Abstract: A wafer imaging system is provided in which a camera is mounted at a known position in relation to an open front of a cassette to view the cassette and its entire stack of wafer contents. The camera can be mounted on a robot or on a tool. An image of the set of wafers is captured and is image processed to provide information on the position and alignment of each wafer in the cassette. The image can be processed to provide data on separation of the wafers within the cassette, any cross slotting of wafers, and the center point of each of the wafers. Image analysis and processing is employed to determine the edge of each of the wafers. One image scan provides a determination of all information on the X, Y and Z position of the wafers in relation to the camera reference position.

Abstract: A wafer imaging system is provided in which a camera is mounted at a known position in relation to an open front of a cassette to view the cassette and its entire stack of wafer contents. The camera can be mounted on a robot or on a tool. An image of the set of wafers is captured and is image processed to provide information on the position and alignment of each wafer in the cassette. The image can be processed to provide data on separation of the wafers within the cassette, any cross slotting of wafers, and the center point of each of the wafers. Image analysis and processing is employed to determine the edge of each of the wafers. One image scan provides a determination of all information on the X, Y and Z position of the wafers in relation to the camera reference position.

Abstract: An automated door assembly is provided for sealing an opening in a barrier to a contaminant-free environment suitable for semiconductor wafer processing. The door assembly comprises a base pivotable toward and away from the opening along an arcuate path and a closure plate linearly movably coupled to the base and configured to a seal the opening in the barrier. The closure plate is removable in synchronization with the pivoting of the base to traverse a horizontal linear path into contact with the barrier to close the opening. A vacuum system is provided in conjunction with the door assembly to extract particles from the sealed environment. A sensor disposed on the closure plate is operable to sense the position of wafers or other objects disposed adjacent the opening, to detect misalignment or omission thereof.

Abstract: A material handling and transport system and process for moving a substrate carrier between storage and processing destinations are provided. The system includes a vehicle that runs on a support structure, such as a pathway or a track assembly supported on the floor, which may be in a pressurized tunnel. A carrier nest on the vehicle receives and supports the carrier. A lifting mechanism on the vehicle vertically raises and lowers the carrier nest. A load port support surface is disposed vertically above the support structure. The carrier is raised through an opening in the load port support surface. A load port nest on the load port support surface receives and supports the carrier adjacent a selected destination. A carrier manipulation mechanism manipulates the carrier over the load port nest. The lifting mechanism then lowers the carrier onto the load port nest. The system is particularly suited for handling and transporting semiconductor wafer carriers.

Abstract: A self supporting electrical cable is provided which is especially of use in linear motion devices. The cable is in the form of a band having a crowned or curved cross-section. The band is self supporting and is typically employed in a looped configuration. The band is composed of a Mylar or other plastic or electrically insulating laminate with electrical conductors and reinforcing elements. The conductors are typically copper and the reinforcing elements are typically stainless steel. In use the cable is usually folded back on itself 180° to provide a loop configuration with a fixed radius loop end in which the loop is moveable along the direction of travel. One end of the cable is connected to the linear motion device, and the other end is connected to a stationary device.

Abstract: An inductive power transfer apparatus is provided which is especially useful for a semiconductor wafer handling system or other similar type of materials transport system in which one or more cars are moveable along a track. The system includes a plurality of elongated primary coils each disposed at an intended position along the track. Each of the moveable cars has one or more pick-up or secondary coils which are coupled to the primary coil when the car comes into position along the track. A secondary coil or coils on the car provides power to a battery charging circuit for so long as the secondary is in coupling relationship with the primary or for so long as needed to provide an intended charge to the on board batteries. A drive circuit for the primary coil may be located near the primary coil or alternatively, a single drive circuit can be at a central location to provide drive signals to a plurality of primary coils.

Abstract: A storage and retrieval system is provided for safely and efficiently storing reticles in a clean environment. An enclosed storage unit is provided for storing the reticles, and other items such as wafers and the like, in an environment which minimizes the amount of contaminants and is suitable for use in a semiconductor fabrication clean room. A retrieval unit is provided separate from the enclosed storage unit for accessing and staging the reticles before they enter and leave the storage unit for minimizing exposure of the storage unit. The storage unit includes a movable storage matrix having a plurality of bays for storing the reticles. The movable storage matrix is selectively moved or rotated by a drive mechanism that is located external to the storage unit so that the storage unit is substantially free of contaminant generating components.

