Abstract: A substrate processing apparatus includes a chamber providing a space in which a substrate is processed, a first substrate support within the chamber and configured to support the substrate when the substrate is loaded into chamber, a second substrate support within the chamber and configured to support the substrate in a height greater than the height in which the first substrate supports the substrate, a first supply port through which a supercritical fluid is supplied to a first space under the substrate of a chamber space, a second supply port through which the supercritical fluid is supplied to a second space above the substrate of the chamber space, and an exhaust port through which the supercritical fluid is exhausted from the chamber.

Abstract: A light emitting device is provided. The light emitting device includes a first semiconductor layer; a second semiconductor layer provided on a bottom surface of the first semiconductor layer; an active layer interposed between the first semiconductor layer and the second semiconductor layer; a dielectric layer provided on a bottom surface of the second semiconductor layer; a plurality of first n-contacts provided on a first etched surface of the first semiconductor layer; and a plurality of first p-contacts and a plurality of second p-contacts provided on the bottom surface of the second semiconductor layer. One first n-contact is disposed along a first edge region of the first semiconductor layer, one first p-contact is closer to the one first n-contact than one second p-contact, and an area of the one first p-contact is greater than an area of each of the second p-contacts.

Abstract: An electronic device is disclosed. The electronic device of the present disclosure comprises a communication unit, and a processor for: when receiving measurement information including color coordinate values of a display through the communication unit, calculating an average adjustment value for color coordinate values of a first region among multiple regions constituting the display by using the received measurement information; if color coordinate values at a boundary between the first region and a second region adjacent to the first region are continuous, adjusting, for each pixel, an adjustment value so that an adjustment amount of color coordinate values of the first region decreases as the adjustment amount gets closer to the boundary with reference to the average adjustment value; and if color coordinate values at the boundary between the first region and the second region are discontinuous, maintaining the adjustment amount at the average adjustment value.

Abstract: A method of manufacturing a semiconductor device includes disposing a gas-storage cylinder storing monochlorosilane within a gas supply unit. The monochlorosilane is supplied from the gas-storage cylinder into a process chamber to form a silicon containing layer therein. The gas-storage cylinder includes manganese.

Abstract: A measurement device includes an emitter configured to emit an electromagnetic signal to an object to be measured. A first detector is disposed to measure a first portion of the electromagnetic signal that is reflected by the object to be measured. A second detector is disposed to measure a second portion of the electromagnetic signal that is transmitted through the object to be measured. The emitter is configured to emit the electromagnetic signal in a direction substantially perpendicular to a surface of the object to be measured.

Abstract: An etch stop layer is formed on a lower wiring. An interlayer insulating film covers the lower wiring and the etch stop layer. A via exposes an upper surface of the etch stop layer, in the interlayer insulating film. A first filler is formed in the via. The first filler is etched to a first filler pattern. A second filler is formed on the first filler pattern and is etched to a second filler pattern. A trench is formed by etching the interlayer insulating film. The first and second filler patterns are etched during the forming of the trench to form a residual filler pattern. The residual filler pattern and the etch stop layer are removed and a wiring structure is formed electrically connected to the lower wiring. The via includes lower and upper portions and the trench includes the upper portion of the via.

Abstract: A method of fabricating a semiconductor memory device includes etching a substrate that forms a trench that crosses active regions of the substrate, forming a gate insulating layer on bottom and side surfaces of the trench, forming a first gate electrode on the gate insulating layer that fills a lower portion of the trench, oxidizing a top surface of the first gate electrode where a preliminary barrier layer is formed, nitrifying the preliminary barrier layer where a barrier layer is formed, and forming a second gate electrode on the barrier layer that fills an upper portion of the trench.

Abstract: A semiconductor light emitting device package includes a lead frame structure including a first lead frame and a second lead frame. A resin portion is adjacent to side surfaces of the first lead frame and the second lead frame. A semiconductor light-emitting device is mounted on the first lead frame and the second lead frame, in the form of a flip chip, by eutectic bonding. Each of the first lead frame and the second lead frame has a plurality of first grooves extended in a first direction.

Abstract: A method for of playing an animation image, the method including: obtaining a plurality of images; displaying a first image of the plurality of images; detecting a first event as a trigger to play the animation image for a first object of the first image; and playing the animation image for the first object using the plurality of images.

Abstract: An antenna module includes a connection member including at least one wiring layer and at least one insulating layer, an antenna package including a plurality of antenna members transmitting or receiving a radio frequency (RF) signal and a plurality of feed vias respectively electrically connected to the plurality of antenna members at one end and respectively electrically connected to a wiring corresponding to the at least one wiring layer at the other end, and positioned on a first surface of the connection member, an integrated circuit (IC) disposed on a second surface of the connection member and electrically connected to the wiring corresponding to the at least one wiring layer to receive an intermediate frequency (IF) signal or baseband signal and transfer an RF signal or receive an RF signal and transfer an IF signal or baseband signal, and a filter filtering an IF signal or a baseband signal.

