Patents Assigned to Sensirion AG
  • Publication number: 20240230519
    Abstract: A photoacoustic gas sensor device for determining a value indicative of a presence or a concentration of a chemical component in a gas comprises a substrate and a measurement cell body arranged on a first side of the substrate. The substrate and the measurement cell body define a measurement cell. A cap is arranged on the first side of the substrate within the measurement cell. The cap and the substrate define a cap volume. The cap and the substrate acoustically seal the cap volume. A measurement volume is confined by the measurement cell body, the substrate and the cap. An aperture is provided in the measurement cell for the gas to enter the measurement volume. Electrical components are arranged on the first side of the substrate and in the measurement cell.
    Type: Application
    Filed: February 24, 2022
    Publication date: July 11, 2024
    Applicant: SENSIRION AG
    Inventors: Thomas UEHLINGER, Christophe SALZMANN
  • Patent number: 12025555
    Abstract: A photodetector comprises a substrate, and supported by the substrate, a configuration to act as optical resonator and to absorb incident radiation of a band, including infrared. The configuration comprises: a resonant frontside structure facing the incident radiation; a backside structure and arranged between the frontside structure and the substrate; and a layer of an active material made from a semiconducting material, and configured to convert at least part of the incident radiation of the band into charge carriers. The frontside structure or the backside structure is made from electrically conducting material and is in contact with the active material. The configuration is configured to selectively absorb the incident radiation of the band. The frontside structure or the backside structure that is in contact with the active material is contacted by electrical contacts for sensing the charge carriers in the active material. The active material comprises amorphous or polycrystalline material.
    Type: Grant
    Filed: June 19, 2020
    Date of Patent: July 2, 2024
    Assignee: SENSIRION AG
    Inventors: Alexander Dorodnyy, Alexander Lochbaum, Jürg Leuthold, Lukas Bürgi, Silvio Graf
  • Publication number: 20240192121
    Abstract: A sensor device (10) comprises an environmental sensor (22) for determining an environmental parameter associated with a sensor gas flow (F2) through the sensor device. The environmental sensor may be a particulate matter sensor for detecting particulate matter in the sensor gas flow. The sensor gas flow is preheated upstream of the environmental sensor (22). To this end, waste heat generated by the environmental sensor (22) itself and/or by a different sensor (12) that is comprised in the sensor device is used. In this manner, the effects of evaporable droplets in the sensor gas flow (F2), as typically present in fog, may be reduced. In some embodiments, a fog signal is derived.
    Type: Application
    Filed: April 9, 2021
    Publication date: June 13, 2024
    Applicant: Sensirion AG
    Inventors: Dominik NIEDERBERGER, Nico STUDER, Daniel RÜFFER, Dominik LEUENBERGER, Frank GÜTLE, Thomas KRÄHENBÜHL, Zeljko MRCARICA, Lukas HOPPENAU, Stefan KOSTNER
  • Publication number: 20240133801
    Abstract: A photoacoustic gas sensor device for determining a value indicative of a presence or a concentration of a chemical component in a gas comprises a substrate and a measurement cell body arranged on a first side of the substrate. The substrate and the measurement cell body define a measurement cell. A cap is arranged on the first side of the substrate within the measurement cell. The cap and the substrate define a cap volume. The cap and the substrate acoustically seal the cap volume. A measurement volume is confined by the measurement cell body, the substrate and the cap. An aperture is provided in the measurement cell for the gas to enter the measurement volume. Electrical components are arranged on the first side of the substrate and in the measurement cell.
    Type: Application
    Filed: February 24, 2022
    Publication date: April 25, 2024
    Applicant: SENSIRION AG
    Inventors: Thomas UEHLINGER, Christophe SALZMANN
  • Patent number: 11965807
    Abstract: A duct probe (20) for sampling a fluid from a main fluid flow (Fm) in a duct (10) defines an elongated supply channel (21) n elongated discharge channel (22). The supply channel has at least one inflow opening (23) for diverting a partial flow (Fp) from the main fluid flow into the supply channel, and the discharge channel has at least one outflow opening for returning the partial flow from the discharge channel into the main fluid flow after it has passed an environmental sensor (30). The duct probe further comprises at least one compensation opening (26) that connects the supply channel and the discharge channel in a region that is located between their closed and open ends. By the presence of the compensation opening (26), a jet flow (Fj) is created, which acts to reduce a pressure difference between the supply channel and the discharge channel when the duct probe is exposed to the main fluid flow (Fm).
