Patents Assigned to Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences
  • Patent number: 11092218
    Abstract: A good-orientation, low-drift micro-movement subassembly for angle adjustment as a precise driving screw for angle adjustment, comprising a slotted knurling handle, a turnbuckle and a central cylindrical shaft. The invention is precise for linear displacement, good orientation, low-drift, stable and reliable adjustment, which can be used for a variety of precision-oriented, small drift, precision micro-angle adjustment of the drive screw.
    Type: Grant
    Filed: July 17, 2019
    Date of Patent: August 17, 2021
    Assignee: Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
    Inventors: Jianqiang Zhu, Gengxiu Tang, Zhigang Liu, Lifeng Du, Xiangyang Pang, Chao Zhang
  • Patent number: 11086192
    Abstract: A single shot autocorrelator for measuring duration of an ultrashort laser pulse in the far field, having a beam splitter to form two beams from an input ultrashort pulse: the reflected beam is firstly reflected by two mirrors mounted on a translation stage for adjusting time delay and subsequently a third mirror, and after focused by a spherical convex lens, enters a naturally grown strontium barium niobate crystal along the crystal z axis; the transmitted beam is firstly focused by a spherical convex lens, and after reflected by two mirrors, enters the crystal along the crystal z axis from opposite direction. The crystal is in the common focal regions of two spherical convex lenses and generates the transverse second harmonic pulse beam that is the autocorrelation signal to be recorded, which is imaged with an optical microscope onto a charge coupled device camera mounted perpendicular to the beams.
    Type: Grant
    Filed: March 15, 2019
    Date of Patent: August 10, 2021
    Assignee: Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
    Inventors: Jianwei Yu, Jianqiang Zhu, Xiaoping Ouyang, Baoqiang Zhu, Peiying Zeng, Xiaoyun Tang
  • Patent number: 11029611
    Abstract: Projection objective wave-front aberration detecting device and a detecting method thereof, wherein the projection objective wave-front aberration detecting device comprises a light source and illuminating system, an object plane grating, an object plane displacement stage, a measured projection objective, an image plane grating, a two-dimensional photoelectric sensor, an image plane displacement stage and a control processing unit. According to the invention, by controlling the length of the object plane grating line, or the periodic structure of the object plane grating perpendicular to the shearing diffraction direction, or the object plane grating to adopt a sinusoidal grating, or the image plane grating to adopt an amplitude-phase hybrid grating, the complexity of an interference field is reduced, and the wave-front aberration detection speed and precision are improved, and the precision and speed of in-situ wave-front aberration detection can be improved.
    Type: Grant
    Filed: November 19, 2019
    Date of Patent: June 8, 2021
    Assignee: Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
    Inventors: Feng Tang, Changzhe Peng, Xiangzhao Wang, Yunjun Lu, Peng Li
  • Patent number: 10969274
    Abstract: Method for detecting wavefront aberration for optical imaging system based on grating shearing interferometer, the grating shearing interferometer system comprising a light source and illumination system, an optical imaging system to be tested, a one-dimensional diffraction grating plate, a two-dimensional diffraction grating plate, a two-dimensional photoelectric sensor, and a computing unit. The one-dimensional and two-dimensional diffraction grating plates are respectively placed on the object plane and the image plane of the optical imaging system to be tested.
    Type: Grant
    Filed: November 15, 2019
    Date of Patent: April 6, 2021
    Assignee: Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
    Inventors: Yunjun Lu, Feng Tang, Xiangzhao Wang
  • Patent number: 10969348
    Abstract: Device and method for measuring in-situ time-resolved X-ray absorption spectrum. The device comprises an X-ray source, a first slit, an acousto-optic tunable X-ray filter, a radio frequency transmitter, a second slit, a front ionization chamber, a front ionization chamber signal amplifier, a sample to be tested, a rear ionization chamber, a rear ionization chamber signal amplifier, a data collector, and a computer. The X-ray source, the acousto-optic tunable X-ray filter, and the radio frequency transmitter are used to generate a monochromatic X-ray beam; the front ionization chamber is used to measure the intensity of the X-ray beam before passing through the sample; the rear ionization chamber is used to measure the intensity of the X-ray beam after passing through the sample; the front ionization chamber signal amplifier, the rear ionization chamber signal amplifier, the data collector, and the computer are used for data acquisition and data processing.
