Patents Assigned to Sinfonia Technology Co., Ltd.
  • Publication number: 20190362995
    Abstract: A substrate storage container management system includes a load port, configured to transfer a substrate into and out of one or more substrate storage containers, including an ID reader configured to read one or more entity IDs for the substrate storage containers, and one or more sensors configured to directly or indirectly detect one or more states of the substrate storage containers, an associator configured to associate the entity IDs read by the ID reader with one or more sensor values detected by the sensors; a database in which data associated by the associator is accumulated, and a data processor configured to analyze the data in the database and to output a state of a respective substrate storage container for each of the entity IDs.
    Type: Application
    Filed: May 24, 2019
    Publication date: November 28, 2019
    Applicant: Sinfonia Technology Co., Ltd.
    Inventors: Izumi Ito, Tomoya Mizutani
  • Publication number: 20190326134
    Abstract: There is provided an exhaust nozzle unit capable of discharging a gas atmosphere in a substrate storage container having a loading/unloading opening from the container to an outside of the container through a port formed on a bottom surface of the container. The exhausted nozzle includes a nozzle capable of switching the port from a closed state to an open state by pressing a valve of the port; and a housing configured to hold the nozzle so as to be movable up and down between a use posture in which the port is in the open state and a standby posture in which the port is in the closed state.
    Type: Application
    Filed: April 18, 2019
    Publication date: October 24, 2019
    Applicant: Sinfonia Technology Co., Ltd.
    Inventors: Atsushi Suzuki, Yasushi Taniyama, Tomoya Mizutani
  • Publication number: 20190326796
    Abstract: A shaft includes a main refrigerant passage capable of supplying a refrigerant in one direction on an axial center part and a test piece side sub-refrigerant passage having a starting end communicating with the vicinity of a downstream end in a refrigerant supply direction of the main refrigerant passage. The downstream end in the refrigerant supply direction of the main refrigerant passage is set at the position before an end of the shaft at the side to which a test piece is connected and a predetermined position on the downstream side in the refrigerant supply direction relative to a test piece side bearing. An ending end (discharge port) of the test piece side sub-refrigerant passage is set on the upstream side (counter test piece side) in the refrigerant supply direction relative to the test piece side bearing.
    Type: Application
    Filed: April 22, 2019
    Publication date: October 24, 2019
    Applicant: SINFONIA TECHNOLOGY CO., LTD.
    Inventors: Hiroki Wakabayashi, Masashi Kutsuna, Yutaka Wakita, Tetsuhiro Tomita
  • Patent number: 10449887
    Abstract: Provided is a cargo carrying vehicle including; an elevating table 2 elevatable in the vertical direction; a plurality of rotating bodies 31 located on the elevating table 2 and configured to rotate so as to carry a cargo C in a conveyance direction X that is a direction toward a loading-unloading part of an aircraft; and a support 32 configured to support the plurality of rotating bodies 31, wherein the support 32 and the plurality of rotating bodies 31 constitute the conveying unit 3, and the conveying unit 3 is movable on the elevating table 2 in a position adjusting direction Y that is a direction intersecting the vertical direction and the conveyance direction.
    Type: Grant
    Filed: February 4, 2016
    Date of Patent: October 22, 2019
    Assignee: Sinfonia Technology Co., Ltd.
    Inventors: Masahiko Kato, Yosuke Yamada
  • Patent number: 10411508
    Abstract: A non-contact power supply device is used in a processing apparatus including a moving unit movable inside a closed container. The device supplies electric power to the moving unit from outside the closed container. The power supply device includes a feed unit and a heat dissipater. The feed unit includes a feed line and a power supply transformer. The feed line has a feed region arranged inside the closed container along the moving direction of the moving unit. The transformer is arranged inside the closed container so as to be opposed to the feed region in a non-contact manner and is provided so as to move together with the moving unit. The heat dissipater includes a portion on one end side connected to the feed region so as to be capable of conducting heat thereto, and a portion on the other end side extending outside the closed container, so that heat generated in the feed region is partially dissipated outside the closed container.
