Shield and cover for target of sputter coating apparatus

Info

Patent number: D401252
Type: Grant
Filed: Jan 27, 1998
Date of Patent: Nov 17, 1998
Assignee: Semiconductor Equipment Technology (San Jose, CA)
Inventors: Andrew William Tudhope (Danville, CA), David Bruce Jordan (San Jose, CA), Jose Luis Gonzalez (Redwood City, CA)
Primary Examiner: Antoine Duval Davis
Law Firm: Gray Cary Ware & Friedenrich
Application Number: 0/82,647

Description

Description

FIG. 1 is a perspective view of a shield and cover for target of sputter coating apparatus embodying the design of the invention;

FIG. 2 is a top plan view of the shield and cover for target of sputter coating apparatus of FIG. 1;

FIG. 3 is a bottom plan view of the shield and cover for target of sputter coating apparatus of FIG. 1;

FIG. 4 is a side elevation view of the shield and cover for target of sputter coating apparatus as seen from the bottom of FIG. 2;

FIG. 5 is a side elevation view of the shield and cover for target of sputter coating apparatus as seen from the top of FIG. 2;

FIG. 6 is a side elevation view of the shield and cover for target of sputter coating apparatus as seen from the left side of FIG. 2;

FIG. 7 is a side elevation view of the shield and cover for target of sputter coating apparatus as seen from the right side of FIG. 2; and,

FIG. 8 is a cross-sectional view of the shield and cover for target of sputter coating apparatus taken along the line 8--8 of FIG. 2.