    Type: Grant
    Filed: September 12, 2019
    Date of Patent: April 6, 2021
    Assignee: Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
    Inventors: Jianda Shao, Shijie Liu, Shenghao Wang
  • Patent number: 10822715
    Abstract: Method for limiting growth of KDP-type crystals with a long seed where an upper and a lower ends of the long seed crystal are respectively limited by an upper baffle plate and a lower tray to restrain growth of a pyramidal surface and allow only four prismatic surfaces in [100] and [010] directions to grow. Finally grown crystal contains no pyramid-prism interface that severely restricts quality of optical element, and all cut optical elements have high optical quality. As four prismatic surfaces are subjected to highly similar growing environment and grow simultaneously, all optical elements cut therefrom have high optical uniformity. Due to uniqueness of a cutting angle of a KDP crystal frequency-tripled element, high cutting efficiency is achieved in the element, and an area of a maximum frequency-tripled element that may be cut is known in advance according to a horizontal size of the grown crystal.
    Type: Grant
    Filed: December 12, 2018
    Date of Patent: November 3, 2020
    Assignee: Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
    Inventors: Hongji Qi, Duanyang Chen, Jianda Shao, Xiaoyi Xie, Bin Wang, Hu Wang
  • Patent number: 10749540
    Abstract: A microwave resonant cavity for laser cooling, microwave interrogation, and atomic state detection, comprising a microwave resonant cavity body, two cutoff waveguide end covers, and four waveguides for laser beams and microwave coupling. The cavity feeds not only microwave but also laser beams into the center of the cavity. In a vacuum chamber with target atoms, the target atoms may be trapped and cooled in the center of the cavity. By sequential operation of the resonant microwave and lasers, the microwave resonant cavity of the present invention may manipulate and detect the atomic state population and interrogate the energy level of the cold atoms in situ. The invention may be applied to the fields of atomic frequency standard, interferometer and atomic gyro for developing the miniaturized cold atoms related precision measurement equipment.
    Type: Grant
    Filed: March 22, 2019
    Date of Patent: August 18, 2020
    Assignee: Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
    Inventors: Desheng Lv, Zhen Zhang, Xinwen Wang, Wei Ren, Xiangkai Peng, Kangkang Liu, Jingfeng Xiang, Liang Liu
  • Patent number: 10670806
    Abstract: Method for preparing micro-optical structure on a film based on chemical mechanical polishing etching, combining photolithography technology with chemical mechanical polishing technology to make preparation and large-scale integration of large-size high-quality micro optical devices on-chip possible. The method comprises coating metal on film surface, selectively removing the metal film by photolithography (such as femtosecond laser selective ablation, ultraviolet photolithography, electron beam etching, ion beam etching, and reactive ion etching), chemical mechanical polishing, chemical corrosion or over polishing and other steps. Micro-optical devices on-chip prepared by the method have extremely high surface finish and extremely low optical loss.
    Type: Grant
    Filed: May 6, 2019
    Date of Patent: June 2, 2020
    Assignee: Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
    Inventors: Ya Cheng, Rongbo Wu, Jintian Lin, Jianhao Zhang, Min Wang
  • Patent number: 10289150
    Abstract: A micro-movement subassembly as a precise driving screw for angle adjustment, comprising a shank, a turnbuckle, and a central cylindrical shaft. The subassembly is precise for linear displacement, good orientation, stable and reliable adjustment, which can be used for a variety of precision-oriented precision micro-angle adjustment of the drive screw.
    Type: Grant
    Filed: June 9, 2017
    Date of Patent: May 14, 2019
    Assignee: Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
    Inventors: Jianqiang Zhu, Gengxiu Tang, Zhigang Liu
  • Patent number: 10201874
    Abstract: Apparatus and method for realizing tubular optical waveguides in glass by femtosecond laser direct writing. Irradiation in glass with focused femtosecond laser pulses leads to decrease of refractive index in the modified region. Tubular optical waveguides of variable mode areas are fabricated by forming the four sides of the modified regions with slit-shaped femtosecond laser pulses, ensuring single mode waveguide with a mode field dimension compatible with direct coupling to single-mode optical fibers.
