Patents Assigned to Pfeiffer Vacuum GmbH
  • Patent number: 9410862
    Abstract: A device for measuring pressure having at least one pressure sensor with at least one active sensor surface, an oscillating and/or variable temperature counter-surface arranged opposite the at least one sensor surface, wherein the sensor surface and the counter-surface are arranged in a hollow body, and the hollow body has at least one opening, and wherein at least one alternating signal amplifier is provided.
    Type: Grant
    Filed: November 21, 2013
    Date of Patent: August 9, 2016
    Assignee: PFEIFFER VACUUM GMBH
    Inventor: Armin Conrad
  • Publication number: 20140356146
    Abstract: A vacuum pump includes a rotor and a rotary bearing, which is to be supplied with an operating medium, for the rotatable support of the rotor, wherein the rotor has a conveying section, in particular a conical conveying section, for supplying the operating medium to the rotary agent. A conveying pump is provided for conveying the operating medium and/or an operating medium store is provided having an absorbent storage means for the operating medium. Further, at least one wick is provided which is in contact with the conveying section to transfer the operating medium provided from the conveying pump and/or from the absorbent storage means to the conveying section in a desired quantity.
    Type: Application
    Filed: May 28, 2014
    Publication date: December 4, 2014
    Applicant: Pfeiffer Vacuum GmbH
    Inventors: Mirko Mekota, Peter Vorwerk, Bernd Hofmann, Johannes Schnarr
  • Publication number: 20140348634
    Abstract: The invention relates to an adapter for vacuum pumps, characterized in that it comprises an annular inlet flange (15) intended to be coupled to an outlet orifice of a chamber and an outlet coupling (16) comprising at least two cylindrical outlet through-housings (21) and forming an at least partial pump casing for the case (4) of a respective turbomolecular vacuum pump (3), said turbomolecular vacuum pumps (3) being intended to be received in a respective cylindrical outlet housing (21). The invention also relates to a pumping device, characterized in that it comprises an adapter for vacuum pumps (2) as described hereinabove and at least two turbomolecular vacuum pumps (3) housed at least partially in a respective cylindrical outlet housing (21).
    Type: Application
    Filed: December 20, 2012
    Publication date: November 27, 2014
    Applicant: PFEIFFER VACUUM GMBH
    Inventors: Thibaut Bourrilhon, Rainer Mathes, Nicolas Varennes
  • Publication number: 20140333030
    Abstract: An apparatus having at least one passage for conducting a gaseous or a liquid operating medium, in particular a vacuum pump, wherein the passage is closed in a fluid-tight manner at a side by at least one elongate sealing element following the extent of the passage. A method of manufacturing an apparatus having at least one passage for conducting a gaseous or a liquid operating medium includes providing a component with a passage-forming groove.
    Type: Application
    Filed: May 8, 2014
    Publication date: November 13, 2014
    Applicant: Pfeiffer Vacuum GmbH
    Inventors: Herbert Stammler, Soenke Gilbrich
  • Publication number: 20140314554
    Abstract: A stator element for a Holweck pump stage has a base shape of substantially cylinder jacket shape or a kit of parts for a stator element for a Holweck pump stage which has a base shape of a substantially cylinder jacket shape, wherein the stator element or the kit of parts comprises a plurality of stator parts which are separate from one another, which are assembled to form the stator element or can be assembled to form the stator element. A vacuum pump having a Holweck pump stage as well as to a method of manufacturing a stator element for a Holweck pump stage or of manufacturing a kit of parts for a stator element for a Holweck pump stage are also disclosed.
    Type: Application
    Filed: April 22, 2014
    Publication date: October 23, 2014
    Applicant: Pfeiffer Vacuum GmbH
    Inventors: Jan Hofmann, Mirko Mekota
  • Publication number: 20140306407
    Abstract: A vacuum pump includes at least one vacuum port for releasably connecting the vacuum pump with at least one recipient an elastomeric seal for sealing the vacuum port against atmosphere a diaphragm gland provided on a vacuum side of the vacuum port and at least one of at least one suction channel and at least one suction opening provided between the elastomeric seal and the diaphragm gland.
    Type: Application
    Filed: March 28, 2014
    Publication date: October 16, 2014
    Applicant: Pfeiffer Vacuum GmbH
    Inventors: Tobias Stoll, Robert Watz, Michael Schweighoefer
  • Publication number: 20140248166
    Abstract: A vacuum pump has at least one side passage pump stage which comprises a side passage bounded by at least one stator element and having a coolant circuit for cooling the vacuum pump with a coolant, wherein the coolant circuit has at least one coolant passage for the side passage pump stage which is bounded at least regionally by the stator element.
