Patents Assigned to Semiconductor Manufacturing
  • Patent number: 10679968
    Abstract: A package includes a substrate, an Under-Bump Metallurgy (UBM) penetrating through the substrate, a solder region over and contacting the UBM, and an interconnect structure underlying the substrate. The interconnect structure is electrically coupled to the solder region through the UBM. A device die is underlying and bonded to the interconnect structure. The device die is electrically coupled to the solder region through the UBM and the interconnect structure. An encapsulating material encapsulates the device die therein.
    Type: Grant
    Filed: July 30, 2018
    Date of Patent: June 9, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Hua Yu, Chung-Hao Tsai, Chuei-Tang Wang
  • Patent number: 10678126
    Abstract: A mask for semiconductor manufacturing includes a mask substrate, a shifter layer over the mask substrate, a stop layer over and in contact with the shifter layer, and an absorber layer over the stop layer. The shifter layer includes each material of a set of materials, the materials being combined in a first proportion in the shifter layer. The stop layer includes each material of the set of materials, the materials being combined in a second proportion in the stop layer that is different from the first proportion.
    Type: Grant
    Filed: April 18, 2018
    Date of Patent: June 9, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chih-Chiang Tu, Chun-Lang Chen, Boming Hsu, Tran-Hui Shen
  • Patent number: 10678977
    Abstract: A semiconductor device including: standard functional cells located in a logic area; standard spare cells arranged in a spare region of the logic area; and a metallization layer including segments, some of the segments being included in corresponding ones of the functional cells, some of the segments being included in corresponding ones of the spare cells, and some of the segments representing strap lines; and wherein a first pitch of the standard spare cells is based on a second pitch of the strap lines.
    Type: Grant
    Filed: November 12, 2018
    Date of Patent: June 9, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Mao-Wei Chiu, Ting-Wei Chiang, Hui-Zhong Zhuang, Li-Chun Tien, Chi-Yu Lu
  • Patent number: 10679693
    Abstract: SRAM arrays are provided. In each SRAM cell arranged in a column of cell array, a pull-down transistor and a pass-gate transistor are formed in P-type well region. A pull-up transistor is formed in N-type well region. At least one well strap cell includes an N-well strap structure formed on the N-type well region and a P-well strap structure formed on the P-type well region. A first distance between the active region of the P-well strap structure and the N-type well region is greater than a second distance between an active region of the pull-down transistor and the pass-gate transistor and the N-type well region.
    Type: Grant
    Filed: October 22, 2019
    Date of Patent: June 9, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventor: Jhon-Jhy Liaw
  • Patent number: 10678973
    Abstract: Electronic design automation (EDA) of the present disclosure, in various embodiments, optimizes designing, simulating, analyzing, and verifying of one or more electronic architectural designs for an electronic device. The EDA of the present disclosure identifies one or more electronic architectural features from the one or more electronic architectural designs. In some situations, the EDA of the present disclosure can manipulate one or more electronic architectural models over multiple iterations using a machine learning process until one or more electronic architectural models from among the one or more electronic architectural models satisfy one or more electronic design targets. The EDA of the present disclosure substitutes the one or more electronic architectural models that satisfy the one or more electronic design targets for the one or more electronic architectural features in the one or more electronic architectural designs to optimize the one or more electronic architectural designs.
    Type: Grant
    Filed: October 4, 2017
    Date of Patent: June 9, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yi-Lin Chuang, Ching-Fang Chen, Wei-Li Chen, Wei-Pin Changchien, Yung-Chin Hou, Yun-Han Lee
  • Patent number: 10679987
    Abstract: Various embodiments of the present application are directed towards an integrated circuit (IC) in which a bootstrap metal-oxide-semiconductor (MOS) device is integrated with a high voltage metal-oxide-semiconductor (HVMOS) device and a high voltage junction termination (HVJT) device. In some embodiments, a drift well is in the semiconductor substrate. The drift well has a first doping type and has a ring-shaped top layout. A first switching device is on the drift well. A second switching device is on the semiconductor substrate, at an indent in a sidewall the drift well. A peripheral well is in the semiconductor substrate and has a second doping type opposite the first doping type. The peripheral well surrounds the drift well, the first switching device, and the second switching device, and further separates the second switching device from the drift well and the first switching device.
    Type: Grant
    Filed: September 12, 2018
    Date of Patent: June 9, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Karthick Murukesan, Wen-Chih Chiang, Chiu-Hua Chung, Chun Lin Tsai, Kuo-Ming Wu, Shiuan-Jeng Lin, Tien Sheng Lin, Yi-Min Chen, Hung-Chou Lin, Yi-Cheng Chiu
  • Patent number: 10679902
    Abstract: Semiconductor device and fabrication method are provided.