    Type: Grant
    Filed: May 19, 2020
    Date of Patent: April 23, 2024
    Assignee: Sensirion AG
    Inventors: Nicolas Moeller, Mark Hornung, Stefan Thiele, Patrick Leidenberger, Stefan Kostner
  • Patent number: 11953486
    Abstract: The present invention relates to a sensor (1) for sensing organic carbon in a liquid (L), comprising: a container (2) having an interior space (20) for receiving the liquid (L), a photodetector (3), and a light source (4) configured to emit ultraviolet light (5) so that the ultraviolet light (5) travels along an optical path (P) through liquid (L) residing in the interior space (20) and is absorbable by carbon bonds of organic molecules in the liquid (L).
    Type: Grant
    Filed: July 19, 2020
    Date of Patent: April 9, 2024
    Assignee: SENSIRION AG
    Inventors: Raffaele Di Giacomo, Matthias Streiff, Michael Merz, Nicolas Moeller
  • Patent number: 11946888
    Abstract: A thermal sensor device is configured to determine a fluid parameter of a fluid based on the heat transfer behavior of the fluid. The sensor device comprises one or more heaters and means for determining a response of the sensor device to heater power being supplied to the heaters. For detecting sensor faults, the sensor device is operated in two different modes of operation. First and second values (cstatic, cdynamic) of the same fluid parameter are determined in the two modes. A fault indicator value (F) is derived by comparing the first and second values. The first mode of operation may be a steady-state mode, the first value (cstatic) being based on a steady-state response of the sensor device to heater power being supplied to the heaters, and the second mode of operation may be a dynamic mode, the second value (cstatic) being based on a transient response.
    Type: Grant
    Filed: December 2, 2021
    Date of Patent: April 2, 2024
    Assignee: Sensirion AG
    Inventors: Eric Monnin, David Kiliani, Andreas Rüegg, Mark Hornung
  • Patent number: 11940370
    Abstract: A particulate matter sensor device comprising an enclosure (21) that comprises a flow inlet (11), a flow outlet (12) and a flow channel (2) extending therebetween, a radiation source for emitting radiation into the flow channel (2) for interaction of the radiation with the particulate matter in the flow (20) of an aerosol sample when guided through the flow channel (2), a radiation detector (4) for detecting at least part of said radiation after interaction with the particulate matter. The sensor device comprises a flow modifying device (511) arranged upstream of the radiation detector (4) and/or of the radiation source (3) for modifying the flow (20) for reducing particulate matter precipitation onto the radiation detector (4) and/or onto the radiation source (3) and/or the channel wall sections in close proximity to the detector (4) and/or source (3). The invention also relates to a method of determining parameters of particulate matter in an aerosol sample by using such a particulate matter sensor device.
    Type: Grant
    Filed: September 17, 2021
    Date of Patent: March 26, 2024
    Assignee: Sensirion AG
    Inventors: Frank Gütle, Ulrich Leidenberger, {hacek over (Z)}eljko Mrcarica, Stefan Kostner, Stefan Thiele
  • Patent number: 11898953
    Abstract: A particulate matter sensor device comprises an enclosure (21) defining a flow channel (2), a radiation source (3) for emitting radiation into the flow channel for interaction of the radiation with particulate matter in an aerosol sample in the flow channel, and a radiation detector (4) for detecting at least part of said radiation after interaction with the particulate matter. The sensor device comprises a flow modifying device (511) arranged upstream of the radiation detector and/or radiation source so as to reduce particulate matter precipitation onto the radiation detector, the radiation source and/or the channel wall sections in their proximity. The invention also relates to a method of determining parameters of particulate matter in an aerosol sample by using such a particulate matter sensor device.
    Type: Grant
    Filed: March 13, 2018
    Date of Patent: February 13, 2024
    Assignee: Sensirion AG
    Inventors: Frank Gütle, Ulrich Leidenberger, {hacek over (Z)}eljko Mr{hacek over (c)}arica, Stefan Kostner, Stefan Thiele
  • Patent number: 11879752
    Abstract: A sensor module as well as a method for manufacturing a sensor module for determining a property of a fluid, in particular for measuring air quality, comprises a printed circuit board, at least one sensor on the printed circuit board for measuring a parameter of the surrounding air and a housing for the printed circuit board. A part of the printed circuit board protrudes from an opening in the housing (10), wherein the at least one sensor (21, 22) is located on a front side of the protruding part of the printed circuit board. In addition, at least the front side of the protruding part of the printed circuit board, with the exception of a recess for the at least one sensor, is encapsulated with a filling compound. The sensor module can be used in an interior or an air duct of motor vehicles or buildings. In one embodiment, the sensor module measures temperature, relative humidity and gas concentration in a fluid, especially in the surrounding air.