Abstract: A wafer pod handling device engages a pod for transport through a flange on top of the pod by receiving the flange into a receptacle and rotating a circular disk having a square aperture such that edges on the disk are positioned beneath an overhang on the flange. As the circular disk is lifted, the edges contact the overhang of the flange and lift the pod. The circular disk is mounted in a housing having a lip adapted to slideably engage the circumference of the circular disk. An actuator on top of the housing rotates the disk into engagement with the flange. As the housing is lifted, the circumference of the circular disk rests on the lip to frictionally secure and support the circular disk despite power failures or accidental rotation that could disengage the pod.

Abstract: A system to allow track-guided vehicles to avoid collisions with one another in straight track and curved track situations utilizing vehicle mounted devices and without the need for additional active traffic control devices. The system includes track-guided vehicles equipped with a plurality of selective sensors on the front and identifying reflective elements on the rear. Reflective strips mounted on the inner face of curved track allow the selective sensors to detect targets around curves. Retroreflective sensors coupled with corner cube reflective material are a preferred set of sensor and target implementations. The placement of the sensors and reflective elements is specified such that a calibrated system limits the range of the system and is easily maintained.

Abstract: A method and system is disclosed for dynamically routing a material transport vehicle using traffic based parameters. A controller directed to allocate a material transport vehicle to a particular node, selects the material transport vehicle that is physically closest to the particular node. The controller calculates an optimal route by identifying the possible routes between the initial node of the material transport vehicle and the destination node, and analyzing each of the nodes within each identified route according to a metric function by calculating a metric function value for each identified route. The controller then selects the route for the material transport vehicle having the smallest metric function value. The metric function may include parameters associated with each of the nodes in the material transport system including a node-to-node distance parameter, a node crossing parameter, and the number of material transport vehicles in a queue at each node within the route.

Abstract: An apparatus for providing power to an automated material handling system that includes a track on which a plurality of electrically powered material transport vehicles are mounted comprises a plurality of current-limited power sources each having a power supply lead and a power return lead. The apparatus further includes a power supply distribution network that is configured and arranged to electrically connect the power supply leads of the plurality of power sources together and to couple the current supplied therefrom to the power supply input of at least one of the plurality of material transport vehicles. And further includes a power return network configured and arranged to electrically couple the power return output of at least one of the plurality of material transport vehicles to the interconnected power return leads of the plurality of power sources.

Abstract: A semiconductor wafer pod payload platform is operable for rotation in response to linear movement of the platform by a cam assembly having rollers adapted to engage a cam surface. The payload platform is rotatably attached to a shuttle platform adapted for movement along linear rails. The shuttle platform is supported by shuttle glides adapted to move along the linear rails. A cam follower assembly is connected to the payload platform through a shaft extending through the shuttle platform and operable to rotate the payload platform. A cam surface substantially parallel to the linear rails is adapted to engage rollers on the cam follower assembly. Linear movement of the shuttle platform causes the rollers on the cam follower assembly to engage the cam surface and dispose the cam follower assembly so as to rotate the payload platform via rotation of the shaft.

Abstract: An ultracapacitor power supply for an electric vehicle is provided which employs an ultracapacitor as the primary power source and a battery as a supplemental power source. This vehicle is particularly effective in power-rail system having gaps in the power-rail or in non-power rail systems having recharging stations positioned along the track The ultracapacitor recharges quickly upon vehicle passage over a live power rail or entry into a recharging station. Optimum performance is achieved when the capacitor is allowed to fully recharge. The battery need only provide power when the ultracapacitor has been discharged or during acceleration or other periods of peak power consumption, thereby reducing the number of battery recharges required during any given operational period.

