Patents Assigned to Pfeiffer Vacuum GmbH
  • Patent number: 10132339
    Abstract: The invention relates to an ionizing pump stage, in particular for a vacuum pump, comprising an inlet for gas entering into the pump stage; an ionizing section communicating with the inlet in a gas-conductive manner and an ionizing device for ionizing the gas entered into the ionizing section; an acceleration device for accelerating the ionized gas present in the ionizing section in the conveying direction; and a neutralizing section following the ionizing section in the conveying direction and communicating with the ionizing section in a gas-conductive manner and a neutralizing device for the electrical neutralizing of the ionized gas entering into the neutralizing section.
    Type: Grant
    Filed: December 13, 2013
    Date of Patent: November 20, 2018
    Assignee: Pfeiffer Vacuum GmbH
    Inventor: Armin Conrad
  • Patent number: 9995309
    Abstract: A vacuum pump includes at least one vacuum port for releasably connecting the vacuum pump with at least one recipient an elastomeric seal for sealing the vacuum port against atmosphere a diaphragm gland provided on a vacuum side of the vacuum port and at least one of at least one suction channel and at least one suction opening provided between the elastomeric seal and the diaphragm gland.
    Type: Grant
    Filed: March 28, 2014
    Date of Patent: June 12, 2018
    Assignee: PFEIFFER VACUUM GMBH
    Inventors: Tobias Stoll, Robert Watz, Michael Schweighoefer
  • Patent number: 9970444
    Abstract: The invention relates to an adapter for vacuum pumps, characterized in that it comprises an annular inlet flange (15) intended to be coupled to an outlet orifice of a chamber and an outlet coupling (16) comprising at least two cylindrical outlet through-housings (21) and forming an at least partial pump casing for the case (4) of a respective turbomolecular vacuum pump (3), said turbomolecular vacuum pumps (3) being intended to be received in a respective cylindrical outlet housing (21). The invention also relates to a pumping device, characterized in that it comprises an adapter for vacuum pumps (2) as described hereinabove and at least two turbomolecular vacuum pumps (3) housed at least partially in a respective cylindrical outlet housing (21).
    Type: Grant
    Filed: December 20, 2012
    Date of Patent: May 15, 2018
    Assignee: Pfeiffer Vacuum GmbH
    Inventors: Thibaut Bourrilhon, Rainer Mathes, Nicolas Varennes
  • Patent number: 9964121
    Abstract: A vacuum pump, in particular to a turbomolecular pump, has a pump inlet, a pump outlet and a pump space for a gas to be pumped arranged between the pump inlet and the pump outlet, and at least one cooling gas inlet for a cooling gas for cooling the vacuum pump, the pump further having one or more hollow regions for the cooling gas connected in a gas conducting manner to the cooling gas inlet and arranged outside the pump space, wherein the or each hollow region is bounded by at least one component of the vacuum pump to be cooled.
    Type: Grant
    Filed: February 27, 2014
    Date of Patent: May 8, 2018
    Assignee: PFEIFFER VACUUM GMBH
    Inventor: Michael Schill
  • Patent number: 9957974
    Abstract: A receiving apparatus for the partial reception of a flange which is or can be connected to a vacuum pump, and having at least one fastening section for fastening to a recipient, at least one support section on which the flange lies in an assembly state and at least one receiving opening bounded by the support section, wherein the flange can be inserted into the receiving opening and can be pulled out of the receiving opening from an access side of the receiving apparatus with a receiving apparatus fastened to the recipient.
    Type: Grant
    Filed: October 29, 2014
    Date of Patent: May 1, 2018
    Assignee: PFEIFFER VACUUM GMBH
    Inventor: Bernd Hofmann
  • Patent number: 9909592
    Abstract: A vacuum pump has a working space, a bearing space, a dividing wall arranged between the working space and the bearing space and at least one rotor shaft which extends through the dividing wall and which forms a gap with the dividing wall and having a blocking device for blocking between the working space and the bearing space. The blocking device is formed by a Siegbahn pump stage which is configured for providing a pump action passing through the gap between the working space and the bearing space.
    Type: Grant
    Filed: July 11, 2014
    Date of Patent: March 6, 2018
    Assignee: PFEIFFER VACUUM GMBH
    Inventors: Jan Hofmann, Mirko Mekota
  • Patent number: 9887604
    Abstract: An apparatus for kinetic energy storage includes an electrical machine operable at least in one of motor mode and generator mode, and at least one energy recovery system for an intermediate storage of a produced kinetic energy and which converts the kinetic energy into an electrical energy, with, the at least one energy recovery system having at least one flywheel body formed as a rotor, and a stator and with at least one of the rotor and the stator being formed as at least one vacuum pump stage.
