Abstract: There is provided a movable iron core linear actuator, which includes a magnetic circuit which causes a moving element to reciprocate. The magnetic circuit includes an iron core constituting the moving element, a stator core including a facing portion which faces the iron core, a pair of permanent magnets disposed in the facing portion along a reciprocating direction and having inverted magnetic poles at their surfaces which face the iron core, and a coil wound around the stator core. Energization to coil causes the moving element to reciprocate. When the coil is energized, the spring force of magnetic spring which changed in accordance with a relative position of the moving element with respect to the stator core is superimposed on the electromagnetic driving force produced by the energization of the coil and is applied to the moving element by the magnetic flux produced by the permanent magnets.

Abstract: An EFEM includes a housing 3 that constitutes a wafer transport chamber 9 that is substantially closed by connecting load ports 4 to an opening 31a provided on a wall 31, and connecting a processing apparatus 6; a wafer transport apparatus 2, and transports a wafer between the processing apparatus 6 and the FOUPs 7 mounted on the load ports 4; a gas delivery port 11; a gas suction port 12; a gas feedback path 10; and a FFU 13 that includes a filter 13b that is provided in the gas delivery port 11, and eliminates particles contained in the delivered gas, wherein the gas in the wafer transport chamber 9 is circulated by generating a downward gasflow in the wafer transport chamber 9 and feeding back the gas through the gas feedback path 10.

Abstract: A 0-axis current calculator 7 configured to calculate a target value of the 0-axis current by setting the current of the open phase to be zero when one of the phases becomes open, or determines that the target value of the 0-axis current is zero when there is no open phase is provided. Based on the target values of the d-axis current and the q-axis current, the target value of the 0-axis current calculated by the 0-axis current calculator 7, and the d-axis current, the q-axis current, and the 0-axis current transformed by the d-q-0 transformer 8, the current supplied to each phase of the motor are controlled.

Abstract: To provide an antenna for dipole-type IC tag, which can conform to various IC chip specifications and communication frequencies in a wide area without causing an increase in the size of antenna, while advantageously suppressing a decrease in a communication distance caused by a defect part in an antenna pattern, in an antenna for dipole-type IC tag, an antenna radiation part is configured by extending an antenna wire in a radiation part extending direction, while repeatedly forming a pair of branch paths that branches in a direction intersecting with the radiation part extending direction, and a connection path which connects the pair of branch paths. The connection path is configured to extend in the radiation part extending direction from a junction of a pair of branch paths to a branch point of a next pair of branch paths.

Abstract: An article sorting and conveying device that conveys articles by the vibrations of a movable body provided through an elastic support unit, includes a first vibration unit that imparts a periodic vibration force to the movable body in a direction inclined from a vertical direction; a second vibration unit that imparts a periodic vibration force in a direction crossing the periodic vibration force by the first vibration unit; and a vibration control unit that causes a periodic vibration force imparted by each vibration unit to have a phase difference and occur simultaneously at the same frequency, and that creates an elliptical vibration trajectory in the movable body. The articles are sorted and conveyed on the movable body by setting the vibration trajectory of the movable body by the vibration control unit such that articles having a different coefficient of friction are conveyed in different directions.

Abstract: The present invention provides an atmosphere replacement apparatus capable of replacing the atmosphere on the surface of a wafer with a small amount of gas. The apparatus is configured to have a cover capable of facing and covering the wafer to be transported, and a gas supply means that supplies gas having properties different from a surrounding atmosphere from the cover, and replaces the atmosphere on the surface of the wafer by the gas.

Abstract: An electromechanical actuator includes a first system and a second system. The first system includes a first motor and a first movable element capable of being moved back and forth in an axial direction of a rod. The second system includes a second motor and a second movable element capable of being moved back and forth in the axial direction of the rod. The electromechanical actuator is capable of adjusting a stroke length which is a distance between the first driving section set to or in the proximity of an end portion of the first movable element and the second driving section set to or in the proximity of an end portion of the second movable element. The first movable element and second movable element are configured for back and forth movement in the axial direction of the common rod.

Abstract: There is provided a movable iron core linear actuator, which includes a magnetic circuit (mc) which causes a moving element (2) to reciprocate. The magnetic circuit (mc) includes an iron core (20) constituting the moving element (2), a stator core (10) including a facing portion (10c) which faces the iron core (20), a pair of permanent magnets (12a, 12b) disposed in the facing portion (10c) along a reciprocating direction and having inverted magnetic poles at their surfaces which face the iron core, and a coil (11) wound around the stator core (10). Energization to coil (11) causes the moving element (2) to reciprocate. When the coil (11) is not energized, offset force (F4) is applied to the moving element (2) by the magnetic flux produced by the permanent magnets (12a, 12b).

Abstract: An EFEM 1 includes a wafer transfer chamber 3 having an interior space in which a wafer transfer robot 5 is disposed and load ports 2 disposed adjacent to a front surface 32 of the wafer transfer chamber 3, and semiconductor processing equipment M can be disposed adjacent to a rear surface 33 of the wafer transfer chamber 3. The EFEM 1 has a configuration in which two buffer stations 4 capable of temporarily storing wafers W are disposed next to each other in the front-rear direction A on a side surface 31 of the wafer transfer chamber 3. The EFEM 1 thus configured adapts to an increase in wafer diameter and is capable of handling many wafers while preventing or minimizing an increase in the stroke distance in the height direction of the wafer transfer robot 5 and an increase in the footprint of the entire EFEM 1.

