Patents Assigned to Sensirion AG
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Patent number: 9562871Abstract: An integrated chemical sensor chip comprises on or integrated in a common substrate a chemically sensitive layer and a heater heating the sensitive layer. In addition, a memory is provided for the storage of a measurement routine, the measurement routine comprising instructions defining a heating process over time and instructions defining one or more measurement points in time. An I/O interface is provided for receiving a trigger for the measurement routine and for supplying a result of the measurement routine. An engine controls the heater and measures a resistance of the sensitive layer according the instructions of the measurement routine.Type: GrantFiled: August 14, 2015Date of Patent: February 7, 2017Assignee: Sensirion AGInventors: Moritz Lechner, Samuel Fuhrer, Zeljko Mrcarica, Ferdinando Pace, Leo Zimmerman
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Patent number: 9562915Abstract: A breath analyzer is described with at least one chemical sensor sensitive to the concentration of a component in a sample of exhaled breath including a compensator for compensating for the effect of variations in the amount of exhaled breath between the user and the sensor location with the chemical sensor being integrated into a portable electronic device, particularly with the sensor being located in an air duct with an opening to the exterior of the housing of the analyzer with the total area of the opening being sufficiently small to restrict effectively mass transport between the exterior and the sensor and/or wherein the compensation includes the compensation for different responses of sensors.Type: GrantFiled: January 22, 2014Date of Patent: February 7, 2017Assignee: Sensirion AGInventors: Lukas Burgi, Felix Mayer, Frank Roeck
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Publication number: 20170017246Abstract: A mass flow controller (10) comprises a fluid inlet (15) and at least one first flow meter (11) to measure a first flow rate (F1) and to output a first flow signal (FS1); at least one second flow meter (12) to measure a second flow (F2) rate and to output a second flow signal (FS2); a control device (13) connected to said first and second flow meters (11,12) and configured and arranged to generate a control signal (C); and at least one control valve (14) connected to said control device (13) to control a total flow rate (Fout) through the mass flow controller (10) in response to the control signal (C). The control signal (C) is generated as a function of both the first and second flow signals (FS1,FS2) such that the mass flow controller's (10) sensitivity to perturbations of said inlet pressure is minimized.Type: ApplicationFiled: July 15, 2016Publication date: January 19, 2017Applicant: Sensirion AGInventors: Mark HORNUNG, Thomas HUBER, Philipp REIBISCH, Andreas ROEGG
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Patent number: 9518970Abstract: A measuring device is provided for determining the type and/or concentration a gaseous analyte from a set of analytes in a gaseous carrier. It comprises a housing having a passage to a cavity. A gas sensor with a heated metal-oxide sensing layer is arranged in the cavity. In order to gain a better understanding of the type of the analyte, diffusion effects are exploited by taking into account that the diffusion process through the passage as well as the catalytic reaction rate at the metal-oxide sensing layer depend on the type of the analyte. These material parameters can be determined by taking several measurements in a non-steady state of the concentration of the analyte within the cavity or while varying the reaction rate.Type: GrantFiled: January 22, 2014Date of Patent: December 13, 2016Assignee: Sensirion AGInventors: Lukas Burgi, Frank Roeck
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Patent number: 9511646Abstract: A sensor module for integration within a seat assembly is provided. The sensor module comprises a temperature and/or humidity sensor (21) and a separate sensor support (51) for mechanically supporting said temperature and/or humidity sensor. The sensor support is configured to be arranged on or in a support layer below an air-permeable cover of the seat assembly.Type: GrantFiled: February 24, 2015Date of Patent: December 6, 2016Assignee: Sensirion AGInventors: Christoph Müller, Michael Götze, Markus Graf
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Patent number: 9508823Abstract: In a method for manufacturing a chemical sensor with multiple sensor cells, a substrate is provided and an expansion inhibitor is applied to the substrate for preventing a sensitive material to be applied to an area on the substrate for building a sensitive film of a sensor cell to expand from said area. The sensitive material is provided and the sensitive film is built by contactless dispensing the sensitive material to said area.Type: GrantFiled: June 26, 2014Date of Patent: November 29, 2016Assignee: Sensirion AGInventors: Felix Mayer, Markus Graf, Lukas Burgi
