Abstract: In a resonance suppression control device that controls suppression of vibrations in a resonance frequency in each vibration mode of a control target having a plurality of vibration modes, a configuration that is simple, and can suppress vibrations in a resonance frequency in the plurality of vibration modes is provided. A control device is a resonance suppression control device that controls suppression of vibrations in a resonance frequency in each vibration mode of a control target having a plurality of vibration modes. The control device includes a plurality of feedback loops that provide negative feedback of output of the control target corresponding to the plurality of vibration modes to an input side. The plurality of feedback loops respectively include band-pass filters that extract one or more vibration modes from the plurality of vibration modes, phase compensators, and amplitude adjusters. The band-pass filters and the phase compensators function as differentiators.

Abstract: The EFEM comprises: a transfer chamber in which a transfer robot is disposed, a first fan that forms a downward air flow in the transfer chamber, a gas return space that circulates the gas flowing downward in the transfer chamber above the first fan, a box that communicates with the transfer chamber and is provided with a gas outlet, and a connecting and disconnecting means configured to switch connection and disconnection of the box to and from the transport chamber. A circulation path in which gas circulates is formed by the transfer chamber, the gas return space, and the box. When the transfer chamber and the box are separated by the connecting and disconnecting means, a shortened circulation path is formed in which the gas circulates without passing through the box.

Abstract: A conveyance system discriminates the front and back of a frame wafer without human intervention. A frame is partially formed asymmetrically with respect to a predetermined center line when viewed in a direction orthogonal to a surface of a wafer. The conveyance system includes a hand configured to hold the frame so that the frame extends in a predetermined virtual plane, a first sensor configured to detect a portion of the frame held on the hand and located in a predetermined first region in the virtual plane, a second sensor configured to detect a portion of the frame held on the hand and located in a second region opposite to the first region across the center line, and a controller configured to determine the front and back of the frame wafer based on a detection result obtained by the first sensor and a detection result obtained by the second sensor.

Abstract: A wafer stocker capable of further improving an environment around wafers is provided. The wafer stocker includes a housing, a loading device provided on a front surface of the housing, a wafer cassette shelf arranged in the housing, a wafer transfer robot configured to move the wafers from a transfer container mounted on the loading device to a wafer cassette in the wafer cassette shelf, a wafer cassette delivery device configured to move the wafer cassette in the wafer cassette shelf to a stage having a different height, and a fan filter unit configured to generate a laminar flow in a wafer transfer space and in a wafer cassette transfer space.

Abstract: To provide a transfer chamber capable of replacing a chemical filter without affecting an internal atmosphere, and shortening or eliminating stop time of a transfer process of a wafer (W) associated with replacement of the chemical filter. The transfer chamber transfers the wafer (W) to or from a processing device (6) by using a transfer robot (2) provided thereinside, and includes a circulation path (CL1) formed inside of a transfer chamber (1) to circulate gas, a chemical filter unit (7) provided in the midstream of the circulation path (CL1), and a connecting and disconnecting means (8) which switches connection and disconnection of the chemical filter unit (7) to and from the circulation path (CL1).

Abstract: Provided is a magnet that allows the orientation direction of main and auxiliary pole pieces to be set precisely and enables easy fabrication of flux focusing permanent magnet units having a high magnetic flux density A magnet 22 includes permanent magnet units 22a each including a main pole piece 221 and auxiliary pole pieces 222. The main pole piece 221 is composed of permanent magnet sheets 221a with substantially the same thickness stacked in the thickness direction. The auxiliary pole pieces 222 are composed of permanent magnet sheets 222a with substantially the same thickness stacked in the thickness direction and arranged at positions adjacent to the main pole piece 221 with orientation directions different from the orientation direction of the main pole piece 221 thereby to focus the magnetic flux at the main pole piece 221.

Abstract: An arm unit of a transfer robot includes an R-axis motor configured to relatively rotate a second arm with respect to a first arm. The R-axis motor is fixed to the first arm so as to protrude to below an arm axis holding portion of the first arm with an output shaft thereof facing upward. The output shaft is configured to penetrate the first arm from below. The output shaft is fixed to the second arm by a shaft fixing portion.

Abstract: According to one embodiment of the present disclosure, a cell culture system includes: a cell culture container; a liquid storage part configured to store a liquid including a culture medium or a reagent to be supplied to the cell culture container; and a cell collection part configured to collect cells cultured in the cell culture container, wherein the cell culture container, the liquid storage part, and the cell collection part are connected by spatially closed-system lines at least during a period from feeding of the liquid to the cell culture container to removal of the cultured cells, and wherein the cell culture container is arranged in an incubator in a form of a multistage shelf including a liquid supply/discharge port.

Abstract: A transport system for transporting a plurality of objects between a storage container configured to store the plurality of objects and a processing apparatus configured to collectively process the plurality of objects held on a tray, including a mounting part on which the storage container is mounted, a stage on which the plurality of objects are mounted, a tray support part configured to support the tray, a first transport device configured to transport the plurality of objects between the storage container mounted on the mounting part and the stage, and a second transport device configured to transport the plurality of objects between the stage and the tray supported by the tray support part.

Abstract: A wafer stocker capable of further improving an environment around wafers is provided. The wafer stocker includes a housing, a loading device provided on a front surface of the housing, a wafer cassette shelf arranged in the housing, a wafer transfer robot configured to move the wafers from a transfer container mounted on the loading device to a wafer cassette in the wafer cassette shelf, a wafer cassette delivery device configured to move the wafer cassette in the wafer cassette shelf to a stage having a different height, and a fan filter unit configured to generate a laminar flow in a wafer transfer space and in a wafer cassette transfer space.

