Abstract: A platen used as a stator of a planar linear motor having a platen body (90) comprised of a stacked member (91) of magnetic sheets (T) giving a high performance and a backing plate. The backing plate of the stacked member (91) is formed with dovetail grooves (91a) along a direction perpendicular to the sheet edge direction. The backing plate (92) has a plurality of first through holes (92a) discretely arranged in lines longitudinally across the strip-shaped portions facing the dovetail grooves (91a). Top bent side ends (94) of connecting beam members (93) have pluralities of second through holes (94a) discretely arranged in lines longitudinally across the beam longitudinal direction. Joints (100) of a fluid hardening material injected into the dovetail grooves (91a) and the through holes (94a) (92a) to fill and harden in the same are formed.

Abstract: A two-phase planar linear motor used for an IC test handler etc. comprising a platen (50) having a platen surface formed with a plurality of platen dots (D) arranged in a matrix and a composite movable member (70) comprised of two X-axis movable members (60X) and two Y-axis movable members (20Y) connected in an in-plane perpendicular relationship. The platen (50) is a stacked member comprised at a plurality of magnetic sheets T stacked together and uses the parallel sheet edge surfaces as the platen surface (51).