Abstract: A microelectromechanical system (MEMS) is provided. In one embodiment, the MEMS includes a transparent substrate, and a plurality of interferometric modulators. The plurality of interferometric modulators includes an optical stack coupled to the transparent substrate, in which the optical stack includes a first light absorbing area. The plurality of interferometric modulators further includes a reflective layer over the optical stack, and one or more posts to support the reflective layer. Each of the one or more posts includes a second light absorbing area integrated in the post.

Abstract: A device to measure pressure is disclosed. In one embodiment, the device includes at least one element with two layers separated by a space which changes over a variable time period in response to a voltage applied across the two layers. The time period may be measured and is indicative of the ambient pressure about the device.

Abstract: In certain embodiments, a device is provided that utilizes both interferometrically reflected light and transmitted light. Light incident on the device is interferometrically reflected from a plurality of layers of the device to emit light in a first direction, the interferometrically reflected light having a first color. Light from a light source is transmitted through the plurality of layers of the device to emit from the device in the first direction, the transmitted light having a second color.

Abstract: A MEMS device is electrically actuated with a voltage placed across a first electrode and a moveable material. The device may be maintained in an actuated state by latch electrodes that are separate from the first electrode.

Abstract: Embodiments include methods and devices for controlling the spectral profile and color gamut of light produced by an interferometric display. Such devices include illuminating a display with selected wavelengths of light. Embodiments also include a display comprising separate sections that output different predetermined colors of light. Other embodiments include methods of making the aforementioned devices.

Abstract: In certain embodiments, a device is provided including a substrate and a plurality of supports over the substrate. The device may further include a mechanical layer having a movable portion and a stationary portion. The stationary portion may disposed over the supports. In certain embodiments, the device further includes a reflective surface positioned over the substrate and mechanically coupled to the movable portion. The device of certain embodiments further includes at least one movable stop element displaced from and mechanically coupled to the movable portion. In certain embodiments, the at least a portion of the stop element may be positioned over the stationary portion.

Abstract: An interferometric modulator (Imod) cavity has a reflector and an induced absorber. A direct view reflective flat panel display may include an array of the modulators. Adjacent spacers of different thicknesses are fabricated on a substrate by a lift-off technique used to pattern the spacers which are deposited separately, each deposition providing a different thickness of spacer. Or a patterned photoresist may be used to allow for an etching process to selectively etch back the thickness of a spacer which was deposited in a single deposition. A full-color static graphical image may be formed of combined patterns of interferometric modulator cavities. Each cavity includes a reflector, and an induced absorber, the induced absorber including a spacer having a thickness that defines a color associated with the cavity.

Abstract: Certain MEMS devices include layers patterned to have tapered edges. One method for forming layers having tapered edges includes the use of an etch leading layer. Another method for forming layers having tapered edges includes the deposition of a layer in which the upper portion is etchable at a faster rate than the lower portion. Another method for forming layers having tapered edges includes the use of multiple iterative etches. Another method for forming layers having tapered edges includes the use of a liftoff mask layer having an aperture including a negative angle, such that a layer can be deposited over the liftoff mask layer and the mask layer removed, leaving a structure having tapered edges.

Abstract: A method and apparatus for displaying data on bi-stable and non-bi-stable displays is provided. The apparatus includes a controller chip capable of being connected to a non-bi-stable display through a first interface channel and also capable of being connected to a bi-stable display via the first interface channel and an additional second interface channel. When connected the non-bi-stable display, the second interface channel is not connected. The second interface channel may carry mode information bits to the bi-stable display module to allow the bi-stable display to utilize power-saving features.

Abstract: MEMS devices include materials which are used in LCD or OLED fabrication to facilitate fabrication on the same manufacturing systems. Where possible, the same or similar materials are used for multiple layers in the MEMS device, and use of transparent conductors for partially transparent electrodes can be avoided to minimize the number of materials needed and minimize fabrication costs. Certain layers comprise alloys selected to achieve desired properties. Intermediate treatment of deposited layers during the manufacturing process can be used to provide layers having desired properties.

Abstract: A package is made of a transparent substrate having an interferometric modulator and a back plate. A non-hermetic seal joins the back plate to the substrate to form a package, and a desiccant resides inside the package. A method of packaging an interferometric modulator includes providing a transparent substrate and manufacturing an interferometric modulator array on a backside of the substrate. A back plate includes a curved portion relative to the substrate. The curved portion is substantially throughout the back plate. The back plate is sealed to the backside of the substrate with a back seal in ambient conditions, thereby forming a package.

