Abstract: A transport apparatus including a drive; a first arm connected to the drive, where the first arm includes a first link, a second link and an end effector connected in series with the drive, where the first link and the second link have different effective lengths; and a system for limiting rotation of the end effector relative to the second link to provide substantially only straight movement of the end effector relative to the drive when the first arm is extended or retracted.

Abstract: A controller for a substrate transport apparatus. The controller includes a first system and a second system for at least partially controlling a movement of a motor of the substrate transport apparatus. The first system is configured to control the movement of the motor based upon a signal from a position sensor. The position sensor outputs the signal based upon a position of a rotor of the motor relative to a stator of the motor. Torque output of the motor is at least partially controlled based upon the signal from the position sensor. The second system for at least partially controlling the movement of the motor is based upon expected disturbances during movement of an arm of the substrate transport apparatus by the motor, where the second system is configured to at least partially increase and/or decrease the torque output of the motor by first system.

Abstract: A substrate transport arm including a plurality of links rotatably connected to each other in series; and a system for maintaining radial orientation of a third one of the links regardless of a rotational angle of first and second ones of the links relative to each other. The system for maintaining radial orientation includes a four-bar linkage.

Abstract: A substrate transport apparatus including a drive section and a first movable arm assembly. The drive section includes a first motor. The first motor includes a stator and a passive rotor. The first movable arm assembly is connected to the first motor. The substrate transport apparatus is configured for the first movable arm assembly to be positionable in a vacuum chamber with the passive rotor being in communication with an environment inside the vacuum chamber.

Abstract: A multi-phase motor including a rotor and a stator including at least one core. The stator includes a plurality of phase sections. Each phase section is configured to provide a phase of the multi-phase motor. Each phase section includes at least one of the core(s), at least two ring magnets having polarity facing in a substantially same direction, and a winding between the at least two ring magnets. The winding is configured to be energized to direct flux through the at least one core at a first portion associated with a first one of the ring magnets, and to be differently energized to direct flux through the at least one core at a second portion associated with a second one of the ring magnets.

Abstract: A substrate transport apparatus including a drive section and a first movable arm assembly. The drive section includes a first motor. The first motor includes a stator and a passive rotor. The first movable arm assembly is connected to the first motor. The substrate transport apparatus is configured for the first movable arm assembly to be positionable in a vacuum chamber with the passive rotor being in communication with an environment inside the vacuum chamber.

Abstract: A substrate transport apparatus including a drive section and a first movable arm assembly. The drive section includes a first motor. The first motor includes a stator and a passive rotor. The first movable arm assembly is connected to the first motor. The substrate transport apparatus is configured for the first movable arm assembly to be positionable in a vacuum chamber with the passive rotor being in communication with an environment inside the vacuum chamber.