Abstract: A conveying apparatus includes: a housing; a movable member; a linear motor; and a cover. The linear motor includes a primary magnetic pole and a secondary magnetic pole each having a facing surface that faces the other and that is a plane along the longitudinal direction of the housing. The cover allows the primary magnetic pole to be located in an atmospheric environment, and the secondary magnetic pole to be located in a vacuum environment or a reduced pressure environment by separating the primary magnetic pole and the secondary magnetic pole from each other. The primary magnetic pole and the secondary magnetic pole face each other so that a direction of a magnetic attraction force generated therebetween and acting on their facing surfaces is different from directions of forces acting, due to an atmospheric pressure outside the housing, on the wall of the housing on which the cover is provided.

Abstract: The electromagnetic clutch (X) includes a rotating shaft (1): a magnetic pole body (2) and a rotor (3) disposed to face each other along an axial direction of the rotating shaft (1); and an armature (4) capable of moving in a direction attachable to or detachable from the rotor (3) along the axial direction of the rotating shaft and forming a magnetic circuit with the magnetic pole body and the rotor. The armature is moved in the axial direction of the rotating shaft by electromagnetic suction force to press the rotor when an exciting coil (21) is in an excitation state. The rotating shaft is configured by an input side shaft portion (11) which is a non-magnetic body and formed of a material having enough strength to support rotation of the rotor and the armature; and an output side shaft portion (12) which is a magnetic body.

Abstract: There is obtained a configuration capable of rapidly decelerating a motor even if a failure occurs in the communication between a controller and a motor control unit in a motor controller in which a speed command is input from the controller to the motor control unit. A motor controller 1 is provided with a main controller 2, and a motor control unit 3 configured to be communicable with the main controller 2 to drive a motor M according to a torque command output from the main controller 2. The motor control unit 3 includes a speed control unit 31 for outputting a torque command, so as to decelerate the motor M, if any failure occurs in communication with the main controller 2 while the motor M is being driven.

Abstract: There is provided a motor controller capable of suppressing the rotation of a motor at the time of discharging an electric accumulator, and a construction machine provided with the motor controller. A motor controller 10 is provided with a current controller 1 for controlling an electric current supplied from an electric accumulator E to a motor M, and a rotation detector 2 for detecting the rotation of the motor M. The current controller 1 supplies only a d-axis current to the motor M according to a discharge command. If the rotation of the motor M is detected by the rotation detector 2 at the time of discharging the electric accumulator E, the current controller 1 controls the d-axis current so as to suppress the rotation of the motor M.

Abstract: An object of the present invention is to provide an inverter device for driving an electric motor, which allows control stability and efficiency to be ensured over a wide region of the speed of the electric motor. The inverter device includes a rotational-speed detection section which detects a rotational speed of the electric motor, a carrier-frequency calculation section which calculates a carrier frequency on the basis of the detected rotational speed, and a carrier-frequency switching section which switches, on the basis of the calculated carrier frequency, the carrier frequency used for performing PWM control on the electric motor. The carrier-frequency calculation section calculates, as the carrier frequency, a frequency increased with an increase in the electric-motor rotational speed detected by the rotational-speed detection section.

Abstract: A vibration damping system comprises a vibration applying device mounted on a frame and a control device that controls the vibration applying device, the control device comprising a voltage command producing part that produces a driving voltage command to drive the vibration applying device and a vibration failure diagnosis part that diagnoses whether there is failure based on a vibration detection signal output by a vibration detecting device, wherein the voltage command producing part produces the driving voltage command corresponding to a diagnosis frequency that is previously set at a frequency identical to a resonance frequency of the frame or the vibration applying device or at a predetermined frequency close to the resonance frequency and makes the vibration applying device generate the vibration applying force according to the driving voltage command, and the vibration failure diagnosis part diagnoses whether there is failure based on the vibration detection signal.

Abstract: The left-right span between a light projection section 5a and a light receiving section 5b of a mapping sensor 5 having an optical axis L1 extending in a left-right horizontal direction is arranged to be narrower than the span of a front opening of a open cassette 12 which is a smaller one of differently-sized containers conveyed to a load port, and the mapping sensor is attached to a mapping device 4. A first protrusion sensor 6 having an optical axis L2 extending in the left-right horizontal direction is attached to the mapping device 4 to be separated from the mapping sensor 5 in a moving direction of the mapping sensor 5. Furthermore, a second protrusion sensor 7 having an optical axis extending in the up-down moving direction of the mapping sensor 5 is provided.

