Patents Assigned to Semiconductor Manufacturing
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Patent number: 11605633Abstract: A semiconductor device is provided. The semiconductor device includes a substrate and a semiconductor layer formed over a substrate. The semiconductor device further includes an isolation region covering the semiconductor layer and nanostructures formed over the semiconductor layer. The semiconductor layer further includes a gate stack wrapping around the nanostructures. In addition, the isolation region is interposed between the semiconductor layer and the gate stack.Type: GrantFiled: January 4, 2021Date of Patent: March 14, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Winnie Victoria Wei-Ning Chen, Meng-Hsuan Hsiao, Tung-Ying Lee, Pang-Yen Tsai, Yasutoshi Okuno
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Patent number: 11605553Abstract: An automated method of unpacking a container containing semiconductor wafers from a sealed bag is provided. The method includes inflating the bag with a gas using an automated gas dispenser. After inflating the bag, the bag is cut using an automated cutting device to expose the container, and the cut bag is removed from around the container.Type: GrantFiled: November 16, 2020Date of Patent: March 14, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Fu-Hsien Li, Chi-Feng Tung, Chi Yuan Chu, Jen-Ti Wang, Hsiang Yin Shen
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Patent number: 11605543Abstract: A method includes depositing a silicon layer, which includes first portions over a plurality of strips, and second portions filled into trenches between the plurality of strips. The plurality of strips protrudes higher than a base structure. The method further includes performing an anneal to allow parts of the first portions of the silicon layer to migrate toward lower parts of the plurality of trenches, and performing an etching on the silicon layer to remove some portions of the silicon layer.Type: GrantFiled: February 18, 2022Date of Patent: March 14, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY. LTD.Inventors: De-Wei Yu, Chien-Hao Chen, Chia-Ao Chang, Pin-Ju Liang
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Patent number: 11605779Abstract: Provided are a memory cell and a method of forming the same. The memory cell includes a first dielectric pattern, a second dielectric pattern, a first bottom electrode, a first storage pattern, and a first top electrode. The first bottom electrode is disposed between the first dielectric pattern and the second dielectric pattern, and the first bottom electrode interfaces a first sidewall of the first dielectric pattern and a sidewall of the second dielectric pattern. The first storage pattern is disposed on the first dielectric pattern, the second dielectric pattern and the first bottom electrode, wherein the first storage pattern is electrically connected to the first bottom electrode. The first storage pattern is between the first bottom electrode and the first top electrode. A semiconductor die including a memory array is also provided.Type: GrantFiled: January 7, 2021Date of Patent: March 14, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hung-Li Chiang, Jer-Fu Wang, Jung-Piao Chiu, Yu-Sheng Chen, Tzu-Chiang Chen
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Patent number: 11605720Abstract: The present disclosure provides a semiconductor device and a method of forming the same. The semiconductor device includes a first channel members being vertically stacked, a second channel members being vertically stacked, an n-type work function layer wrapping around each of the first channel members, a first p-type work function layer over the n-type work function layer and wrapping around each of the first channel members, a second p-type work function layer wrapping around each of the second channel members, a third p-type work function layer over the second p-type work function layer and wrapping around each of the second channel members, and a gate cap layer over a top surface of the first p-type work function layer and a top surface of the third p-type work function layer such that the gate cap layer electrically couples the first p-type work function layer and the third p-type work function layer.Type: GrantFiled: February 26, 2021Date of Patent: March 14, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chia-Wei Chen, Wei Cheng Hsu, Hui-Chi Chen, Jian-Hao Chen, Kuo-Feng Yu, Shih-Hang Chiu, Wei-Cheng Wang, Yen-Ju Chen
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Patent number: 11605638Abstract: Semiconductor structures and methods are provided. A method according to the present disclosure includes forming a first channel member, a second channel member directly over the first channel member, and a third channel member directly over the second channel member, depositing a first metal layer around each of the first channel member, the second channel member, and the third channel member, removing the first metal layer from around the second channel member and the third channel member while the first channel member remains wrapped around by the first metal layer, after the removing of the first metal layer, depositing a second metal layer around the second channel member and the third channel member, removing the second metal layer from around the third channel member, and after the removing of the second metal layer, depositing a third metal layer around the third channel member.Type: GrantFiled: June 8, 2021Date of Patent: March 14, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Shih-Hao Lin, Kian-Long Lim, Chia-Hao Pao, Chih-Chuan Yang, Chia-Wei Chen, Chien-Chih Lin
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Patent number: 11605564Abstract: A semiconductor device includes a substrate, a fin protruding from the substrate, and a gate stack over the substrate and engaging the fin. The fin having a first end and a second end. The semiconductor device also includes a dielectric layer abutting the first end of the fin and spacer features disposed on sidewalls of the gate stack and on a top surface of the dielectric layer.Type: GrantFiled: December 14, 2020Date of Patent: March 14, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Che-Cheng Chang, Chih-Han Lin, Jr-Jung Lin
