Patents Assigned to Sinfonia Technology Co., Ltd.
  • Publication number: 20210215752
    Abstract: A method of diagnosing a load port includes identifying a plurality of entities for a plurality of substrate storage containers by a plurality of load ports capable of transferring a substrate into and out of the plurality of substrate storage containers; detecting directly or indirectly a plurality of states of the plurality of substrate storage containers by a plurality of sensors provided at the plurality of load ports; associating the plurality of load ports, the plurality of entities and a plurality of sensor values, with each other; accumulating, in a database, data associated in the act of associating the plurality of load ports, the plurality of entities, and the plurality of sensor values; and analyzing the data in the database and determining a state of each of the plurality of load ports.
    Type: Application
    Filed: March 26, 2021
    Publication date: July 15, 2021
    Applicant: Sinfonia Technology Co., Ltd.
    Inventors: Izumi Ito, Tomoya Mizutani
  • Publication number: 20210185867
    Abstract: This air control device for mounter is to solve a problem of realizing an air control device for a mounter capable of providing a secured holding state by a nozzle without damaging a part by adjusting, during vacuum suction, an amount of air to be drawn suitably for the part and the nozzle. This air control device for mounter is configured such that a nozzle n detachably attached to a head module HM of a mounter is connected to a negative pressure region, and a part is suctioned at a distal end of the nozzle n. The head module HM is mounted with a variable throttle mechanism 4, and by using the variable throttle mechanism 4, an amount of air to be drawn into the negative pressure region from the nozzle is adjustable.
    Type: Application
    Filed: January 10, 2018
    Publication date: June 17, 2021
    Applicant: SINFONIA TECHNOLOGY CO., LTD.
    Inventor: Susumu Irie
  • Patent number: 11009141
    Abstract: In an invention including: a piezoelectric element (13) which generates, as a displacement, a driving force necessary for an operation of a valve body (12) which is an operating body; a displacement enlarging mechanism (14) including at least a spring element so as to enlarge a displacement of the piezoelectric element (13) which acts on the valve body (12); and a driving device (15) which operates the valve body (12) by applying a voltage to the piezoelectric element (13) to extend the piezoelectric element (13), the driving device (15) includes a first filter processing unit (15x) having an inverse function characteristic of a mechanical resonance frequency when operating the displacement enlarging mechanism (14), and is configured to apply, a voltage which reduces the mechanical resonance, to the piezoelectric element (13) through this resonance suppression processing unit (15x).
    Type: Grant
    Filed: July 14, 2017
    Date of Patent: May 18, 2021
    Assignee: SINFONIA TECHNOLOGY CO., LTD.
    Inventor: Susumu Irie
  • Patent number: 10985678
    Abstract: A motor control apparatus includes: a motor drive control section that controls driving of a motor using a predetermined phase; a rotation position detecting section that, at every 180 degrees of an electrical angle of the motor, outputs two kinds of detection signals according to the rotation position of the rotor of the motor; a stopped position estimating section that estimates the stopped position at the start of rotation of the rotor using an elapsed time from when rotation the rotor starts until the kind of the detection signal outputted from the rotation position detecting section switches; a rotational speed estimating section that estimates the rotational speed of the rotor using the elapsed time and the stopped position; and an estimated phase calculating section that calculates an estimated phase as the aforementioned predetermined phase using the rotational speed.
    Type: Grant
    Filed: October 30, 2017
    Date of Patent: April 20, 2021
    Assignee: SINFONIA TECHNOLOGY CO., LTD.
    Inventors: Kazunari Kanazawa, Takeshi Tomizaki, Nobumasa Usiro, Makoto Maruyama, Yuji Ogawa
  • Patent number: 10978325
    Abstract: A substrate storage container management system includes a load port, configured to transfer a substrate into and out of one or more substrate storage containers, including an ID reader configured to read one or more entity IDs for the substrate storage containers, and one or more sensors configured to directly or indirectly detect one or more states of the substrate storage containers, an associator configured to associate the entity IDs read by the ID reader with one or more sensor values detected by the sensors; a database in which data associated by the associator is accumulated, and a data processor configured to analyze the data in the database and to output a state of a respective substrate storage container for each of the entity IDs.
    Type: Grant
    Filed: May 24, 2019
    Date of Patent: April 13, 2021
    Assignee: Sinfonia Technology Co., Ltd.
