Abstract: A precursor delivery system includes a flow path from a precursor container to a reaction space of a thin film deposition system, such as an atomic layer deposition (ALD) reactor. A staging volume is preferably established between the precursor container and the reaction space for receiving at least one dose of the precursor material from the precursor container, from which a series of pulses is released toward the reaction space. The precursor material is typically vaporized after loading it in the precursor container by heating or reducing the pressure inside the precursor container. A vacuum line is preferably coupled to the precursor container and bypasses the reaction space for reducing pressure inside the precursor container without drawing particles into the reaction space. A high conductivity particle filter having inertial traps may be included, preferably between the precursor container and a staging volume, for filtering particles from the precursor material.

Abstract: A shut-off type diaphragm valve adapted for use in an atomic layer deposition system includes a flexible diaphragm operable to flex between an open position whereby a valve passage is at least partially open and a closed position whereby a substantial portion of a first side of the diaphragm is pressed against a valve seat to thereby block the valve passage and facilitate heat transfer between the valve seat and the diaphragm. In some embodiments, a heating body thermally contacts the valve body and extends proximal to a second side of the diaphragm opposite the first side thereof to form a thermally conductive pathway that facilitates maintaining an operating temperature at the diaphragm. A thermally resistive member may be interposed between the valve passage and an actuator, such as a solenoid, for attenuating heat transfer between the valve passage and the actuator.

Abstract: A light sensitive display.

Abstract: An image sensor array includes image sensors having photo TFTs to generate photocurrent in response to received images. The photo TFTs each have their respective gate electrodes shorted to source electrodes to increase generated photocurrent. Storage capacitors are coupled to each photo TFT and discharged upon generation of a photocurrent. Each storage capacitor is coupled to a readout TFT that passes a current from the storage capacitor to a data line. Data lines indicate location of the received image on the image sensor array.

Abstract: A shut-off type diaphragm valve adapted for use in an atomic layer deposition system includes a valve seat having an annular seating surface that surrounds an inlet of the valve and extends radially therefrom. The seating surface contacts a substantial portion of the first side of a flexible diaphragm when the diaphragm is closed, to facilitate heat transfer and counteract dissipative cooling of the diaphragm, thereby inhibiting condensation of a medium flowing through the valve passage. The seating surface is preferably flat and smooth, to prevent shearing of an elastomeric diaphragm. For a plastic diaphragm, a ring-shaped seating ridge may extend from the seating surface to cause localized permanent deformation of the diaphragm and enhanced sealing, while still allowing a substantial portion of the diaphragm to contact the seating surface for enhanced heat transfer. Valve speed enhancements and other reliability enhancing features are also described.

Abstract: A liquid crystal device including a front electrode layer, rear electrode layer, a liquid crystal material located between the front electrode layer and the rear electrode layer. A polarizer is located between the liquid crystal material and the front electrode layer and changing an electrical potential between the rear electrode layer and the front electrode layer modifies portions of the liquid crystal material to change the polarization of the light incident thereon. A plurality of light sensitive elements are located together with the rear electrode layer and a processor determines the position of at least one of the plurality of light sensitive elements that has been inhibited from sensing ambient light.

Abstract: A liquid crystal device includes a front electrode layer, a rear electrode layer, and a liquid crystal material located between the front electrode layer and the rear electrode layer. A first and second transistor each includes three terminals. The first transistor is a photo transistor. The first terminal of the first transistor electrically interconnected to a conductive electrode free from additional electrical elements therebetween. The second terminal of the first transistor is electrically interconnected to the conductive electrode free from additional electrical elements therebetween and the second terminal of the first transistor is maintained at the same potential as the conductive electrode.

Abstract: An image sensor array includes image sensors having photo TFTs to generate photocurrent in response to received images. The photo TFTs each have their respective gate electrodes and source electrodes independently biased to reduce the effects of dark current. Storage capacitors are coupled to each photo TFT and discharged upon generation of a photocurrent. Each storage capacitor is coupled to a readout TFT that passes a current from the storage capacitor to a data line. The photo TFT may be disposed above the storage capacitor to increase the exposed surface area of the photo TFT.

