Abstract: A spatial light modulator comprising a memory cell array for use in display systems and a method of operating the memory cell array have been disclosed herein. The memory cell array comprises one or more rows of memory cells. Each row of memory cells is provided with a plurality of wordlines so that the memory cells in a row can be activated separately and independently. Memory cells connected to different wordlines in the same row, and the memory cells connected to different wordlines in different rows can be activated synchronized or asynchonized as desired. With is configuration, perceived artifacts, such as perceived dynamic-false-contouring artifacts, can be suppressed, if not eliminated. A row of reference memory cells can be formed within the memory cell array. The reference memory cells can maintain a predefined reference voltage state that is different from the voltage states maintained by the other memory cells of the memory cell array.

Abstract: A method and an improved multilayer hinge structure for use in a micromirror device for a spatial light modulator are provided herein. The micromirror device presents a conductive, composite torsion hinge with improved mechanical reliability, achieved by optimizing the geometry of the hinge, which minimizes the amount of residual twist, fixed torsional stiffness and fixed rate of plastic deformation in the mechanically undesirable hinge element. A method and its alternatives are disclosed herein by the present invention for manufacturing such multilayer hinge structure.

Abstract: An etching method, such as for forming a micromechanical device, is disclosed. One embodiment of the method is for releasing a micromechanical structure, comprising, providing a substrate; providing a sacrificial layer directly or indirectly on the substrate; providing one or more micromechanical structural layers on the sacrificial layer; performing a first etch to remove a portion of the sacrificial layer, the first etch comprising providing an etchant gas and energizing the etchant gas so as to allow the etchant gas to physically, or chemically and physically, remove the portion of the sacrificial layer; performing a second etch to remove additional sacrificial material in the sacrificial layer, the second etch comprising providing a gas that chemically but not physically etches the additional sacrificial material.

Abstract: A spatial light modulator includes an upper optically transmissive substrate held above a lower substrate containing addressing circuitry. One or more electrostatically deflectable elements are suspended by hinges from the upper substrate. In operation, individual mirrors are selectively deflected and serve to spatially modulate light that is incident to, and the reflected back through, the upper substrate. Motion stops may be attached to the reflective deflectable elements so that the mirror does not snap to the bottom substrate. Instead, the motion stop rests against the upper substrate thus limiting the deflection angle of the reflective deflectable elements.

Abstract: Methods and apparatus for producing a pulse-width-modulated (PWM) grayscale or color image using a binary spatial light modulator. By staggering and re-quantizing the PWM intervals to a clock of a period based on the frame time divided by number of rows in the display, the system's peak bandwidth requirements are optimized for displays of arbitrary resolution and arbitrary choice of PWM waveform. Additionally, a gating circuit increases the optical efficiency of a spatial light modulator using this PWM method in a field-sequential color system by reducing the duration of the blanking period between color fields.

Abstract: A spatial light modulator having a micromirror and one or more deflection limiting mechanisms, and a process for fabrication therefor. In one embodiment, the mirror support structure has a deflection stopping mechanism that limits the tilt angle of the reflective plate. Alternatively, a deflection stopping mechanism can be provided separate from the mirror support structure. The deflection stopping mechanism can be used in conjunction with one or more additional stopping mechanisms such as the abutment of a portion of the reflective plate against the substrate upon which it was constructed and/or abutment of the micromirror on a surface or structure of the circuit substrate.

Abstract: A projection system is disclosed that has a light source of multiple wavelengths, a spatial light modulator and projection optics for projecting an image to be viewed by a viewer or to be displayed on a target. Also provided are one or more color sequencing devices which filter the light multiple times. Whether a single or plural color sequencing elements are provided, a single light beam passes at least twice through a sequence of light filters. In one embodiment, two color wheels provide the ability to filter the light multiple times. By changing the physical position or phase of one series of filters relative to another, the brightness and color saturation of the image projected through the projection optics can be changed. The changes in brightness and color saturation can be performed manually by mechanically changing the phase (or position) of the color sequencing device(s) relative to the light beam. Such changes can be performed step-wise of gradually through a continuum of brightness vs.

Abstract: A spatial light modulator includes an upper optically transmissive substrate held above a lower substrate containing addressing circuitry. One or more electrostatically deflectable elements are suspended by hinges from the upper substrate. In operation, individual mirrors are selectively deflected and serve to spatially modulate light that is incident to, and then reflected back through, the upper substrate. Motion stops may be attached to the reflective deflectable elements so that the mirror does not snap to the bottom substrate. Instead, the motion stop rests against the upper substrate thus limiting the deflection angle of the reflective deflectable elements.

Abstract: The present invention provides methods for the immobilization of molecules to a surface using a hydrogel. In particular, the invention relates to the formation and use of a hydrogel in a microscale environment, such as that used for the screening of molecules with microfabricated mechanical resonant sensors. In a preferred embodiment, the molecule is coupled to polyethylene glycol, or a block co-polymer and/or derivative thereof, and immobilized to a planar oxide surface that has been silanized. The immobilized molecule can then be used in a microscale screening or binding assay in an optimal hydrogel environment.

Abstract: A spatial light modulator includes an upper optically transmissive substrate held above a lower substrate containing addressing circuitry. One or more electrostatically deflectable elements are suspended by hinges from the upper substrate. In operation, individual mirrors are selectively deflected and serve to spatially modulate light that is incident to, and then reflected back through, the upper substrate. Motion stops may be attached to the reflective deflectable elements so that the mirror does not snap to the bottom substrate. Instead, the motion stop rests against the upper substrate thus limiting the deflection angle of the reflective deflectable elements.