    Type: Grant
    Filed: October 23, 2018
    Date of Patent: January 23, 2024
    Assignee: Sensirion AG
    Inventors: Stephan Braun, Tobias Schmid, Thomas Brugger, Matthias Merz, Manuel Becker
  • Patent number: 11796522
    Abstract: A gas sensor includes a support structure with a cavity, a sensing element sensitive to a gas and arranged in the cavity, and a filter spanning the cavity. The filter is a size selective filter.
    Type: Grant
    Filed: October 11, 2021
    Date of Patent: October 24, 2023
    Assignee: SENSIRION AG
    Inventors: Pernilla Andersson, Roman Pavelko, Aline Rotzetter
  • Patent number: 11761876
    Abstract: A particulate matter (PM) sensor comprises a substrate forming a cavity (5), the substrate comprising a semiconductor chip (4), and a light source (1) arranged in the cavity (5). The light source (1) is adapted to emit a light beam (7). The light beam (7) forms a detection volume (8) for particulate matter (9) outside the cavity (5). Optionally, the particulate matter sensor comprises an optical element (2) delimiting the cavity (5) at one end. The optical element (2) is configured to shape the light beam (7). Further, the particulate matter sensor comprises at least one photodetector (3) that is integrated into a surface of the semiconductor chip (4). The surface into which the at least one photodetector (3) is integrated faces the detection volume (8). The at least one photodetector (3) is adapted to detect light (10) scattered by particulate matter (9) in the detection volume (8).
    Type: Grant
    Filed: October 21, 2022
    Date of Patent: September 19, 2023
    Assignee: Sensirion AG
    Inventors: Frank Gütle, Lukas Hoppenau, Lukas Rüthemann, David Pustan, Werner Hunziker
  • Patent number: 11754492
    Abstract: A photoacoustic gas sensor device is proposed for determining a value indicative of a presence or a concentration of a component in a gas. The photoacoustic gas sensor device comprises a substrate, and a measurement cell body arranged on a first side of the substrate. The substrate and the measurement cell body define a measurement cell enclosing a measurement volume. The measurement cell comprises an aperture for a gas to enter the measurement volume. The device further comprises an electromagnetic radiation source for emitting electromagnetic radiation, and a microphone for measuring a sound wave generated by the component in response to an absorption of electromagnetic radiation by the component. The electromagnetic radiation source and the microphone are arranged on the first side of the substrate and in the measurement volume. The microphone has a bottom port facing the substrate, and the measurement volume is communicatively coupled to the bottom port.
    Type: Grant
    Filed: April 16, 2020
    Date of Patent: September 12, 2023
    Assignee: Sensirion AG
    Inventor: Thomas Uehlinger
  • Patent number: 11726052
    Abstract: A capacitive sensor includes a substrate and an electrode structure including at least a first electrode, a second electrode and a sensing layer arranged between the first electrode and the second electrode. The sensor further includes a measurement circuit configured to measure the capacitance of the electrode structure by applying, at a first measurement phase, a first pair of electrical potentials including a first electrical potential of the first electrode and a first electrical potential of the second electrode to the first electrode and the second electrode by applying, at a second measurement phase, a second pair of electrical potentials including a second electrical potential of the first electrode and a second electrical potential of the second electrode to the first electrode and the second electrode. The first electrical potential of the second electrode and the second electrical potential of the second electrode are different from each other.
    Type: Grant
    Filed: February 19, 2020
    Date of Patent: August 15, 2023
    Assignee: Sensirion AG
    Inventor: Marcel Plüss
  • Publication number: 20230227883
    Abstract: The invention relates to a method for culturing and detecting microorganisms, comprising the steps of providing a liquid sample (S) in a barrel (10) of a device (1) for culturing and detecting microorganisms, passing the liquid sample (S) through a first filtering membrane (40) such that microorganisms contained in the liquid sample (S) are retained at a first side (41) of the first filtering membrane (40), contacting said first side (41) with a first growth medium (210) capable of supporting growth of microorganisms, incubating the first filtering membrane (40) and the first growth medium (210) at an incubation temperature, arranging a sensing surface (51) of a gas sensor (50) in fluid connection with a second side (42) of the first filtering membrane (40), detecting a metabolic gas released by the microorganisms by means of the gas sensor (50).
