Abstract: A vacuum pump includes a fan including a rotational speed to be controlled to cool the vacuum pump, a temperature sensor, and a control device that regulates the rotational speed of the fan in dependence on a power consumption of a drive of the vacuum pump and on a temperature measured by the temperature sensor. Another vacuum pump includes an electrically driven fan, an air guide hood, and a conductor that leads from the fan to a supply connection for the fan. The conductor is connected to the supply connection via an electrical connector. The connector is separated from an air flow path, defined by the air guide hood, by a partition wall.

Abstract: The invention relates to a scroll pump comprising a pressure sensor integrated into the scroll pump.

Abstract: A vacuum device, in particular to a vacuum pump, includes a reservoir for an operating medium; an outlet connector arranged at or in the reservoir; and a selection device that selectively closes or opens the outlet connector or an outlet line, which is connected via the outlet connector to the reservoir, in dependence on whether the operating medium or water is present at the outlet connector.

Abstract: The invention relates to a recirculation device for a gas of a process device, said recirculation device comprising a recirculation pump, wherein the recirculation pump is a side channel pump.

Abstract: The invention relates to a vacuum system, comprising a vacuum pump, preferably turbomolecular pump, and at least one vacuum chamber, wherein the vacuum pump comprises: at least a first and a second inlet and a common outlet; at least a first and a second pumping stage, each pumping stage comprising at least one rotor element being arranged on a common rotor shaft, wherein the first inlet is connected to an upstream end of the first pumping stage and the second inlet is connected to an upstream end of the second pumping stage; a direction element for preventing a gas flow from a downstream end of the first pumping stage to the second inlet; a conduit having a conduit inlet and a conduit outlet, wherein the conduit inlet is connected to the downstream end of the first pumping stage and the conduit outlet is connected to a location downstream of the second pumping stage; wherein the first inlet and the second inlet of the pump are connected to the same vacuum chamber.

Abstract: The present invention relates to a vacuum safety valve for a vacuum pump, in particular for a rotary vane pump, comprising a housing having a flow path extending between an inlet and an outlet for a gas to be conveyed, a valve region that is disposed in the flow path and in which a valve closure element is arranged that is movable between a closed position and an open position, a control space that is associated with the valve region and in which a membrane separating the pressure side from an operating side is arranged, and a control element active between the membrane and the closure element, wherein the closure element is movable via the control element against a return force from the closed position into the open position by means of the membrane acted on at the pressure side and is movable back into the closed position on a removal of the membrane load due to the return force and is held in the closed position.

Abstract: The present invention relates to a vacuum pump, in particular to a turbomolecular pump, having at least one pump stage and having a pressure determination unit for determining a pressure present at a suction side of the vacuum pump, said pump comprising a measurement device, with a measurement tap of the measurement device being provided in the region of the pump stage or downstream of the pump stage.

Abstract: A membrane vacuum pump has at least one working space which is bounded by a membrane deformable to change the size of the working space and by a wall in which at least one inlet and at least one outlet are formed for a medium which is sucked into the working space which increases in size in so doing in a suction phase and is expelled via the outlet from the working space which decreases in size in so doing in a compression phase. The membrane vacuum pump furthermore has a controllable actuator unit for deforming the membrane by a contactless action on the membrane by means of electrical and/or magnetic fields.

Abstract: The invention relates to an ionizing pump stage, in particular for a vacuum pump, comprising an inlet for gas entering into the pump stage; an ionizing section communicating with the inlet in a gas-conductive manner and an ionizing device for ionizing the gas entered into the ionizing section; an acceleration device for accelerating the ionized gas present in the ionizing section in the conveying direction; and a neutralizing section following the ionizing section in the conveying direction and communicating with the ionizing section in a gas-conductive manner and a neutralizing device for the electrical neutralizing of the ionized gas entering into the neutralizing section.

Abstract: A vacuum pump includes at least one vacuum port for releasably connecting the vacuum pump with at least one recipient an elastomeric seal for sealing the vacuum port against atmosphere a diaphragm gland provided on a vacuum side of the vacuum port and at least one of at least one suction channel and at least one suction opening provided between the elastomeric seal and the diaphragm gland.