Abstract: Provided are a method and an apparatus for increasing call quality while reducing consumption of bit rates in immersive multimedia communication. A method of transmitting, by a terminal device, an audio signal to a counterpart terminal device, includes: extracting head tracking information of a user of the counterpart terminal device from a packet received from the counterpart terminal device; predicting a head direction of the user of the counterpart terminal device after a predetermined time period, based on the extracted head tracking information; generating audio output signals by combining audio input signals received via a plurality of microphones, based on the predicted head direction; and transmitting information about the predicted head direction and a sound frame in which the audio output signals are compressed, to the counterpart terminal device.

Abstract: The present disclosure relates to a communication technique for converging an IoT technology with a 5G communication system for supporting a higher data transmission rate beyond a 4G system, and a system therefor. The present disclosure may be applied to an intelligent service (for example, a smart home, a smart building, a smart city, a smart car or connected car, healthcare, digital education, retail business, a security and security related service, or the like) on the basis of a 5G communication technology and an IoT related technology.

Abstract: An electronic device and a control method therefor are provided. The electronic device comprises: a plurality of microphones for receiving audio signals in which voice signals are included; a communicator for receiving state information according to information about a connection with the electronic device; and a processor for determining the noise environment around the electronic device based on one or more of audio amplitude information that is received by the plurality of microphones and that is output by an external device, and state information of the external device, and for processing the voice signal based on the determined noise environment so as to perform voice recognition.

Abstract: A composition for preparing a polyimide-inorganic composite material including: a polyamic acid represented by Chemical Formula 1, a polyimide represented by Chemical Formula 2, or a combination thereof; an inorganic particle precursor; and water, wherein the polyamic acid, the polyimide, or the combination thereof is a reaction product of a dicarboxylic acid anhydride and a diamine, wherein the mole ratio of the diamine to the dicarboxylic acid anhydride is greater than 0.93 and less than 0.95, and wherein the inorganic particle precursor is included in an amount to provide an inorganic particle in an amount of greater than or equal to about 30 weight % and less than or equal to about 60 weight % based the total weight of the polyimide-inorganic composite material prepared: wherein in Chemical Formulae 1 and 2, groups and variable are the same as defined in the specification.

Abstract: An optoelectronic device includes a first electrode and a second electrode facing each other a photoelectric conversion layer between the first electrode and the second electrode and a buffer layer between the photoelectric conversion layer and the second electrode. The buffer layer includes a nitride. The nitride includes one of silicon nitride (SiNx, 0<x<1), silicon oxynitride (SiOyNz, 0<y<0.5, 0<z<1), and a combination thereof.

Abstract: An apparatus for mapping user data into a selective underlying exposure address (SUE) space includes a memory that stores machine instructions and a processor that executes the instructions to combine first user data from a plurality of logically-addressed blocks to create a SUE page. The SUE page corresponds to a respective physical page of a respective physical block on each of a plurality of dies for which corresponding physical blocks of memory cells are jointly managed as a unit in a storage device. The processor further executes the instructions to store mapping information associating the first user data with the SUE page in a logical address space in the storage device.

Abstract: Encoding and decoding methods are provided. An information object is encoded according to a preset encoding scheme. A preset set of bits is selected from the encoded information object and the selected set of bits is output as a sample. A control packet including information on a sample number is generated. The sample is assembled with the control packet. The sample is modulated into a sound signal according to a preset scheme. An input sound signal is demodulated according to the preset scheme. Sample bits and control packet bits containing information of the sample are separated from each other in demodulated received bits. Address information corresponding to each bit of the sample is generated according to the control packet. A soft decision of the sample bits is summed for each piece of the generated address information. A sample decoding of the summed soft decision of the sample bits is performed.

Abstract: An analog-to-digital converter includes a sample hold circuit configured to receive an analog input signal based on an operating mode, the operating mode being one of at least two modes including a sample mode and a hold mode. The sample hold circuit includes a first transistor including a control terminal and a first terminal, the first transistor configured to receive a control signal via the control terminal and receive the analog input signal via the first terminal. The analog-to-digital converter further includes a bootstrap switch operationally connected to the control terminal and the first terminal of the first transistor, the bootstrap switch configured to form a first current path from a power source based on the analog input signal and a boosted voltage of the control terminal of the first transistor in the sample mode, the control terminal bing along the first current path in the sample mode.

Abstract: A display apparatus includes a display unit configured to display a screen; a bezel formed along a boundary of the display unit and configured to output light; and a control unit configured to control lighting of the bezel, wherein the control unit is further configured to control a lighting area of the bezel to provide visual feedback corresponding to a status of the display apparatus to a user.

Abstract: A method of manufacturing a semiconductor device includes providing pre-conductive lines and post-conductive lines for forming a first logic cell and a second logic cell, which are adjacent to each other, and a dummy cell and a third logic cell, which are adjacent to each other. A first conductive line, adjacent to the second logic cell, from among conductive lines of the first logic cell is spaced a first reference distance apart from a second conductive line, adjacent to the first logic cell, from among conductive lines of the second logic cell. A dummy line, which is adjacent to the third logic cell, from among conductive lines of the dummy cell is spaced a second reference distance apart from a third conductive line, which is adjacent to the dummy cell, from among conductive lines of the third logic cell. The second reference distance is greater than the first reference distance.