    Type: Application
    Filed: February 4, 2021
    Publication date: July 20, 2023
    Applicant: SENSIRION AG
    Inventors: Deborah HUBER, Matthias STREIFF, Oliver BALTENSPERGER, Raffaele DI GIACOMO
  • Patent number: 11703470
    Abstract: A sensor device for determining at least one heat transfer parameter of a gas comprises a sensor unit (10) comprising at least one heater element and at least one temperature sensor. A first (inner) housing (20) receives the sensor unit. The first housing comprises a first membrane (22) allowing a diffusive gas exchange between the exterior and the interior of the first housing. The first housing is received in a second (outer) housing (30). The second housing comprises a second membrane (32) allowing a diffusive gas exchange between the exterior of the second housing and the exterior of the first housing. Thereby temperature gradients inside the first housing are reduced. The second housing can be made of metal and can be disposed on a support plate (40), taking the form of a cap. An auxiliary sensor (50) can be arranged in the space between the first and second housings.
    Type: Grant
    Filed: June 21, 2021
    Date of Patent: July 18, 2023
    Assignee: Sensirion AG
    Inventors: Mark Hornung, Eric Monnin
  • Publication number: 20230194450
    Abstract: A thermal sensor device serves for determining a concentration of a target gas in a gas sample that further comprises a disturbance gas. The thermal sensor device comprises first and second measurement structures (1, 2) comprising first and second temperature sensors (TS1, TS2) and a heater element (31) operable to cause heat transfer to the measurement structures through the gas sample. Processing circuitry provides heating power (P3) to the heater element and derives an output signal (S) based on a response of the temperature sensors to the heating power, the output signal being indicative of a concentration of the target gas in the gas sample. The first and second measurement structures have different heat dissipation capabilities, and the processing circuitry derives the output signal from a weighted difference of temperature signals from the first and second temperature sensors.
    Type: Application
    Filed: December 15, 2022
    Publication date: June 22, 2023
    Applicant: Sensirion AG
    Inventors: Andreas RÜEGG, David KILIANI, Matthias STUDER, Nicolas MOELLER, Mark HORNUNG, Lukas BÜRGI
  • Patent number: 11674833
    Abstract: A thermal sensor comprises an active element (41), e.g., a heater or cooler, at least one temperature sensor (31), and processing circuitry (50). The processing circuitry causes a change of power supplied to the active element (41). It then determines, at a plurality of times, a thermal parameter based on an output signal of the temperature sensors and analyzes the transient behavior of the thermal parameter. Based on this analysis, the processing circuitry determines a contamination signal that is indicative of a contamination on a sensing surface of the thermal sensor. If the thermal sensor comprises a plurality of temperature sensors arranged in different sectors of the sensing surface, a multi-sector thermal signal can be derived from the outputs of the sensors, and determination of the contamination signal can be based on the multi-sector thermal signal.
    Type: Grant
    Filed: December 10, 2019
    Date of Patent: June 13, 2023
    Assignee: Sensirion AG
    Inventors: Mark Hornung, Andreas Rüegg, Harry Figi, Lucas Huber
  • Publication number: 20220390425
    Abstract: A gas sensor includes a support structure with a cavity, a sensing element sensitive to a gas and arranged in the cavity, and a filter spanning the cavity. The filter is a size selective filter.
    Type: Application
    Filed: October 11, 2021
    Publication date: December 8, 2022
    Applicant: SENSIRION AG
    Inventors: Pernilla ANDERSSON, Roman PAVELKO, Aline ROTZETTER
  • Patent number: 11513092
    Abstract: The invention is directed to a gas sensor that includes a hotplate, a support structure, a gas selective filter, and circuitry. The support structure is configured to define a cavity. The gas selective filter is held by the support structure and spans the cavity. Various components are connected to the circuitry, and may include a temperature sensor element, a gas sensing element, and a heater. The temperature sensor element is configured to sense a temperature Tf of the filter. The gas sensing element is sensitive to a target gas in the cavity. The heater is in thermal communication with the gas sensing element. The circuitry is configured to operate the sensing element, estimate a temperature Tf of the filter, and regulate the heater. The circuitry regulates an extent to which power is supplied to the heater based on the estimated temperature Tf of the filter.
    Type: Grant
    Filed: September 23, 2020
    Date of Patent: November 29, 2022
    Assignee: Sensirion AG
    Inventors: Michael Rabe, Robert Meyer-Piening, Matthias Studer