    Inventors: Izumi Ito, Tomoya Mizutani
  • Patent number: 10947063
    Abstract: A load port including: a base as part of a wall partitioning a transportation space from an external space; an opening provided to the base; a door configured to open and close the opening and securing a lid to, and releasing a lid from, a container containing contents; and a first seal member for sealing the space between the base and the container. At least some of the container-side end surface of the door is located nearer to the transportation space than the container-side end part of the first seal member. The load port can keep a surrounding space clean when a FOUP is connected to a casing.
    Type: Grant
    Filed: November 8, 2019
    Date of Patent: March 16, 2021
    Assignee: SINFONIA TECHNOLOGY CO., LTD.
    Inventors: Atsushi Suzuki, Yasushi Taniyama
  • Patent number: 10930537
    Abstract: Provided are a door opening/closing system which prevents the entry of atmospheric air into a front-opening unified pod (FOUP) and an equipment front end module (EFEM) when the FOUP and the EFEM are placed in communication with each other, and a load port equipped with the door opening/closing system.
    Type: Grant
    Filed: January 28, 2020
    Date of Patent: February 23, 2021
    Assignee: SINFONIA TECHNOLOGY CO., LTD.
    Inventors: Toshihiro Kawai, Yasushi Taniyama, Munekazu Komiya, Takashi Shigeta
  • Patent number: 10931215
    Abstract: A motor control apparatus 1 includes a fixed phase setting section that sets a fixed phase of a motor according to a detection signal. At the start of rotation of a rotor, the fixed phase setting section sets a first fixed phase that is equal to or greater than ?90 degrees relative to a stable stopping point at a maximum electrical angle and is equal to or less than 90 degrees relative to a stable stopping point at a minimum electrical angle of the rotor as the fixed phase, and sets a second fixed phase that is equal to or greater than ?90 degrees relative to a stable stopping point at a maximum electrical angle and is equal to or less than 90 degrees relative to a stable stopping point at a minimum electrical angle of the rotor.
    Type: Grant
    Filed: October 30, 2017
    Date of Patent: February 23, 2021
    Assignee: Sinfonia Technology Co., Ltd.
    Inventors: Kazunari Kanazawa, Takeshi Tomizaki, Nobumasa Usiro, Makoto Maruyama, Yuji Ogawa
  • Patent number: 10923372
    Abstract: There is provided a gas injection device configured to prevent entry of atmospheric air when charging gas into a FOUP. In order to realize such a gas injection device, the gas injection device is structured so as to include: a gas supply port 72 through which inert gas is supplied; a nozzle main body 71 including a gas passage 77 communicating with the gas supply port 72; an opening/closing mechanism 92 configured to close the gas supply port 72; and an opener 96 configured to cause the opening/closing mechanism 92 to open the gas supply port 72 closed by the opening/closing mechanism 92.
    Type: Grant
    Filed: August 19, 2016
    Date of Patent: February 16, 2021
    Assignee: SINFONIA TECHNOLOGY CO., LTD.
    Inventors: Toshihiro Kawai, Yasushi Taniyama, Munekazu Komiya, Takashi Shigeta
  • Patent number: 10923377
    Abstract: There is provided a load port provided to a loading/unloading port of a semiconductor-processing apparatus to transfer a semiconductor wafer, including: a FOUP support configured to support a FOUP that includes a FOUP lid and move the FOUP in a front-rear direction with respect to the loading/unloading port; a lid configured to open and close the loading/unloading port; a FOUP lid sensor provided to perform a detection operation between a position of the lid in a closed state and a position of the FOUP lid when unloading is normally completed by retreating the FOUP by a predetermined distance with respect to the loading/unloading port; and an observer configured to observe that the FOUP lid sensor has performed the detection operation after the unloading is completed.
    Type: Grant
    Filed: October 3, 2019
    Date of Patent: February 16, 2021
    Assignee: Sinfonia Technology Co., Ltd.
