Patents Assigned to Pfeiffer Vacuum GmbH
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Patent number: 9410862Abstract: A device for measuring pressure having at least one pressure sensor with at least one active sensor surface, an oscillating and/or variable temperature counter-surface arranged opposite the at least one sensor surface, wherein the sensor surface and the counter-surface are arranged in a hollow body, and the hollow body has at least one opening, and wherein at least one alternating signal amplifier is provided.Type: GrantFiled: November 21, 2013Date of Patent: August 9, 2016Assignee: PFEIFFER VACUUM GMBHInventor: Armin Conrad
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Publication number: 20140356146Abstract: A vacuum pump includes a rotor and a rotary bearing, which is to be supplied with an operating medium, for the rotatable support of the rotor, wherein the rotor has a conveying section, in particular a conical conveying section, for supplying the operating medium to the rotary agent. A conveying pump is provided for conveying the operating medium and/or an operating medium store is provided having an absorbent storage means for the operating medium. Further, at least one wick is provided which is in contact with the conveying section to transfer the operating medium provided from the conveying pump and/or from the absorbent storage means to the conveying section in a desired quantity.Type: ApplicationFiled: May 28, 2014Publication date: December 4, 2014Applicant: Pfeiffer Vacuum GmbHInventors: Mirko Mekota, Peter Vorwerk, Bernd Hofmann, Johannes Schnarr
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Publication number: 20140348634Abstract: The invention relates to an adapter for vacuum pumps, characterized in that it comprises an annular inlet flange (15) intended to be coupled to an outlet orifice of a chamber and an outlet coupling (16) comprising at least two cylindrical outlet through-housings (21) and forming an at least partial pump casing for the case (4) of a respective turbomolecular vacuum pump (3), said turbomolecular vacuum pumps (3) being intended to be received in a respective cylindrical outlet housing (21). The invention also relates to a pumping device, characterized in that it comprises an adapter for vacuum pumps (2) as described hereinabove and at least two turbomolecular vacuum pumps (3) housed at least partially in a respective cylindrical outlet housing (21).Type: ApplicationFiled: December 20, 2012Publication date: November 27, 2014Applicant: PFEIFFER VACUUM GMBHInventors: Thibaut Bourrilhon, Rainer Mathes, Nicolas Varennes
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Publication number: 20140333030Abstract: An apparatus having at least one passage for conducting a gaseous or a liquid operating medium, in particular a vacuum pump, wherein the passage is closed in a fluid-tight manner at a side by at least one elongate sealing element following the extent of the passage. A method of manufacturing an apparatus having at least one passage for conducting a gaseous or a liquid operating medium includes providing a component with a passage-forming groove.Type: ApplicationFiled: May 8, 2014Publication date: November 13, 2014Applicant: Pfeiffer Vacuum GmbHInventors: Herbert Stammler, Soenke Gilbrich
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Publication number: 20140314554Abstract: A stator element for a Holweck pump stage has a base shape of substantially cylinder jacket shape or a kit of parts for a stator element for a Holweck pump stage which has a base shape of a substantially cylinder jacket shape, wherein the stator element or the kit of parts comprises a plurality of stator parts which are separate from one another, which are assembled to form the stator element or can be assembled to form the stator element. A vacuum pump having a Holweck pump stage as well as to a method of manufacturing a stator element for a Holweck pump stage or of manufacturing a kit of parts for a stator element for a Holweck pump stage are also disclosed.Type: ApplicationFiled: April 22, 2014Publication date: October 23, 2014Applicant: Pfeiffer Vacuum GmbHInventors: Jan Hofmann, Mirko Mekota
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Publication number: 20140306407Abstract: A vacuum pump includes at least one vacuum port for releasably connecting the vacuum pump with at least one recipient an elastomeric seal for sealing the vacuum port against atmosphere a diaphragm gland provided on a vacuum side of the vacuum port and at least one of at least one suction channel and at least one suction opening provided between the elastomeric seal and the diaphragm gland.Type: ApplicationFiled: March 28, 2014Publication date: October 16, 2014Applicant: Pfeiffer Vacuum GmbHInventors: Tobias Stoll, Robert Watz, Michael Schweighoefer