Abstract: Methods of fabricating an electromechanical systems device that mitigate permanent adhesion, or stiction, of the moveable components of the device are provided. The methods provide an amorphous silicon sacrificial layer with improved and reproducible surface roughness. The amorphous silicon sacrificial layers further exhibit excellent adhesion to common materials used in electromechanical systems devices.

Abstract: A light modulator device includes a first electrical conduit, a second electrical conduit electrically isolated from the first conduit, a first display element, and a second display element. The first display element is in an actuated state when a voltage difference between the first conduit and the second conduit has a magnitude greater than a first actuation voltage and is in a released state when the voltage difference has a magnitude less than a first release voltage. The second display element is in an actuated state when the voltage difference has a magnitude greater than a second actuation voltage and is in a released state when the voltage difference has a magnitude less than a second release voltage. Either the actuation voltages are substantially equal and the release voltages are different, or the actuation voltages are different and the release voltages are substantially equal.

Abstract: Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal.

Abstract: A microelectromechanical systems (MEMS) display element may include a photovoltaic structure configured to generate electric energy from incident light. In one embodiment, the display element includes a first layer that is at least partially transmissive of light, a second layer that is at least partially reflective of light, and a photovoltaic element that is formed on the first layer or the second layer or formed between the first layer and the second layer. The second layer is spaced from the first layer and is selectably movable between a first position in which the display element has a first reflectivity and a second position in which the display element has a second reflectivity. The first reflectivity is greater than the second reflectivity. The photovoltaic element is at least partially absorptive of light and is configured to convert a portion of the absorbed light into electric energy, at least when the second layer is in the second position.

Abstract: Embodiments include devices and methods for wavelength filtering. For example, one embodiment includes a display comprising a plurality of the display elements each comprising a movable reflector, a first partial reflector, and a second partial reflector. The first partial reflector is positioned at a first distance from the movable reflector and forms a first optical resonant cavity therebetween. The second partial reflector is positioned at a second distance from said first partial reflector and forming a second optical resonant cavity therebetween. In various embodiments, the movable reflector is movable with respect to the first partial reflector to alter the first optical cavity. Other embodiments include a method of making devices.

Abstract: A multi-state light modulator comprises a first reflector. A first electrode is positioned at a distance from the first reflector. A second reflector is positioned between the first reflector and the first electrode. The second reflector is movable between an undriven position, a first driven position, and a second driven position, each having a corresponding distance from the first reflector. In one embodiment, the three positions correspond to reflecting white light, being non-reflective, and reflecting a selected color of light. Another embodiment is a method of making the light modulator. Another embodiment is a display including the light modulator.

Abstract: Methods and systems for providing brightness control in an interferometric modulator (IMOD) display are provided. In one embodiment, an interferometric modulator display pixel is provided that includes a microelectromechanical systems (MEMS) interferometric modulator having an associated first color spectrum, and a color absorber located substantially in front of the interferometric modulator display pixel, in which the color absorber has an associated second color spectrum. The microelectromechanical systems (MEMS) interferometric modulator is operable to shift the first color spectrum relative to the second color spectrum to control a visual brightness of the interferometric modulator display pixel independent of a color of the interferometric modulator display pixel.

Abstract: Light is modulated using an array of modulation elements formed on a semiconductor substrate, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. The elements are made by forming a sandwich of two layers and a sacrificial layer between them, the sacrificial layer having a thickness related to the final cavity dimension, and using water or an oxygen based plasma to remove the sacrificial layer.

Abstract: A bit depth of a pixel comprising multiple display elements, such as interferometric modulators, may be increased through the use of display elements having different intensities, while the lead count is minimally increased. An exemplary pixel with at least one display element having an intensity of 0.5 and N display elements each having an intensity of one can provide about 2N+1 shades (e.g., 0, 0.5, 1.0, 1.5, 2.0, [N+0.5]). In comparison, a pixel having N display elements, each having an intensity of one, can only provide about N+1 shades (e.g., 0, 1, 2, . . . , N). Thus, using at least one display element having an intensity lower than the intensity of each of the other display elements increases the number of shades provided by the pixel by an approximate factor of two and increases the bit depth of the pixel, while minimizing the number of additional leads.