    Type: Grant
    Filed: October 30, 2013
    Date of Patent: February 6, 2018
    Assignee: Pfeiffer Vacuum GmbH
    Inventors: Wolfgang Bremer, Armin Conrad
  • Patent number: 9869319
    Abstract: A vacuum pump includes a pump inlet, a pump outlet, a rotor rotatable about an axis of rotation, at least one process gas pump stage for conveying a process gas present at the pump inlet from the pump inlet to the pump outlet, a motor space, and a drive motor which is arranged in the motor space, is configured for rotationally driving the rotor and which has a motor stator, wherein at least one gas path is provided for the process gas from the pump inlet to the pump outlet which leads through the motor space and which leads at least sectionally along the motor stator or through the motor stator.
    Type: Grant
    Filed: July 23, 2014
    Date of Patent: January 16, 2018
    Assignee: Pfeiffer Vacuum GmbH
    Inventors: Mirko Mekota, Jan Hofmann, Uwe Leib, Michael Schill, Bernhard Koch
  • Patent number: 9822799
    Abstract: An arrangement includes a vacuum pump having a rotor, and a drive unit for driving the rotor and having at least one magnetic interference field-generating component and at least one compensation coil for compensating the magnetic interference field generated by the at least one component.
    Type: Grant
    Filed: September 10, 2014
    Date of Patent: November 21, 2017
    Assignee: PFEIFFER VACUUM GMBH
    Inventor: Armin Conrad
  • Patent number: 9745978
    Abstract: A housing for a rotary vane pump includes a suction flange and a discharge flange having a multi-angular cross-section with at least two sides extending parallel to each other, cooling ribs provided on an outer surface of the housing, with the number of cooling ribs in the region with a high internal pressure being greater than a number of cooling ribs in the region with a low internal pressure, inlet and outlet, with the inlet cross-section being greater than the outlet cross-section, and connection elements provided on the housing and each having two installation surfaces connected by a connection surface.
    Type: Grant
    Filed: November 11, 2014
    Date of Patent: August 29, 2017
    Assignee: Pfeiffer Vacuum GmbH
    Inventors: Christopher Kobus, Kevin Schneider
  • Patent number: 9695967
    Abstract: A connection apparatus for establishing a vacuum-tight connection, in particular a flange connection, between at least two components of a vacuum arrangement, having a first coupling element for coupling to the one component and a second coupling element for coupling to the other component. The first coupling element and the second coupling element are coupled to one another via a pivotable operating lever and the connection apparatus is adjustable by pivoting the operating lever from a first position in which the coupling elements have a larger spacing from one another into a second position in which the coupling elements have a smaller spacing from one another.
    Type: Grant
    Filed: January 16, 2014
    Date of Patent: July 4, 2017
    Assignee: Pfeiffer Vacuum GmbH
    Inventor: Helmut Utsch
  • Patent number: 9453514
    Abstract: A vacuum pump has a rotor mounted on a rotor shaft and provided with pump active components cooperating with opposite stationary pump active components, fastening element for securing the rotor on the rotor shaft, and a safety element provided in addition to the fastening element for preventing rotation of the rotor and the rotor shaft relative to each other.
    Type: Grant
    Filed: September 3, 2013
    Date of Patent: September 27, 2016
    Assignee: Pfeiffer Vacuum GmbH
    Inventors: Robert Watz, Bernhard Tatzber, Herbert Stammler
  • Patent number: 9410862
    Abstract: A device for measuring pressure having at least one pressure sensor with at least one active sensor surface, an oscillating and/or variable temperature counter-surface arranged opposite the at least one sensor surface, wherein the sensor surface and the counter-surface are arranged in a hollow body, and the hollow body has at least one opening, and wherein at least one alternating signal amplifier is provided.
    Type: Grant
    Filed: November 21, 2013
    Date of Patent: August 9, 2016
    Assignee: PFEIFFER VACUUM GMBH
    Inventor: Armin Conrad
  • Publication number: 20140356146
    Abstract: A vacuum pump includes a rotor and a rotary bearing, which is to be supplied with an operating medium, for the rotatable support of the rotor, wherein the rotor has a conveying section, in particular a conical conveying section, for supplying the operating medium to the rotary agent. A conveying pump is provided for conveying the operating medium and/or an operating medium store is provided having an absorbent storage means for the operating medium. Further, at least one wick is provided which is in contact with the conveying section to transfer the operating medium provided from the conveying pump and/or from the absorbent storage means to the conveying section in a desired quantity.