    Type: Grant
    Filed: April 11, 2016
    Date of Patent: February 12, 2019
    Assignee: Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
    Inventors: Ya Cheng, Yang Liao, Wei Chu, Peng Wang, Jia Qi
  • Patent number: 10136078
    Abstract: A random grating based compressive sensing wideband hyperspectral imaging system comprising a front imaging component, an optical splitting component, more than two branches, and a computer, with each branch having an exit pupil transformation component and a compressive spectral imaging component. The system is based on compressive sensing theory, makes use of the correlation between spectra, increases compression rate on the spectral dimension, realizes three-dimensional compressive collection of wideband spectral image data, and greatly reduces data collection amount. The system is capable of measuring spectral image information on a wideband spectrum with a single exposure, and may obtain high spatial resolution and high spectral resolution by means of designing the random gratings on the various spitting paths.
    Type: Grant
    Filed: January 17, 2017
    Date of Patent: November 20, 2018
    Assignee: Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
    Inventors: Shensheng Han, Zhentao Liu, Jianrong Wu, Enrong Li, Shiyu Tan, Zhe Chen
  • Patent number: 9863841
    Abstract: A point diffraction interferometric wavefront aberration measuring device comprising an optical source, an optical splitter, a first light intensity and polarization regulator, a phase shifter, a second light intensity and polarization regulator, an ideal wavefront generator, an object precision adjusting stage, a measured optical system, an image wavefront detection unit, an image precision adjusting stage, and a data processing unit. The center distance between the first output port and the second output port of the ideal wavefront generator is smaller than the diameter of the isoplanatic region of the measured optical system and is greater than the ratio of the diameter of the image point dispersion speckle of the measured optical system over the amplification factor thereof. A method for detecting wavefront aberration of the optical system is also provided by using the device.
    Type: Grant
    Filed: December 31, 2015
    Date of Patent: January 9, 2018
    Assignee: Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
    Inventors: Xiangzhao Wang, Feng Tang, Guoxian Zhang, Shifu Xu
  • Patent number: 9804502
    Abstract: An illumination device comprises a laser source, a beam expander, a micromirror array having a first control system, a fast steering mirror having a second control system, a diaphragm array, a microlens array, an illumination lens group, and a reflection mirror sequentially along the propagation direction of the laser beam. The first control system comprises a first computer controlling each micromirror on the micro-mirror array through the micromirror array controller to rotate in two-dimensional directions so expanded beam forms desired intensity patterns on the diaphragm array after reflected by the micromirror array and fast reflection mirror and a micromirror array controller; the second control system comprises a second computer controlling the reflection mirror of the fast steering mirror to rotate through fast steering mirror controller so created intensity pattern moves relative to the diaphragm array and a fast steering mirror controller. Method for using the illumination device is provided.
    Type: Grant
    Filed: December 30, 2015
    Date of Patent: October 31, 2017
    Assignee: Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
    Inventors: Aijun Zeng, Yunbo Zhang, Mingxing Chen, Ying Wang, Huijie Huang
  • Patent number: 9766154
    Abstract: A multi field point aberration parallel detection device for a lithographic projection lens and a detection method therefor, having a spatial light modulator that is respectively arranged on the object plane and the image plane of the projection lens under test, wherein the object plane spatial light modulator and the image plane spatial light modulator are respectively disposed as an object plane grating set comprising multiple one-dimensional gratings and an image plane grating set comprising multiple two-dimensional gratings via computer programming. The gratings in the object plane grating set and the image plane grating set are conjugate one to another in respect of the projection lens under test, with each pair of conjugate grating being measured for the wave aberration of a field point.
    Type: Grant
    Filed: December 30, 2015
    Date of Patent: September 19, 2017
    Assignee: Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences
    Inventors: Fengzhao Dai, Xiangzhao Wang, Feng Tang, Yazhong Zheng
  • Patent number: 9709896
    Abstract: Illumination system for a lithographic projection exposure step-and-scan apparatus comprising a light source, a pupil shaping unit, a field defining unit, a first lens array, a first slit array, a second lens array, a third lens array, a second slit array, a fourth lens array, a condenser lens, and a scanning drive unit sequentially arranged along the light beam propagation direction. The illumination system reduces requirements on lens processing, slit scanning speed, and slit scanning precision, therefore may be implemented more easily.
