Patents Assigned to Sensirion AG
  • Patent number: 9562871
    Abstract: An integrated chemical sensor chip comprises on or integrated in a common substrate a chemically sensitive layer and a heater heating the sensitive layer. In addition, a memory is provided for the storage of a measurement routine, the measurement routine comprising instructions defining a heating process over time and instructions defining one or more measurement points in time. An I/O interface is provided for receiving a trigger for the measurement routine and for supplying a result of the measurement routine. An engine controls the heater and measures a resistance of the sensitive layer according the instructions of the measurement routine.
    Type: Grant
    Filed: August 14, 2015
    Date of Patent: February 7, 2017
    Assignee: Sensirion AG
    Inventors: Moritz Lechner, Samuel Fuhrer, Zeljko Mrcarica, Ferdinando Pace, Leo Zimmerman
  • Patent number: 9562915
    Abstract: A breath analyzer is described with at least one chemical sensor sensitive to the concentration of a component in a sample of exhaled breath including a compensator for compensating for the effect of variations in the amount of exhaled breath between the user and the sensor location with the chemical sensor being integrated into a portable electronic device, particularly with the sensor being located in an air duct with an opening to the exterior of the housing of the analyzer with the total area of the opening being sufficiently small to restrict effectively mass transport between the exterior and the sensor and/or wherein the compensation includes the compensation for different responses of sensors.
    Type: Grant
    Filed: January 22, 2014
    Date of Patent: February 7, 2017
    Assignee: Sensirion AG
    Inventors: Lukas Burgi, Felix Mayer, Frank Roeck
  • Publication number: 20170017246
    Abstract: A mass flow controller (10) comprises a fluid inlet (15) and at least one first flow meter (11) to measure a first flow rate (F1) and to output a first flow signal (FS1); at least one second flow meter (12) to measure a second flow (F2) rate and to output a second flow signal (FS2); a control device (13) connected to said first and second flow meters (11,12) and configured and arranged to generate a control signal (C); and at least one control valve (14) connected to said control device (13) to control a total flow rate (Fout) through the mass flow controller (10) in response to the control signal (C). The control signal (C) is generated as a function of both the first and second flow signals (FS1,FS2) such that the mass flow controller's (10) sensitivity to perturbations of said inlet pressure is minimized.
    Type: Application
    Filed: July 15, 2016
    Publication date: January 19, 2017
    Applicant: Sensirion AG
    Inventors: Mark HORNUNG, Thomas HUBER, Philipp REIBISCH, Andreas ROEGG
  • Patent number: 9518970
    Abstract: A measuring device is provided for determining the type and/or concentration a gaseous analyte from a set of analytes in a gaseous carrier. It comprises a housing having a passage to a cavity. A gas sensor with a heated metal-oxide sensing layer is arranged in the cavity. In order to gain a better understanding of the type of the analyte, diffusion effects are exploited by taking into account that the diffusion process through the passage as well as the catalytic reaction rate at the metal-oxide sensing layer depend on the type of the analyte. These material parameters can be determined by taking several measurements in a non-steady state of the concentration of the analyte within the cavity or while varying the reaction rate.
    Type: Grant
    Filed: January 22, 2014
    Date of Patent: December 13, 2016
    Assignee: Sensirion AG
    Inventors: Lukas Burgi, Frank Roeck
  • Patent number: 9511646
    Abstract: A sensor module for integration within a seat assembly is provided. The sensor module comprises a temperature and/or humidity sensor (21) and a separate sensor support (51) for mechanically supporting said temperature and/or humidity sensor. The sensor support is configured to be arranged on or in a support layer below an air-permeable cover of the seat assembly.
    Type: Grant
    Filed: February 24, 2015
    Date of Patent: December 6, 2016
    Assignee: Sensirion AG
    Inventors: Christoph Müller, Michael Götze, Markus Graf
  • Patent number: 9508823
    Abstract: In a method for manufacturing a chemical sensor with multiple sensor cells, a substrate is provided and an expansion inhibitor is applied to the substrate for preventing a sensitive material to be applied to an area on the substrate for building a sensitive film of a sensor cell to expand from said area. The sensitive material is provided and the sensitive film is built by contactless dispensing the sensitive material to said area.
    Type: Grant
    Filed: June 26, 2014
    Date of Patent: November 29, 2016
    Assignee: Sensirion AG
    Inventors: Felix Mayer, Markus Graf, Lukas Burgi
  • Patent number: 9506885
    Abstract: A sensor chip comprises a substrate (1) with a front side (11) and a back side (12), and an opening (13) in the substrate (1) reaching through from its back side (12) to its front side (11). A stack (2) of dielectric and conducting layers is arranged on the front side (11) of the substrate (1), a portion of which stack (2) spans the opening (13) of the substrate (1). Contact pads (32) are arranged at the front side (11) of the substrate (1) for electrically contacting the sensor chip. A sensing element (4) is arranged on the portion of the stack (2) spanning the opening (13) on a side of the portion facing the opening (13).