    Type: Application
    Filed: February 27, 2014
    Publication date: September 4, 2014
    Applicant: Pfeiffer Vacuum GmbH
    Inventors: Aleksandr Shirinov, Wolfgang Soehngen, Torsten Gogol, Sebastian Oberbeck
  • Publication number: 20140241853
    Abstract: A vacuum pump, in particular to a turbomolecular pump, has a pump inlet, a pump outlet and a pump space for a gas to be pumped arranged between the pump inlet and the pump outlet, and at least one cooling gas inlet for a cooling gas for cooling the vacuum pump, the pump further having one or more hollow regions for the cooling gas connected in a gas conducting manner to the cooling gas inlet and arranged outside the pump space, wherein the or each hollow region is bounded by at least one component of the vacuum pump to be cooled.
    Type: Application
    Filed: February 27, 2014
    Publication date: August 28, 2014
    Applicant: Pfeiffer Vacuum GmbH
    Inventor: Michael SCHILL
  • Publication number: 20140212296
    Abstract: A method of at least one of coating of and applying lacquer on magnetic rings of a rotor magnetic bearing mounted on the rotor, includes arranging of the magnetic rings (4) of the magnetic bearing on the rotor (1) at a location (3) provided for the magnetic rings (4), and coating of and/or applying lacquer on exposed surfaces (10) of the magnetic rings (4), respectively. The rotor includes magnetic rings arranged thereon or therein and coated or having lacquer applied thereon in accordance with the above-described method, and a vacuum pump includes such a rotor.
    Type: Application
    Filed: December 26, 2013
    Publication date: July 31, 2014
    Applicant: Pfeiffer Vacuum GmbH
    Inventors: Marco Antonacci, Herbert Stammler
  • Publication number: 20140203550
    Abstract: A connection apparatus for establishing a vacuum-tight connection, in particular a flange connection, between at least two components of a vacuum arrangement, having a first coupling element for coupling to the one component and a second coupling element for coupling to the other component. The first coupling element and the second coupling element are coupled to one another via a pivotable operating lever and the connection apparatus is adjustable by pivoting the operating lever from a first position in which the coupling elements have a larger spacing from one another into a second position in which the coupling elements have a smaller spacing from one another.
    Type: Application
    Filed: January 16, 2014
    Publication date: July 24, 2014
    Applicant: Pfeiffer Vacuum GmbH
    Inventor: Helmut Utsch
  • Publication number: 20140174188
    Abstract: A device for measuring pressure having at least one pressure sensor with at least one active sensor surface, an oscillating and/or variable temperature counter-surface arranged opposite the at least one sensor surface, wherein the sensor surface and the counter-surface are arranged in a hollow body, and the hollow body has at least one opening, and wherein at least one alternating signal amplifier is provided.
    Type: Application
    Filed: November 21, 2013
    Publication date: June 26, 2014
    Applicant: Pfeiffer Vacuum GmbH
    Inventor: Armin Conrad
  • Publication number: 20140169986
    Abstract: The invention relates to an ionizing pump stage, in particular for a vacuum pump, comprising an inlet for gas entering into the pump stage; an ionizing section communicating with the inlet in a gas-conductive manner and an ionizing device for ionizing the gas entered into the ionizing section; an acceleration device for accelerating the ionized gas present in the ionizing section in the conveying direction; and a neutralizing section following the ionizing section in the conveying direction and communicating with the ionizing section in a gas-conductive manner and a neutralizing device for the electrical neutralizing of the ionized gas entering into the neutralizing section.
    Type: Application
    Filed: December 13, 2013
    Publication date: June 19, 2014
    Applicant: Pfeiffer Vacuum GmbH
    Inventor: Armin CONRAD
  • Publication number: 20140170001
    Abstract: A vacuum system includes at least one recipient having a housing and at least one outlet opening for evacuating the recipient, a vacuum pump connected with the at least one outlet opening of the at least one recipient for evacuating same, an attachment provided between the vacuum pump and the recipient housing and formed as an intermediate piece, with the attachment being fixedly and vacuum-tightly secured on the recipient, and the vacuum pump being fixedly and releasably secured to the attachment at an end of the attachment opposite the recipient, and at least one O-ring sealing provided between the attachment end opposite the recipient and the vacuum pump for sealing the vacuum pump, with the O-ring sealing being formed as an elastomeric O-ring.
