Abstract: This disclosure provides implementations of electromechanical systems resonator structures, devices, apparatus, systems, and related processes. A resonator structure generally includes a first conductive layer with an input electrode, an output electrode, and a ground electrode. The ground electrode is disposed between the input electrode and the output electrode. In some implementations, the second conductive layer includes an input electrode, an output electrode, and a ground electrode. In some other implementations, a second conductive layer includes a pair of ground electrodes and a signal electrode in the form of an input or output electrode disposed between the ground electrodes. A piezoelectric layer is disposed between the first conductive layer and the second conductive layer.

Abstract: Methods of fabricating an electromechanical systems device that mitigate permanent adhesion, or stiction, of the moveable components of the device are provided. The methods provide an amorphous silicon sacrificial layer with improved and reproducible surface roughness. The amorphous silicon sacrificial layers further exhibit excellent adhesion to common materials used in electromechanical systems devices.

Abstract: An ornamental display device having an interferometric modulator for displaying an ornamental image. The ornamental device may also have a signal receiver configured to receive an external signal. The ornamental device may further have a processor configured to control an image on the display based on the external signal. The external signal is emitted from a controller configured to control a plurality of ornamental devices to display coordinated images. The ornamental device may have a patterned diffuser formed on a transparent substrate to provide an ornamental image or information. The ornamental device may be a piece of jewelry or an article that may be worn. The image displayed may have an iridescent appearance. A controller may also be used to control images displayed on multiple ornamental device to provide coordinated images based on externals received or pre-programmed images.

Abstract: A reflective subpixel array may be formed in which an absorption layer is formed on a back substrate, which may obviate the need for a black mask on a front substrate upon which the reflective subpixel array is formed. In some implementations, the black mask layer may be formed only in post areas on the front substrate. The absorption layer may absorb light that enters between subpixel rows and/or columns. The absorption layer may include at least one highly conductive layer that can form part of the signal routing for the display. Conductive spacers may be formed to connect the conductive absorption layer to a conductive layer of the subpixel array.

Abstract: Methods and devices to measure voltage margins of electromechanical devices are disclosed. The voltage margins are determined based on responses to test voltages which cause the devices to change states. State changes of the devices are detected by monitoring integrated current or charge used to drive the devices with the test voltages.

Abstract: Embodiments include methods and devices for controlling the spectral profile and color gamut of light produced by an interferometric display. Such devices include illuminating a display with selected wavelengths of light. Embodiments also include a display comprising separate sections that output different predetermined colors of light. Other embodiments include methods of making the aforementioned devices.

Abstract: This disclosure provides apparatus, systems and methods for optical decoupling. In one implementation, an optical system includes a substrate transmissive to visible light, a first antireflective structure disposed on a surface of the substrate, a second antireflective structure. The first and second antireflective structures define at least one cavity containing air in between. The optical system further includes a plurality of support posts configured to space the first antireflective structure from the second antireflective structure to define the height of the at least one cavity. A reflective display is disposed on a surface of the second antireflective structure opposite the at least one cavity.

Abstract: This disclosure provides methods and apparatus for increasing the efficiency of a photovoltaic module. In one aspect, an apparatus includes an array of photovoltaic cells. One or more reflective surfaces can be provided along the edges of the array, between the edges of the array and the frame. The reflective surfaces can extend in a direction from the back of the array toward the front of the array so as to reflect light exiting the first and second edges of the array back into the array through the first and second edges. The reflective surface can be convex and/or can be disposed at one or more angles with respect to the array. The angles can be selected based on a selected geographical latitude and a corresponding selected orientation of the array relative to the sun.

Abstract: This disclosure provides methods and apparatus for increasing the efficiency of a photovoltaic module. In one aspect, the position of a photovoltaic panel can be updated throughout the day based on whether the solar angle of incidence on the panel falls within a cone of at least 10° about a normal of the panel. For example, the panel can remain stationary when the solar angle of incidence falls within the cone, but when the solar angle of incidence falls outside the cone, the panel can be moved so that the solar angle of incidence falls within the cone.

Abstract: Methods of fabricating an electromechanical systems (EMS) device with spacers between plates and EMS devices formed by the same are disclosed. In one embodiment, a EMS device is fabricated by laminating a front substrate and a carrier, each of which has components preformed thereon. The front substrate is provided with stationary electrodes formed thereover. A carrier including movable electrodes formed thereover is attached to the front substrate. The carrier may be released after transferring the movable electrodes to the front substrate. In other embodiments, the carrier stays over the front substrate, and serves as a backplate for the EMS device. Features are formed by deposition and patterning, by embossing, or by patterning and etching. Spacers are provided between the front substrate and the backplate to maintain a gap therebetween. The resulting EMS devices can trap smaller volumes between laminated substrates and are less susceptible to pressure variations and moisture leakage.