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Patent number: 9506885Abstract: A sensor chip comprises a substrate (1) with a front side (11) and a back side (12), and an opening (13) in the substrate (1) reaching through from its back side (12) to its front side (11). A stack (2) of dielectric and conducting layers is arranged on the front side (11) of the substrate (1), a portion of which stack (2) spans the opening (13) of the substrate (1). Contact pads (32) are arranged at the front side (11) of the substrate (1) for electrically contacting the sensor chip. A sensing element (4) is arranged on the portion of the stack (2) spanning the opening (13) on a side of the portion facing the opening (13).Type: GrantFiled: September 10, 2015Date of Patent: November 29, 2016Assignee: Sensirion AGInventors: Felix Mayer, Ulrich Bartsch, Martin Winger, Markus Graf, Pascal Gerner
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Patent number: 9466498Abstract: A CMOS gas sensor comprises a membrane (13) extending over an opening (12) of a silicon substrate (1). A patch (2) of sensing material is arranged on the membrane (13) and in contact with electrodes (3) of platinum. A heater (5) of tungsten is located in or on the membrane (13) at the location of the patch (2) of metal-oxide sensing material. Combining platinum electrodes (3) with a tungsten heater (5) on top of a CMOS structure provides a gas sensor of high reliability and stability.Type: GrantFiled: January 22, 2014Date of Patent: October 11, 2016Assignee: Sensirion AGInventors: Johannes Buhler, Cyrill Kuemin
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Patent number: 9456749Abstract: A portable electronic device is described with telecommunication capabilities to allow for data and/or voice communication via private or public networks, having an integrated chemical sensor sensitive to ketones within a breath sample of a user wherein the sensor comprises at least one metal oxide gas sensor and a control circuit for the sensor integrated onto a common substrate or package.Type: GrantFiled: January 22, 2014Date of Patent: October 4, 2016Assignee: Sensirion AGInventors: Frank Roeck, Moritz Lechner, Michael Dommer
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Patent number: 9437514Abstract: A semiconductor package including an integrated device, the package having a front side, a back side and side walls linking the front and back sides, wherein each side wall is coated, to at least 80% of its area, with a coating material different from the material(s) of the back and front sides. A method of manufacturing a semiconductor package by providing an assembly containing an array of the packages, the assembly having thickness d0 and being attached to a dicing tape of thickness dd, fabricating a set of first dicing streets with width w1 and depth d1<(d0+dd), filling the first dicing streets at least partially with a coating material, and fabricating, in the coating material in each first dicing street, a second dicing street with width w2?w1 and depth d2?d0 but <(d0+dd).Type: GrantFiled: April 28, 2015Date of Patent: September 6, 2016Assignee: Sensirion AGInventor: Werner Hunziker
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Patent number: 9401983Abstract: A chemical alert system for generating an alarm is described including a portable electronic device, preferably with telecommunication capabilities to allow for data and/or voice communication via private or public networks, and at least one chemical sensor integrated with the housing of the portable device and controlled by a chemical sensor processing unit, further comprising an alert discriminator receiving input based on measurements of the chemical sensor, performing a test on the input and based on an outcome of the test initiating the transfer of measurements of the chemical sensor to a remote processing facility.Type: GrantFiled: January 22, 2014Date of Patent: July 26, 2016Assignee: Sensirion AGInventors: Moritz Lechner, Rafael Santschi
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Patent number: 9366720Abstract: In a method for manufacturing a sensor chip a spacer (3) is arranged at the front side (11) of a substrate (1) at which front side (11) a sensing element (2) is arranged, too. Holes (14) are etched for building vias (15) extending through the substrate (1) between the front side (11) of the substrate (1) and its back side (12). After etching, the holes (14) are filled with conductive material to complete the vias (15). The spacer (3) provides protection to the sensing element (2) and the sensing chip throughout the manufacturing process.Type: GrantFiled: January 26, 2012Date of Patent: June 14, 2016Assignee: Sensirion AGInventors: Markus Graf, Matthias Streiff, Werner Hunziker, Christoph Schanz
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Patent number: 9366584Abstract: In a portable electronic device components (2) consuming electrical power during operation may generate heat. A temperature sensor (1) for sensing an ambient temperature (TS) of the portable electronic device may as a consequence not supply the correct temperature value. It is suggested to provide a compensator (4) for determining a compensated ambient temperature (TA) dependent on at least the sensed ambient temperature (TS) and information (Pi) related to the electrical power consumed by at least one of the components (2).Type: GrantFiled: November 1, 2013Date of Patent: June 14, 2016Assignee: Sensirion AGInventors: Markus Graf, Andreas Tiefenauer, Andrea Sacchetti, Dominik Niederberger