Abstract: A method of diagnosing a load port includes identifying a plurality of entities for a plurality of substrate storage containers by a plurality of load ports capable of transferring a substrate into and out of the plurality of substrate storage containers; detecting directly or indirectly a plurality of states of the plurality of substrate storage containers by a plurality of sensors provided at the plurality of load ports; associating the plurality of load ports, the plurality of entities and a plurality of sensor values, with each other; accumulating, in a database, data associated in the act of associating the plurality of load ports, the plurality of entities, and the plurality of sensor values; and analyzing the data in the database and determining a state of each of the plurality of load ports.

Abstract: There is provided an exhaust nozzle unit capable of discharging a gas atmosphere in a substrate storage container having a loading/unloading opening from the container to an outside of the container through a port formed on a bottom surface of the container. The exhausted nozzle includes a nozzle capable of switching the port from a closed state to an open state by pressing a valve of the port; and a housing configured to hold the nozzle so as to be movable up and down between a use posture in which the port is in the open state and a standby posture in which the port is in the closed state.

Abstract: A cell collection method of collecting cells includes a culture medium movement process, a detachment liquid supply process, and a mixing process, wherein in the culture medium movement process, a used culture medium in a culture container is moved to a collection container, wherein in the detachment liquid supply process after the culture medium movement process, a detachment liquid for detaching the cells from an inner surface of the culture container is supplied to the culture container, and wherein in the mixing process after the detachment liquid supply process, the detachment liquid and the used culture medium are mixed with each other.

Abstract: A wafer stocker is capable of further improving an environment around wafers. The wafer stocker includes a housing, a loading device provided on a front surface of the housing, a wafer cassette shelf arranged in the housing, a wafer transfer robot configured to move the wafers from a transfer container mounted on the loading device to a wafer cassette in the wafer cassette shelf, a wafer cassette delivery device configured to move the wafer cassette in the wafer cassette shelf to a stage having a different height, and a fan filter unit configured to generate a laminar flow in a wafer transfer space and in a wafer cassette transfer space.

Abstract: Particles in an accommodation chamber are also easily discharged while facilitating replacement of an atmosphere in the accommodation chamber with an inert gas. An EFEM includes a load port 4, a housing configured to define, in the housing, a transfer chamber closed by connecting the load port 4 to an opening provided in a partition wall, a supply pipe for supplying nitrogen to a transfer chamber, and a discharge pipe 49 for discharging a gas in the transfer chamber. The load port 4 includes an opening/closing mechanism 54 capable of opening and closing a lid 101 of a mounted FOUP 100, and an accommodation chamber 60 kept in communication with the transfer chamber via a slit 51b and configured to accommodate a part of the opening/closing mechanism 54. The discharge pipe 49 is connected to the accommodation chamber 60 to discharge the gas in the transfer chamber via the accommodation chamber 60.

Abstract: An EFEM is provided with a circulation path including a substrate transfer space formed inside a housing and a return path configured to return gas flowing from one side to the other side of the substrate transfer space, the EFEM including: a partition wall configured to separate the substrate transfer space and the return path; a capture part provided in the return path having a higher pressure than the substrate transfer space in a state in which the gas circulates through the circulation path, and configured to capture particles contained in the gas flowing through the return path; and a connecting pipe configured to guide the gas flowing inside a predetermined device arranged in the substrate transfer space to the return path, wherein the connecting pipe is connected to the return path on an upstream side of the capture part in a gas flow direction.

Abstract: In a resonance suppression control device that controls suppression of vibrations in a resonance frequency in each vibration mode of a control target having a plurality of vibration modes, a configuration that is simple, and can suppress vibrations in a resonance frequency in the plurality of vibration modes is provided. A control device is a resonance suppression control device that controls suppression of vibrations in a resonance frequency in each vibration mode of a control target having a plurality of vibration modes. The control device includes a plurality of feedback loops that provide negative feedback of output of the control target corresponding to the plurality of vibration modes to an input side. The plurality of feedback loops respectively include band-pass filters that extract one or more vibration modes from the plurality of vibration modes, phase compensators, and amplitude adjusters. The band-pass filters and the phase compensators function as differentiators.

Abstract: An EFEM includes a housing having a substantially closed substrate transfer space in the housing and a control part configured to perform a control of supplying an inert gas into at least the housing. The control part includes an inert gas total supply amount setting part configured to set a total supply amount of the inert gas to be supplied into the housing; a door open/purge determination part configured to determine whether a container door of a substrate storage container is in an open state and whether a purge device is performing a purge process; and an in-housing inert gas supply amount calculation part configured to calculate a supply amount of the inert gas to be supplied into the housing. The supply amount of the inert gas to be supplied into the housing is determined according to an inert gas supply amount command value determined based on a calculation result.

Abstract: This air control device for mounter is to solve a problem of realizing an air control device for a mounter capable of providing a secured holding state by a nozzle without damaging a part by adjusting, during vacuum suction, an amount of air to be drawn suitably for the part and the nozzle. This air control device for mounter is configured such that a nozzle n detachably attached to a head module HM of a mounter is connected to a negative pressure region, and a part is suctioned at a distal end of the nozzle n. The head module HM is mounted with a variable throttle mechanism 4, and by using the variable throttle mechanism 4, an amount of air to be drawn into the negative pressure region from the nozzle is adjustable.

Abstract: There is provided a load port, including: a frame including an opening via which a transfer target object is capable of passing in a substantially horizontal posture; a load port door configured to engage with a container door capable of opening and closing a loading/unloading port of a storage container including slots capable of accommodating the transfer target object in a multi-stage manner, and to open and close the opening of the frame; and a mapping mechanism configured to map information on an accommodation state including presence or absence of the transfer target object in each of the slots in the storage container via the opening and the loading/unloading port.