Abstract: Embodiments of MEMS devices include support structures having substantially vertical sidewalls. Certain support structures are formed through deposition of self-planarizing materials or via a plating process. Other support structures are formed via a spacer etch. Other MEMS devices include support structures at least partially underlying a movable layer, where the portions of the support structures underlying the movable layer include a convex sidewall. In further embodiments, a portion of the support structure extends through an aperture in the movable layer and over at least a portion of the movable layer.

Abstract: This disclosure provides systems, apparatus and techniques by which electromechanical resonators are implemented. In one aspect, by mechanically loading the resonator body in specific ways, multiple resonance modes are created within the resonator body resulting in wider bandwidths.

Abstract: This disclosure provides mechanical layers and methods of forming the same. In one aspect, a method of forming a pixel includes depositing a black mask on a substrate, depositing an optical stack over the black mask, and forming a mechanical layer over the optical stack. The black mask is disposed along at least a portion of a side of the pixel, and the mechanical layer defines a cavity between the mechanical layer and the optical stack. The mechanical layer includes a reflective layer, a dielectric layer, and a cap layer, and the dielectric layer is disposed between the reflective layer and the cap layer. The method further includes forming a notch in the dielectric layer of the mechanical layer along the side of the pixel so as to reduce the overlap of the dielectric layer with the black mask along the side of the pixel.

Abstract: This disclosure provides systems, methods and apparatus including computer programs encoded on computer storage media for producing line multiplied images with better visual appearance. In one aspect, before lines of the image are multiplied, they are dithered with a noise signal that increases faster with higher frequency along the multiplied dimension of the image data than along the non multiplied dimension of the image. This results in a line multiplied image was improved image quality.

Abstract: A field effect transistor comprises an electrostatically moveable gate electrode. The moveable gate is supported by at least two posts, and the source, drain, and channel of the transistor are centrally located under the moveable layer. At least one electrode is positioned on at least two sides of the source, drain, and channel.

Abstract: Methods and devices to measure voltage margins of electromechanical devices are disclosed. The voltage margins are determined based on responses to test voltages which cause the devices to change states. State changes of the devices are detected by monitoring integrated current or charge used to drive the devices with the test voltages.

Abstract: An array of display elements, such as interferometric modulators, is integrated with collapsible cavity microelectromechanical system (MEMS) electrical switches. The electrical switches and the display elements may be at least partially formed with the same manufacturing operations. The switches may form row or column select functions for the display elements.

Abstract: An Interferometric Modulator (IMod) is a microelectromechanical device for modulating light using interference. The colors of these devices may be determined in a spatial fashion, and their inherent color shift may be compensated for using several optical compensation mechanisms. Brightness, addressing, and driving of IMods may be accomplished in a variety of ways with appropriate packaging, and peripheral electronics which can be attached and/or fabricated using one of many techniques. The devices may be used in both embedded and directly perceived applications, the latter providing multiple viewing modes as well as a multitude of product concepts ranging in size from microscopic to architectural in scope.

Abstract: A microelectromechanical systems device fabricated on a pre-patterned substrate having grooves formed therein. A lower electrode is deposited over the substrate and separated from an orthogonal upper electrode by a cavity. The upper electrode is configured to be movable to modulate light. A semi-reflective layer and a transparent material are formed over the movable upper electrode.

Abstract: This disclosure provides systems, methods and apparatuses for pixel vias. In one aspect, a method of forming an electromechanical device having a plurality of pixels includes depositing an electrically conductive black mask on a substrate at each of four corners and along at least one edge region of each pixel, depositing a dielectric layer over the black mask, depositing an optical stack including a stationary electrode over the dielectric layer, and depositing a mechanical layer over the optical stack. The method further includes providing a conductive via in a first pixel of the plurality of pixels, the via disposed in the dielectric layer and electrically connecting the stationary electrode to the black mask, the via disposed in a position along an edge of the first pixel, spaced offset from the edge of the first pixel in a direction towards the center of the first pixel.

Abstract: Methods and devices to measure voltage margins of electromechanical devices are disclosed. The voltage margins are determined based on responses to test voltages which cause the devices to change states. State changes of the devices are detected by monitoring integrated current or charge used to drive the devices with the test voltages.

Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for preventing the edge subpixels of a display from actuating. Some implementations provide a small conductive via inside edge subpixels of a passively-addressed display, such as a microelectromechanical systems (MEMS)-based display. The vias may be configured to make an electrical connection between a movable conductive layer and another conductive layer of the edge subpixel. Electricity may be provided to the active subpixel array by way of these vias in the edge subpixels. The concepts provided herein apply to other types of passively-addressed displays, such as organic light-emitting diode (“OLED”) displays and field emission displays.