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Publication number: 20140248166Abstract: A vacuum pump has at least one side passage pump stage which comprises a side passage bounded by at least one stator element and having a coolant circuit for cooling the vacuum pump with a coolant, wherein the coolant circuit has at least one coolant passage for the side passage pump stage which is bounded at least regionally by the stator element.Type: ApplicationFiled: February 27, 2014Publication date: September 4, 2014Applicant: Pfeiffer Vacuum GmbHInventors: Aleksandr Shirinov, Wolfgang Soehngen, Torsten Gogol, Sebastian Oberbeck
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Publication number: 20140241853Abstract: A vacuum pump, in particular to a turbomolecular pump, has a pump inlet, a pump outlet and a pump space for a gas to be pumped arranged between the pump inlet and the pump outlet, and at least one cooling gas inlet for a cooling gas for cooling the vacuum pump, the pump further having one or more hollow regions for the cooling gas connected in a gas conducting manner to the cooling gas inlet and arranged outside the pump space, wherein the or each hollow region is bounded by at least one component of the vacuum pump to be cooled.Type: ApplicationFiled: February 27, 2014Publication date: August 28, 2014Applicant: Pfeiffer Vacuum GmbHInventor: Michael SCHILL
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Publication number: 20140212296Abstract: A method of at least one of coating of and applying lacquer on magnetic rings of a rotor magnetic bearing mounted on the rotor, includes arranging of the magnetic rings (4) of the magnetic bearing on the rotor (1) at a location (3) provided for the magnetic rings (4), and coating of and/or applying lacquer on exposed surfaces (10) of the magnetic rings (4), respectively. The rotor includes magnetic rings arranged thereon or therein and coated or having lacquer applied thereon in accordance with the above-described method, and a vacuum pump includes such a rotor.Type: ApplicationFiled: December 26, 2013Publication date: July 31, 2014Applicant: Pfeiffer Vacuum GmbHInventors: Marco Antonacci, Herbert Stammler
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Publication number: 20140203550Abstract: A connection apparatus for establishing a vacuum-tight connection, in particular a flange connection, between at least two components of a vacuum arrangement, having a first coupling element for coupling to the one component and a second coupling element for coupling to the other component. The first coupling element and the second coupling element are coupled to one another via a pivotable operating lever and the connection apparatus is adjustable by pivoting the operating lever from a first position in which the coupling elements have a larger spacing from one another into a second position in which the coupling elements have a smaller spacing from one another.Type: ApplicationFiled: January 16, 2014Publication date: July 24, 2014Applicant: Pfeiffer Vacuum GmbHInventor: Helmut Utsch
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Publication number: 20140174188Abstract: A device for measuring pressure having at least one pressure sensor with at least one active sensor surface, an oscillating and/or variable temperature counter-surface arranged opposite the at least one sensor surface, wherein the sensor surface and the counter-surface are arranged in a hollow body, and the hollow body has at least one opening, and wherein at least one alternating signal amplifier is provided.Type: ApplicationFiled: November 21, 2013Publication date: June 26, 2014Applicant: Pfeiffer Vacuum GmbHInventor: Armin Conrad
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Publication number: 20140169986Abstract: The invention relates to an ionizing pump stage, in particular for a vacuum pump, comprising an inlet for gas entering into the pump stage; an ionizing section communicating with the inlet in a gas-conductive manner and an ionizing device for ionizing the gas entered into the ionizing section; an acceleration device for accelerating the ionized gas present in the ionizing section in the conveying direction; and a neutralizing section following the ionizing section in the conveying direction and communicating with the ionizing section in a gas-conductive manner and a neutralizing device for the electrical neutralizing of the ionized gas entering into the neutralizing section.Type: ApplicationFiled: December 13, 2013Publication date: June 19, 2014Applicant: Pfeiffer Vacuum GmbHInventor: Armin CONRAD
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Publication number: 20140170001Abstract: A vacuum system includes at least one recipient having a housing and at least one outlet opening for evacuating the recipient, a vacuum pump connected with the at least one outlet opening of the at least one recipient for evacuating same, an attachment provided between the vacuum pump and the recipient housing and formed as an intermediate piece, with the attachment being fixedly and vacuum-tightly secured on the recipient, and the vacuum pump being fixedly and releasably secured to the attachment at an end of the attachment opposite the recipient, and at least one O-ring sealing provided between the attachment end opposite the recipient and the vacuum pump for sealing the vacuum pump, with the O-ring sealing being formed as an elastomeric O-ring.Type: ApplicationFiled: November 26, 2013Publication date: June 19, 2014Applicant: Pfeiffer Vacuum GmbHInventors: Tobias Stoll, Michael Schweighoefer