Abstract: A wafer carrier adapter for use with a 200 millimeter wafer carrier and a pod door opener to a front end of a semiconductor processing environment. The 200 millimeter wafer carrier has a bottom surface and is provided with a plurality of recesses extending through the bottom surface in a predetermined configuration and a front opening for accessing silicon wafers in the wafer carrier. The pod door opener has a platform with a kinematic coupling which includes a plurality of pins extending upwardly in a predetermined pattern from the platform for aligning and supporting 300 millimeter wafer carriers relative to a port in the pod door opener. The wafer carrier adapter comprises a support structure having top and bottom surfaces. The support structure is provided with a plurality of recesses extending through the bottom surface adapted to receive the plurality of pins.

Abstract: An automated door assembly is provided for sealing an opening in a barrier to a contaminant-free environment suitable for semiconductor wafer processing. The door assembly comprises a base pivotable toward and away from the opening along an arcuate path and a closure plate linearly movably coupled to the base and configured to a seal the opening in the barrier. The closure plate is movable in synchronization with the pivoting of the base to traverse a horizontal linear path into contact with the barrier to close the opening. A vacuum system is provided in conjunction with the door assembly to extract particles from the sealed environment. A sensor disposed on the closure plate is operable to sense the position of wafers or other objects disposed adjacent the opening, to detect misalignment or omission thereof.

Abstract: A hoist system including a roller assembly which is allowed to pivot as a suspending member is rolled up around a drum compensates for lateral forces and allows a load on the suspending member to remain centered under the roller assembly. The drum has a shaft mounted through the center with a resilient coupling between the shaft and the drum which allows transfer of rotational torque while allowing the drum to pivot. Such a coupling can be furnished by a pair of concentric rings around the shaft having pivot holes orthogonal to the shaft axis. The innermost ring is connected by a pair of pivot pins to the shaft. The outermost ring is connected to the innermost ring by another pair of pivot pins perpendicular to the pivot pins through the shaft. The outermost ring is attached to the inside of the drum.

Abstract: An apparatus for detecting the presence of a wafer cassette, or pod, resting on an arrangement of pins allows cassette detection without interfering with insertion of a robotic paddle arm beneath the cassette to remove it for transport. A cassette resides on an arrangement of beveled pins which mate with corresponding receptacles on the underside. Pins supporting the cassette have a spring biased, hollow outer cylinder coaxially mounted around a center post. A cassette placed on the pins displaces the outer cylinder downward a sufficient distance to trigger a sensor. Upon removal of the cassette, the outer cylinder is displaced upwards, resetting the sensor.

Abstract: A wafer transfer system is operable with a front or side loading wafer carrier to move one or more wafers in a straight line from the carrier to a position in which the wafers are accessible for further processing by movement along the same straight line. The transfer system provides a wafer extractor which employs a plurality of paired fingers of a size and configuration to fit between the spaced, stacked wafers in the carrier. After insertion between the wafers, the fingers are movable by a small amount vertically to lift the wafers off the shoulders of the carrier. The fingers, now supporting the wafers, are movable generally horizontally along a straight line to remove the wafers from the carrier. The fingers are supported from a support structure in a manner which provides clearance for the wafers to pass through the support structure for further processing along the same straight line path.

Abstract: A hoist system having triangular suspension bands minimizes sway and twisting during the lifting of a payload. The system includes three depending retractable and extensible triangular tension members which provide three sets of opposed horizontal tensile forces aligned along three non-parallel lines. Each tension member comprises a flexible triangular band attached along one side to one of three rotatable spools arranged at 60.degree. to each other. The bands are attached near their vertices to a payload gripper assembly which is raised or lowered as the bands are wound or unwound from the spools. The three triangular bands provide six horizontal force components which provide good lateral stability and torsional rigidity, thereby minimizing sway and twisting of the payload. The bands also provide good payload lifting strength.

Abstract: A wafer transfer system is operable with a front or side loading wafer carrier to move one or more wafers in a straight line from the carrier to a position in which the wafers are accessible for further processing by movement along the same straight line. The transfer system provides a wafer extractor which employs a plurality of paired fingers of a size and configuration to fit between the spaced, stacked wafers in the carrier. After insertion between the wafers, the fingers are movable by a small amount vertically to lift the wafers off the shoulders of the carrier. The fingers, now supporting the wafers, are movable generally horizontally along a straight line to remove the wafers from the carrier. The fingers are supported from a support structure in a manner which provides clearance for the wafers to pass through the support structure for further processing along the same straight line path.