Abstract: This disclosure provides systems, methods and apparatuses for pixel vias. In one aspect, a method of forming an electromechanical device having a plurality of pixels includes depositing an electrically conductive black mask on a substrate at each of four corners of each pixel, depositing a dielectric layer over the black mask, depositing an optical stack including a stationary electrode over the dielectric layer, depositing a mechanical layer over the optical stack, and anchoring the mechanical layer over the optical stack at each corner of each pixel. The method further includes providing a conductive via in a first pixel of the plurality of pixels, the via in the dielectric layer electrically connecting the stationary electrode to the black mask, the via disposed at a corner of the first pixel, offset from where the mechanical layer is anchored over the optical stack in an optically non-active area of the first pixel.

Abstract: In one embodiment, the invention provides a method for fabricating a microelectromechanical systems device. The method comprises fabricating a first layer comprising a film having a characteristic electromechanical response, and a characteristic optical response, wherein the characteristic optical response is desirable and the characteristic electromechanical response is undesirable; and modifying the characteristic electromechanical response of the first layer by at least reducing charge build up thereon during activation of the microelectromechanical systems device.

Abstract: This disclosure provides systems, methods and apparatus for fabricating thin film transistor devices. In one aspect, a substrate having a source region, a drain region, and a channel region between the source region and the drain region is provided. The substrate also includes an oxide semiconductor layer, a first dielectric layer overlying the channel region, and a first metal layer on the dielectric layer. A second metal layer is formed on the oxide semiconductor layer overlying the source region and the drain region. The oxide semiconductor layer and the second metal layer are treated to form a heavily doped n-type oxide semiconductor in the oxide semiconductor layer overlying the source region and the drain region. An oxide in the second metal layer also can be formed.

Abstract: This disclosure provides systems, methods and apparatus for forming spacers on a substrate and building an electromechanical device over the spacers and the substrate. In one aspect, a raised anchor area is formed over the spacer by adding layers that result in a high point above the substrate. The high point can protect the movable sections of the MEMS device from contact with a backplate.

Abstract: Various methods are described to characterize interferometric modulators or similar devices. Measured voltages across interferometric modulators may be used to characterize transition voltages of the interferometric modulators. Measured currents may be analyzed by integration of measured current to provide an indication of a dynamic response of the interferometric modulator. Frequency analysis may be used to provide an indication of a hysteresis window of the interferometric modulator or mechanical properties of the interferometric modulator. Capacitance may be determined through signal correlation, and spread-spectrum analysis may be used to minimize the effect of noise or interference on measurements of various interferometric modulator parameters.

Abstract: This disclosure provides systems, methods and for providing a desiccant in a MEMS package. A MEMS device may be packaged with a desiccant to provide a moisture-free environment. In order to avoid undesirable effects on the MEMS device, the desiccant may be selected or treated so as to be compatible with a particular MEMS device, for instance, a very thin profile may be desired. A method for covalently bonding zeolite crystals with a substrate is provided such that a layer of zeolite crystals is covalently attached to a substrate surface of the MEMS device package. This bonding includes a change in the chemical structure of the zeolite such that is chemically adhered to the substrate.

Abstract: This disclosure provides systems, methods and apparatus for providing illumination by using a light guide to distribute light and for determining spacing between light turning features in the light guide. In one aspect, a light intensity profile along a first axis is determined and the pitch of light turning features along that first axis is varied based upon this profile, while the pitch along a second crossing axis (for example, an orthogonal axis) and the sizes of the light turning features remain unchanged. In some implementations, an apparatus includes a light guide having an array of light turning features configured to turn light from at least one light emitter. The light turning features can be non-uniformly spaced apart along a first axis such that pitches vary non-monotonically and, along a second axis that crosses the first axis, the light turning features are spaced apart with substantially the same progression.

Abstract: Systems, methods and apparatus including computer programs encoded on computer storage media optimize display image quality under a variety of imaging environments. Dynamic frame streams such as those present in video applications may require a higher frame rate to adequately convey motion in the stream. A line multiplying image pipeline may be utilized for dynamic frames, which lowers the resolution of the displayed image. When dithering line multiplied images, a noise signal including asymmetrical high frequency components around zero frequency may be utilized. The display of static frames, such as photographs, may be achieved with acceptable image quality using a relatively lower display frame rate. Such a frame rate may enable the display of a high resolution image. A noise signal tailored for higher resolution, non line multiplied frames, such as a noise signal with symmetric high frequency components around zero frequency may be utilized for static frames.