Abstract: This disclosure provides systems, methods and apparatus for bonding a device substrate formed of a substantially transparent material to a carrier substrate. A laser etch stop layer may be formed on the device substrate. The carrier substrate may be coated with a releasable layer, such as a polymer layer. Vias may be formed in the device substrate by laser drilling. The vias may be filled with conductive material, e.g., by electroplating or by filling the vias with a conductive paste. One or more types of devices may then be attached to the device substrate and configured for electrical communication with the vias. In some implementations, passive devices may be formed on the device substrate before the vias are formed. Before or after device fabrication, the substrates may be separated. The substrates may be separated by laser irradiation or chemical dissolution of the releasable layer.

Abstract: Optical filter functionality is incorporated into a substrate of a display element thereby decreasing the need for a separate thin film filter and, accordingly, reducing a total thickness of a filtered display element. Filter functionality may be provided by any filter material, such as pigment materials, photoluminescent materials, and opaque material, for example. The filter material may be incorporated in the substrate at the time of creating the substrate or may be selectively diffused in the substrate through a process of masking the substrate, exposing the substrate to the filter material, and heating the substrate in order to diffuse the filter material in the substrate.

Abstract: Methods and devices for applying bias potentials of opposite polarities to columns of electromechanical display elements are described herein. The bias potentials may be applied such that a column and an adjacent column receive bias potentials of opposite polarity. The bias potentials may be applied such that a polarity of bias voltages received by columns of a first set of the display elements is opposite a polarity of bias voltages received by columns of a second set of the display elements.

Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for providing positive and negative voltages of a power supply. In one aspect, the power supply includes an inductor having a first end coupled via a source switch to a voltage source and coupled via a first plurality of output switches to a respective plurality of negative outputs and a second end coupled via a ground switch to a ground potential and coupled via a second plurality of output switches to a respective plurality of positive outputs and a controller adapted to configure the switches into at least one of multiple configurations.

Abstract: Embodiments of MEMS devices comprise a conductive movable layer spaced apart from a conductive fixed layer by a gap, and supported by rigid support structures, or rivets, overlying depressions in the conductive movable layer, or by posts underlying depressions in the conductive movable layer. In certain embodiments, both rivets and posts may be used. In certain embodiments, these support structures are formed from rigid inorganic materials, such as metals or oxides. In certain embodiments, etch barriers may also be deposited to facilitate the use of materials in the formation of support structures which are not selectively etchable with respect to other components within the MEMS device.

Abstract: This disclosure provides systems, methods and apparatus for touch systems. In one aspect, the touch system can include at least one light guide optically coupled to at least one light source and at least one optical detector. The light guide can be configured to transmit light from at least one light source across the surface in at least one direction and to receive at least a portion of the transmitted light reflected in an opposite direction in response to at least one reflecting object on the surface. The touch system also can include a touchscreen transceiver. The touch system can be configured to determine a location of at least one reflecting object on the surface by identifying a position of where the light guide or the touchscreen transceiver receives the reflected light and by determining time-of-flight of the transmitted light and the reflected light.

Abstract: This disclosure provides systems, methods and apparatus for a MEMS device. In one aspect, an electromechanical systems apparatus includes a substrate, a stationary electrode positioned over the substrate, a movable electrode spaced from the stationary electrode by a gap, and at least one support structure extending above the movable electrode. The support structure includes an inorganic dielectric layer and a polymer layer.

Abstract: This disclosure provides systems, methods and apparatus for an imaging system that includes a light guide having light-turning features that are configured to receive ambient light incident on the light guide, including light scattered from a scene to be imaged, and to direct the received ambient light towards an image sensor. The light-turning features may have angle-discriminating properties so that some light-turning features capture light incident upon the light guide at certain angles of incidence, but not others. Light scattered from multiple parts of a scene to be imaged may then be directed to correlated locations on an image sensor, which provides electronic data representing an image.

Abstract: A voltage-controlled capacitor and methods for forming the same are described. A mechanical conductor membrane of the voltage-controlled capacitor is movable to and from a first position and a second position. An amount of capacitance can vary with the movement of the mechanical conductor membrane. A microelectromechanical systems (MEMS) voltage-controlled capacitor can be used in a variety of applications, such as, but not limited to, RF switches and RF attenuators.

Abstract: An interferometric display comprises a backlight with light extraction features formed from a desiccant material within the display. A light source is positioned at one or more edges or corners of the back glass, and the desiccant based features patterned in or on the back glass remove unwanted moisture and create uniform light extraction from the back glass.