Patents Assigned to Reflectivity, Inc
  • Patent number: 7215459
    Abstract: Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.
    Type: Grant
    Filed: February 11, 2005
    Date of Patent: May 8, 2007
    Assignee: Reflectivity, Inc.
    Inventors: Andrew Huibers, Satyadev Patel, Jonathan Doan, James Dunphy, Dmitri Simonian, Hongqin Shi, Jianglong Zhang
  • Patent number: 7172296
    Abstract: In order to minimize light diffraction along the direction of switching and more particularly light diffraction into the acceptance cone of the collection optics, in the present invention, micromirrors are provided which are not rectangular. Also, in order to minimize the cost of the illumination optics and the size of the display unit of the present invention, the light source is placed orthogonal to the rows (or columns) of the array, and/or the light source is placed orthogonal to a side of the frame defining the active area of the array. The incident light beam, though orthogonal to the sides of the active area, is not however, orthogonal to any substantial portion of sides of the individual micromirrors in the array. Orthogonal sides cause incident light to diffract along the direction of micromirror switching, and result in light ‘leakage’ into the ‘on’ state even if the micromirror is in the ‘off’ state. This light diffraction decreases the contrast ratio of the micromirror.
    Type: Grant
    Filed: May 28, 2004
    Date of Patent: February 6, 2007
    Assignee: Reflectivity, Inc
    Inventor: Andrew G. Huibers
  • Patent number: 7167297
    Abstract: In order to minimize light diffraction along the direction of switching and more particularly light diffraction into the acceptance cone of the collection optics, in the present invention, micromirrors are provided which are not rectangular. Also, in order to minimize the cost of the illumination optics and the size of the display unit of the present invention, the light source is placed orthogonal to the rows (or columns) of the array, and/or the light source is placed orthogonal to a side of the frame defining the active area of the array. The incident light beam, though orthogonal to the sides of the active area, is not however, orthogonal to any substantial portion of sides of the individual micromirrors in the array. Orthogonal sides cause incident light to diffract along the direction of micromirror switching, and result in light ‘leakage’ into the ‘on’ state even if the micromirror is in the ‘off’ state. This light diffraction decreases the contrast ratio of the micromirror.
    Type: Grant
    Filed: May 28, 2004
    Date of Patent: January 23, 2007
    Assignee: Reflectivity, Inc
    Inventor: Andrew G. Huibers
  • Patent number: 7138693
    Abstract: A method for processing microelectromechanical devices is disclosed herein. The method prevents the diffusion and interaction between sacrificial layers and structure layers of the microelectromechanical devices by providing selected barrier layers between consecutive sacrificial and structure layers.
    Type: Grant
    Filed: October 19, 2004
    Date of Patent: November 21, 2006
    Assignee: Reflectivity, Inc.
    Inventors: Satyadev Patel, Jonathan Doan, Andrew Huibers
  • Patent number: 7119944
    Abstract: Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.
    Type: Grant
    Filed: February 11, 2005
    Date of Patent: October 10, 2006
    Assignee: Reflectivity, Inc.
    Inventors: Satyadev Patel, Andrew Huibers, Jonathan Doan, James Dunphy, Dmitri Simonian, Hongqin Shi, Jianglong Zhang
  • Patent number: 7113322
    Abstract: The micromirror device of the present invention comprises a reflective deflectable mirror plate and an addressing electrode provided for deflecting the mirror plate, wherein the addressing electrode is displaced along a direction perpendicular to the length of the hinge such that a portion of the addressing electrode is extended beyond the mirror plate.
    Type: Grant
    Filed: September 21, 2004
    Date of Patent: September 26, 2006
    Assignee: Reflectivity, INC
    Inventor: Satyadev Patel
  • Patent number: 7110160
    Abstract: Disclosed herein a microelectromechanical device having first and second substrates that are bonded together with a gap formed therebetween. A plurality of functional members is disposed within the gap. The two substrates are bonded with a bonding agent that comprises an electrically conductive adhesive material.
    Type: Grant
    Filed: April 8, 2005
    Date of Patent: September 19, 2006
    Assignee: Reflectivity, INC
    Inventors: Satyadev Patel, Peter Richards, Jonathan Doan, Terry Tarn
  • Patent number: 7099065
    Abstract: A spatial light modulator is disclosed, along with methods for making such a modulator that comprises an array of mirror devices each having at least a first electrode and a second electrode. The first electrode is designated for driving the mirror plate of the micromirror device to an ON state, and the second electrode is designated for driving the mirror plate to an OFF state. The two electrodes can be disposed on the same side of the mirror plate but on opposite sides of the rotation axis of the mirror plate for driving the mirror plate to rotate in opposite directions. Alternatively, the two electrodes can be disposed on the opposite sides of the mirror plate, but on the same side of the rotation axis of the mirror plate for driving the mirror plate to rotate in opposite directions. The ON state and OFF state of the mirror plate can be defined by stops.