Abstract: A spatial light modulator having a substrate holding an array of deflectable (e.g. mirror) elements. The deflectable elements are deflectably coupled to the substrate via corresponding hinges, each hinge being disposed on a side of the deflectable element opposite to the side on which the substrate is disposed. By placing the hinge in this way the fill factor of the array is improved. The hinge can be provided flush against the deflectable element, or it can be provided with a gap between the deflectable element and the hinge. The hinge can be attached via one or more posts or walls connecting to the substrate, and with a flexible or deformable portion that is substantially or entirely hidden from view when viewed through the substrate (e.g. a glass substrate). In one embodiment, the hinge is connected to the undersides of both the substrate and the deflectable element, and connects towards a center part of the deflectable element.

Abstract: In order to minimize light diffraction along the direction of switching and more particularly light diffraction into the acceptance cone of the projection optics, in the present invention, mirrors are provided which are not rectangular. Also, in order to minimize the cost of the illumination optics and the size of the display unit of the present invention, the light source is placed orthogonal to the rows (or columns) of the array, and/or the light source is placed orthogonal to a side of the frame defining the active area of the array. The incident light beam, though orthogonal to the sides of the active area, are not however, orthogonal to any substantial portion of sides of the individual mirrors in the array. Orthogonal sides cause incident light to diffract along the direction of mirror switching, and result in light ‘leakage’ into the on-state even if the mirror is in the off-state. This light diffraction decreases the contrast ratio of the mirror.

Abstract: A spatial light modulator having one or more deflection limiting mechanisms and process for fabrication therefor. In one embodiment, the mirror support structure has rigid deflection stoppers that limit the tilt angle of the reflective plate. The mirror support structure may also include an attraction electrode that is attached to the back-side of the reflective plate such that the reflective plate may be selectively actuated by electrostatic force. Alternatively, a deflection stopping mechanism can be provided separate from the mirror support structure. The deflection stopping mechanism can be used in conjunction with one or more additional stopping mechanisms such as the abutment of a portion of the reflective plate against the substrate upon which it was constructed.

Abstract: Methods and apparatus for producing a pulse-width-modulated (PWM) grayscale or color image using a binary spatial light modulator. By staggering and re-quantizing the PWM intervals to a clock of a period based on the frame time divided by number of rows in the display, the system's peak bandwidth requirements are optimized for displays of arbitrary resolution and arbitrary choice of PWM waveform. Additionally, a gating circuit increases the optical efficiency of a spatial light modulator using this PWM method in a field-sequential color system by reducing the duration of the blanking period between color fields.

Abstract: A spatial light modulator includes an upper optically transmissive substrate held above a lower substrate containing addressing circuitry. One or more electrostatically deflectable elements are suspended by hinges from the upper substrate. In operation, individual mirrors are selectively deflected and serve to spatially modulate light that is incident to, and then reflected back through, the upper substrate. Motion stops may be attached to the reflective deflectable elements so that the mirror does not snap to the bottom substrate. Instead, the motion stop rests against the upper substrate thus limiting the deflection angle of the reflective deflectable elements.

Abstract: A light beam steering device includes a mirror plate that is mechanically coupled directly (or indirectly) to an optically transmissive substrate by flexures that permit the mirror plate to tilt around a plurality of axes when electrodes are controlled to cause the mirror plate tilting. The optically transmissive substrate is spaced apart from a device substrate so that the mirror plate is between the optically transmissive and device substrates. Electrically conductive electrodes are formed on the device substrate opposite the mirror plate. The direction towards a target of the reflected portion of a light beam that is incident on the mirror plate can be monitored and adjusted using a photodetector array. A plurality of optical (e.g. fiber optic) inputs can direct light to an array of such light beam steering devices, which in turn target a plurality of optical (e.g. fiber optic) outputs.

Abstract: The etching of a sacrificial silicon portion in a microstructure such as a microelectromechanical structure by the use of etchant gases that are noble gas fluorides or halogen fluorides is performed with greater selectivity toward the silicon portion relative to other portions of the microstructure by the addition of non-etchant gaseous additives to the etchant gas. An additional discovery is that non-etchant gaseous additives that have a molar averaged formula weight that is below that of molecular nitrogen offer significant advantages over gaseous additives of higher formula weights by causing completion of the etch in a shorter period of time while still achieving the same improvement in selectivity.

Abstract: A spatial light modulator includes an upper optically transmissive substrate held above a lower substrate containing addressing circuitry. One or more electrostatically deflectable elements are suspended by hinges from the upper substrate. In operation, individual mirrors are selectively deflected and serve to spatially modulate light that is incident to, and then reflected back through, the upper substrate. Motion stops may be attached to the reflective deflectable elements so that the mirror does not snap to the bottom substrate. Instead, the motion stop rests against the upper substrate thus limiting the deflection angle of the reflective deflectable elements.

Abstract: A spatial light modulator includes an upper optically transmissive substrate held above a lower substrate containing addressing circuitry. One or more electrostatically deflectable elements are suspended by hinges from the upper substrate. In operation, individual mirrors are selectively deflected and serve to spatially modulate light that is incident to, and then reflected back through, the upper substrate. Motion stops may be attached to the reflective deflectable elements so that the mirror does not snap to the bottom substrate. Instead, the motion stop rests against the upper substrate thus limiting the deflection angle of the reflective deflectable elements.

Abstract: A spatial light modulator, comprised of an upper and a lower substrate. One or more electrostatically deflectable mirrors are suspended by torsion hinges from an optically transmissive upper substrate. The upper substrate is held above the lower substrate containing electronic circuitry. In operation, individual mirrors are selectively deflected and serve to spatially modulate light that is incident to, and then reflected back through, the upper substrate. An aperture layer is built into the upper substrate to enable light to reach only the flat mirror surfaces.