    Type: Application
    Filed: May 28, 2014
    Publication date: December 4, 2014
    Applicant: Pfeiffer Vacuum GmbH
    Inventors: Mirko Mekota, Peter Vorwerk, Bernd Hofmann, Johannes Schnarr
  • Publication number: 20140348634
    Abstract: The invention relates to an adapter for vacuum pumps, characterized in that it comprises an annular inlet flange (15) intended to be coupled to an outlet orifice of a chamber and an outlet coupling (16) comprising at least two cylindrical outlet through-housings (21) and forming an at least partial pump casing for the case (4) of a respective turbomolecular vacuum pump (3), said turbomolecular vacuum pumps (3) being intended to be received in a respective cylindrical outlet housing (21). The invention also relates to a pumping device, characterized in that it comprises an adapter for vacuum pumps (2) as described hereinabove and at least two turbomolecular vacuum pumps (3) housed at least partially in a respective cylindrical outlet housing (21).
    Type: Application
    Filed: December 20, 2012
    Publication date: November 27, 2014
    Applicant: PFEIFFER VACUUM GMBH
    Inventors: Thibaut Bourrilhon, Rainer Mathes, Nicolas Varennes
  • Publication number: 20140333030
    Abstract: An apparatus having at least one passage for conducting a gaseous or a liquid operating medium, in particular a vacuum pump, wherein the passage is closed in a fluid-tight manner at a side by at least one elongate sealing element following the extent of the passage. A method of manufacturing an apparatus having at least one passage for conducting a gaseous or a liquid operating medium includes providing a component with a passage-forming groove.
    Type: Application
    Filed: May 8, 2014
    Publication date: November 13, 2014
    Applicant: Pfeiffer Vacuum GmbH
    Inventors: Herbert Stammler, Soenke Gilbrich
  • Publication number: 20140314554
    Abstract: A stator element for a Holweck pump stage has a base shape of substantially cylinder jacket shape or a kit of parts for a stator element for a Holweck pump stage which has a base shape of a substantially cylinder jacket shape, wherein the stator element or the kit of parts comprises a plurality of stator parts which are separate from one another, which are assembled to form the stator element or can be assembled to form the stator element. A vacuum pump having a Holweck pump stage as well as to a method of manufacturing a stator element for a Holweck pump stage or of manufacturing a kit of parts for a stator element for a Holweck pump stage are also disclosed.
    Type: Application
    Filed: April 22, 2014
    Publication date: October 23, 2014
    Applicant: Pfeiffer Vacuum GmbH
    Inventors: Jan Hofmann, Mirko Mekota
  • Publication number: 20140306407
    Abstract: A vacuum pump includes at least one vacuum port for releasably connecting the vacuum pump with at least one recipient an elastomeric seal for sealing the vacuum port against atmosphere a diaphragm gland provided on a vacuum side of the vacuum port and at least one of at least one suction channel and at least one suction opening provided between the elastomeric seal and the diaphragm gland.
    Type: Application
    Filed: March 28, 2014
    Publication date: October 16, 2014
    Applicant: Pfeiffer Vacuum GmbH
    Inventors: Tobias Stoll, Robert Watz, Michael Schweighoefer
  • Publication number: 20140248166
    Abstract: A vacuum pump has at least one side passage pump stage which comprises a side passage bounded by at least one stator element and having a coolant circuit for cooling the vacuum pump with a coolant, wherein the coolant circuit has at least one coolant passage for the side passage pump stage which is bounded at least regionally by the stator element.
    Type: Application
    Filed: February 27, 2014
    Publication date: September 4, 2014
    Applicant: Pfeiffer Vacuum GmbH
    Inventors: Aleksandr Shirinov, Wolfgang Soehngen, Torsten Gogol, Sebastian Oberbeck
  • Publication number: 20140241853
    Abstract: A vacuum pump, in particular to a turbomolecular pump, has a pump inlet, a pump outlet and a pump space for a gas to be pumped arranged between the pump inlet and the pump outlet, and at least one cooling gas inlet for a cooling gas for cooling the vacuum pump, the pump further having one or more hollow regions for the cooling gas connected in a gas conducting manner to the cooling gas inlet and arranged outside the pump space, wherein the or each hollow region is bounded by at least one component of the vacuum pump to be cooled.
    Type: Application
    Filed: February 27, 2014
    Publication date: August 28, 2014
    Applicant: Pfeiffer Vacuum GmbH
    Inventor: Michael SCHILL