    Inventor: Toshimitsu Morihana
  • Publication number: 20210028031
    Abstract: There is provided an EFEM, including: at least one load port; a housing closed by connecting the at least one load port to an opening provided on a side wall of the housing and configured to define, in the housing, a transfer chamber for transferring a substrate; a substrate transfer device disposed in the transfer chamber and configured to transfer the substrate; an inert gas supply unit configured to supply an inert gas to the transfer chamber; and a gas discharge unit configured to discharge a gas in the transfer chamber, wherein the at least one load port includes: an opening/closing mechanism capable of opening and closing a lid of a mounted FOUP; and an accommodation chamber kept in communication with the transfer chamber and configured to accommodate a part of the opening/closing mechanism.
    Type: Application
    Filed: March 13, 2019
    Publication date: January 28, 2021
    Applicant: Sinfonia Technology Co., Ltd.
    Inventors: Toshihiro Kawai, Gengoro Ogura
  • Publication number: 20210013078
    Abstract: In the present disclosure, when a supply flow rate of an inert gas is changed, a pressure fluctuation in a circulation path is suppressed. An EFEM includes a supply valve configured to be capable of changing a supply flow rate of the inert gas supplied to the circulation path, a discharge valve configured to be capable of changing a discharge flow rate of a gas discharged from the circulation path, a concentration detection part configured to detect a change in an atmosphere inside the circulation path, a pressure detection part configured to detect a pressure in the circulation path, and a control part configured to control the supply valve and the discharge valve. The control part is configured to determine an opening degree of the discharge valve to a predetermined value based on a detection result obtained by the concentration detection part.
    Type: Application
    Filed: March 13, 2019
    Publication date: January 14, 2021
    Applicant: Sinfonia Technology Co., Ltd.
    Inventors: Toshihiro Kawai, Gengoro Ogura
  • Publication number: 20210013077
    Abstract: In an inert-gas circulating type EFEM, generation of any constraints on installation of incidental equipment, a maintenance door, or the like is inhibited, and the need for changing the placement position, etc. of a feedback path according to the specifications, etc. of a substrate processing device connected thereto is eliminated. An EFEM 1 is provided with: a transfer chamber 41 in which a wafer W is conveyed; a unit installation chamber 42 in which a FFU 44 for feeding nitrogen to the transfer chamber 41 is installed; and a return path 43 for feeding the nitrogen having flown through the transfer chamber 41, back to the unit installation chamber 42. A substrate processing apparatus 6 is connected to the rear-side end of the transfer chamber 41. The return path 43 is disposed at the front-side end of the transfer chamber 41.
    Type: Application
    Filed: March 13, 2019
    Publication date: January 14, 2021
    Applicant: Sinfonia Technology Co., Ltd.
    Inventors: Toshihiro Kawai, Gengoro Ogura
  • Publication number: 20210010598
    Abstract: A housing is made sealable even when the rigidity of a frame member and a cover member is not high. In an EFEM, a pressure difference having a predetermined value or less exists between an internal space of a housing and an external space of the housing. The housing includes a frame member assembled so as to form an opening, a cover member attached to the frame member so as to cover the opening, and a seal member sandwiched between the frame member and the cover member and configured to extend so as to surround the opening. The frame member and the cover member are formed of a sheet metal. The seal member is an elastic member having a hollow cross section orthogonal to an extension direction of the seal member.
    Type: Application
    Filed: March 13, 2019
    Publication date: January 14, 2021
    Applicant: Sinfonia Technology Co., Ltd.
    Inventors: Toshihiro Kawai, Gengoro Ogura
  • Patent number: 10819203
    Abstract: A linear actuator is provided that has a configuration capable of inhibiting contact between an inner core and a plate spring that is connected to the inner core and an outer core, and which is realized by a configuration that is easy to assemble. A stator is arranged in an opening section of a through-hole in the inner core, and has a spacer through which a shaft passes. An outer frame section of the plate spring is connected to the outer core, and a fixed section of the plate spring is connected to the inner core through the spacer in a state in which the shaft passes therethrough. The spacer includes a penetration section having an insertion hole which the shaft is inserted through, and restriction sections and which restrict a displacement of a predetermined amount or more of the plate spring to the inner core side.
    Type: Grant
    Filed: May 2, 2017
    Date of Patent: October 27, 2020
    Assignee: SINFONIA TECHNOLOGY CO., LTD.
