Abstract: An interference modulator (IMod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provides greater flexibility. Electronic hardware can be field reconfigured to accommodate different display formats and/or application functions. An IMod's electromechanical behavior can be decoupled from its optical behavior. An improved actuation means is provided, some one of which may be hidden from view. An IMod or IMod array is fabricated and used in conjunction with a MEMS switch or switch array. An IMod can be used for optical switching and modulation. Some IMods incorporate 2-D and 3-D photonic structures. A variety of applications for modulation of light are discussed. A MEMS manufacturing and packaging approach is provided based on continuous web fed process.

Abstract: This disclosure provides systems, methods and apparatus for providing white light color output from an electromechanical systems (EMS) device with reduced likelihood of stiction. In one aspect, interferometric modulators are configured to provide a white color output while having a non-zero modulator gap dimension. Such a feature can reduce problems associated with zero modulator gap dimensions such as stiction. Various methodologies can be used to yield such a non-zero modulator gap and a white color output. In some implementations, for example, an optical element that introduced wavelength dependent phase shift is used. In some implementations this wavelength dependent phase shifting optical element includes a stack of color filters, a hologram, a diffraction grating, or layers of material having specific thicknesses and wavelength dependent indices of refraction.

Abstract: This disclosure provides systems, methods and apparatus for protecting electromechanical systems (EMS) devices from mechanical interference. In one aspect, an array of EMS devices may include one or more regions in which an EMS device is replaced with a spacer structure, such that the overall height of the spacer structure is greater than the height of the surrounding EMS devices. In another aspect, resilient spacer structures can be formed overlying stable portions of an EMS device array. These resilient spacer structures may be formed from a cross-linked organic material.

Abstract: This disclosure provides systems, methods and apparatus for encapsulating a display device. In one aspect, an interferometric modulator (IMOD) is formed on a substrate. The IMOD includes an absorbing layer separated from the substrate, a reflective layer between the absorbing layer and the substrate, and an optical gap between the absorbing layer and the reflective layer. One or more thin film encapsulation layers hermetically seal the IMOD between the one or more thin film encapsulation layers and the substrate. In another aspect, an optical or functional layer can be formed over the one or more thin film encapsulation layers.

Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for using acoustic artifact data produced through normal operation of interferometric modulator (IMOD) displays to convey data in addition to the graphical content displayed using an IMOD display panel. In one aspect, such acoustic artifact data may be used to fingerprint or authenticate graphical content displayed by an IMOD display panel. In another aspect, the actuation of IMODs in an IMOD display panel may be modulated to produce a desired acoustic artifact data stream that may communicate information independently of, and simultaneously with, the display of graphical content.

Abstract: This disclosure provides systems, methods and apparatus for vias in an integrated circuit structure such as a passive device. In one aspect, an integrated passive device includes a first conductive trace and a second conductive trace over the first conductive trace with an interlayer dielectric between a portion of the first conductive trace and the second conductive trace. One or more vias are provided within the interlayer dielectric to provide electrical connection between the first conductive trace and the second conductive trace. A width of the vias is greater than a width of at least one of the conductive traces.

Abstract: This disclosure provides implementations of multi-gate transistors, structures, devices, apparatus, systems, and related processes. In one aspect, a device includes a thin-film semiconducting layer arranged over a substrate. A drain and source are coupled to the semiconducting layer. The device also includes first, second and third gates all arranged adjacent the semiconducting layer and configured to receive first, second, and third control signals, respectively. Dielectric layers insulate the gates from the semiconducting layer and from one another. In a first mode, the first, second, and third gates are configured such that charge is stored in a potential well in a region of the semiconducting layer adjacent the second gate. In a second mode, the first, second and third gate electrodes are configured such that the stored charge is transferred through the region of the semiconducting layer adjacent the third gate electrode and through the source to a load.

Abstract: A system and method for an optical component that masks non-active portions of a display and provides an electrical path for one or more display circuits. In one embodiment an optical device includes a substrate, a plurality of optical elements on the substrate, each optical element having an optical characteristic which changes in response to a voltage applied to the optical element, and a light-absorbing, electrically-conductive optical mask disposed on the substrate and offset from the plurality of optical elements, the optical mask electrically coupled to one or more of the optical elements to provide electrical paths for applying voltages to the optical elements. In another embodiment, a method of providing an electrical signal to optical elements of a display comprises electrically coupling an electrically-conductive light-absorbing mask to one or more optical elements, and applying a voltage to the mask to activate the one or more optical elements.

Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using gyroscopes. Such gyroscopes may include a sense frame, a proof mass disposed outside the sense frame, a pair of anchors and a plurality of drive beams. The plurality of drive beams may be disposed on opposing sides of the sense frame and between the pair of anchors. The drive beams may connect the sense frame to the proof mass. The drive beams may be configured to cause torsional oscillations of the proof mass substantially in a first plane of the drive beams. The sense frame may be substantially decoupled from the drive motions of the proof mass. Such devices may be included in a mobile device, such as a mobile display device.

