Patents Assigned to SCREEN Holdings Co., Ltd.
  • Patent number: 11110724
    Abstract: A printing apparatus for printing on a front surface of a printing medium, and thereafter printing on a back surface of the printing medium. The apparatus includes the following elements: a front surface print head for printing a cue mark, and printing a front surface image based on front surface image data with reference to the cue mark; a back surface image data corrector for creating corrected back surface image data based on elasticity information in a transport direction after printing of the front surface image; a detector for detecting the cue mark; and a back surface print head for printing the corrected back surface image data on the back surface of the printing medium with reference to the cue mark detected by the detector.
    Type: Grant
    Filed: July 29, 2019
    Date of Patent: September 7, 2021
    Assignee: SCREEN HOLDINGS CO., LTD.
    Inventor: Susumu Takahashi
  • Patent number: 11101146
    Abstract: A protective disk is disposed between a spin base and a substrate W and is capable of being raised and lowered between a separated position which is separated downward from the substrate W and a near position which is nearer to the substrate than the separated position. An upper surface of the protective disk has an inner surface which is provided on an inner side of a plurality of holding pins in a radial direction and a flat surface which is provided on an outer side of the inner surface in the radial direction and is provided above the inner surface. The flat surface faces a lower surface of a part on an inner side of an outer circumferential end in the radial direction, in a circumferential edge portion of the substrate.
    Type: Grant
    Filed: December 22, 2018
    Date of Patent: August 24, 2021
    Assignee: SCREEN Holdings Co., Ltd.
    Inventors: Nobuaki Okita, Ryo Muramoto, Takayuki Nishida
  • Patent number: 11100377
    Abstract: In an image recording apparatus, when an image is recorded on a recording medium, the recording medium passes through a head part only once. Before the image is recorded, a value of a color component of at least some of pixels included in the image is corrected in order to reduce color mixing unevenness. At that time, on the basis of respective values of two reference color components among a plurality of color components of a correction target pixel, a value of one target color component included among the two reference color components is corrected. Alternatively, on the basis of respective values of three reference color components among the plurality of color components, a value of one target color component or respective values of two target color components included among the three reference color components are corrected.
    Type: Grant
    Filed: April 26, 2018
    Date of Patent: August 24, 2021
    Assignee: SCREEN HOLDINGS CO., LTD.
    Inventor: Yoshikazu Ichioka
  • Patent number: 11093808
    Abstract: There is provided a color matching method including: step of, for each of segmented regions obtained by dividing a region of an entire color chart into a plurality of regions so that boundaries of the segmented regions are parallel to the feeding direction of the base material, determining average color difference between colorimetric values of a color chart outputted from the reference device and colorimetric values of a color chart outputted from the adjustment target device; a step of, taking a segmented region whose average color difference is minimum as the reference region, calculating difference values of the average color differences between the reference region and each of the segmented regions other than the reference region; and a step of specifying a segmented region whose difference value is equal to or greater than a predetermined threshold value as an abnormal region in which abnormality of a head is occurring.
    Type: Grant
    Filed: August 4, 2020
    Date of Patent: August 17, 2021
    Assignee: SCREEN HOLDINGS, CO., LTD.
    Inventor: Hiroki Endo
  • Patent number: 11094529
    Abstract: A substrate processing apparatus includes a substrate holder, and a discharge head for peripheral area from which a fluid is discharge toward a surface peripheral area of the substrate held on the substrate holder. The discharge head for peripheral area includes multiple nozzles, and a support part that supports the nozzles integrally. The nozzles include a processing liquid nozzle from which a processing liquid is discharged toward the surface peripheral area, and a gas nozzle from which gas is discharged toward the surface peripheral area. The gas nozzle is placed upstream of a rotative direction of the substrate relative to the processing liquid nozzle.
    Type: Grant
    Filed: July 19, 2018
    Date of Patent: August 17, 2021
    Assignee: SCREEN Holdings Co., Ltd.
