Abstract: A rotating electric machine 100 having a rotor 1, a stator 2, and a coil 3 including a coil conductor 31 wound around teeth 21b provided on at least one of the rotor 1 and the stator 2 includes a spacer section 42 configured to extend along a slot S formed between the teeth 21b and to be inserted between turns of the coil conductor 31 to define a gap G between the turns, and a cooling medium supply section 6 configured to distribute a cooling medium in the gap G. A notched section 421 cut out in such a manner that a widthwise dimension of the spacer section 42 is relatively short is provided in a middle of an extension of the spacer section 42.

Abstract: It is possible to reduce a rise in temperature of a rotor by reducing the temperature of a stator. The motor 1 includes a stator 5, and a rotor 4, which is disposed with a gap from the stator 5, being arranged in a housing 2, in which the stator 5 is provided with an annular yoke and a plurality of teeth protruding from an inner peripheral portion of the yoke toward the rotor 4; slots in which coils 6 wound around the teeth are arranged are respectively formed between the teeth that are adjacent to each other; a mold resin portion 30 in which the stator 5 and the coils 6 are molded is provided; the mold resin portion 30 includes a flow path 32 formed within at least one slot among a plurality of slots; and the flow path 32 is supplied with a cooling medium.

Abstract: A cell dispensing device capable of efficiently dispensing cells while reducing the risk of mixing of bacteria or the like is provided. The cell dispensing device includes a first tube configured to connect a container and a dispensing container to each other, a syringe pump attached to a second tube connected to a branch portion formed in the first tube, and a buffer tank provided between the syringe pump and the branch portion. The cell suspension stored in the container is temporarily stored in the buffer tank and is delivered to the dispensing container by the syringe pump.

Abstract: An EFEM includes a circulation path including a transfer chamber configured to form a transfer space where a substrate is transferred and a return path configured to return a gas flowing from one side to the other side of the transfer chamber, the EFEM including: a capture part provided in the return path and configured to electrically capture particles contained in the gas flowing through the return path, wherein the return path and the transfer chamber are provided such that a partition wall is interposed therebetween, and a differential pressure is generated on both sides of the partition wall such that a pressure on the side of the return path becomes higher than a pressure on the side of the transfer chamber in a state in which the gas circulates through the circulation path.

Abstract: An arm unit of a transfer robot includes an R-axis motor configured to relatively rotate a second arm with respect to a first arm. The R-axis motor is fixed to the first arm so as to protrude to below an arm axis holding portion of the first arm with an output shaft thereof facing upward. The output shaft is configured to penetrate the first arm from below. The output shaft is fixed to the second arm by a shaft fixing portion.

Abstract: An EFEM includes a housing having a substantially closed substrate transfer space in the housing and a control part configured to perform a control of supplying an inert gas into at least the housing. The control part includes an inert gas total supply amount setting part configured to set a total supply amount of the inert gas to be supplied into the housing; a door open/purge determination part configured to determine whether a container door of a substrate storage container is in an open state and whether a purge device is performing a purge process; and an in-housing inert gas supply amount calculation part configured to calculate a supply amount of the inert gas to be supplied into the housing. The supply amount of the inert gas to be supplied into the housing is determined according to an inert gas supply amount command value determined based on a calculation result.

Abstract: There is provided a load port, including: a frame including an opening via which a transfer target object is capable of passing in a substantially horizontal posture; a load port door configured to engage with a container door capable of opening and closing a loading/unloading port of a storage container including slots capable of accommodating the transfer target object in a multi-stage manner, and to open and close the opening of the frame; and a mapping mechanism configured to map information on an accommodation state including presence or absence of the transfer target object in each of the slots in the storage container via the opening and the loading/unloading port.

Abstract: An EFEM includes: a housing including a transfer chamber where a processing object is transferred; and a connection module provided between the transfer chamber and a front chamber of a processing apparatus configured to perform a predetermined process on the processing object, and connect the transfer chamber and the front chamber, wherein the housing includes a rear member formed with a housing side opening through which the processing object is capable of passing, wherein the connection module includes: a first connection member arranged around the housing side opening when viewed from a depth direction in which the housing and the front chamber are arranged, and attached to the rear member; and a second connection member arranged around a front chamber side opening formed in the front chamber so as to allow the processing object to pass therethrough when viewed from the depth direction, and attached to the front chamber.

