Abstract: A lithography illumination system, along the transmission direction of the laser light, successively having a laser light source, a collimating and expanding unit, a pupil shaping unit, a first micro-lens array, a micro-integrator rod array, a micro-scanning slit array, a second micro-lens array, a condenser lens group, a mask, and and a motion control unit for controlling the motion of the micro scanning slit array.

Abstract: A lithography pupil shaping optical system and method for generating off-axis illumination mode. The invention is composed of illumination mode generation unit, rotatable wave plate, polarization beam splitter unit, ring I generation unit and ring II generation unit. Through selecting corresponding diffractive optical element and appropriate adjustment, this invention can generate various illumination modes including single ring illumination mode and double ring illumination mode. The intensity at pupil plane and the inner and outer diameters of the off-axis illumination mode can be adjusted continuously.

Abstract: Device and method for measuring phase retardation distribution and fast axis azimuth angle distribution of birefringence sample in real time. The device consists of a collimating light source, a circular polarizer, a diffractive beam-splitting component, a quarter-wave plate, an analyzer array, a charge coupled device (CCD) image sensor and a computer with an image acquisition card. The method can measure the phase retardation distribution and the fast axis azimuth angle distribution of the birefringence sample in real time and has large measurement range. The measurement result is immune to the light-intensity fluctuation of the light source.

Abstract: An apparatus and method for adjusting prism beam expander. The prism beam expander adjustment apparatus has a light source, a baseplate, a precise rotary stage, support columns, a two-dimensional slide stage, the first 90-degree bellcrank lever, an indication light source, the second 90-degree bellcrank lever, an optical filter, a photodetector, a computer, and an assembly platform. Incidence angles of all prisms of a prism beam expander can be precisely demarcated and designed beam magnification is obtained with the preferred adjustment methods. The parallel of the prisms can be guaranteed by monitoring the pitching of the prisms in the adjustment process. As a result, the linewidth narrowing and cavity losses decreasing can be improved by application of the fixed prism beam expander.

Abstract: A detection apparatus and method for testing optical performance of beam shaping element used in ultraviolet lithography machine; The apparatus comprises visible wavelength laser and other optical units placed along the optical axis including, in order from laser side, (a) beam expander lens group, (b) beam splitter, (c) first far field imaging lens, (d) adjustable aperture or (e) CCD image sensor, (f) second far field imaging lens and (g) energy sensor. The detection apparatus is suitable be employed to detect the optical performance of beam shaping element working at any ultraviolet band, and provides the features of low cost, easy operation and quick measurement.

Abstract: A compact optical mount for adjust optical component in 3 dimensions. Based on the traditional 2D adjustable optical mount, its inner space is utilized for installing the third dimension angular adjustment. By virtue of its compact structure, convenient adjustment, high precision and good stability, the invention is suitable for adjusting small optics in 3 dimensions, by which the real optical axil can agree with the idea optical axil well to fast adjust the whole optical system.

Abstract: Six-axis four-subdividing interferometer comprising a six-axis light splitting system and an interference module which are sequentially arranged along the incident direction of polarization orthogonal double-frequency laser, wherein the six-axis light splitting system comprises five 45-degree plane beam splitters and four 45-degree full-reflecting mirrors.

Abstract: Four-axis four-subdividing interferometer comprising a four-axis light splitting module and an interference module which are sequentially arranged along the incident direction of polarization orthogonal double-frequency laser. The four-axis light splitting system comprises three 50% plane beam splitters and three 45-degree plane reflecting mirrors. The invention comprises a four-axis four-subdividing plane mirror interferometer and a four-axis four-subdividing differential interferometer. In the differential interferometer, an adjustable 45-degree reflecting mirror is used to guide the reference light to a reference reflecting mirror which is arranged in the same direction as a measurement mirror and fixed on the moving object.

Abstract: Four-axis four-subdividing interferometer comprising a four-axis light splitting module and an interference module which are sequentially arranged along the incident direction of polarization orthogonal double-frequency laser. The four-axis light splitting system comprises three 50% plane beam splitters and three 45-degree plane reflecting mirrors. The invention comprises a four-axis four-subdividing plane mirror interferometer and a four-axis four-subdividing differential interferometer. In the differential interferometer, an adjustable 45-degree reflecting minor is used to guide the reference light to a reference reflecting minor which is arranged in the same direction as a measurement minor and fixed on the moving object.

Abstract: A honeycomb table, including an upper skin tapped with holes for mounting equipments, a lower skin with a plurality of holes, a honeycomb core layer, connecting side walls, a number of cups and funnels in honeycomb core cells one-to-one. The cups are positioned on the holes in the lower skin. The cups and funnels prevent contaminants and residue from reaching the interior of the honeycomb core, such that the honeycomb can be continuously maintained in a clean working condition.

Abstract: A detection apparatus and method for testing optical performance of beam shaping element used in ultraviolet lithography machine; The apparatus comprises visible wavelength laser and other optical units placed along the optical axis including, in order from laser side, (a) beam expander lens group, (b) beam splitter, (c) first far field imaging lens, (d) adjustable aperture or (e) CCD image sensor, (f) second far field imaging lens and (g) energy sensor. The detection apparatus is suitable be employed to detect the optical performance of beam shaping element working at any ultraviolet band, and provides the features of low cost, easy operation and quick measurement.

Abstract: Six-axis four-subdividing interferometer comprising a six-axis light splitting system and an interference module which are sequentially arranged along the incident direction of polarization orthogonal double-frequency laser, wherein the six-axis light splitting system comprises five 45-degree plane beam splitters and four 45-degree full-reflecting minors.

Abstract: A compact optical mount for adjust optical component in 3 dimensions. Based on the traditional 2D adjustable optical mount, its inner space is utilized for installing the third dimension angular adjustment. By virtue of its compact structure, convenient adjustment, high precision and good stability, the invention is suitable for adjusting small optics in 3 dimensions, by which the real optical axel can agree with the idea optical axel well to fast adjust the whole optical system.

Abstract: A honeycomb table, including an upper skin tapped with holes for mounting equipments, a lower skin with a plurality of holes, a honeycomb core layer, connecting side walls, a number of cups and funnels in honeycomb core cells one-to-one. The cups are positioned on the holes in the lower skin. The cups and funnels prevent contaminants and residue from reaching the the interior of the honeycomb core, such that the honeycomb can be continuously maintained in a clean working condition.

Abstract: An optical table comprising an upper skin tapped with holes for mounting equipment, a lower skin with a plurality of through holes which is coaxial with the tapped holes on the upper skin in a one to one arrangement, a honeycomb core, a connecting side wall, and a number of tubes. The tubes are positioned between the interior of the upper and lower skins so as to connect the holes on both skins so that contaminants and residue will be unable to enter into the interior of the honeycomb core, and so that the optical table can be rapidly and thoroughly cleaned.

Abstract: An optical table comprising an upper skin tapped with holes for mounting equipment, a lower skin with a plurality of through holes which is coaxial with the tapped holes on the upper skin in a one to one arrangement, a honeycomb core, a connecting side wall, and a number of tubes. The tubes are positioned between the interior of the upper and lower skins so as to connect the holes on both skins so that contaminants and residue will be unable to enter into the interior of the honeycomb core, and so that the optical table can be rapidly and thoroughly cleaned.