Abstract: Systems, methods and apparatus for processing a substrate are disclosed. A reactor for processing a substrate includes a reaction chamber, a substrate support, a nozzle, and an outlet. The chamber is configured to process a single substrate on the substrate support. The nozzle extends along an axis of elongation along a side of the chamber. The nozzle includes a nozzle body forming an inner volume, an inlet providing fluid communication between a reactant source and the inner volume, and a plurality of holes spaced along the axis of elongation. The holes provide fluid communication between the inner volume of the nozzle body and the reaction chamber. The nozzle is configured such that fluid conductance through the holes increases with increasing distance from the inlet. The outlet is configured to allow flow from the nozzle through the reaction chamber to the outlet. The flow is parallel to a major surface of the substrate.

Abstract: Systems, methods and apparatus for processing a substrate are described. A reactor includes a reaction chamber, a composite nozzle, and a reaction chamber outlet. The composite nozzle extends along a side of the chamber and includes a first nozzle and a second nozzle separate from and parallel the first nozzle. Each nozzle includes a body extending along an axis of elongation, an inlet providing communication between at least one source of a common species and an inner volume of the body, and holes spaced along the axis. The holes provide fluid communication between the inner volume and the chamber. The outlet is configured to allow flow from the composite nozzle through the chamber to the outlet. The first nozzle inlet is positioned at a first end of the first body, and the second nozzle inlet is positioned at a second end of the second body. The second end is opposite the first end of the first body.

Abstract: This disclosure provides systems, methods and apparatus for an illumination system. In one aspect, the illumination system is a light guide that includes spaced-apart regions of medium containing diffractive features. For example, the medium may include holographic medium having holograms that are configured to redirect light, propagating through the light guide, out of the light guide. The spaces between the spaced-apart regions of media may be filled with a material having a lower refractive index than the light guide, thereby functioning as a reflective cladding in those spaces.

Abstract: This disclosure provides systems, methods and apparatus for vias in an integrated circuit structure such as a passive device. In one aspect, an integrated passive device includes a first conductive trace and a second conductive trace over the first conductive trace with an interlayer dielectric between a portion of the first conductive trace and the second conductive trace. One or more vias are provided within the interlayer dielectric to provide electrical connection between the first conductive trace and the second conductive trace. A width of the vias is greater than a width of at least one of the conductive traces.

Abstract: A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.

Abstract: This disclosure provides systems, apparatus, and devices and methods of fabrication for electromechanical devices. In one implementation, an apparatus includes a metal proof mass and a piezoelectric component as part of a MEMS device. Such apparatus can be particularly useful for MEMS gyroscope devices. For instance, the metal proof mass, which may have a density several times larger than that of silicon, is capable of reducing the quadrature and bias error in a MEMS gyroscope device, and capable of increasing the sensitivity of the MEMS gyroscope device.

Abstract: A semiconductor device comprising a second surface of a logic die and a second surface of a via bar coupled to a first surface of a substrate, a second surface of a memory die coupled to a first surface of the via bar, a portion of the second surface of the memory die extending over the first surface of the logic die, such that the logic die and the memory die are vertically staggered, and the memory die electrically coupled to the logic die through the via bar. The via bar can be formed from glass, and include through-glass vias (TGVs) and embedded passives such as resistors, capacitors, and inductors. The semiconductor device can be formed as a single package or a package-on-package structure with the via bar and the memory die encapsulated in a package and the substrate and logic die in another package.

Abstract: This disclosure provides systems, methods and apparatus related to an electromechanical display device. In one aspect, an analog interferometric modulator includes a reflective display pixel having a reflector, and a movable first absorbing layer positionable at a distance d1 from the reflector, the first absorbing layer and the reflector defining a first gap therebetween. The apparatus also includes a second absorbing layer disposed at a distance d2 from the first absorbing layer, the first absorbing layer disposed between the second absorbing layer and the reflector, the second absorbing layer and the first absorbing layer defining a second gap therebetween. In addition, at least two of the reflector, the first absorbing layer and second absorbing layer are movable to synchronously either increase or decrease the thickness dimension of the first gap and the second gap.

Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for displaying high bit-depth images using temporal modulation on display devices including display elements that have multiple primary colors. In order to reduce visual artifacts produced by angular metamerism, the display elements are configured to display only those combinations of the different primary colors that satisfy certain constraints. Color combinations of the multiple primary colors that satisfy these constraints are included in a constrained color palette that includes fewer than all the possible colors that can be provided by all combinations of the primary colors.