Abstract: An EFEM includes a housing having a substantially closed substrate transfer space in the housing and a control part configured to perform a control of supplying an inert gas into at least the housing. The control part includes an inert gas total supply amount setting part configured to set a total supply amount of the inert gas to be supplied into the housing; a door open/purge determination part configured to determine whether a container door of a substrate storage container is in an open state and whether a purge device is performing a purge process; and an in-housing inert gas supply amount calculation part configured to calculate a supply amount of the inert gas to be supplied into the housing. The supply amount of the inert gas to be supplied into the housing is determined according to an inert gas supply amount command value determined based on a calculation result.

Abstract: A lubricating oil supply device includes: a supplier provided with a temporary storage for storing a lubricating oil temporarily, and configured to supply the lubricating oil stored in the temporary storage to a bearing together with compressed air; a lubricating oil supply path having one end portion connected to the temporary storage and the other end portion connected to a lubricating oil storage for storing the lubricating oil; a deliverer provided in the lubricating oil supply path, and configured to deliver the lubricating oil stored in the lubricating oil storage via the lubricating oil supply path to fill the temporary storage with the lubricating oil; an air supply path having one end portion connected to the supplier and the other end portion connected to a compressed air supplier for supplying the compressed air; and a pressure accumulator provided in the air supply path and configured to accumulate the compressed air.

Abstract: Particles in an accommodation chamber are also easily discharged while facilitating replacement of an atmosphere in the accommodation chamber with an inert gas. An EFEM includes a load port 4, a housing configured to define, in the housing, a transfer chamber closed by connecting the load port 4 to an opening provided in a partition wall, a supply pipe for supplying nitrogen to a transfer chamber, and a discharge pipe 49 for discharging a gas in the transfer chamber. The load port 4 includes an opening/closing mechanism 54 capable of opening and closing a lid 101 of a mounted FOUP 100, and an accommodation chamber 60 kept in communication with the transfer chamber via a slit 51b and configured to accommodate a part of the opening/closing mechanism 54. The discharge pipe 49 is connected to the accommodation chamber 60 to discharge the gas in the transfer chamber via the accommodation chamber 60.

Abstract: There is provided motor, including: a stator including a plurality of laminated plates; and a rotor arranged inside the stator with a gap between the rotor and the stator, wherein the stator further includes an annular yoke located outside of the stator and a plurality of teeth protruding from an inner peripheral surface of the yoke toward the rotor, wherein slots in which coils wound around the teeth are arranged are formed between the teeth that are adjacently arranged, wherein gaps to which a cooling medium is supplied are formed between bottom portions of the slots and the coils, and wherein the stator further includes end plate members arranged so as to face the laminated plates.

Abstract: A housing is made sealable even when the rigidity of a frame member and a cover member is not high. In an EFEM, a pressure difference having a predetermined value or less exists between an internal space of a housing and an external space of the housing. The housing includes a frame member assembled so as to form an opening, a cover member attached to the frame member so as to cover the opening, and a seal member sandwiched between the frame member and the cover member and configured to extend so as to surround the opening. The frame member and the cover member are formed of a sheet metal. The seal member is an elastic member having a hollow cross section orthogonal to an extension direction of the seal member.

Abstract: In the present disclosure, when a supply flow rate of an inert gas is changed, a pressure fluctuation in a circulation path is suppressed. An EFEM includes a supply valve configured to be capable of changing a supply flow rate of the inert gas supplied to the circulation path, a discharge valve configured to be capable of changing a discharge flow rate of a gas discharged from the circulation path, a concentration detection part configured to detect a change in an atmosphere inside the circulation path, a pressure detection part configured to detect a pressure in the circulation path, and a control part configured to control the supply valve and the discharge valve. The control part is configured to determine an opening degree of the discharge valve to a predetermined value based on a detection result obtained by the concentration detection part.