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Publication number: 20160161951Abstract: A method for determining a fluid composition parameter, e.g., a fluid identifier, a mixing ratio or a parameter describing heat transfer properties, of an unknown fluid in a mass flow controller is disclosed. A control valve of the mass flow controller is set so as to establish a constant flow, preferably zero flow, through the mass flow controller. A heating element of the flow sensor is heated, and at least one temperature value is measured with temperature sensors arranged on both sides of the heater while the fluid contacts the flow sensor. First calibration data (LUT1) are retrieved. The first calibration data have, as input values, temperature values measured with the flow sensor at the previously established constant flow and have, as output values, values of the fluid composition parameter. The first calibration data are used to determine the fluid composition parameter from the measured temperature value.Type: ApplicationFiled: December 3, 2015Publication date: June 9, 2016Applicant: Sensirion AGInventors: Mark HORNUNG, Remo Fürst, Thomas Huber
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Patent number: 9341499Abstract: Disclosed is a method for adjusting a sensor signal and a corresponding sensor system comprising a sensor for providing a sensor signal representative of a measure other than temperature, dynamic components of the sensor signal being dependent on temperature. In addition there is provided a temperature sensor for measuring the temperature. Dynamic components in the sensor signal are adjusted subject to the temperature sensed, and a compensated sensor signal is supplied. Such sensor system helps compensating for long response times of sensors.Type: GrantFiled: May 17, 2011Date of Patent: May 17, 2016Assignee: Sensirion AGInventors: Markus Graf, Vincent Hess, Dominik Niederberger
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Patent number: 9312713Abstract: In a method for operating a portable electronic device a recharge process for recharging a rechargeable energy storage of the portable electronic device is detected. A heater is activated for heating a sensitive layer of a chemical sensor contained in the portable electronic device subject to the detection of the recharge process.Type: GrantFiled: March 6, 2013Date of Patent: April 12, 2016Assignee: Sensirion AGInventors: Markus Graf, Moritz Lechner
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Patent number: 9224658Abstract: A sensing device has a semiconductor substrate with an opening and a membrane spanning the opening. A heater is arranged on the membrane. To reduce the thermal conductivity of the membrane, a recess is etched into the membrane from below.Type: GrantFiled: January 22, 2014Date of Patent: December 29, 2015Assignee: Sensirion AGInventors: Robert Sunier, Cyrill Kuemin, Rene Hummel
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Patent number: 9188464Abstract: The present sensing device comprises a sensor (1, ) for providing sensor data representative of a quantity to be measured. Together with the sensor (1, ) a radio frequency interface (2, ) for transmitting the sensor data is arranged in a casing (3, ). The casing (3, ) comprises an opening (33, ) for exposing a sensitive element (11, ) of the sensor (1, ) to an environment of the casing (3, ). A seal (4, ) is provided for sealing the opening (33, ) against an interior (3, ) of the casing (3, ). The sensing device can be used as autonomous humidity detector for detecting humidity e.g. in cars under test.Type: GrantFiled: December 16, 2011Date of Patent: November 17, 2015Assignee: Sensirion AGInventors: Markus Graf, Pascal Gerner, Christian Landis, Matthias Streiff
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Patent number: 9176576Abstract: An input device for triggering a function of an electronic device comprises a humidity sensor (12), and a control unit (11). The control unit (11) analyzes a humidity signal (RH) supplied by the humidity sensor (12) and provides a trigger signal (C) subject to the analysis of the humidity signal (RH) for triggering the function of the electronic device (3). In such way, the function of the electronic device can simply be controlled by blowing at the input device (1).Type: GrantFiled: December 29, 2011Date of Patent: November 3, 2015Assignee: Sensirion AGInventors: Dominic Böni, Robert Rupprecht, Andrea Wüest, Pascal Gerner
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Patent number: 9146143Abstract: There is disclosed a flow sensor arrangement, comprising a main channel (1) for conveying a fluid, a bypass (2) connected to the main channel (1) for conveying a portion of the fluid supplied in the main channel (1), and a flow sensor (6) for measuring a flow of the fluid portion in the bypass (2). The bypass (2) branches off from the main channel (1) at an angle (?) of less than 90 degrees between an inlet section (21) of the bypass (2) and a supply section (11) of the main channel (1). By such design means, particles can be prevented from entering the bypass (2) by this adversely affecting the measurements.Type: GrantFiled: August 17, 2010Date of Patent: September 29, 2015Assignee: Sensirion AGInventors: Mark Hornung, Felix Mayer, Claudia Kuttel