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Publication number: 20140125171Abstract: An apparatus for kinetic energy storage includes an electrical machine operable at least in one of motor mode and generator mode, and at least one energy recovery system for an intermediate storage of a produced kinetic energy and which converts the kinetic energy into an electrical energy, with, the at least one energy recovery system having at least one flywheel body formed as a rotor, and a stator and with at least one of the rotor and the stator being formed as at least one vacuum pump stage.Type: ApplicationFiled: October 30, 2013Publication date: May 8, 2014Applicant: Pfeiffer Vacuum GmbHInventors: Wolfgang Bremer, Armin Conrad
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Publication number: 20140072408Abstract: A vacuum pump has a rotor mounted on a rotor shaft and provided with pump active components cooperating with opposite stationary pump active components, fastening element for securing the rotor on the rotor shaft, and a safety element provided in addition to the fastening element for preventing rotation of the rotor and the rotor shaft relative to each other.Type: ApplicationFiled: September 3, 2013Publication date: March 13, 2014Applicant: PFEIFFER VACUUM GMBHInventors: Robert Watz, Bernhard Tatzber, Herbert Stammler
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Patent number: 8651838Abstract: A vacuum pump that includes a housing, a control unit including control elements for controlling electronic and electrical components located in the inner chamber of the housing, and a separation member for separating the inner chamber in which an underpressure prevails, from an environment in which the vacuum pump is located and including a printed circuit board having elements for conducting electrical current and voltage in the inner chamber of the pump housing.Type: GrantFiled: March 28, 2007Date of Patent: February 18, 2014Assignee: Pfeiffer Vacuum GmbHInventors: Timo Birkenstock, Dirk Hopf, Tobias Stoll
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Patent number: 8613600Abstract: A vacuum pump system includes a vacuum pump with a brushless, multi-phase, synchronous motor with a permanently magnetically excited rotor, and a pump type recognition element, a control unit for controlling the vacuum pump and having a drive microcontroller and a final stage, and a further microcontroller that monitors a rotational speed of the motor and turning off the final stage in case the rotational speed of the motor exceeds a maximum allowable rotational speed of the motor, and that forms part of the control unit.Type: GrantFiled: September 15, 2006Date of Patent: December 24, 2013Assignee: Pfeiffer Vacuum GmbHInventors: Wolfgang Losch, André Mueller
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Publication number: 20130224001Abstract: The invention relates to a vacuum pump having at least one molecular pump stage, in particular a Holweck stage, which includes a rotor member which forms the pump-active surface of the molecular pump stage and having at least one side channel pump stage which is arranged downstream of the molecular pump stage and which includes a plurality of rotor elements, wherein the rotor elements of the side channel pump stage are supported by the rotor member of the molecular pump stage. The invention further relates to a vacuum pump having at least one molecular pump stage, in particular a Holweck stage, and having at least one side channel pump stage which is arranged downstream of the molecular pump stage and which includes a plurality of rotor elements, wherein the side channel pump stage is arranged between a pump inlet and the molecular pump stage.Type: ApplicationFiled: February 14, 2013Publication date: August 29, 2013Applicant: PFEIFFER VACUUM GMBHInventor: Pfeiffer Vacuum GmbH
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Patent number: 8398383Abstract: A foil shield for covering at least one opening of a suction flange of a vacuum pump includes at least one member formed of a material having a relative permeability ?r greater than 1,000.Type: GrantFiled: November 14, 2005Date of Patent: March 19, 2013Assignee: Pfeiffer Vacuum GmbHInventors: Frank Klabunde, Tobias Stoll
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Patent number: 8398362Abstract: A turbomolecular pump includes a plurality of alternatively axially arranged one behind another, rotor and stator discs (8,9) provided with blades (10), with the blades (10) located in vicinity of the high vacuum side having a blade angle (?) that is steeper than blade angle (?) of the blades (10) located in vicinity of the vacuum side, and with the blade angle (?) of the blades (10) located in the vicinity of the vacuum side (3) amounting to less than 8°.Type: GrantFiled: March 14, 2005Date of Patent: March 19, 2013Assignee: Pfeiffer Vacuum GmbHInventors: Armin Conrad, Peter Fahrenbach