    Type: Grant
    Filed: December 27, 2018
    Date of Patent: June 9, 2020
    Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, SMIC New Technology Research and Development (Shanghai) Corporation
    Inventors: Zhi Dong Wang, Cheng Long Zhang, Wu Tao Tu
  • Patent number: 10679950
    Abstract: An integrated circuit structure includes a semiconductor substrate having a plurality of semiconductor strips, a first recess being formed by two adjacent semiconductor strips among the plurality of semiconductor strips, a second recess being formed within the first recess, and an isolation region being provided in the first recess and the second recess. The second recess has a lower depth than the first recess.
    Type: Grant
    Filed: July 25, 2018
    Date of Patent: June 9, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wan-Chun Kuan, Chih-Teng Liao, Yi-Wei Chiu, Tzu-Chan Weng
  • Patent number: 10679877
    Abstract: The current disclosure describes carrier tape systems that include a carrier tape substrate and a cover tape. The carrier tape system includes a plurality of repetitive adhesion areas where the carrier tape substrate and cover tape are attached to each other and non-adhesion areas where the carrier tape substrate and cover tape are not attached to each other. Separating the cover tape and the carrier tape substrate at these repetitive adhesion and non-adhesion areas imparts a vibration to the cover tape which impedes or prevents semiconductor devices carried in pockets of the carrier tape substrate from adhering to adhesive on the cover tape.
    Type: Grant
    Filed: March 28, 2019
    Date of Patent: June 9, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Tsung-Jen Liao, Pei-Haw Tsao, Tsui-Mei Chen
  • Patent number: 10680109
    Abstract: A device includes a semiconductor substrate, a first fin arranged over the semiconductor substrate, and an isolation structure. The first fin includes an upper portion, a bottom portion, and an insulator layer between the upper portion and the bottom portion. A top surface of the insulator layer is wider than a bottom surface of the upper portion of the first fin. The isolation structure surrounds the bottom portion of the first fin.
    Type: Grant
    Filed: September 25, 2018
    Date of Patent: June 9, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shu-Hao Kuo, Jung-Hao Chang, Chao-Hsien Huang, Li-Te Lin, Kuo-Cheng Ching
  • Patent number: 10679999
    Abstract: A capacitor-coupled N-type transistor-based one-time programmable (OTP) device is disclosed. The OTP includes a transistor and a coupling capacitor both formed in a p-well and isolated from each other by field oxide or shallow trench isolation (STI). The transistor is constructed of a gate, a source region and a drain region composed of heavily-doped N-region. The coupling capacitor has a top plat formed of polysilicon on substrate surface, and a bottom plate constructed of an NLDD region and a heavily-doped N-region in the NLDD region. In order to achieve maximum capacitance utilization, the top plate of the coupling capacitor has a width not greater than the NLDD implantation region or twice a lateral junction depth of the heavily-doped n-region. The gate of the transistor may not be wider than the top plate of the coupling capacitor such that capacitance coupling ratio of the coupling capacitor to the transistor is optimized.
    Type: Grant
    Filed: November 28, 2018
    Date of Patent: June 9, 2020
    Assignee: Shanghai Huahong Grace Semiconductor Manufacturing Corporation
    Inventors: Yu Chen, Yuan Yuan, Hualun Chen
  • Patent number: 10679915
    Abstract: A package structure includes a plurality of first dies, a first encapsulant, and a first redistribution structure. The first encapsulant encapsulates the first dies. The first redistribution structure is disposed on the first dies and the first encapsulant. The first redistribution structure includes a dielectric layer covering a top surface and sidewalls of the first encapsulant.
    Type: Grant
    Filed: October 28, 2018
    Date of Patent: June 9, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ping-Yin Hsieh, Chin-Fu Kao, Li-Hui Cheng, Szu-Wei Lu
  • Patent number: 10678989
    Abstract: A method for timing optimization is disclosed. The method includes obtaining information on timing of paths in a chip, wherein the information includes a mean of slacks and a sigma of slacks of each of the paths, determining a sigma margin (SM) value each of the paths, the SM value being obtained by dividing the mean by the sigma, and determining that a first path of the paths is more critical than a second path of the paths, an SM value of the first path being smaller than that of the second path.
