Abstract: A process for P-type boron doping of silicon wafers placed on a support in the chamber of a furnace of whose one end includes a wall in which element for introducing reactive gases and a carrier gas carrying a boron precursor in gaseous form are located, whereby the process includes the following stages: a) reacting in the chamber, the reactive gases with boron trichloride BCl3 that is diluted in the carrier gas at a pressure of between 1 kPa and 30 kPa, and a temperature of between 800° C. and 1100° C., to form a boron oxide B2O3 glass layer; and b) carrying out the diffusion of atomic boron in silicon under an N2+O2 atmosphere at a pressure of between 1 kPa and 30 kPa. A furnace designed for implementing the doping process, and the manufacturing of large boron-doped silicon slices, in particular for photovoltaic applications are also claimed.

Abstract: The present invention provides an image engraving device for engraving a special composite paper or a thin plastic plate by moving an engraving needle and a target plate to be engraved relative to each other such that the engraving needle scans the target plate, the image engraving device operating only if a license code is input and is certified correct. The image engraving device has a license code input part for inputting a license code, a license code certifying part certifying whether the input license code is correct or not, and a controller controlling to allow the image engraving device to operate only if the license code is certified correct. With this configuration, the image engraving device solves the problem. In order to secure the certification of the license code, an engraving needle driver and a target plate driver are provided certifying parts, respectively. The operation of the certifying parts is hard-coded to prevent the image engraving device from fraudulently certifying.

Abstract: Control systems for recovery wheels, ventilation systems with recovery devices, buildings having ventilation, and methods of controlling recovery wheels and controlling or modifying ventilation systems. A parameter of ventilation systems or recovery devices, such as the speed of a recovery wheel, may be controlled as a function of pressure, differential pressure, flow rate, or fan speed, for example, to provide appropriate purge flow to maintain purge effectiveness and limit the carry-over of contaminants from a return/exhaust airstream to an outside/supply airstream, for instance, in a variable air-volume system. A purge angle may be set at a minimum position commensurate with a maximum flow rate and recovery-wheel speed may be reduced at lower flows to maintain purge effectiveness. In some embodiments, temperature and humidity are measured, and wheel speed is also controlled as a function of these measurements.

Abstract: In an image card where an image is formed on a thin plate made of special synthetic paper or plastic by engraving by sweeping the plate with the engraving needle through relative movement of an engraving needle and a plate, it is impossible to form a hidden image which can be viewed when a viewpoint is changed or form an image formed by watermark engraving and the hidden image within the same plane. A hidden image is formed on an image card by engraving while angles of stripes of striped patterns are changed in response to shading of an image. Further, an image engraving device is provided with a rotary driving unit, and engraving is performed in a state that an extending direction of striped grooves of the hidden image and a forming direction of the engraving are made equal, so that a wall face of a groove is always formed by the same side face of an engraving needle and undulation does not occur on the wall face of the groove. Similarly, a shape of a bottom face of the groove is made even.

Abstract: Method and device for doping or diffusion, or oxidation of silicon wafers (4), the wafers being introduced into the chamber (2) of an oven (1) wherein is introduced at least a gas for performing the doping or diffusion or oxidation process. The method comprises simultaneously with the introduction and passage of gas into the chamber (2) of the oven (1), continuously subjecting the latter to a depression of constant value. The device comprises an oven (1) provided with a chamber (2) wherein are introduced the wafers, the oven including at least an inlet tube (5a, 5b, 5c) for introducing at least a gas into the chamber (2) to carry out the processes and at least an outlet tube (6) for extracting the gas whereto is connected a suction unit (7) for generating in the chamber (2) a constant and controlled depression.

Abstract: Control systems for recovery wheels, ventilation systems with recovery devices, buildings having ventilation, and methods of controlling recovery wheels and controlling or modifying ventilation systems. A parameter of ventilation systems or recovery devices, such as the speed of a recovery wheel, may be controlled as a function of pressure, differential pressure, flow rate, or fan speed, for example, to provide appropriate purge flow to maintain purge effectiveness and limit the carry-over of contaminants from a return/exhaust airstream to an outside/supply airstream, for instance, in a variable air-volume system. A purge angle may be set at a minimum position commensurate with a maximum flow rate and recovery-wheel speed may be reduced at lower flows to maintain purge effectiveness. In some embodiments, temperature and humidity are measured, and wheel speed is also controlled as a function of these measurements.

Abstract: Device for automatically loading and unloading a feed to be treated in a heat treatment unit (1) such as a diffusion oven, comprising at least a cantilever (2) designed to receive the whole feed and to introduce the feed in the oven. The feed can consist of silicon wafers (4) arranged in quartz boats. The device comprises a multiple-basket automatic transfer equipment receiving on a reception zone, the whole feed, and transferring, from the reception zone to the cantilever, the whole feed and optionally dummy feeds, shielding feeds and control elements and vice-versa after the heat treatment, transferring the whole treated feed to the reception zone and transferring, from the cantilever to their original locations, the shielding feeds and the control elements, the various operations being carried out according to a predetermined scenario.

Abstract: The convertible pad support can receive at least two different types of pads of different dimensions. The support includes a three-dimensional structure defining a storage volume wherein the pads are disposed. The structure includes two lateral flanks which are firmly connected by two fixed arms and receives at least one additional arm which can be placed opposite the storage volume. The structure maintains the pads inside the storage volume with the aid of the other arms whereby the normal distance between the additional arm and the geometric longitudinal axis of one of the fixed arms can be adjusted in order to adapt support to the dimensions of the pads to be received.