    Type: Grant
    Filed: May 13, 2003
    Date of Patent: August 29, 2006
    Assignee: Reflectivity, Inc.
    Inventors: Satyadev Patel, Andrew G. Huibers, Christopher J. Spindt, Peter J. Heureux
  • Patent number: 7085035
    Abstract: Disclosed herein is a micromirror-based display system having an improved contrast ratio with the deflection of the micromirrors accomplished through one addressing electrode associate with the micromirror.
    Type: Grant
    Filed: October 19, 2004
    Date of Patent: August 1, 2006
    Assignee: Reflectivity, INC
    Inventors: Andrew Huibers, Satyadev Patel, Peter Heureux, Robert Duboc, Regis Grasser
  • Patent number: 7075702
    Abstract: A micromirror of a micromirror array of a spatial light modulator used in display systems comprises a mirror plate attached to a hinge that is supported by two posts formed on a substrate. Also the mirror plate is operable to rotate along a rotation axis that is parallel to but offset from a diagonal of the mirror plate when viewed from the top. An imaginary line connecting the two posts is not parallel to either diagonal of the mirror plate.
    Type: Grant
    Filed: August 30, 2005
    Date of Patent: July 11, 2006
    Assignee: Reflectivity, INC
    Inventors: Andrew Huibers, Satyadev Patel
  • Patent number: 7071520
    Abstract: MEMS devices are provided that are capable of movement due to a flexible portion formed of unique materials for this purpose. The MEMS device can have a flexible portion formed of a nitride or oxynitride of at least one transition metal, and formed of a nitride or oxynitride of at least one metalloid or near metalloid; a flexible portion formed of a single transition metal nitride or oxynitride and in the absence of any other metal or metalloid nitrides; a flexible portion formed of one or more late transition metal nitrides or oxynitrides; a flexible portion formed of a single transition metal in nitride form, and an additional metal substantially in elemental form; or a flexible portion formed of at least one metalloid nitride or oxynitride. The MEMS devices can be any device, though preferably one with a flexible portion such as an accelerometer, DC relay or RF switch, optical cross connect or optical switch, or micromirror arrays for direct view and projection displays. The flexible portion (e.g.
    Type: Grant
    Filed: June 21, 2002
    Date of Patent: July 4, 2006
    Assignee: Reflectivity, INC
    Inventor: Jason S. Reid
  • Patent number: 7057674
    Abstract: A color wheel is disclosed that has at least one segment that occupies, for a given radius, a percentage of the circumference of the wheel at that radius, which percentage varies continuously or in multiple steps from a radially inward point to a radially outer point on the wheel. In one embodiment, the color wheel has a plurality of filter segments adjacent each other around the circumference of the wheel, wherein at least one of the transitions from one filter segment to the next is curved or stepped. A color wheel also is disclosed that has a plurality of filter segments adjacent each other around the circumference of the wheel, wherein at least one of the segments is a higher brightness segment than the others and has sides facing adjacent filter segments that do not lie on the radius of the wheel. A projection system is also disclosed that has a light source, a unique color wheel, a spatial light modulator, and projection optics.
    Type: Grant
    Filed: January 11, 2002
    Date of Patent: June 6, 2006
    Assignee: Reflectivity, INC
    Inventors: Peter W. Richards, Andrew G. Huibers, Gregory R. Muir
  • Patent number: 7057251
    Abstract: Micromechanical devices are provided that are capable of movement due to a flexible portion. The micromechanical device can have a flexible portion formed of an oxide of preferably an element from groups 3A to 6A of the periodic table (preferably from the first two rows of these groups) and a late transition metal (preferably from groups 8B or 1B of the periodic table). The micromechanical devices can be any device, particularly MEMS sensors or actuators preferably having a flexible portion such as an accelerometer, DC relay or RF switch, optical cross connect or optical switch, or a micromirror part of an array for direct view and projection displays. The flexible portion is preferably formed by sputtering a target having a group 8B or 1B element and a selected group 3A to 6A element, namely B, Al, In, Si, Ge, Sn, or Pb. The target can have other major constituents or impurities (e.g. additional group 3A to 6A element(s)).
    Type: Grant
    Filed: July 17, 2002
    Date of Patent: June 6, 2006
    Assignee: Reflectivity, INC
    Inventor: Jason S. Reid
  • Patent number: 7055961
    Abstract: A projection system is disclosed comprising a light source, a first reflector proximate the light source, a second reflector proximate the light source, a light pipe, a color sequencing device a spatial light modulator and a target. The color sequencing device preferably directs three or more colors onto the spatial light modulator at a time. Some light is reflected from the color sequencing device back through the light pipe and is again reflected at the reflector at the light source before returning to the light pipe and color sequencing device. The brightness of the projection system is thereby increased.