Abstract: This disclosure provides systems, methods and apparatus for enhancing the brightness and/or contrast ratio of display devices. In one aspect, the display devices can include an annular diffuser that is configured to scatter light into a ring shaped region. The annular diffuser can include a plurality of axicon lenses or holographic features. The reflective display can include an annular diffuser to shift the direction along which most of the modulated light is scattered away from the direction along which light is specularly reflected by the display devices to reduce specular glare and enhance brightness and/or contrast ratio.

Abstract: This disclosure provides systems, methods and apparatus for electromechanical systems devices with improved electrical properties and device life span. In one aspect, a conformal antistiction layer is formed within a cavity of an electromechanical systems apparatus over a roughened surface. The conformal antistiction layer can include a dielectric layer. The conformal antistiction layer can include a self-assembled monolayer (SAM) formed over the dielectric layer. The conformal antistiction layer can replicate the roughness of the surface that it is deposited on.

Abstract: This disclosure provides systems, methods and apparatus for packaging a device, for example an electromechanical systems (EMS) device, with a seal. In one aspect, the EMS device includes a primary seal positioned around a perimeter of the EMS device and in contact with a substrate and a cover plate, and a secondary seal positioned around portions of an outer periphery of the primary seal and in contact with the substrate and the cover plate. The primary seal can have low outgassing and low permeability of water vapor, and the secondary seal can have high mechanical strength that does not degrade when adhered to glass.

Abstract: This disclosure provides systems, methods and apparatus for providing a desired illumination pattern within a given plane. In one aspect, a light wash system can be configured to provide substantially even illumination on a wall or floor. The light wash system can use light-shaping optics such as a stack of optical films to provide a light wash system which is smaller than conventional light wash systems which utilize parabolic reflectors. The light wash system may include an internal retroreflector to allow a wider range of throw distances for the light wash system.

Abstract: This disclosure provides systems and methods for illumination systems with one or more reflective structures over a light guide. In one aspect, each reflective structure can have an absorber structure with a width greater than a width of the reflective structure. The absorber structure can have overhanging portions that are in parallel with and laterally protrude past one or more edges of the reflective structure, or the absorber structure can have enclosing portions that substantially enclose the reflective structure. The reflective structures can include light-turning features, such as facets, and/or conductive wires, such as touch sensor wires.

Abstract: Methods and devices for calibrating and controlling the actuation of an analog interferometric modulator configured to have a plurality of actuation states. Devices and methods for calibrating an analog interferometric modulator to respond in linear relation to an applied voltage.

Abstract: This disclosure provides systems, methods and apparatus for a beam pattern projection device that includes a modulating array of light sources. In one aspect, the beam pattern projection device may include a lens. The array of light sources can be positioned such that its output plane is substantially one focal length away from the lens along the optical axis. The output of the array of light sources can be controllable to create an adjustable beam pattern out of a plurality of possible beam patterns that are each associated with a power level of each light source in the array of light sources. The device can project at a distance the adjustable beam pattern created by the array of light sources.

Abstract: A projector can include a projection lens that is positioned substantially one focal length away from a spatial light modulator. The projector may also include a non-imaging optic configured to illuminate the spatial light modulator. The non-imaging optic may include a light emitter and an etendue-preserving reflector. The projector can be configured to project an image created by the spatial light modulator at a distance using light from the non-imaging optic.

Abstract: This disclosure provides systems, methods and apparatus for purge gas delivery in an atomic layer deposition (ALD) processing apparatus. The ALD processing apparatus can include a processing chamber including a lid and a chamber wall. One or more process gas lines for delivering process gases are coupled to one or more process gas delivery sources in the processing chamber. An o-ring can be positioned proximate an outer edge of the processing chamber to provide a seal with the chamber wall and the lid. The lid is configured to open for removal of the substrate and close to process the substrate. A purge line for delivering purge gas is coupled to one or more purge gas delivery line sources in the processing chamber, and the purge gas delivery line sources are disposed between the o-ring and the one or more process gas delivery sources.

Abstract: This disclosure provides systems and methods for thin film switching devices, such as thin film transistors and thin film diodes, which are integrated in a display apparatus. In one aspect, a thin film switching device is positioned on a rear side of an electromechanical systems (EMS) display element formed over a substrate and is in electrical communication with the EMS display element. In another aspect, the thin film switching device is positioned between the EMS display element and the substrate. A planar layer is disposed between the EMS display element and the thin film switching device, with the planar layer having a planar surface.

Abstract: This disclosure provides systems, methods and apparatus which involve selectively removing a sacrificial portion of molybdenum (Mo) relative to other structural materials in a self-limiting manner. The Mo is only partially removed, leaving behind a remaining portion of molybdenum. The self-limiting etch can form an internal cavity by removing only a portion of a Mo layer between electromechanical systems electrodes. The remaining Mo can serve as a support structure between the electrodes.