Abstract: A carrier transfer facilitating device does not require, for example, renewal (replacement) of an existing load port. Specifically, a carrier transfer facilitating device is provided for a load port on which a FOUP is placed. The carrier transfer facilitating device includes a temporary table on which the FOUP is temporarily placed, a carrier transferring carriage that travels above a carrier table of the load port and the temporary table in the horizontal direction and that lifts and transfers the FOUP between the carrier table and the temporary table, a supporting member that supports the temporary table and the carrier transferring carriage, and a controller that controls the movement of the carrier transferring carriage so as to avoid contact of the carrier transferring carriage with the FOUP while the FOUP is transferred between the hoop supporting table or the temporary table and an OHT.

Abstract: The vibration device includes a base, a movable bench, a first horizontal excitation unit, a second horizontal excitation unit, and a vertical excitation unit. The vibration device includes a first middle bench and a second middle bench between the base and the movable bench. The vibration device includes first horizontal elastic support units, second horizontal elastic support units, and vertical elastic support units that elastically connect the base, the first middle bench, the second middle bench, and the movable bench sequentially in the first horizontal direction, the second horizontal direction, and the vertical direction. If overall device is supposed as a first mass body, a second mass body, and a third mass body with the first horizontal elastic support units and the second horizontal elastic support units as boundaries, respective barycentric positions of these mass bodies are almost the same in the vertical direction and horizontal direction.

Abstract: The Electronic Module includes body case 2 that comprises a plurality of case members 3, 4 by abutting each other and that has an internal space (S) where the first opening P1 is formed on one side surface of the internal space (S) and the second opening P2 that opens in a direction different from that of the first opening P1 is in an exposed state when a plurality of the case members 3, 4 are separated each other, a substrate 5 on which a sensor IC 51 is mounted and that is housed in the internal space (S) of the body case 2, and a resin body 6 that covers the substrate 5 by being filled in the internal space (S) of the body case 2 and solidified or hardened, and is characterized by that a plurality of the case members 3, 4.

Abstract: A purge nozzle unit 1 includes a nozzle main body 2 including a trunk 41 and a collar section 8 protruding outward from the trunk 41 and a holder 3 including a side wall 31 that is in slidable contact with an outward face of the collar section 8 and a bottom wall 33 having a through hole 32 with which an outward face of the trunk 41 is in slidable contact and is configured such that a vent 30 in communication with the outside is formed in the holder 3 and the nozzle main body 2 is vertically moved relative to the holder 3 by regulating a pressure in a pressure-regulated space S formed between the nozzle main body 2 and the holder 3 and in communication with the vent 30.

Abstract: The left-right span between a light projection section 5a and a light receiving section 5b of a mapping sensor 5 having an optical axis L1 extending in a left-right horizontal direction is arranged to be narrower than the span of a front opening of a open cassette 12 which is a smaller one of differently-sized containers conveyed to a load port, and the mapping sensor is attached to a mapping device 4. A first protrusion sensor 6 having an optical axis L2 extending in the left-right horizontal direction is attached to the mapping device 4 to be separated from the mapping sensor 5 in a moving direction of the mapping sensor 5. Furthermore, a second protrusion sensor 7 having an optical axis extending in the up-down moving direction of the mapping sensor 5 is provided.

Abstract: A cassette adapter which makes it possible for a second cassette which accommodates a circular wafer of a diameter of 200 mm to be used on a load port ready for a first cassette which accommodates a different circular wafer of another diameter of 300 mm is locked to the load port by an adapter main body locking apparatus. The locking apparatus includes a locking air cylinder serving as a locking member for locking the first cassette to a carrier base of the load port, and a locking target member provided integrally on a rear face of an adapter plate of the cassette adapter for disengageably engaging with a locking pawl at an end of a rod of the air cylinder. A seating sensor mechanism detects that the second cassette is seated at a correct position on the adapter plate.

Abstract: To provide a conveying apparatus that includes: a fixed section; a movable section movable with respect to the fixed section; and a pair of linear motors each located so as to be partially included in the fixed section and the movable section. Each linear motor includes a primary magnetic pole section and a secondary magnetic pole section, and these pole sections are arranged to face each other so as to enable the movable section to move with respect to the fixed section. The movable section includes a movable body capable of conveying a conveyed object, and one of the magnetic pole sections of each linear motor. Each linear motor is located at each of opposite ends of the movable body in a width direction that is orthogonal to a moving direction, and the fixed section includes the other of the magnetic pole sections.