    Type: Grant
    Filed: September 10, 2015
    Date of Patent: November 29, 2016
    Assignee: Sensirion AG
    Inventors: Felix Mayer, Ulrich Bartsch, Martin Winger, Markus Graf, Pascal Gerner
  • Patent number: 9466498
    Abstract: A CMOS gas sensor comprises a membrane (13) extending over an opening (12) of a silicon substrate (1). A patch (2) of sensing material is arranged on the membrane (13) and in contact with electrodes (3) of platinum. A heater (5) of tungsten is located in or on the membrane (13) at the location of the patch (2) of metal-oxide sensing material. Combining platinum electrodes (3) with a tungsten heater (5) on top of a CMOS structure provides a gas sensor of high reliability and stability.
    Type: Grant
    Filed: January 22, 2014
    Date of Patent: October 11, 2016
    Assignee: Sensirion AG
    Inventors: Johannes Buhler, Cyrill Kuemin
  • Patent number: 9456749
    Abstract: A portable electronic device is described with telecommunication capabilities to allow for data and/or voice communication via private or public networks, having an integrated chemical sensor sensitive to ketones within a breath sample of a user wherein the sensor comprises at least one metal oxide gas sensor and a control circuit for the sensor integrated onto a common substrate or package.
    Type: Grant
    Filed: January 22, 2014
    Date of Patent: October 4, 2016
    Assignee: Sensirion AG
    Inventors: Frank Roeck, Moritz Lechner, Michael Dommer
  • Patent number: 9437514
    Abstract: A semiconductor package including an integrated device, the package having a front side, a back side and side walls linking the front and back sides, wherein each side wall is coated, to at least 80% of its area, with a coating material different from the material(s) of the back and front sides. A method of manufacturing a semiconductor package by providing an assembly containing an array of the packages, the assembly having thickness d0 and being attached to a dicing tape of thickness dd, fabricating a set of first dicing streets with width w1 and depth d1<(d0+dd), filling the first dicing streets at least partially with a coating material, and fabricating, in the coating material in each first dicing street, a second dicing street with width w2?w1 and depth d2?d0 but <(d0+dd).
    Type: Grant
    Filed: April 28, 2015
    Date of Patent: September 6, 2016
    Assignee: Sensirion AG
    Inventor: Werner Hunziker
  • Patent number: 9401983
    Abstract: A chemical alert system for generating an alarm is described including a portable electronic device, preferably with telecommunication capabilities to allow for data and/or voice communication via private or public networks, and at least one chemical sensor integrated with the housing of the portable device and controlled by a chemical sensor processing unit, further comprising an alert discriminator receiving input based on measurements of the chemical sensor, performing a test on the input and based on an outcome of the test initiating the transfer of measurements of the chemical sensor to a remote processing facility.
    Type: Grant
    Filed: January 22, 2014
    Date of Patent: July 26, 2016
    Assignee: Sensirion AG
    Inventors: Moritz Lechner, Rafael Santschi
  • Patent number: 9366720
    Abstract: In a method for manufacturing a sensor chip a spacer (3) is arranged at the front side (11) of a substrate (1) at which front side (11) a sensing element (2) is arranged, too. Holes (14) are etched for building vias (15) extending through the substrate (1) between the front side (11) of the substrate (1) and its back side (12). After etching, the holes (14) are filled with conductive material to complete the vias (15). The spacer (3) provides protection to the sensing element (2) and the sensing chip throughout the manufacturing process.
    Type: Grant
    Filed: January 26, 2012
    Date of Patent: June 14, 2016
    Assignee: Sensirion AG
    Inventors: Markus Graf, Matthias Streiff, Werner Hunziker, Christoph Schanz
  • Patent number: 9366584
    Abstract: In a portable electronic device components (2) consuming electrical power during operation may generate heat. A temperature sensor (1) for sensing an ambient temperature (TS) of the portable electronic device may as a consequence not supply the correct temperature value. It is suggested to provide a compensator (4) for determining a compensated ambient temperature (TA) dependent on at least the sensed ambient temperature (TS) and information (Pi) related to the electrical power consumed by at least one of the components (2).