    Inventors: Tomonori Fujiwara, Nobuyuki Shibayama, Yukifumi Yoshida
  • Patent number: 11094068
    Abstract: An image processing method is for detecting the edge of a well where cells are analyzed, from image data obtained by capturing the well and surroundings of the well, and an edge coordinate group for the well is extracted from the image data. If a plurality of edge coordinate groups has been extracted, edge candidates for the well are generated for each of the plurality of edge coordinate groups. Then, an edge candidate that satisfies a predetermined reference value is selected from among the generated edge candidates. If a plurality of edge candidates has been selected, relative evaluations are conducted to determine the edge of the analysis region from among the plurality of edge candidates.
    Type: Grant
    Filed: November 6, 2017
    Date of Patent: August 17, 2021
    Assignee: SCREEN HOLDINGS CO., LTD.
    Inventor: Takuya Yasuda
  • Patent number: 11089657
    Abstract: A semiconductor wafer held by a holding part in a chamber is irradiated and heated with halogen light emitted from a plurality of halogen lamps. A cylindrical louver and an annular light-shielding member, both made of opaque quartz, are provided between the halogen lamps and the semiconductor wafer. The outer diameter of the light-shielding member is smaller than the inner diameter of the louver. Light emitted from the halogen lamps and passing through a clearance between the inner wall surface of the louver and the outer circumference of the light-shielding member is applied to a peripheral portion of the semiconductor wafer where a temperature drop is likely to occur. On the other hand, light travelling toward an overheat region that has a higher temperature than the other region and appears in the surface of the semiconductor wafer when only a louver is installed is blocked off by the light-shielding member.
    Type: Grant
    Filed: February 22, 2016
    Date of Patent: August 10, 2021
    Assignee: SCREEN Holdings Co., Ltd.
    Inventors: Makoto Abe, Hikaru Kawarazaki, Hideaki Tanimura, Masashi Furukawa
  • Patent number: 11087510
    Abstract: Side coordinate groups that correspond to the four sides of the well are extracted from the edge coordinate group. Approximate lines are generated from the side coordinate groups. Corner coordinate groups that correspond to the four corners of the well are extracted from the edge coordinate group. Two intersecting approximate lines are selected from the approximate lines, and a contact candidate coordinates is set on each of the two approximate lines. Every possible pair of one contact candidate coordinate on one of the two approximate lines and one contact candidate coordinates set on the other approximate line are generated. For the generated pairs, processing for calculating an approximate curve by polynomial approximation from the corner coordinate group is performed, the approximate curve being in contact with two contact candidate coordinates. An approximate curve that is closest to the corner coordinate group is selected from all the calculated approximate curves.
    Type: Grant
    Filed: November 22, 2017
    Date of Patent: August 10, 2021
    Assignee: SCREEN HOLDINGS CO., LTD.
    Inventor: Takuya Yasuda
  • Publication number: 20210240741
    Abstract: A data processing method includes: acquiring time series data; acquiring evaluation values; performing classification; and performing extraction. In the acquiring of the time series data, a plurality of time series data acquired by a substrate processing device are acquired. In the acquiring of the evaluation values, the evaluation values of the plurality of time series data are acquired. In the performing of classification, each of the plurality of time series data is classified into one of a plurality of classifications based on the evaluation value. In the performing of extraction, the time series data corresponding to one of the plurality of classifications is extracted as extracted time series data.
    Type: Application
    Filed: December 31, 2020
    Publication date: August 5, 2021
    Applicant: SCREEN Holdings Co., Ltd.
    Inventors: Hideji NAOHARA, Takashi IKEUCHI
  • Patent number: 11081409
    Abstract: A first mass flow controller is provided in an inert gas pipe for feeding nitrogen gas. A second mass flow controller is provided in a reactive gas pipe for feeding ammonia. A joint pipe communicatively connects a joint portion of the inert gas pipe and the reactive gas pipe to a chamber for treating a semiconductor wafer. The joint pipe is provided with a mass flowmeter. A detector detects gas leakage by comparing a total value of flow rates of nitrogen controlled by the first mass flow controller and of ammonia controlled by the second mass flow controller with a measurement value of a flow rate of a treatment gas, obtained by the mass flowmeter.
    Type: Grant
    Filed: May 15, 2018
    Date of Patent: August 3, 2021
    Assignee: SCREEN HOLDINGS CO., LTD.