Abstract: The wafer transport apparatus prevents contaminant deposited on an unprocessed wafer from adhering to a processed wafer. Carrying-in load port 2A is loaded with a FOUP 1 storing an unprocessed wafer W1. Carrying-in chamber 3A has a transport robot 4A which takes out the unprocessed wafer W1 from the FOUP 1. Carrying-in load lock 5A is accessed by the transport robot 4A from the carrying-in chamber 3A side. Carrying-out load port 2B is loaded with the FOUP 1 that can store a processed wafer W2. Carrying-out chamber 3B has a transport robot 4B which passes the processed wafer W2 to the FOUP 1. Carrying-out load lock 5B is accessed by the transport robot 4B from the carrying-out chamber 3B side. The carrying-in chamber 3A and carrying-out chamber 3B are separated from each other. The carrying-in load lock 5A and carrying-out load lock 5B are arranged on different stages.

Abstract: Provided is a wheel drive system for aircraft RS including a motor 2 that is connected to a wheel 12, and provided with two voltage supply lines L1 and L2 for supplying the voltages Vta and Vpr with varying the length of a winding 21 to be energized; a voltage supply unit for supplying the voltage Vta and Vpr to the two voltage supply lines L1 and L2; and a control unit 8 for controlling the voltage supply unit, wherein the control unit 8 is configured to select one of the two voltage supply lines L1 and L2, and supply the voltage Vta or Vpr, by controlling the voltage supply unit.

Abstract: The Electronic Module has a body case 2, including a plurality of case members 3, 4 and that has an internal space (S) where a first opening P1 is formed on one side surface of the internal space and a second opening P2 that opens in a direction different from that of the first opening P1 is in an exposed state when a plurality of the case members are separated each other, a substrate 5 on which a sensor IC 51 is mounted and that is housed in the internal space of the body case, and a resin body 6 that covers the substrate 5 by being filled in the internal space of the body case and solidified or hardened, and is characterized by that a plurality of the case members and the substrate 5 are integrated by the use of the resin body 6 as an accouplement.

Abstract: A load port provided adjacent to a wafer transport chamber for taking in and out a wafer W between the wafer transport chamber and a FOUP, includes a plate-shaped part that constitutes a part of a wall of the wafer transport chamber, and has an opening for opening the wafer transport chamber; a door part for opening and closing the opening; a mounting table that is configured to mount a wafer storage container so as to oppose a lid part for opening and closing an internal space to the door part, and to move to and from the plate-shaped part; and an elastic part that is provided on the mounting table side of the plate-shaped part along the peripheral edge of the opening, wherein the elastic part elastically contacts the periphery of the lid part in the wafer storage container by moving the mounting table toward the plate-shaped part.

Abstract: An electromagnetic vibration suppression device 1 includes a plurality of electromagnet pairs 2 (2A, 2B) disposed in the width direction of a steel sheet Sa. Each electromagnet pair is oppositely disposed in the thickness direction of the steel sheet Sa traveling in a predetermined direction. A control section 4 is adapted to control current to be applied to each electromagnet 2A, 2B to suppress the vibration of the steel sheet Sa traveling between electromagnets 2A and 2B. The control section 4 is arranged to determine an edge position Sae of the steel sheet Sa by computation based on an inputted width dimension of the steel sheet Sa and a meandering amount of the steel sheet Sa inputted therein, and separately control a current amount to be applied to the electromagnets 2A and 2B based on the edge position Sae of the steel sheet Sa.

Abstract: A damping device includes a calculator calculating a pseudo vibration to cancel a source vibration transmitted from a vibration source to a position to be damped, using an adaptive control algorithm. The canceling vibration is generated according to the pseudo vibration. A vibration detector detects an error vibration remaining at the position. The adaptive control algorithm is adapted by learning to reduce the error vibration. A frequency recognizer recognizes a frequency of the source vibration from a signal related to the vibration source. The frequency of the vibration is used to determine a frequency of the pseudo vibration. A phase difference identifier identifies a phase difference between the error vibration and the canceling vibration according to the pseudo vibration, and a frequency corrector corrects, according to the phase difference, the frequency of the vibration to eliminate the phase difference.