Abstract: Particles in an accommodation chamber are also easily discharged while facilitating replacement of an atmosphere in the accommodation chamber with an inert gas. An EFEM includes a load port 4, a housing configured to define, in the housing, a transfer chamber closed by connecting the load port 4 to an opening provided in a partition wall, a supply pipe for supplying nitrogen to a transfer chamber, and a discharge pipe 49 for discharging a gas in the transfer chamber. The load port 4 includes an opening/closing mechanism 54 capable of opening and closing a lid 101 of a mounted FOUP 100, and an accommodation chamber 60 kept in communication with the transfer chamber via a slit 51b and configured to accommodate a part of the opening/closing mechanism 54. The discharge pipe 49 is connected to the accommodation chamber 60 to discharge the gas in the transfer chamber via the accommodation chamber 60.

Abstract: An EFEM includes a housing including a transfer chamber in which a processing target object is transferred, and a connection module provided between the transfer chamber and a front chamber, wherein the housing includes a rear member having a housing-side opening through which the processing target object is capable of passing, the connection module includes a first frame part arranged around the housing-side opening and pressed by a transfer chamber-side surface of the rear member, a second frame part provided in the front chamber and arranged around a front chamber-side opening, and connected to the first frame part, and a sealing part configured to seal the second frame part and the front chamber, and the sealing part includes a flexible portion capable of expanding and contracting at least in a predetermined direction, and an enclosure portion connected to the flexible portion and configured to enclose the front chamber-side opening.

Abstract: In a resonance suppression control device that controls suppression of vibrations in a resonance frequency in each vibration mode of a control target having a plurality of vibration modes, a configuration that is simple, and can suppress vibrations in a resonance frequency in the plurality of vibration modes is provided. A control device is a resonance suppression control device that controls suppression of vibrations in a resonance frequency in each vibration mode of a control target having a plurality of vibration modes. The control device includes a plurality of feedback loops that provide negative feedback of output of the control target corresponding to the plurality of vibration modes to an input side. The plurality of feedback loops respectively include band-pass filters that extract one or more vibration modes from the plurality of vibration modes, phase compensators, and amplitude adjusters. The band-pass filters and the phase compensators function as differentiators.

Abstract: The EFEM comprises: a transfer chamber in which a transfer robot is disposed, a first fan that forms a downward air flow in the transfer chamber, a gas return space that circulates the gas flowing downward in the transfer chamber above the first fan, a box that communicates with the transfer chamber and is provided with a gas outlet, and a connecting and disconnecting means configured to switch connection and disconnection of the box to and from the transport chamber. A circulation path in which gas circulates is formed by the transfer chamber, the gas return space, and the box. When the transfer chamber and the box are separated by the connecting and disconnecting means, a shortened circulation path is formed in which the gas circulates without passing through the box.

Abstract: A conveyance system discriminates the front and back of a frame wafer without human intervention. A frame is partially formed asymmetrically with respect to a predetermined center line when viewed in a direction orthogonal to a surface of a wafer. The conveyance system includes a hand configured to hold the frame so that the frame extends in a predetermined virtual plane, a first sensor configured to detect a portion of the frame held on the hand and located in a predetermined first region in the virtual plane, a second sensor configured to detect a portion of the frame held on the hand and located in a second region opposite to the first region across the center line, and a controller configured to determine the front and back of the frame wafer based on a detection result obtained by the first sensor and a detection result obtained by the second sensor.

Abstract: A wafer stocker capable of further improving an environment around wafers is provided. The wafer stocker includes a housing, a loading device provided on a front surface of the housing, a wafer cassette shelf arranged in the housing, a wafer transfer robot configured to move the wafers from a transfer container mounted on the loading device to a wafer cassette in the wafer cassette shelf, a wafer cassette delivery device configured to move the wafer cassette in the wafer cassette shelf to a stage having a different height, and a fan filter unit configured to generate a laminar flow in a wafer transfer space and in a wafer cassette transfer space.