    Inventors: Yosuke Muraguchi, Hiroshi Takizawa, Yasuhiro Sakai, Takayoshi Fujii, Takashi Fukunaga
  • Publication number: 20200312686
    Abstract: To provide a transfer chamber capable of replacing a chemical filter without affecting an internal atmosphere, and shortening or eliminating stop time of a transfer process of a wafer (W) associated with replacement of the chemical filter. The transfer chamber transfers the wafer (W) to or from a processing device (6) by using a transfer robot (2) provided thereinside, and includes a circulation path (CL1) formed inside of a transfer chamber (1) to circulate gas, a chemical filter unit (7) provided in the midstream of the circulation path (CL1), and a connecting and disconnecting means (8) which switches connection and disconnection of the chemical filter unit (7) to and from the circulation path (CL1).
    Type: Application
    Filed: April 10, 2020
    Publication date: October 1, 2020
    Applicant: SINFONIA TECHNOLOGY CO., LTD.
    Inventors: Toshihiro Kawai, Takashi Shigeta, Munekazu Komiya, Yasushi Taniyama
  • Publication number: 20200310363
    Abstract: A dead time estimation device capable of accurately estimating a dead time in a control system is provided. A dead time estimation device 6 includes a dead time calculation section 64 configured to obtain a dead time L{circumflex over (?)}?1 with which an evaluation function J in Equation (1) is at minimum [Equation 7] J=?|?/e?{circumflex over (L)}?1s???|df ??(1) where G{circumflex over (?)}/e?L{circumflex over (?)}?1s is a frequency characteristic of an element from which a dead time element is removed from a transfer function of a control target P and G{circumflex over (?)}? is a transfer function not including the dead time element in the control target P.
    Type: Application
    Filed: February 28, 2020
    Publication date: October 1, 2020
    Applicant: SINFONIA TECHNOLOGY CO., LTD.
    Inventor: Yoji MASUI
  • Patent number: 10781416
    Abstract: A connection mechanism includes two connection parts. Each connection part includes a first flange including a through hole and an attaching portion by which the first flange is attached to a partial wall portion while the through hole faces an opening. The attaching portion includes: a vertical adjuster which adjusts the attaching position of the first flange so that a surface of the first flange, which is opposite to a surface of the first flange facing the partial wall portion, is vertical; and a rotation adjuster which adjusts the attaching position of the first flange about a horizontal axis passing the center of the through hole and extending in the thickness direction. The attaching position of a first flange can be individually adjusted.
    Type: Grant
    Filed: October 4, 2016
    Date of Patent: September 22, 2020
    Assignee: SINFONIA TECHNOLOGY CO., LTD.
    Inventors: Haruki Takeuchi, Yoshimasa Suda
  • Patent number: 10781902
    Abstract: For a gear train GL including a drive gear 33 and an idler gear 34 engaged with each other and a lock gear 35, provided are a first drive means 3A configured to linearly drive the lock gear 35 in forward and backward directions, a second drive means 3B configured to rotationally drive the drive gear 33 in normal and reverse directions, and a controller C configured to control the both drive means 3A and 3B. The controller C starts driving the lock gear 35 at the time of an unlocking operation, from an engagement position toward the disengagement position through the first drive means 3A, and when the drive is started, the controller C drives the drive gear 33 into one of normal and reverse directions and into the other direction through the second drive means 3B with a polarity reversal in a predetermined cycles T1 and T2.
    Type: Grant
    Filed: March 29, 2018
    Date of Patent: September 22, 2020
    Assignee: SINFONIA TECHNOLOGY CO., LTD.
    Inventors: Masaharu Tsujimura, Katsuaki Saito
  • Publication number: 20200274474
    Abstract: There is provided a control device for a synchronous electric motor that controls a drive of the synchronous electric motor. The control device includes: a limit value setting part configured to set a limit value for an output torque related value that is related to an output torque of the synchronous electric motor according to a rotation speed of the synchronous electric motor; a command generator configured to generate a voltage command based on an input command and the limit value without feeding back a current flowing through the synchronous electric motor; a PWM signal generator configured to generate a PWM signal for controlling the drive of the synchronous electric motor based on the voltage command; and a drive controller configured to control the drive of the synchronous electric motor using the PWM signal.
    Type: Application
    Filed: May 14, 2018
    Publication date: August 27, 2020
    Applicant: Sinfonia Technology Co., Ltd.
    Inventor: Makoto MARUYAMA