    Inventors: Mao Omori, Takashi Ito, Nobuhiko Nishide
  • Patent number: 11081376
    Abstract: A first processing module includes a first specified processing unit and a first delivery part. A substrate supply part is on a first direction side of the first processing module. A transfer module is on a second direction side on the opposite of the first processing module from the first direction. The transfer module includes a frame, a first floor, a second floor, and a gateway. The frame defines a placement space in which a first transfer apparatus of the transfer module is placed. A first transfer apparatus is installed on the first floor. The second floor is on a third direction side, which is a horizontal direction orthogonal to the first direction, with respect to the first floor inside the placement space. The gateway is provided on the third direction side with respect to the second floor and communicates the placement space to the outside of the frame.
    Type: Grant
    Filed: November 15, 2019
    Date of Patent: August 3, 2021
    Assignee: SCREEN Holdings Co., Ltd.
    Inventors: Yuichi Takayama, Koji Hashimoto, Noriyuki Kikumoto
  • Patent number: 11077690
    Abstract: A printing apparatus of this invention scans with a tester a testing chart printed by a printing controller to acquire testing image data. A total amount of displacement calculator calculates an amount of displacement of a recording position including a direction of misregister as a total amount of displacement, based on a large amount of displacement determined by a large amount of displacement determiner, a direction of displacement detected by a direction of displacement detector, a shift amount corresponding to an amount of displacement detecting chart determined by an amount of displacement detecting chart determiner, and a peak position of the amount of displacement detecting chart determined by the amount of displacement detecting chart determining unit. Thus, since a total amount of displacement of the misregister can be calculated only by printing the testing chart on web paper WP, an amount of displacement of the misregister in the transport direction can be obtained easily in a short time.
    Type: Grant
    Filed: September 20, 2016
    Date of Patent: August 3, 2021
    Assignee: SCREEN HOLDINGS CO., LTD.
    Inventors: Asuka Muramatsu, Kazuki Fukui, Tomotaka Kato, Kazuki Yamanaka, Seiya Nomura, Takaharu Yamamoto
  • Patent number: 11074684
    Abstract: A high-frequency component removing part removes high-frequency components from a first object image obtained by picking up an image of an object and a first reference image, to acquire a second object image and a second reference image, respectively. A correction part corrects a value of each pixel of at least one of the first object image and the first reference image on the basis of a discrepancy, which is a ratio or a difference, between a value of the corresponding pixel of the second object image and a value of the corresponding pixel of the second reference image. A comparison part compares the first object image with the first reference image, to thereby detect a defect area in the first object image.
    Type: Grant
    Filed: May 14, 2018
    Date of Patent: July 27, 2021
    Assignee: SCREEN HOLDINGS CO., LTD.
    Inventor: Hiroyuki Onishi
  • Patent number: 11064598
    Abstract: A static eliminator performs processing of reducing the charge amount of an electrically charged substrate. The static eliminator includes a substrate holder and an ultraviolet irradiator. The substrate holder holds the substrate. The ultraviolet irradiator is capable of irradiating a main surface of the substrate with ultraviolet light in an irradiation amount that differs between a plurality of divided regions of the main surface of the substrate.
    Type: Grant
    Filed: December 18, 2017
    Date of Patent: July 13, 2021
    Assignee: SCREEN Holdings CO., Ltd.
    Inventors: Takayoshi Tanaka, Seiji Ano
  • Patent number: 11061636
    Abstract: A print job data generation portion generates print job data, including flatplan information that specifies an actual position of each of pages on a unit printing sheet, based on submission data and a flatplan template. In the case where a page size in the submission data is smaller than a maximum page size defined by the flatplan template, the print job data generation portion determines the position of each of the pages in accordance with an intra-cell positioning rule set in the flatplan template Dt with no change in the folding position represented by the flatplan template.
    Type: Grant
    Filed: February 21, 2019
    Date of Patent: July 13, 2021
    Assignee: SCREEN HOLDINGS CO., LTD.
    Inventors: Yo Izawa, Takako Kato, Yoshihiko Onogawa
  • Patent number: 11060054
    Abstract: A specimen container includes a well having an opening to store fluid. An opening plane, and first and second cross sections have outer peripheral shapes dissimilar to each other and in a plan view, the second cross section is contained in the first cross section and the first cross section is contained in the opening plane. The opening plane, and the first and second cross sections are defined in a horizontal posture of the body. The opening plane is a projected plane of the opening of the well on a horizontal plane. The first cross section is a horizontal cross section of the internal space taken at a position corresponding to a first depth defined vertically downwardly from the opening. The second cross section is a horizontal cross section of the internal space taken at a position corresponding to a second depth greater than the first depth.