Abstract: A device for holding a wafer, an electronic component comprises a system for transporting without deformation a wafer of electronic components. The device also enables the transport by one or the other of the passive or active faces. The device comprises a planar and thin rigid support having a controllable temperature and at least an electrode consisting of (N+1) elements, confined between two sheets of insulating material. The support provides a protrusion-free surface for gripping the wafer, and electrostatic elements for positive retention of the wafer induces a gripping power of the latter distributed over the entire support. The U-shaped support is borne by the electrical bond of the electrode with a remote (adjustable, AC or DC, mono-multipolar) power source. The gripping surface of the device is planar and protrusion-free whatever the geometry of the support used.

Abstract: The invention concerns an electrostatic chuck (250) comprising an upper ceramic (205) bearing the substrate (200) to be treated and a lower ceramic (215) bearing heating elements (225) and radio frequency electrodes (220), said ceramics being permanently bonded together. Said ceramics are preferably bonded together by heated glass and the lower ceramic is fixedly assembled to a pedestal, for example through a soldered bonding.

Abstract: A self-restarting pool cover siphon includes a weighted housing placed on a pool cover having water thereon, the housing having a hollow interior and openings through which water can enter, a tube in fluid communication with the hollow interior and through which water drains, the tube bent into a loop and having an opening between opposite ends thereof at an upper position of the loop, and a differential pressure causing device removably connected to the opposite end of the tube for initially causing a differential pressure in the tube to cause water in the housing to drain through the tube, and thereafter being removed from the opposite end of the tube, wherein additional water on the pool cover will cause water remaining in the loop to pass the opening in the loop to re-prime the siphon and cause drainage of the water from the pool cover.

Abstract: A fiber optic module housing (10) has a plurality of module seats (12a) for receipt of fiber optic modules (16) having a connector portion extending through a connector opening (12b) of a front wall of the housing. A pressure bar (14i) is integrally connected to the cover (14) through hinges (14h) and is movable to depress a locking arm (16b) of the connectors. A hole (12h) is provided in the back wall of base (12) in alignment with each module seat for a straight test configuration and posts (12j) are provided in a recess (12d) of the base for a loop test configuration. In one embodiment the connector openings are aligned in a straight line and in another they are aligned in a stepped configuration.

Abstract: The present invention relates to chemical delivery systems and methods for delivery of liquid chemicals. In one embodiment, the present invention relates to systems having multi-reservoir load cell assemblies for delivering chemicals used in the semiconductor industry. In one embodiment, the present invention provides a multi-reservoir load cell assembly, including a controller, a buffer reservoir, a main reservoir, one or more load cells, coupled to the assembly and to the controller, operable to weigh the liquid in the reservoir(s), a plurality of supply lines, each supply line having a valve and connecting one of the supply containers to the main reservoir, and a gas and vacuum sources for withdrawing the liquid from the assembly when demanded by the controller and for refilling the assembly from the supply containers.

Abstract: The present invention relates to chemical delivery systems and methods for delivery of liquid chemicals. In one embodiment, the present invention relates to systems having multi-reservoir load cell assemblies for delivering chemicals used in the semiconductor industry. In one embodiment, the present invention provides a multi-reservoir load cell assembly, including a controller, a buffer reservoir, a main reservoir, one or more load cells, coupled to the assembly and to the controller, operable to weigh the liquid in the reservoir(s), a plurality of supply lines, each supply line having a valve and connecting one of the supply containers to the main reservoir, and a gas and vacuum sources for withdrawing the liquid from the assembly when demanded by the controller and for refilling the assembly from the supply containers.

Abstract: A molding apparatus intended to produce a flush finished part without any gate tab. The apparatus has a gate selectively movable between a first position permitting flow of mold medium from the cold runner to enter the mold cavity and a second position blocking such flow, the gate in the second position fully filling the opening and having a surface exposed to the mold cavity which surface is flush with the interior wall to.

Abstract: A system and method for controlling the temperature and humidity level of a controlled space. The system includes a total energy recovery wheel and a dehumidification wheel in conjunction with a cooler to control the temperature and humidity of air supplied to a controlled space. In a method of controlling temperature and humidity of a controlled space, supply air is cooled and dehumidified by passing it through a rotating total energy recovery wheel. The total energy recovery wheel is cooled and dehumidified by passing exhaust air through it. The supply air is further cooled and dehumidified by passing it through a cooler. The supply air is warmed and further dehumidified by passing it through a rotating dehumidification wheel. The dehumidification wheel is warmed and dehumidified by passing exhaust air through it. During the heating mode, the system functions as an extremely effective total energy recovery device by operating the two wheels in series.

Abstract: The present invention relates to chemical delivery systems and methods for delivery of liquid chemicals. In one embodiment, the present invention relates to systems having multi-reservoir load cell assemblies for delivering chemicals used in the semiconductor industry. In one embodiment, the present invention provides a multi-reservoir load cell assembly, including a controller, a buffer reservoir, a main reservoir, one or more load cells, coupled to the assembly and to the controller, operable to weigh the liquid in the reservoir(s), a plurality of supply lines, each supply line having a valve and connecting one of the supply containers to the main reservoir, and a gas and vacuum sources for withdrawing the liquid from the assembly when demanded by the controller and for refilling the assembly from the supply containers.