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Patent number: 11605558Abstract: A method includes providing a substrate, a dielectric layer over the substrate, and metallic features over the dielectric layer; and forming an organic blocking layer (OBL) over the dielectric layer and between lower portions of the metallic features. The OBL covers sidewall surfaces of the lower portions, but not upper portions, of the metallic features. The method further includes depositing a dielectric barrier layer over top surfaces of the metallic features and over the sidewall surfaces of the upper portions of the metallic features, wherein at least a portion of a top surface of the OBL is not covered by the dielectric barrier layer; forming an inter-metal dielectric (IMD) layer between the metallic features and above the OBL; and removing the OBL, leaving an air gap above the dielectric layer, below the dielectric barrier layer and the IMD layer, and laterally between the lower portions of the metallic features.Type: GrantFiled: March 26, 2021Date of Patent: March 14, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chin-Lung Chung, Shin-Yi Yang, Ming-Han Lee
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Patent number: 11605635Abstract: In an embodiment, a method includes forming a plurality of fins adjacent to a substrate, the plurality of fins comprising a first fin, a second fin, and a third fin; forming a first insulation material adjacent to the plurality of fins; reducing a thickness of the first insulation material; after reducing the thickness of the first insulation material, forming a second insulation material adjacent to the first insulation material and the plurality of fins; and recessing the first insulation material and the second insulation material to form a first shallow trench isolation (STI) region.Type: GrantFiled: February 26, 2021Date of Patent: March 14, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Szu-Ying Chen, Sen-Hong Syue, Li-Ting Wang, Huicheng Chang, Yee-Chia Yeo
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Patent number: 11605670Abstract: The disclosure is directed to spin-orbit torque MRAM structures and methods. A SOT channel of the SOT-MRAM includes multiple heavy metal layers and one or more dielectric dusting layers each sandwiched between two adjacent heavy metal layers. The dielectric dusting layers each include discrete molecules or discrete molecule clusters of a dielectric material scattered in or adjacent to an interface between two adjacent heavy metal layers.Type: GrantFiled: May 1, 2019Date of Patent: March 14, 2023Assignees: Taiwan Semiconductor Manufacturing Co., Ltd., National Taiwan UniversityInventors: Zong-You Luo, Ya-Jui Tsou, I-Cheng Tung, CheeWee Liu
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Patent number: 11605562Abstract: A semiconductor device and a method of manufacturing the same are disclosed. The semiconductor device includes a plurality of fins on a substrate. A fin end spacer is formed on an end surface of each of the plurality of fins. An insulating layer is formed on the plurality of fins. A source/drain epitaxial layer is formed in a source/drain space in each of the plurality of fins. A gate electrode layer is formed on the insulating layer and wrapping around the each channel region. Sidewall spacers are formed on the gate electrode layer.Type: GrantFiled: January 4, 2021Date of Patent: March 14, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Tung Ying Lee, Tzu-Chung Wang, Kai-Tai Chang, Wei-Sheng Yun
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Patent number: 11605563Abstract: A semiconductor device includes a stack of semiconductor layers vertically arranged above a semiconductor base structure, a gate dielectric layer having portions each surrounding one of the semiconductor layers, and a gate electrode surrounding the gate dielectric layer. Each portion of the gate dielectric layer has a top section above the respective semiconductor layer and a bottom section below the semiconductor layer. The top section has a top thickness along a vertical direction perpendicular to a top surface of the semiconductor base structure; and the bottom section has a bottom thickness along the vertical direction. The top thickness is greater than the bottom thickness.Type: GrantFiled: April 16, 2021Date of Patent: March 14, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Yung-Hsiang Chan, Wen-Hung Huang, Shan-Mei Liao, Kuei-Lun Lin, Jian-Hao Chen, Kuo-Feng Yu
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Patent number: 11605735Abstract: Semiconductor structure and a method for fabricating the semiconductor structure are provided. The semiconductor structure includes a substrate, a doped source layer formed in the substrate; a channel pillar formed on the doped source layer; a gate structure formed on the sidewall surface of the channel pillar; a first contact layer, having a first thickness and formed at the surface of the doped source layer; and a second contact layer having a second thickness and formed on the top surface of the channel pillar. The first thickness is greater than the second thickness.Type: GrantFiled: August 14, 2020Date of Patent: March 14, 2023Assignees: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION, SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATIONInventor: Fei Zhou
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Patent number: 11605709Abstract: In an embodiment, an integrated circuit (IC) device comprises a semiconductor substrate, an isolation region and an active region disposed on the semiconductor substrate, a gate stack disposed over the active region, and a source and a drain disposed in the active region and interposed by the gate stack in a first direction. The active region is at least partially surrounded by the isolation region. A middle portion of the active region laterally extends beyond the gate stack in a second direction that is perpendicular to the first direction.Type: GrantFiled: December 14, 2020Date of Patent: March 14, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Ching-Hung Kao, Chi-Feng Huang, Fu-Huan Tsai, Victor Chiang Liang