    Type: Grant
    Filed: August 15, 2016
    Date of Patent: September 10, 2019
    Assignee: Sinfonia Technology Co., Ltd.
    Inventors: Yuji Yamanaka, Mamoru Kosaki, Hideaki Moriya
  • Publication number: 20190264827
    Abstract: In an invention including: a piezoelectric element (13) which generates, as a displacement, a driving force necessary for an operation of a valve body (12) which is an operating body; a displacement enlarging mechanism (14) including at least a spring element so as to enlarge a displacement of the piezoelectric element (13) which acts on the valve body (12); and a driving device (15) which operates the valve body (12) by applying a voltage to the piezoelectric element (13) to extend the piezoelectric element (13), the driving device (15) includes a first filter processing unit (15x) having an inverse function characteristic of a mechanical resonance frequency when operating the displacement enlarging mechanism (14), and is configured to apply, a voltage which reduces the mechanical resonance, to the piezoelectric element (13) through this resonance suppression processing unit (15x).
    Type: Application
    Filed: July 14, 2017
    Publication date: August 29, 2019
    Applicant: SINFONIA TECHNOLOGY CO., LTD.
    Inventor: Susumu Irie
  • Publication number: 20190252228
    Abstract: A load port provided adjacent to a wafer transport chamber for taking in and out a wafer W between the wafer transport chamber and a FOUP, includes a plate-shaped part that constitutes a part of a wall of the wafer transport chamber, and has an opening for opening the wafer transport chamber; a door part for opening and closing the opening; a mounting table that is configured to mount a wafer storage container so as to oppose a lid part for opening and closing an internal space to the door part, and to move to and from the plate-shaped part; and an elastic part that is provided on the mounting table side of the plate-shaped part along the peripheral edge of the opening, wherein the elastic part elastically contacts the periphery of the lid part in the wafer storage container by moving the mounting table toward the plate-shaped part.
    Type: Application
    Filed: April 25, 2019
    Publication date: August 15, 2019
    Applicant: SINFONIA TECHNOLOGY CO., LTD.
    Inventors: Mitsutoshi Ochiai, Takaaki Nakano
  • Publication number: 20190240848
    Abstract: A germ-free glove box includes: a housing in which a germ-free space is formed, the housing including a connector to which a container housing an object is connected; and a glove provided at a front plate of the housing to allow an operating personnel to perform an operation in the germ-free space from the outside of the housing. In this germ-free glove box, the connector is provided on an upper plate of the housing. In the germ-free glove box outside spaces beside the box are effectively utilized, and a large working space is secured at around the bottom surface of a germ-free space.
    Type: Application
    Filed: July 21, 2017
    Publication date: August 8, 2019
    Applicant: SINFONIA TECHNOLOGY CO., LTD.
    Inventors: Haruki TAKEUCHI, Takayuki YAMADA, Toru SAEKI, Takumi ONISHI, Hiroyuki UDA, Hisashi GOMI, Toshimitsu FUJI, Hirotsugu SHIRAIWA, Norihiko YAMAMOTO
  • Patent number: 10361107
    Abstract: Reliability in the restriction of the movement of a container is improved. A content moving device 1 includes: a table portion 20 on which a container 50 is placed; and a restricting mechanism 30. A flange 55 of the container 50 is shaped to provide a recessed portion 56a. A restricting mechanism 30 includes: a collar portion 31; a first restricting portion 32 configured to be located in the recessed portion 56a; a second restricting portion 33a provided above the first restricting portion 32 and inward of the collar portion 31; and a second moving mechanism.
    Type: Grant
    Filed: June 8, 2016
    Date of Patent: July 23, 2019
    Assignee: SINFONIA TECHNOLOGY CO., LTD.
    Inventors: Haruki Takeuchi, Kazuhiro Tsuji, Minetaka Maeda
  • Patent number: 10351811
    Abstract: A cell culture container characterized by being equipped with a container main body and a flat plate attached onto one surface of the container main body, wherein the container main body is equipped with an inflow port through which a liquid can flow into the container main body, a passage through which the liquid flowing into the container main body from the inflow port can pass, and an outflow port through which the liquid passing through the passage can flow out from the container main body, and wherein, on the bottom surface of the passage, multiple cell-seeding areas in which cells passing through the passage can be seeded are arranged side by side along the passage.
