Patents Assigned to Semiconductor Equipment Technology
  • Patent number: 6186880
    Abstract: An annular ring assembly is provided in which mechanical elements of the retaining ring assembly maintain strict planar flatness, rigidity, high tolerances and surface stability control. Additionally, glues, adhesives, and epoxies are eliminated from the construction of the plastic retaining and backing ring assembly. Further, adverse chemical reaction and contamination from adhesives that are typically in direct contact with chemical slurry and substrate layers undergoing polishing are eliminated. As a result, the present invention provides a low cost alternative to suppliers and manufacturers of retaining rings and facilitates a method to exchange, recondition and recycle the retaining ring for an infinite period, thus reducing consumable waste materials. Further, the ring assembly maintains uniform mechanical properties and strict tolerances after post reconditioning, thus reducing the variability and maintaining process consistency.
    Type: Grant
    Filed: September 29, 1999
    Date of Patent: February 13, 2001
    Assignee: Semiconductor Equipment Technology
    Inventors: Jose Gonzalez, Dave Jordan, Andrew Tudhope
  • Patent number: D401250
    Type: Grant
    Filed: January 27, 1998
    Date of Patent: November 17, 1998
    Assignee: Semiconductor Equipment Technology
    Inventors: Andrew William Tudhope, David Bruce Jordan, Jose Luis Gonzalez
  • Patent number: D401251
    Type: Grant
    Filed: January 27, 1998
    Date of Patent: November 17, 1998
    Assignee: Semiconductor Equipment Technology
    Inventors: Andrew William Tudhope, David Bruce Jordan, Jose Luis Gonzalez
  • Patent number: D401252
    Type: Grant
    Filed: January 27, 1998
    Date of Patent: November 17, 1998
    Assignee: Semiconductor Equipment Technology
    Inventors: Andrew William Tudhope, David Bruce Jordan, Jose Luis Gonzalez