Abstract: A method and apparatus for providing substantially pure hydrogen gas from a mixture of hydrogen and gaseous contaminants includes passing a gaseous mixture containing hydrogen gas and gaseous impurities through a purifier to form substantially pure hydrogen gas which is stored in a porous storage material including a getter material. The substantially pure hydrogen gas can be released from the porous storage matrix as desired. Preferably the purifier and porous storage matrix are separated by a thermally insulating matrix. The apparatuses can be combined in a serial configuration to provide a stream of substantially pure hydrogen gas at a substantially constant pressure.

Abstract: A wafer processing system including a processing chamber, a low pressure pump coupled to the processing chamber for pumping noble and non-noble gases, a valve mechanism coupling a source of noble gas to the processing chamber, an in situ getter pump disposed within the processing chamber which pumps certain non-noble gases during the flow of the noble gas into the chamber, and a processing mechanism for processing a wafer disposed within the processing chamber. Preferably, the in situ getter pump can be operated at a number of different temperatures to preferentially pump different species of gas at those temperatures. A gas analyzer is used to automatically control the temperature of the getter pump to control the species of gasses that are pumped from the chamber.

Abstract: A combination cryopump/getter pump including a cryopump section having a cryopump inlet, a getter pump section having a getter pump inlet, and a mechanism for coupling the cryopump section and the getter pump section to a single port of a process chamber to be evacuated. Preferably, a cylindrical cryopump section surrounds a cylindrical getter pump section. Preferably, the cryopump section and the getter pump section are coupled to the common port of the process chamber by a gate valve mechanism. In one embodiment of the present invention, the gate valve mechanism isolates the cryopump inlet and the getter pump inlet when in a closed position, and in another embodiment of the present invention the gate valve does not isolate the cryopump inlet from the getter pump inlet when in a closed position. Preferably, thermal insulation is provided between the getter pump section and the cryopump section to thermally isolate the two sections. The cryopump section preferably includes both a 15.degree. K array and a 80.

Abstract: A wafer processing system including a processing chamber, a low pressure pump coupled to the processing chamber for pumping noble and non-noble gases, a valve mechanism coupling a source of noble gas to the processing chamber, an in situ getter pump disposed within the processing chamber which pumps certain non-noble gases during the flow of the noble gas into the chamber, and a processing mechanism for processing a wafer disposed within the processing chamber. Preferably, the in situ getter pump can be operated at a number of different temperatures to preferentially pump different species of gas at those temperatures. A gas analyzer is used to automatically control the temperature of the getter pump to control the species of gasses that are pumped from the chamber.

Abstract: A method for predicting end-of-life of a system consumable in a fluid purification system characterized by the steps of (a) coupling a model consumable to the fluid purification system which has comparable characteristics but substantially less time capacity than the system consumable; (b) diverting a portion of an unpurified fluid which could otherwise flow into the system consumable into the model consumable; and (c) analyzing the model consumable to predict the end-of-life of the system consumable. Preferably, the time capacity of the model consumable to remove impurities from the fluid is a small fraction, e.g. 25%-50%, of the capacity of the system consumable.

Abstract: The invention relates generally to a gas purification system for the purification of noble gasses and nitrogen. An improved method of purification generally includes the following steps: (a) heating an impure gas; (b) contacting the impure gas with an impurity sorbing material to produce a purified gas; (c) cooling the purified gas to a temperature less than about 100.degree. C.; and (d) contacting the purified gas with a hydrogen sorbing gas to remove residual hydrogen. The system includes an improved heat exchange apparatus for cooling the purified gas and a low temperature hydrogen sorption apparatus.

Abstract: A cryogenic valve that uses conventional materials in unusual ways to achieve very low heat leak, excellent strength, pressure or vacuum integrity and modest manufacturing cost. Heat leak rates on the order of 0.5 watt have been obtained in a 1.5 inch valve. Such performance is made possible by the unique structure of the valve stem, of the bonnet extension, and of certain insulative spacers. The valve stem consists of a thin wall tube of wound glass filaments in an epoxy matrix. The bonnet extension consists of a thin wall stainless steel bellows wound with glass fibers in an epoxy matrix. The insulative spacers have a shape that results in a long tortuous conduction path when they are stacked inside the valve stem and in the space between the valve stem and the bonnet extension.

Abstract: A blender designed on aerodynamic principles produces a thorough mixing of a number of solute gases with a diluent gas, so that the output of the blender is homogeneous to a high degree. The solute gases are supplied at desired rates by a flow controller upstream of the blender, and the blender is designed to mix these solute gases without altering the desired composition. This is accomplished by discharging the solute gases into a region devoid of turbulence, namely, near the entrance of a compression chamber. As the discharged gases approach the constriction of the venturi, a violent turbulence takes place, thereby thoroughly mixing and blending the gases. After passing through the constriction of the venturi, the gases enter a second expansion chamber which slows the flow to permit further blending to occur by molecular diffusion.

Abstract: The invention relates generally to a gas purification system for the purification of noble gasses and nitrogen. An improved method of purification generally includes the following steps: (a) heating an impure gas; (b) contacting the impure gas with an impurity sorbing material to produce a purified gas; (c) cooling the purified gas to a temperature less than about 100.degree. C.; and (d) contacting the purified gas with a hydrogen sorbing gas to remove residual hydrogen. The system includes an improved heat exchange apparatus for cooling the purified gas and a low temperature hydrogen sorption apparatus.