    Type: Grant
    Filed: August 18, 2016
    Date of Patent: July 16, 2019
    Assignee: SINFONIA TECHNOLOGY CO., LTD.
    Inventors: Tomoaki Kurakazu, Yasuhiro Oshima, Yoshio Kimura, Kenichi Kagawa, Shinichi Gomi, Shigenori Ozaki
  • Patent number: 10340168
    Abstract: A load port provided adjacent to a wafer transport chamber for taking in and out a wafer W between the wafer transport chamber and a FOUP, includes a plate-shaped part that constitutes a part of a wall of the wafer transport chamber, and has an opening for opening the wafer transport chamber; a door part for opening and closing the opening; a mounting table that is configured to mount a wafer storage container so as to oppose a lid part for opening and closing an internal space to the door part, and to move to and from the plate-shaped part; and an elastic part that is provided on the mounting table side of the plate-shaped part along the peripheral edge of the opening, wherein the elastic part elastically contacts the periphery of the lid part in the wafer storage container by moving the mounting table toward the plate-shaped part.
    Type: Grant
    Filed: January 28, 2015
    Date of Patent: July 2, 2019
    Assignee: SINFONIA TECHNOLOGY CO., LTD.
    Inventors: Mitsutoshi Ochiai, Takaaki Nakano
  • Patent number: 10325709
    Abstract: There is provided a power transmission device to switch a coupled state and an uncoupled state between a first member and a second member which are arranged in a transmission path of a driving force to thereby control transmission of the driving force. The device includes a movable body having ferromagnetic property, a first magnetic path and a second magnetic path, and a permanent magnet. The device also includes a driving portion to excite the electromagnet in the forward direction and then increases an attraction force on a side on which a magnetic flux is increased or decreased.
    Type: Grant
    Filed: January 8, 2016
    Date of Patent: June 18, 2019
    Assignee: SINFONIA TECHNOLOGY CO., LTD.
    Inventor: Hideaki Kuwabara
  • Publication number: 20190181737
    Abstract: A linear actuator is provided that has a configuration capable of inhibiting contact between an inner core and a plate spring that is connected to the inner core and an outer core, and which is realized by a configuration that is easy to assemble. A stator is arranged in an opening section of a through-hole in the inner core, and has a spacer through which a shaft passes. An outer frame section of the plate spring is connected to the outer core, and a fixed section of the plate spring is connected to the inner core through the spacer in a state in which the shaft passes therethrough. The spacer includes a penetration section having an insertion hole which the shaft is inserted through, and restriction sections and which restrict a displacement of a predetermined amount or more of the plate spring to the inner core side.
    Type: Application
    Filed: May 2, 2017
    Publication date: June 13, 2019
    Applicant: SINFONIA TECHNOLOGY CO., LTD.
    Inventors: Yosuke MURAGUCHI, Hiroshi TAKIZAWA, Yasuhiro SAKAI, Takayoshi FUJII, Takashi FUKUNAGA
  • Publication number: 20190145641
    Abstract: There is provided a method for manufacturing semiconductor. The method includes providing a semiconductor manufacturing apparatus and providing an EFEM. The EFEM includes a shield gas curtain apparatus 6 that forms a gas curtain capable of shielding an opening 23 when an internal space 5S of a purge container 5, in which the humidity is reduced to a predetermined value by means of a bottom purge apparatus 25 provided in a load port 2, is brought into communication with an internal space 3S of a wafer transport chamber 3, the gas curtain being formed of a shield curtain gas blown immediately downward from a location near the opening 23 of the load port 2 and being closer to the wafer transport chamber 3 than the opening 23 at a higher height than an upper edge of the opening 23.
    Type: Application
    Filed: January 10, 2019
    Publication date: May 16, 2019
    Applicant: SINFONIA TECHNOLOGY CO., LTD.