    Type: Grant
    Filed: January 18, 2018
    Date of Patent: June 9, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Yen-Pin Chen, Tzu-Hen Lin, Tai-Yu Cheng, Florentin Dartu, Chung-Hsing Wang
  • Patent number: 10676668
    Abstract: For a metal gate replacement integration scheme, the present disclosure describes removing a polysilicon gate electrode with a highly selective wet etch chemistry without damaging surrounding layers. For example, the wet etch chemistry can include one or more alkaline solvents with a steric hindrance amine structure, a buffer system that includes tetramethylammonium hydroxide (TMAH) and monoethanolamine (MEA), one or more polar solvents, and water.
    Type: Grant
    Filed: December 14, 2018
    Date of Patent: June 9, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Neng-Jye Yang, Kuo Bin Huang, Ming-Hsi Yeh, Shun Wu Lin, Yu-Wen Wang, Jian-Jou Lian, Shih Min Chang
  • Patent number: 10678146
    Abstract: A method includes moving a sticky structure to a wafer table such that a first particle on the wafer table is adhered to the sticky structure, moving the sticky structure away from the wafer table after the first particle is adhered to the sticky structure, and performing a lithography process to a wafer held by the wafer table after moving the sticky structure away from the wafer table.
    Type: Grant
    Filed: October 18, 2018
    Date of Patent: June 9, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Min-Cheng Wu, Chi-Hung Liao
  • Patent number: 10679990
    Abstract: A multiple-fin device includes a substrate and a plurality of fins formed on the substrate. Source and drain regions are formed in the respective fins. A dielectric layer is formed on the substrate. The dielectric layer has a first thickness adjacent one side of a first fin and having a second thickness, different from the first thickness, adjacent an opposite side of the fin. A continuous gate structure is formed overlying the plurality of fins, the continuous gate structure being adjacent a top surface of each fin and at least one sidewall surface of at least one fin. By adjusting the dielectric layer thickness, channel width of the resulting device can be fine-tuned.
    Type: Grant
    Filed: December 17, 2018
    Date of Patent: June 9, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chi-Wen Liu, Chao-Hsiung Wang
  • Patent number: 10675732
    Abstract: A chemical mechanical polishing apparatus including a conditioning head having a first pressure sensor and a controller configured to adjust at least one of a position or a rotation of the conditioning pad responsive to the first pressure data. The conditioning head is adjustable between a first position and a second position, the conditioning head and a polishing pad are in contact when the conditioning head is in the second position, and the first pressure sensor generates first pressure data when the conditioning head is in the second position.
    Type: Grant
    Filed: April 18, 2017
    Date of Patent: June 9, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: ChunHung Chen, Sheng-Chen Wang
  • Patent number: 10680027
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a first semiconductor die, and a second semiconductor die bonded on the first semiconductor die. A through-substrate via penetrates through a semiconductor substrate of the second semiconductor die. A passivation layer is disposed between the first semiconductor die and the second semiconductor die, wherein the passivation layer is directly bonded to the semiconductor substrate of the second semiconductor die. A conductive feature passes through the passivation layer, wherein the conductive feature is bonded to the through-substrate via. A barrier layer is disposed between the conductive feature and the passivation layer. The barrier layer covers sidewalls of the conductive feature and separates the surface of the conductive feature from a nearest neighboring surface of the first or second semiconductor die.
    Type: Grant
    Filed: April 26, 2019
    Date of Patent: June 9, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Min-Feng Kao, Dun-Nian Yaung, Jen-Cheng Liu, Hsun-Ying Huang
  • Patent number: 10679981
    Abstract: A circuit includes a first transistor, a second transistor and a first resistive load. The first transistor has a first terminal coupled to a first reference voltage terminal, a second terminal coupled to a second reference voltage terminal, and a control terminal coupled to the first reference voltage terminal. The second transistor has a first terminal coupled to the second reference voltage terminal, a second terminal coupled to the first reference voltage terminal and the control terminal of the first transistor, and a control terminal coupled to the second reference voltage terminal and the second terminal of the first transistor. The first transistor further comprises a third terminal coupled to the second reference voltage terminal through the first resistive load.
    Type: Grant
    Filed: October 4, 2017
    Date of Patent: June 9, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventor: Chien-Yao Huang
  • Patent number: 10679820
    Abstract: A method includes applying a voltage to a wafer or a device under test (DUT). The wafer or the DUT is illuminated with an electron beam after applying the voltage to the wafer or the DUT. Cathodoluminescent light emitted from the wafer or the DUT in response to the electron beam is detected. One or more characteristics of the wafer or the DUT are determined based on the detected cathodoluminescent light.
    Type: Grant
    Filed: November 15, 2018
    Date of Patent: June 9, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Bao-Hua Niu, Jung-Hsiang Chuang, David Hung-I Su