    Type: Grant
    Filed: June 28, 2005
    Date of Patent: June 6, 2006
    Assignee: Reflectivity, INC
    Inventor: Andrew G. Huibers
  • Patent number: 7057246
    Abstract: Micromechanical devices are provided that are capable of movement due to a flexible portion. The micromechanical device can have a flexible portion formed of a nitride of preferably an element from groups 3A to 6A of the periodic table (preferably from the first two rows of these groups) and a late transition metal (preferably from groups 8B or 1B of the periodic table). The micromechanical devices can be any device, particularly MEMS sensors or actuators preferably having a flexible portion such as an accelerometer, DC relay or RF switch, optical cross connect or optical switch, or a micromirror part of an array for direct view and projection displays. The flexible portion is preferably formed by sputtering a target having a group 8B or 1B element and a group 3A to 6A element. The target can have other major constituents or impurities (e.g. additional group 3A to 6A element(s)). The target is reactively sputtered in a nitrogen ambient so as to result in a sputtered hinge.
    Type: Grant
    Filed: July 20, 2001
    Date of Patent: June 6, 2006
    Assignee: Reflectivity, INC
    Inventor: Jason S. Reid
  • Patent number: 7042623
    Abstract: Disclosed herein is a micromirror array device package having a light absorbing material disposed within the package for reducing undesired light scattering. The light absorbing material can be deposited as a thin film (or strip, frame, segments or a combination thereof), or as a vertical wall insert between the micromirror array device and a cover substrate of the package.
    Type: Grant
    Filed: October 19, 2004
    Date of Patent: May 9, 2006
    Assignee: Reflectivity, INC
    Inventors: Andrew Huibers, Satyadev Patel, Terry Tarn
  • Patent number: 7042622
    Abstract: A micromirror of a micromirror array of a spatial light modulator used in display systems comprises a mirror plate attached to a hinge that is supported by two posts formed on a substrate. Also the mirror plate is operable to rotate along a rotation axis that is parallel to but offset from a diagonal of the mirror plate when viewed from the top. An imaginary line connecting the two posts is not parallel to either diagonal of the mirror plate.
    Type: Grant
    Filed: October 30, 2003
    Date of Patent: May 9, 2006
    Assignee: Reflectivity, INC
    Inventors: Andrew Huibers, Satyadev Patel
  • Patent number: 7041224
    Abstract: The etching of a material in a vapor phase etchant is disclosed where a vapor phase etchant is provided to an etching chamber at a total gas pressure of 10 Torr or more, preferably 20 Torr or even 200 Torr or more. The vapor phase etchant can be gaseous acid etchant, a noble gas halide or an interhalogen. The sample/workpiece that is etched can be, for example, a semiconductor device or MEMS device, etc. The material that is etched/removed by the vapor phase etchant is preferably silicon and the vapor phase etchant is preferably provided along with one or more diluents. Another feature of the etching system includes the ability to accurately determine the end point of the etch step, such as by creating an impedance at the exit of the etching chamber (or downstream thereof) so that when the vapor phase etchant passes from the etching chamber, a gaseous product of the etching reaction is monitored, and the end point of the removal process can be determined.
    Type: Grant
    Filed: March 22, 2002
    Date of Patent: May 9, 2006
    Assignee: Reflectivity, Inc.
    Inventors: Satyadev R. Patel, Gregory P. Schaadt, Douglas B. MacDonald, Hongqin Shi, Andrew G. Huibers, Peter Heureux
  • Patent number: 7034982
    Abstract: A plastically deformable element of a microelectromechanical device is strained so as to improve the lifetime of the microelectromechanical device. The element of the device can be strained by deforming the element into a deformed state and holding the element at the deformed state for a particular time period so as to acquire an amount of plastic deformation. The operation states of the device are calibrated according to the states before straining and the acquired plastic deformation. After then, the device is operated in the calibrated states.
    Type: Grant
    Filed: April 13, 2004
    Date of Patent: April 25, 2006
    Assignee: Reflectivity, Inc
    Inventor: Jonathan Doan
  • Patent number: 7034985
    Abstract: Disclosed herein is a micromirror package having a micromirror being attached to a supporting surface of a package substrate, and sealed between the package substrate and a package cover, whereas the micromirror array is placed offset the center of the supporting surface.
    Type: Grant
    Filed: October 19, 2004
    Date of Patent: April 25, 2006
    Assignee: Reflectivity, Inc.
    Inventors: Andrew Huibers, Regis Grasser