Abstract: The present invention discloses a Micro-Electro-Mechanical System (MEMS) acoustic pressure sensor device and a method for making same. The MEMS device includes: a substrate; a fixed electrode provided on the substrate; and a multilayer structure, which includes multiple metal layers and multiple metal plugs, wherein the multiple metal layers are connected by the multiple metal plugs. A cavity is formed between the multilayer structure and the fixed electrode. Each metal layer in the multilayer structure includes multiple metal sections. The multiple metal sections of one metal layer and those of at least another metal layer are staggered to form a substantially blanket surface as viewed from a moving direction of an acoustic wave.

Abstract: The invention provides a micro-electro-mechanical device which is manufactured by a CMOS manufacturing process. The micro-electro-mechanical device includes a stationary unit, a movable unit, and a connecting member. The stationary unit includes a first capacitive sensing region and a fixed structure region. The movable unit includes a second capacitive sensing region and a proof mass, wherein the first capacitive sensing region and the second capacitive sensing region form a capacitor, and the proof mass region consists of a single material. The connecting member is for connecting the movable unit in a way to allow a relative movement of the movable unit with respect to the stationary unit.

Abstract: The present invention discloses a thermal pile sensing structure integrated with one or more capacitors, which includes: a substrate, an infrared sensing unit and a partition structure. The infrared sensing unit includes a first and a second sensing structure. A hot junction is formed between the first and the second sensing structures at a location where the first and the second sensing structures are close to each other. A cold junction is formed between the partition structure and the first sensing structure at a location where these two structures are close to each other. Another cold junction is formed between the partition structure and the second sensing structure at a location where these two structures are close to each other. A temperature difference between the hot junction and the cold junction generates a voltage difference signal. Apart of the partition structure forms at least one capacitor.

Abstract: The present invention discloses a manufacturing method for a semiconductor device. The manufacturing method includes: providing a substrate; forming a semiconductor stacked structure on the substrate; forming at least apart of a stacked cap layer on the semiconductor stacked structure, wherein the part of the stacked cap layer includes a nitride layer; removing a part of the nitride layer; forming the rest part of the stacked cap layer; forming a protection layer on the stacked cap layer, and etching the protection layer to form an opening, wherein the nitride layer is not exposed by the opening; and introducing an etchant material into the opening to etch the substrate. The present invention also provides a semiconductor device made by the method.

Abstract: This invention provides a MEMS device, including: a mass structure having at least one anchor; at least one flexible structure connected with the mass structure at the at least one anchor; a plurality of top electrodes located above the mass structure and forming a top capacitor circuit with the mass structure; and a plurality of bottom electrodes located under the mass structure and forming a bottom capacitor circuit with the mass structure. The projections of the plural top electrodes on the mass structure along a normal direction of the mass structure are located at opposite sides of the anchor, and the projections of the plural bottom electrodes on the mass structure along a normal direction of the mass structure are located at opposite sides of the anchor. This invention also provides a MEMS compensation structure.

Abstract: The present invention discloses a method and apparatus for controlling an object movement on a screen. The method senses a first change in a position of a pointing device in a coordinate system to obtain a first displacement, and controls the object movement by a first displacement output ratio according to the first displacement. The method senses a second change in a position of the pointing device in a coordinate system to obtain a second displacement, and controls the object movement by a second displacement output ratio when a difference between a direction of the first displacement and a direction of the second displacement exceeds a first angle threshold, wherein the second displacement output ratio is lower than the first displacement output ratio.

Abstract: The present invention provides an image sensor circuit with a power noise filtering function and a control method thereof. The image sensor circuit includes: an image sensing unit, for sensing an image, to generate an image sensed signal; a power noise sensing unit, for sensing a power noise, to generate a power noise signal; a differential amplifier circuit, which is coupled to the image sensing unit and the power noise sensing unit, for receiving the image sensed signal and the power noise signal, to generate a differential filtered signal by a differential amplification operation between the image sensed signal and the power noise signal; and an analog-to-digital converter (ADC) circuit, which is coupled to the differential amplifier circuit, for receiving the differential filtered signal, to generate a digital image signal.

Abstract: The present invention discloses a gesture recognition apparatus including a substrate, a light emitting device, an image sensor and a processing unit. The light emitting device is for emitting a light beam according to a first clock signal. The image sensor is disposed on the substrate and is for receiving the light beam reflected by an object according to a second clock signal to generate an object image. The processing unit is disposed on the substrate and is for recognizing the object image detected by the image sensor to provide a command signal. There is a correlation between a period of the first clock signal and a period of the second clock signal. The present invention also provides a complex optical apparatus.

Abstract: An optical touch apparatus includes a first light source, a second light source, a light guide device, a light reflecting device and an image sensing module. The first light source emits first light beam which travels within the light guide device and is reflective by an object close to or in contact with a surface of the light guide device to become a first image light beam. The first image light beam is reflected by a light reflecting device. The image sensing module receives the first image light beam. The second light source emits a second light beam, wherein when the optical touch apparatus moves on a working surface, the second light beam is reflective by the working surface to form a second image light beam which is received by the same image sensing module.