    Type: Grant
    Filed: June 29, 2018
    Date of Patent: July 13, 2021
    Assignee: SCREEN HOLDINGS CO., LTD.
    Inventor: Kunio Ikefuji
  • Patent number: 11060856
    Abstract: A device includes a storage 52 for storing a reference pattern corresponding to a part of a workpiece outer peripheral part, an imager 27 for imaging the outer peripheral part at least for one turn of a workpiece by such imaging at a fixed point as to include at least a part of the outer peripheral part in an imaging field of view, an image processor 55 for detecting a region corresponding to the reference pattern by performing a pattern matching process, and a misalignment detector 51 for detecting the misalignment based on information on a position of each of a plurality of the detected regions. The reference pattern corresponds in shape to a plurality of characteristic parts that present on the outer peripheral part, have shapes congruent to each other and have a mutually symmetrical positional relationship with respect to rotation about the center axis.
    Type: Grant
    Filed: December 21, 2018
    Date of Patent: July 13, 2021
    Assignee: SCREEN HOLDINGS CO., LTD.
    Inventor: Yasushi Sasa
  • Publication number: 20210202258
    Abstract: A substrate treatment apparatus includes a nozzle, a moving mechanism, a storage portion, and a control portion. The learned model is generated by learning, as learning data, learning target speed information indicating a moving speed of the nozzle and the amount of treatment acquired by executing a treatment on a substrate that is a learning target while causing the nozzle to move at a speed based on the learning target speed information. The control portion causes speed information at the time of treatment to be outputted from the learned model by inputting a target amount of an amount of treatment to the learned model. The control portion controls a moving mechanism such that the nozzle moves at a speed based on the speed information at the time of treatment when the treatment is executed on a substrate that is a treatment target.
    Type: Application
    Filed: December 24, 2020
    Publication date: July 1, 2021
    Applicant: SCREEN Holdings Co., Ltd.
    Inventors: Hideji NAOHARA, Takashi OTA, Takashi IKEUCHI, Yasunori NAKAMURA
  • Publication number: 20210197224
    Abstract: A substrate processing method includes a liquid film forming step of forming a liquid film, a liquid film heat retaining step of keeping the liquid film warm, a gas phase layer forming step of forming a gas phase layer which holds the processing liquid on a center portion of the liquid film, an opening forming step of forming an opening in the center portion of the liquid film by excluding the processing liquid held by the gas phase layer, a substrate rotating step of rotating the substrate around a rotation axis, and an opening expanding step of expanding the opening, while a state in which the gas phase layer is formed on an inner circumferential edge of the liquid film is maintained, by moving the irradiation region toward a circumferential edge portion of the substrate while the liquid film heat retaining step and the substrate rotating step are performed.
    Type: Application
    Filed: December 24, 2020
    Publication date: July 1, 2021
    Applicant: SCREEN Holdings Co., Ltd.
    Inventors: Hiroshi ABE, Takashi OTA, Takaaki ISHIZU, Kenji KOBAYASHI, Ryo MURAMOTO, Sei NEGORO, Manabu OKUTANI, Wataru SAKAI
  • Patent number: 11046083
    Abstract: A bottle for ink supply is shipped with a two-dimensional code attached to the bottle, individual information being embedded in the two-dimensional code. A user reads the two-dimensional code with a portable information terminal and thereby transmits the individual information to a management server. If there is no fraud or problem, the management server transmits a passcode to the portable information terminal. When the bottle is placed in a bottle storing unit, the two-dimensional code is read by a two-dimensional code reader, and a passcode is created based on the individual information embedded in the two-dimensional code. Only when the passcode matches the passcode registered by the user, ink in the bottle becomes ready to use.
    Type: Grant
    Filed: December 30, 2019
    Date of Patent: June 29, 2021
    Assignee: SCREEN HOLDINGS CO., LTD.
    Inventor: Satoru Kiyohara