    Type: Grant
    Filed: December 30, 2015
    Date of Patent: July 18, 2017
    Assignee: Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
    Inventors: Aijun Zeng, Liqun Chen, Ruifang Fang, Huijie Huang
  • Patent number: 9709730
    Abstract: A hollow-core photonic crystal fiber gas cell and method for preparing the same. The hollow-core photonic crystal fiber gas cell comprises a single-mode fiber, a fiber splicing protection sleeve, a hollow-core photonic crystal fiber, and a photoelectric detector. One end of the single-mode fiber is fusion spliced with one end of the hollow-core photonic crystal fiber to form a fusion splice and seal one end of the hollow-core photonic crystal fiber gas cell. The fiber splicing protection sleeve covers and protects the fusion splice. The other end of the hollow-core photonic crystal fiber is processed into an output end by fusion sealing, and the surface of the output end faces, but is not parallel to, a detection surface of the photoelectric detector.
    Type: Grant
    Filed: December 28, 2016
    Date of Patent: July 18, 2017
    Assignee: Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
    Inventors: Haiwen Cai, Zeheng Chen, Fei Yang, Jianxin Geng, Dijun Chen, Weibiao Chen
  • Patent number: 9658114
    Abstract: A device for measuring point diffraction interferometric wavefront aberration having an optical source, an optical splitter, a first light intensity and polarization regulator, a phase shifter, a second light intensity and polarization regulator, an ideal wavefront generator, an object precision adjusting stage, a measured optical system, an image wavefront detection unit, an image precision adjusting stage, and a data processing unit. A method for detecting wavefront aberration of the optical system by using the device is also disclosed.
    Type: Grant
    Filed: December 31, 2015
    Date of Patent: May 23, 2017
    Assignee: Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
    Inventors: Feng Tang, Xiangzhao Wang, Peng Feng, Fudong Guo, Yunjun Lu
  • Patent number: 9559411
    Abstract: A method for producing infrared ZnS domes comprises forming green body by CIP and sintering by hot pressing. In the present invention, the pressure transfers through inert particles hence distributes uniformly while the shape of the dome is controlled by a lower punch head. The ZnS ceramic domes produced by the method of the present invention are of uniform infrared properties with high yield.
    Type: Grant
    Filed: November 23, 2015
    Date of Patent: January 31, 2017
    Assignee: Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
    Inventors: Xiaojian Mao, Baoyan Chai, Long Zhang, Benxue Jiang, Qiang Yuan, Junxi Xie
  • Patent number: 9488525
    Abstract: Apparatuses and method for real-time measuring ultrashort pulse shape and pulse width. Transient-grating effect on a transparent optical medium is used to generate a reference beam. A black plate with four equal-sized holes divides the incoming laser beam into four beams, one of which is attenuated and introduced an appropriate time delay relative to the other three. The four laser beams pass through a concave mirror and are focused onto a nonlinear transparent optical medium. The three beams without attenuation are used to generate a transient-grating light in the transparent medium. The transient-grating light is collinear and overlapped with the fourth attenuated beam. According to the third-order nonlinear effect, the transient-grating light has a broader spectral bandwidth and more smooth spectrum phase with respect to the incident laser. By measuring the spectral interference, the spectrum and spectral phase may be retrieved by spectral interferometry.
    Type: Grant
    Filed: August 22, 2014
    Date of Patent: November 8, 2016
    Assignee: Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
    Inventors: Jun Liu, Fangjia Li, Ruxin Li
  • Patent number: 9423621
    Abstract: Prism beam expansion system which having two or more right angle prisms with the same structure. The incident light beam enters via an incident inclined plane and exits as an exit light beam that is perpendicular to an exit right angle plane of the same right angle prism. The vertex angle ? of all the right angle prisms are the same and satisfies the expression ? = arcsin ( n ? ? 1 n ? ? 2 × sin ? ? ? ? ? 1 ) , where n1 and n2 represent the refractive indexes of the laser beam respectively in the incident media and in the right angle prism.
    Type: Grant
    Filed: November 30, 2015
    Date of Patent: August 23, 2016
    Assignee: Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
    Inventors: Zhijun Yuan, Haibo Zhang, Jun Zhou, Liming Geng, Liyuan Jiang, Yunrong Wei