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Patent number: 11604211Abstract: A testing device for testing an integrated circuit package is provided, including a printed circuit board having a first surface, a second surface, and multiple conductive layers between the first and second surfaces. A metal layer is formed on the second surface and is electrically connected to one of the conductive layers that is grounded. A testing socket is disposed over the first surface. A conductive fastener secures the testing socket to the printed circuit board and is electrically connected to the metal layer. A cover is disposed over the testing socket to form a space for accommodating the integrated circuit package between the cover and the testing socket. The cover has a conductive surface in contact with the integrated circuit package. A conductive element assembly is disposed between the cover and the testing socket and is electrically connected to the conductive surface and the conductive fastener.Type: GrantFiled: August 30, 2021Date of Patent: March 14, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Shao-Chun Chiu, Wen-Feng Liao, Hao Chen, Chun-Hsing Chen
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Patent number: 11605737Abstract: A device includes a substrate, a semiconductor layer, a gate structure, source/drain regions, a bottom isolation layer, and a bottom spacer. The semiconductor layer is above the substrate. The gate structure is above the substrate and surrounds the semiconductor layer. The source/drain regions are on opposite sides of the semiconductor layer. The bottom isolation layer is between the substrate and the semiconductor layer. The bottom spacer is on a sidewall of the bottom isolation layer. The bottom isolation layer has a seam therein, and the seam exposes a sidewall of the bottom spacer.Type: GrantFiled: April 18, 2022Date of Patent: March 14, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Zhi-Chang Lin, Shih-Cheng Chen, Jung-Hung Chang, Lo-Heng Chang, Chien-Ning Yao
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Patent number: 11606084Abstract: An oscillation circuit is provided. The oscillation circuit includes a first inverting circuit. The first inverting circuit comprises a first transistor of a first type and a second transistor of the first type, wherein a gate terminal of the first transistor is connected to a gate terminal of the second transistor, and a source terminal of the first transistor is connected to a drain terminal of the second transistor.Type: GrantFiled: September 12, 2020Date of Patent: March 14, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Yung-Shun Chen, Chih-Chiang Chang, Yung-Chow Peng
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Patent number: 11605422Abstract: A circuit includes a memory array, a control circuit configured to identify an address of a first row containing a weak cell, and store corresponding address information in a storage device, and an address decoding circuit including NAND pairs, inverter pairs, and a logic tree. Each NAND pair receives corresponding bits of the address information and the address of the first row and corresponding inverted bits of the address information and the address of the first row inverted by corresponding inverter pairs, and output terminals of the NAND pairs are connected to the logic tree. The logic tree matches the address information with the address of the first row based on output logic levels from the NAND pairs and, in response to the corresponding address information matching the address of the first row, activates a second row of the memory array simultaneously with the first row being activated.Type: GrantFiled: May 27, 2021Date of Patent: March 14, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventor: Shih-Lien Linus Lu
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Publication number: 20230073308Abstract: A structure includes a substrate, a transistor, a contact, an oxygen-free etch stop layer, an oxygen-containing etch stop layer, a dielectric layer, and a via. The transistor is on the substrate. The contact is on a source/drain region of the transistor. The oxygen-free etch stop layer spans the contact. The oxygen-containing etch stop layer extends along a top surface of the oxygen-free etch stop layer. The dielectric layer is over the oxygen-containing etch stop layer. The via passes through the dielectric layer, the oxygen-containing etch stop layer, and the oxygen-free etch stop layer and lands on the contact. The memory stack lands on the via.Type: ApplicationFiled: November 9, 2022Publication date: March 9, 2023Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO, LTD.Inventors: Jung-Tang WU, Szu-Ping TUNG, Szu-Hua WU, Shing-Chyang PAN, Meng-Yu WU
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Publication number: 20230075909Abstract: An electronic apparatus, a semiconductor package module and a method for manufacturing the semiconductor package module are provided. The semiconductor package module includes: an encapsulated structure, including a device die and an encapsulant laterally enclosing the device die; a package substrate, attached to a first side of the encapsulated structure; a composite thermal interfacial structure, disposed on a second side of the encapsulated structure, and including thermally conductive elements arranged side by side or stacked along a vertical direction; a ring structure, attached to the package substrate and laterally surrounding the encapsulated structure; and a heat spreader, attached to the second side of the encapsulated structure through the composite thermal interfacial structure, and supported by the ring structure.Type: ApplicationFiled: April 14, 2022Publication date: March 9, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Wensen Hung, Tsung-Yu Chen, Jia-Syuan Li, Chen-Hsiang Lao, Hung-Chi Li