    Inventors: Yasushi Taniyama, Mitsutoshi Ochiai, Mitsuo Natsume, Atsushi Suzuki
  • Publication number: 20180323086
    Abstract: Gas is circulated in an entire transportation space. A robot transport device includes a transportation space in which a transport robot is provided and circulation passages by which gas in the transportation space is circulated. Around the transportation space, surrounding spaces are provided. To these surrounding spaces, an object is transported by the transport robot. The transportation space communicates with each of the surrounding spaces via each of openings. The circulation passages are provided to sandwich the transportation space to avoid a working area of the transport robot, including the openings. The circulation passages are provided in pillar portions forming the transportation space.
    Type: Application
    Filed: October 28, 2016
    Publication date: November 8, 2018
    Applicant: SINFONIA TECHNOLOGY CO., LTD.
    Inventors: Takashi SHIGETA, Toshihiro KAWAI, Haruki TAKEUCHI, Yoshimasa SUDA, Hisashi GOMI, Shigenori OZAKI
  • Publication number: 20180315632
    Abstract: A purging nozzle unit of a gas supply device according to the present invention including: a housing that is capable of passing a predetermined gas so as to replace the internal atmosphere of a FOUP with the predetermined gas; a nozzle coming into intimate contact with the proximity of a port that is provided on one face of the FOUP, the nozzle being pressed to thereby open the port; an operation adjustment space configured to increase or decrease so as to operate the nozzle between a use posture in which the predetermined gas can be supplied into the target container via the port and a standby posture in which the predetermined gas cannot be supplied into the target container via the port; and a gas introducing part configured to export or import compression air relative to the operation adjustment space to thereby control an operation of the nozzle.
    Type: Application
    Filed: April 24, 2018
    Publication date: November 1, 2018
    Applicant: SINFONIA TECHNOLOGY CO., LTD.
    Inventors: Yasushi Taniyama, Toshimitsu Morihana
  • Publication number: 20180308731
    Abstract: Reliability in the restriction of the movement of a container is improved. A content moving device 1 includes: a table portion 20 on which a container 50 is placed; and a restricting mechanism 30. A flange 55 of the container 50 is shaped to provide a recessed portion 56a. A restricting mechanism 30 includes: a collar portion 31; a first restricting portion 32 configured to be located in the recessed portion 56a; a second restricting portion 33a provided above the first restricting portion 32 and inward of the collar portion 31; and a second moving mechanism.
    Type: Application
    Filed: June 8, 2016
    Publication date: October 25, 2018
    Applicant: SINFONIA TECHNOLOGY CO., LTD.
    Inventor: Haruki TAKEUCHI
  • Publication number: 20180283512
    Abstract: For a gear train GL including a drive gear 33 and an idler gear 34 engaged with each other and a lock gear 35, provided are a first drive means 3A configured to linearly drive the lock gear 35 in forward and backward directions, a second drive means 3B configured to rotationally drive the drive gear 33 in normal and reverse directions, and a controller C configured to control the both drive means 3A and 3B. The controller C starts driving the lock gear 35 at the time of an unlocking operation, from an engagement position toward the disengagement position through the first drive means 3A, and when the drive is started, the controller C drives the drive gear 33 into one of normal and reverse directions and into the other direction through the second drive means 3B with a polarity reversal in a predetermined cycles T1 and T2.
    Type: Application
    Filed: March 29, 2018
    Publication date: October 4, 2018
    Applicant: SINFONIA TECHNOLOGY CO., LTD.
    Inventors: Masaharu Tsujimura, Katsuaki Saito
  • Patent number: D841489
    Type: Grant
    Filed: July 24, 2017
    Date of Patent: February 26, 2019
    Assignee: Sinfonia Technology Co., Ltd.
    Inventors: Hidetoshi Katada, Takenori Motoori
  • Patent number: D851274
    Type: Grant
    Filed: October 30, 2017
    Date of Patent: June 11, 2019
    Assignee: SINFONIA TECHNOLOGY CO., LTD.
    Inventors: Hisashi Gomi, Yusuke Yoda, Hirotsugu Shiraiwa