    Type: Application
    Filed: November 26, 2013
    Publication date: June 19, 2014
    Applicant: Pfeiffer Vacuum GmbH
    Inventors: Tobias Stoll, Michael Schweighoefer
  • Publication number: 20140125171
    Abstract: An apparatus for kinetic energy storage includes an electrical machine operable at least in one of motor mode and generator mode, and at least one energy recovery system for an intermediate storage of a produced kinetic energy and which converts the kinetic energy into an electrical energy, with, the at least one energy recovery system having at least one flywheel body formed as a rotor, and a stator and with at least one of the rotor and the stator being formed as at least one vacuum pump stage.
    Type: Application
    Filed: October 30, 2013
    Publication date: May 8, 2014
    Applicant: Pfeiffer Vacuum GmbH
    Inventors: Wolfgang Bremer, Armin Conrad
  • Publication number: 20140072408
    Abstract: A vacuum pump has a rotor mounted on a rotor shaft and provided with pump active components cooperating with opposite stationary pump active components, fastening element for securing the rotor on the rotor shaft, and a safety element provided in addition to the fastening element for preventing rotation of the rotor and the rotor shaft relative to each other.
    Type: Application
    Filed: September 3, 2013
    Publication date: March 13, 2014
    Applicant: PFEIFFER VACUUM GMBH
    Inventors: Robert Watz, Bernhard Tatzber, Herbert Stammler
  • Patent number: 8651838
    Abstract: A vacuum pump that includes a housing, a control unit including control elements for controlling electronic and electrical components located in the inner chamber of the housing, and a separation member for separating the inner chamber in which an underpressure prevails, from an environment in which the vacuum pump is located and including a printed circuit board having elements for conducting electrical current and voltage in the inner chamber of the pump housing.
    Type: Grant
    Filed: March 28, 2007
    Date of Patent: February 18, 2014
    Assignee: Pfeiffer Vacuum GmbH
    Inventors: Timo Birkenstock, Dirk Hopf, Tobias Stoll
  • Patent number: 8613600
    Abstract: A vacuum pump system includes a vacuum pump with a brushless, multi-phase, synchronous motor with a permanently magnetically excited rotor, and a pump type recognition element, a control unit for controlling the vacuum pump and having a drive microcontroller and a final stage, and a further microcontroller that monitors a rotational speed of the motor and turning off the final stage in case the rotational speed of the motor exceeds a maximum allowable rotational speed of the motor, and that forms part of the control unit.
    Type: Grant
    Filed: September 15, 2006
    Date of Patent: December 24, 2013
    Assignee: Pfeiffer Vacuum GmbH
    Inventors: Wolfgang Losch, André Mueller
  • Publication number: 20130224001
    Abstract: The invention relates to a vacuum pump having at least one molecular pump stage, in particular a Holweck stage, which includes a rotor member which forms the pump-active surface of the molecular pump stage and having at least one side channel pump stage which is arranged downstream of the molecular pump stage and which includes a plurality of rotor elements, wherein the rotor elements of the side channel pump stage are supported by the rotor member of the molecular pump stage. The invention further relates to a vacuum pump having at least one molecular pump stage, in particular a Holweck stage, and having at least one side channel pump stage which is arranged downstream of the molecular pump stage and which includes a plurality of rotor elements, wherein the side channel pump stage is arranged between a pump inlet and the molecular pump stage.
    Type: Application
    Filed: February 14, 2013
    Publication date: August 29, 2013
    Applicant: PFEIFFER VACUUM GMBH
    Inventor: Pfeiffer Vacuum GmbH
  • Patent number: 8398383
    Abstract: A foil shield for covering at least one opening of a suction flange of a vacuum pump includes at least one member formed of a material having a relative permeability ?r greater than 1,000.
    Type: Grant
    Filed: November 14, 2005
    Date of Patent: March 19, 2013
    Assignee: Pfeiffer Vacuum GmbH
    Inventors: Frank Klabunde, Tobias Stoll
  • Patent number: 8398362
    Abstract: A turbomolecular pump includes a plurality of alternatively axially arranged one behind another, rotor and stator discs (8,9) provided with blades (10), with the blades (10) located in vicinity of the high vacuum side having a blade angle (?) that is steeper than blade angle (?) of the blades (10) located in vicinity of the vacuum side, and with the blade angle (?) of the blades (10) located in the vicinity of the vacuum side (3) amounting to less than 8°.
    Type: Grant
    Filed: March 14, 2005
    Date of Patent: March 19, 2013
    Assignee: Pfeiffer Vacuum GmbH
    Inventors: Armin Conrad, Peter Fahrenbach