Abstract: Methods and devices for reducing the voltage required to update an array of display elements having variable capacitance are described herein. In one implementation, the method includes driving a display element to a first state using a reset drive line. The method further includes driving the display element to a second state using a column drive line. The capacitance of the display element is higher in the first state than in the second state.

Abstract: Encapsulation is provided to electromechanical devices to protect the devices from such environmental hazards as moisture and mechanical shock. In addition to the encapsulation layer providing protection from environmental hazards, the encapsulation layer is additionally planarized so as to function as a substrate for additional circuit elements formed above the encapsulation layer.

Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for a display with inactive dummy pixels. A display apparatus may include subpixels having a first electrode layer and a second electrode layer. The first electrode layer of an edge subpixel may include an opening, which may be made large enough to prevent the edge subpixel from actuating. The size of the openings also may be selected to attain a desired overall reflectivity for an array of edge subpixels. For example, the size of the openings may be selected to make the reflectivity of an edge pixel array similar to the reflectivity of a routing area.

Abstract: Illumination devices and methods of making same are disclosed. In one embodiment, an illumination apparatus includes a light source, a light guide having a planar first surface, a first end and a second end, and a length therebetween, the light guide positioned to receive light from the light source into the light guide first end, and the light guide configured such that light from the light source provided into the first end of the light guide propagates towards the second end, and a plurality of light turning features that are configured to reflect light propagating towards the second end of the light guide out of the planar first surface of the light guide, each light turning feature having a turning surface and an interferometric stack formed on the turning surface.

Abstract: This disclosure provides systems, methods, and apparatus for providing illumination for lighting systems. One or more light emitters can be disposed about a longitudinal axis, such as in an at least partial polygonal shape, so that the light sources emit light radially outwardly away from the longitudinal axis. A collimating reflector can be disposed radially outward of the one or more light emitters and can be configured to at least partially collimate the light and to substantially preserve etendue of the light emitted from the light emitters. The one or more light emitters can substantially fill an input aperture of the collimating reflector in a direction of the longitudinal axis. The light can be coupled into a light guide, which can be configured to distribute the light to a target lighting area.

Abstract: An optical touch sensor may include traces of photoconductive material formed on a substantially transparent substrate. Each photoconductive trace may be capable of responding to an incident light intensity increase on a portion of the photoconductive trace by increasing the number of charged carriers, thereby raising the electrical conductivity of that portion of the photoconductive trace. An incident light intensity decrease on a portion of the photoconductive trace will lower the electrical conductivity of that portion of the photoconductive trace. The corresponding changes in voltage may be measured by circuits that include conductive traces formed substantially perpendicular to, and configured for electrical connection with, the traces of photoconductive material. A diode (such as a Schottky diode) may be formed at the electrical connections between the conductive traces and the photoconductive traces.

Abstract: This disclosure provides circuits and methods for resetting a movable element, such as a mirror of an interferometric modulator (IMOD), to a consistent starting point or reset position. In one example, a circuit may include three electrodes with a capacitor coupled between two of the electrodes. Additionally, the polarity of one of the electrodes may be configured to switch and reverse in polarity relative to another electrode. Accordingly, the movable element may be moved to a reset position.

Abstract: Some implementations described herein involve defining a viewing angle range, also referred to herein as a viewing cone. The viewing cone may be produced by an array of optical fibers on a display. The optical fiber array may include tapered optical fibers that are capable of increasing the amount of light transmitted through the optical fiber array. The optical fiber array may be a graded index optical fiber array, wherein the refractive index of the optical fiber cores varies along the axis of the optical fibers.

Abstract: An interferometric modulator array is formed with connectors and/or an encapsulation layer with electrical connections. The encapsulation layer hermetically seals the array. Circuitry may also be formed over the array.

Abstract: This disclosure provides systems, methods and apparatus related to an electromechanical display device. In one aspect, an analog interferometric modulator (AIMOD) includes a reflective display pixel having a movable reflective layer and a stationary absorber layer, the reflective layer and absorber layer defining a cavity therebetween. A color notch filter may be employed to produce an improved white state. In some implementations, the color notch filter is positioned on a side of the substrate opposite the absorber layer. In some other implementations, the color notch filter is positioned between the substrate and the movable reflective layer.

Abstract: A multi-state light modulator comprises a first reflector. A first electrode is positioned at a distance from the first reflector. A second reflector is positioned between the first reflector and the first electrode. The second reflector is movable between an undriven position, a first driven position, and a second driven position, each having a corresponding distance from the first reflector. In one embodiment, the three positions correspond to reflecting white light, being non-reflective, and reflecting a selected color of light. Another embodiment is a method of making the light modulator. Another embodiment is a display including the light modulator.