Abstract: The invention relates to an adapter for vacuum pumps, characterized in that it comprises an annular inlet flange (15) intended to be coupled to an outlet orifice of a chamber and an outlet coupling (16) comprising at least two cylindrical outlet through-housings (21) and forming an at least partial pump casing for the case (4) of a respective turbomolecular vacuum pump (3), said turbomolecular vacuum pumps (3) being intended to be received in a respective cylindrical outlet housing (21). The invention also relates to a pumping device, characterized in that it comprises an adapter for vacuum pumps (2) as described hereinabove and at least two turbomolecular vacuum pumps (3) housed at least partially in a respective cylindrical outlet housing (21).

Abstract: A vacuum pump, in particular to a turbomolecular pump, has a pump inlet, a pump outlet and a pump space for a gas to be pumped arranged between the pump inlet and the pump outlet, and at least one cooling gas inlet for a cooling gas for cooling the vacuum pump, the pump further having one or more hollow regions for the cooling gas connected in a gas conducting manner to the cooling gas inlet and arranged outside the pump space, wherein the or each hollow region is bounded by at least one component of the vacuum pump to be cooled.

Abstract: A receiving apparatus for the partial reception of a flange which is or can be connected to a vacuum pump, and having at least one fastening section for fastening to a recipient, at least one support section on which the flange lies in an assembly state and at least one receiving opening bounded by the support section, wherein the flange can be inserted into the receiving opening and can be pulled out of the receiving opening from an access side of the receiving apparatus with a receiving apparatus fastened to the recipient.

Abstract: A vacuum pump has a working space, a bearing space, a dividing wall arranged between the working space and the bearing space and at least one rotor shaft which extends through the dividing wall and which forms a gap with the dividing wall and having a blocking device for blocking between the working space and the bearing space. The blocking device is formed by a Siegbahn pump stage which is configured for providing a pump action passing through the gap between the working space and the bearing space.

Abstract: An apparatus for kinetic energy storage includes an electrical machine operable at least in one of motor mode and generator mode, and at least one energy recovery system for an intermediate storage of a produced kinetic energy and which converts the kinetic energy into an electrical energy, with, the at least one energy recovery system having at least one flywheel body formed as a rotor, and a stator and with at least one of the rotor and the stator being formed as at least one vacuum pump stage.

Abstract: A vacuum pump includes a pump inlet, a pump outlet, a rotor rotatable about an axis of rotation, at least one process gas pump stage for conveying a process gas present at the pump inlet from the pump inlet to the pump outlet, a motor space, and a drive motor which is arranged in the motor space, is configured for rotationally driving the rotor and which has a motor stator, wherein at least one gas path is provided for the process gas from the pump inlet to the pump outlet which leads through the motor space and which leads at least sectionally along the motor stator or through the motor stator.

Abstract: An arrangement includes a vacuum pump having a rotor, and a drive unit for driving the rotor and having at least one magnetic interference field-generating component and at least one compensation coil for compensating the magnetic interference field generated by the at least one component.

Abstract: A housing for a rotary vane pump includes a suction flange and a discharge flange having a multi-angular cross-section with at least two sides extending parallel to each other, cooling ribs provided on an outer surface of the housing, with the number of cooling ribs in the region with a high internal pressure being greater than a number of cooling ribs in the region with a low internal pressure, inlet and outlet, with the inlet cross-section being greater than the outlet cross-section, and connection elements provided on the housing and each having two installation surfaces connected by a connection surface.

Abstract: A connection apparatus for establishing a vacuum-tight connection, in particular a flange connection, between at least two components of a vacuum arrangement, having a first coupling element for coupling to the one component and a second coupling element for coupling to the other component. The first coupling element and the second coupling element are coupled to one another via a pivotable operating lever and the connection apparatus is adjustable by pivoting the operating lever from a first position in which the coupling elements have a larger spacing from one another into a second position in which the coupling elements have a smaller spacing from one another.

Abstract: A vacuum pump has a rotor mounted on a rotor shaft and provided with pump active components cooperating with opposite stationary pump active components, fastening element for securing the rotor on the rotor shaft, and a safety element provided in addition to the fastening element for preventing rotation of the rotor and the rotor shaft relative to each other.