edge sensors; determining one or more sensor locations of the one or more edge sensors based on the robot locations; transporting the substrate along the nominal transport path past the one or more edge sensors to a target location; determining the robot place location based on the sensor locations; and placing the substrate at the target location with the robot located at the robot place location.

Abstract: A transport apparatus including a drive; a first arm connected to the drive, where the first arm includes a first link, a second link and an end effector connected in series with the drive, where the first link and the second link have different effective lengths; and a system for limiting rotation of the end effector relative to the second link to provide substantially only straight movement of the end effector relative to the drive when the first arm is extended or retracted.

Abstract: A substrate transport apparatus including a drive section and a first movable arm assembly. The drive section includes a first motor. The first motor includes a stator and a passive rotor. The first movable arm assembly is connected to the first motor. The substrate transport apparatus is configured for the first movable arm assembly to be positionable in a vacuum chamber with the passive rotor being in communication with an environment inside the vacuum chamber.

Abstract: A controller for a substrate transport apparatus. The controller includes a first system and a second system for at least partially controlling a movement of a motor of the substrate transport apparatus. The first system is configured to control the movement of the motor based upon a signal from a position sensor. The position sensor outputs the signal based upon a position of a rotor of the motor relative to a stator of the motor. Torque output of the motor is at least partially controlled based upon the signal from the position sensor. The second system for at least partially controlling the movement of the motor is based upon expected disturbances during movement of an arm of the substrate transport apparatus by the motor, where the second system is configured to at least partially increase and/or decrease the torque output of the motor by first system.

Abstract: A method including moving a substrate, located on a first end effector of a robot, from a first location towards a second location by the robot; determining location of a fiducial on the substrate while the substrate is being moved from the first location towards the second location; comparing the determined location of the fiducial with a reference fiducial location while the robot is moving the substrate from the first location towards the second location.

Abstract: An apparatus including at least one processor; and at least one non-transitory memory including computer program code, the at least one memory and the computer program code configured to, with the at least one processor, cause the apparatus to: determine locations of at least two substrates on respective end effectors of the apparatus while the substrates are being moved by the end effectors in substantial unison towards respective target locations for the substrates; and while the end effectors are being moved towards the respective target locations, and based upon the determined locations of the substrates, adjust a position of at least a first one of the end effectors on the apparatus relative to a second one of the end effectors, where the position of the first end effector is adjusted relative to the second end effector while the apparatus is moving the substrates in substantial unison towards the respective target locations and prior to reaching the target locations.