Abstract: A diaphragm valve includes a pressure vent communicating with an enclosed space behind the diaphragm for reducing resistance to transitioning of the diaphragm between the open and closed positions. In some implementations, a pump or other source of suction is coupled to the pressure vent to reduce fluid pressure in the enclosed space. When used in an atomic layer deposition (ALD) system, the venting and suction improves the thin film deposition process and prevents leakage through the valve of potentially toxic ALD precursor vapors. Features for thermal management and reliability enhancement are also described.

Abstract: A high conductivity particle filter provides a flow path to subject a fluid stream to a series of turns. The turns require an abrupt directional change for the fluid stream. Traps are positioned in proximity to the turns to capture particles, which have greater inertia than the fluid. The flow path may be a spiral or a series of parallel paths. A cross sectional area of the flow path may be progressively decreased to increase flow velocity and particle inertia.

Abstract: A diaphragm valve includes a heating body that thermally contacts a valve body of the valve and extends proximal to a diaphragm of the valve opposite a valve passage through which medium flows. The heating body forms a thermally conductive pathway between the valve body and the diaphragm that facilitates maintaining an operating temperature at the diaphragm. When used in an atomic layer deposition (ALD) system, the diaphragm valve inhibits condensation or freezing of high-temperature ALD precursor gases in the valve passage. A plunger including thermally insulating features preferably extends through a central opening in the heating body to operably couple a valve actuator to the diaphragm. In some embodiments, a thermally resistive member may be interposed between the valve passage and the actuator for attenuating heat transfer between the valve passage and the actuator.

Abstract: An image sensor array includes image sensors having photo TFTs to generate photocurrent in response to received images. The photo TFTs each have their respective gate electrodes shorted to source electrodes to increase generated photocurrent. Each photo TFT is coupled to a reference TFT to compensate for dark current in a corresponding photo TFT. Storage capacitors are coupled to each photo TFT and discharged upon generation of a photocurrent. Each storage capacitor is coupled to a readout TFT that passes a current from the storage capacitor to a data line. Data lines indicate location of the received image on the image sensor array.

Abstract: A process and system for depositing a carbon- and transition metal-containing thin film on a substrate involves placing a substrate within a reaction space and sequentially pulsing into the reaction space a transition metal chemical and an organometallic chemical. Following each chemical pulse, the reaction space is purged, and the pulse and purge sequence is repeated until a desired film thickness is obtained. A preferred deposition process uses atomic layer deposition techniques and may result in an electrically conductive thin carbide film having uniform thickness over a large substrate area and excellent adhesion and step coverage properties.

Abstract: A high conductivity particle filter provides a flow path to subject a fluid stream to a series of turns. The turns require an abrupt directional change for the fluid stream. Traps are positioned in proximity to the turns to capture particles, which have greater inertia than the fluid. The flow path may be a spiral or a series of parallel paths. A cross sectional area of the flow path may be progressively decreased to increase flow velocity and particle inertia.

Abstract: An image sensor array includes image sensors having photo TFTs to generate photocurrent in response to received images. The photo TFTs each have their respective gate electrodes shorted to source electrodes to increase generated photocurrent. Each photo TFT is coupled to a reference TFT to compensate for dark current in a corresponding photo TFT. Storage capacitors are coupled to each photo TFT and discharged upon generation of a photocurrent. Each storage capacitor is coupled to a readout TFT that passes a current from the storage capacitor to a data line. Data lines indicate location of the received image on the image sensor array.

Abstract: An organic light emitting device with selected electrical energy potential imposed across the organic luminous material.

Abstract: An active matrix electroluminescent device provides a gray scale display. The device comprises a first electrode layer including a plurality of individually addressable pixel electrodes, a second electrode layer, and a stack including at least a phosphor layer which produces light upon the application of an electric field across the phosphor layer and a dielectric layer. The stack is disposed between the first and second electrode layers. The second electrode layer is driven during the first subframe time period with a first illumination signal having a first amplitude. At least one of the set of the selected ones of the pixel electrodes is selected with data signals during a subsequent subframe time period of the frame.

Abstract: An alternating current thin-film lectroluminescent device includes a plurality of pixel electrodes. An electroluminescent phosphor material is located between a first dielectric layer and a second dielectric layer. A transparent electrode layer, wherein at least a portion 10 of the electroluminescent phosphor material and the first and second dielectric layers are located between the pixel electrodes and the transparent electrode layer. The first dielectric layer is closer to the transparent electrode layer than the second dielectric layer. A non-uniform substantially non-conductive light absorbing material is located between the transparent electrode layer and the first dielectric layer.