    Type: Grant
    Filed: November 1, 2013
    Date of Patent: June 14, 2016
    Assignee: Sensirion AG
    Inventors: Markus Graf, Andreas Tiefenauer, Andrea Sacchetti, Dominik Niederberger
  • Publication number: 20160161951
    Abstract: A method for determining a fluid composition parameter, e.g., a fluid identifier, a mixing ratio or a parameter describing heat transfer properties, of an unknown fluid in a mass flow controller is disclosed. A control valve of the mass flow controller is set so as to establish a constant flow, preferably zero flow, through the mass flow controller. A heating element of the flow sensor is heated, and at least one temperature value is measured with temperature sensors arranged on both sides of the heater while the fluid contacts the flow sensor. First calibration data (LUT1) are retrieved. The first calibration data have, as input values, temperature values measured with the flow sensor at the previously established constant flow and have, as output values, values of the fluid composition parameter. The first calibration data are used to determine the fluid composition parameter from the measured temperature value.
    Type: Application
    Filed: December 3, 2015
    Publication date: June 9, 2016
    Applicant: Sensirion AG
    Inventors: Mark HORNUNG, Remo Fürst, Thomas Huber
  • Patent number: 9341499
    Abstract: Disclosed is a method for adjusting a sensor signal and a corresponding sensor system comprising a sensor for providing a sensor signal representative of a measure other than temperature, dynamic components of the sensor signal being dependent on temperature. In addition there is provided a temperature sensor for measuring the temperature. Dynamic components in the sensor signal are adjusted subject to the temperature sensed, and a compensated sensor signal is supplied. Such sensor system helps compensating for long response times of sensors.
    Type: Grant
    Filed: May 17, 2011
    Date of Patent: May 17, 2016
    Assignee: Sensirion AG
    Inventors: Markus Graf, Vincent Hess, Dominik Niederberger
  • Patent number: 9312713
    Abstract: In a method for operating a portable electronic device a recharge process for recharging a rechargeable energy storage of the portable electronic device is detected. A heater is activated for heating a sensitive layer of a chemical sensor contained in the portable electronic device subject to the detection of the recharge process.
    Type: Grant
    Filed: March 6, 2013
    Date of Patent: April 12, 2016
    Assignee: Sensirion AG
    Inventors: Markus Graf, Moritz Lechner
  • Patent number: 9224658
    Abstract: A sensing device has a semiconductor substrate with an opening and a membrane spanning the opening. A heater is arranged on the membrane. To reduce the thermal conductivity of the membrane, a recess is etched into the membrane from below.
    Type: Grant
    Filed: January 22, 2014
    Date of Patent: December 29, 2015
    Assignee: Sensirion AG
    Inventors: Robert Sunier, Cyrill Kuemin, Rene Hummel
  • Patent number: 9188464
    Abstract: The present sensing device comprises a sensor (1, ) for providing sensor data representative of a quantity to be measured. Together with the sensor (1, ) a radio frequency interface (2, ) for transmitting the sensor data is arranged in a casing (3, ). The casing (3, ) comprises an opening (33, ) for exposing a sensitive element (11, ) of the sensor (1, ) to an environment of the casing (3, ). A seal (4, ) is provided for sealing the opening (33, ) against an interior (3, ) of the casing (3, ). The sensing device can be used as autonomous humidity detector for detecting humidity e.g. in cars under test.
    Type: Grant
    Filed: December 16, 2011
    Date of Patent: November 17, 2015
    Assignee: Sensirion AG
    Inventors: Markus Graf, Pascal Gerner, Christian Landis, Matthias Streiff
  • Patent number: 9176576
    Abstract: An input device for triggering a function of an electronic device comprises a humidity sensor (12), and a control unit (11). The control unit (11) analyzes a humidity signal (RH) supplied by the humidity sensor (12) and provides a trigger signal (C) subject to the analysis of the humidity signal (RH) for triggering the function of the electronic device (3). In such way, the function of the electronic device can simply be controlled by blowing at the input device (1).
    Type: Grant
    Filed: December 29, 2011
    Date of Patent: November 3, 2015
    Assignee: Sensirion AG
    Inventors: Dominic Böni, Robert Rupprecht, Andrea Wüest, Pascal Gerner
  • Patent number: 9146143
    Abstract: There is disclosed a flow sensor arrangement, comprising a main channel (1) for conveying a fluid, a bypass (2) connected to the main channel (1) for conveying a portion of the fluid supplied in the main channel (1), and a flow sensor (6) for measuring a flow of the fluid portion in the bypass (2). The bypass (2) branches off from the main channel (1) at an angle (?) of less than 90 degrees between an inlet section (21) of the bypass (2) and a supply section (11) of the main channel (1). By such design means, particles can be prevented from entering the bypass (2) by this adversely affecting the measurements.
    Type: Grant
    Filed: August 17, 2010
    Date of Patent: September 29, 2015
    Assignee: Sensirion AG
    Inventors: Mark Hornung, Felix Mayer, Claudia Kuttel