Abstract: The invention provides a MEMS device with enhanced structural strength. The MEMS device includes a plurality of metal layers, including a top metal layer with a plurality of metal segments. The metal segments are individually connected to an adjacent metal layer immediately under the top metal layer through at least one supporting pillar, and there is no dielectric layer between the metal segments and the adjacent metal layer immediately under the top metal layer. The metal layers except the top metal layer are respectively connected to their adjacent metal layers through at least one supporting pillar and a dielectric layer filling in between.

Abstract: The invention provides a package structure which includes a substrate, at least one chip module, and a housing. The at least one chip module is located on the substrate. The housing includes an upper cover, a surrounding wall, and at least one adhesion enhancement structure. The surrounding wall is connected to the upper cover and encompasses the at least one chip module. The surrounding wall and the adhesion enhancement structure are bonded to the substrate by an adhesive. The adhesion enhancement structure includes an encircled hole or a semi-encircled hole.

Abstract: The present invention provides a package structure of an optical apparatus which includes a substrate, a light emitting device, a light sensing device, and a light barrier member. The light emitting device is disposed on the substrate and electrically connected to the substrate. The light emitting device is for emitting light. The light sensing device is disposed on the substrate and is a chip scale package (CSP) device. The light sensing device is for receiving light reflected by an object. The light barrier member is disposed around a periphery of the light sensing device.

Abstract: The present invention provides a package structure of an optical apparatus which includes a substrate, a light emitting device, a light sensing device, and a light barrier member. The light emitting device is disposed on the substrate and electrically connected to the substrate. The light emitting device is for emitting light. The light sensing device is disposed on the substrate and is a chip scale package (CSP) device. The light sensing device is for receiving light reflected by an object. The light barrier member is disposed around a periphery of the light sensing device.

Abstract: The present invention discloses a gesture detecting apparatus which includes an image capturing device and a processing unit. The image capturing device is for capturing an object light beam reflected by an object and outputting corresponding image information accordingly. The processing unit is for processing the image information and generating a first command or a second command accordingly. The steps of generating the first command and the second command by the processing unit include: outputting a first command if an image size of the image information increases with a relatively higher velocity and decreases with a relatively lower velocity in a sequential time series; and outputting a second command if the image size of the image information increases with a relatively lower velocity and decreases with a relatively higher velocity in the sequential time series.

Abstract: The invention provides a micro-electro-mechanical device which includes a substrate, an electrode, and a diaphragm. The electrode includes plural vent holes. The diaphragm is disposed above and in parallel to the electrode, to form a capacitive sensor with the electrode. The diaphragm includes plural ribs protruding upward and/or downward from the diaphragm; the ribs are respectively disposed in correspondence to the plural vent holes and do not overlap nor contact the electrode. A method for making the micro-electro-mechanical device is also provided according to the present invention.

Abstract: A proximity sensor includes a transmitter unit, a receiver unit, and a housing. The transmitter unit transmits a light signal. The receiver unit receives the light signal reflected by an object to determine a proximity status of the object. The housing defines a first enclosed accommodation space for accommodating the receiver unit, wherein the portion of the housing defining the first enclosed accommodation space has a sealed light passage made of a light-transmissible material such that the receiver unit is capable of receiving the light signal reflected by the object through the light passage. The housing can further include a second enclosed accommodation space for accommodating the transmitter unit.

Abstract: The present invention discloses a noise-shielded capacitive touch device, which includes a first sensor region, a second sensor region and a shielding layer. Each of the first sensor region and the second sensor region includes plural sensing lines and driving lines. The sensing lines are in parallel with each other and extend along a first direction. Each sensing line has an extension portion at its end near the other sensor region. The driving lines are in parallel with each other and extend along a second direction, wherein the second direction intersects the first direction. The extension portions and the shielding layer form an electric field wall to avoid cross interferences between the two sensor regions.

Abstract: The present invention discloses an optical touch panel system, an optical sensing module, and an operation method using for the same system. The system recognizes a track of an object moving on or above a touch control surface to determine a corresponding gesture function; it includes a touch control surface, at least one image sensor, and a processor. The touch control surface includes at least two touch control areas. The image sensor captures a plurality of continuous pictures including the images of the objects. The processer determines which touch control area the object is moving on or above according to a starting position or a path of the track, and executes a gesture function corresponding to the track and the touch control area.

Abstract: The present invention discloses an optical touch panel system and a positioning method for positioning an object existing in a touch control area. The system includes: at least one reflective element disposed on a side of the touch control area; at least one light guide module disposed on a side of the touch control area adjacent to or opposite the reflective element and emitting light; an image sensor capturing an image of the object; a plurality of photo detectors arranged on a side of the touch control area adjacent to the image sensor and sensing the object to obtain shade information; and a processor calculating the coordinates of the object according to the image and the shade information.

Abstract: The present invention discloses an optical touch panel system and a positioning method for positioning an object in a touch control area. The system includes: at least two reflective elements respectively disposed on a first side and a second side of the touch control area, wherein the sum of lengths of the first side and the second side is larger than the sum of lengths of the two reflective elements; two lighting elements respectively disposed on a third side and a fourth side of the touch control area; an image sensor forming projected images by capturing an image of the object and at least one mirror image of the object formed by the two reflective elements; and a processor calculating the coordinates of the object according to geometric information of the projected images.