Abstract: A robot arm apparatus includes an arm mechanism including a base member and a link pivotally connected to the base member for pivotal motion in a horizontal plane through a rotational shaft. The link holds a regular circular transport object at its distal end. The apparatus also includes an edge detector, provided on the base member, that detects two edges of the regular circular transport object as the link pivotally rotates with respect to the base member, a pivotal angle detector that detects a pivotal angle of the link with respect to the base member, and a center position calculator that calculates a center position of the regular circular transport object with respect to the link. The calculation is based on two pivotal angles detected by the pivotal angle detector when the edge detector detects the two edges of the regular circular transport object.

Abstract: There is provided an EFEM that includes a shield gas curtain apparatus 6 that forms a gas curtain capable of shielding an opening 23 when an internal space 5S of a purge container 5, in which the humidity is reduced to a predetermined value by means of a bottom purge apparatus 25 provided in a load port 2, is brought into communication with an internal space 3S of a wafer transport chamber 3, the gas curtain being formed of a shield curtain gas blown immediately downward from a location near the opening 23 of the load port 2 and being closer to the wafer transport chamber 3 than the opening 23 at a higher height than an upper edge of the opening 23. The EFEM thus configured can prevent and suppress a rapid increase in the humidity in the purge container, in which the humidity in the interior space is reduced by performing the bottom purging, occurring immediately after a lid of the purge container is opened, so that quality degradation due to the moisture adhered on a wafer can be avoided.

Abstract: A linear actuator driving device is provided. The linear actuator driving device includes an electromagnetic driving unit which makes a moving element reciprocate in response to a driving command and an offset correcting unit which corrects the driving command to carry out offset energization to make the center of reciprocation of the moving element be moved in the direction in which deviation between the center of reciprocation of the moving element and the center of the movement possible range is eliminated. The offset correcting unit is configured such that the amplitude information is acquired and, with respect to the amplitude value corresponding to the acquired amplitude information, if the movable amplitude is in a movable area insufficient condition, correction of the driving command is performed and, on the other hand, if the movable amplitude is not in the movable area insufficient condition, correction of the driving command is released.

Abstract: There is obtained a configuration capable of rapidly decelerating a motor even if a failure occurs in the communication between a controller and a motor control unit in a motor controller in which a speed command is input from the controller to the motor control unit. A motor controller 1 is provided with a main controller 2, and a motor control unit 3 configured to be communicable with the main controller 2 to drive a motor M according to a torque command output from the main controller 2. The motor control unit 3 includes a speed control unit 31 for outputting a torque command, so as to decelerate the motor M, if any failure occurs in communication with the main controller 2 while the motor M is being driven.

Abstract: There is provided a motor controller capable of suppressing the rotation of a motor at the time of discharging an electric accumulator, and a construction machine provided with the motor controller. A motor controller 10 is provided with a current controller 1 for controlling an electric current supplied from an electric accumulator E to a motor M, and a rotation detector 2 for detecting the rotation of the motor M. The current controller 1 supplies only a d-axis current to the motor M according to a discharge command. If the rotation of the motor M is detected by the rotation detector 2 at the time of discharging the electric accumulator E, the current controller 1 controls the d-axis current so as to suppress the rotation of the motor M.

Abstract: An object of the present invention is to provide an inverter device for driving an electric motor, which allows control stability and efficiency to be ensured over a wide region of the speed of the electric motor. The inverter device includes a rotational-speed detection section which detects a rotational speed of the electric motor, a carrier-frequency calculation section which calculates a carrier frequency on the basis of the detected rotational speed, and a carrier-frequency switching section which switches, on the basis of the calculated carrier frequency, the carrier frequency used for performing PWM control on the electric motor. The carrier-frequency calculation section calculates, as the carrier frequency, a frequency increased with an increase in the electric-motor rotational speed detected by the rotational-speed detection section.

Abstract: A load port device comprises a link mechanism that has a main moving link whose one end is connected with a door holding member in a rotatable manner, a guide that bends and extends from a horizontal direction to a vertical direction and that guides one end of the main moving link, a main moving block with which the other end of the main moving link is connected in a rotatable manner and a door hoisting shaft that extends in the vertical direction and that moves the main moving block in the extending direction. The link mechanism allows the end of the main moving link to move from the horizontal direction to the vertical direction or from the vertical direction to the horizontal direction along the guide in a state that the other end of the main moving link moves to the vertical direction.

Abstract: An apparatus includes a processing apparatus that processes raw material in an airtight state, an accommodation section that accommodates the raw material, a first feeding path that is provided outside the processing apparatus and receives the raw material from the accommodation section, and a second feeding path having upstream and downstream ends that are outside and inside the processing apparatus, respectively. The second feeding path receives the raw material from the first feeding path. The apparatus also includes a joint section that separates and joins the first path and the second path, and a closing section that is positioned in the second path closer to the processing apparatus than the joint section and maintains the processing apparatus, and the second path in an airtight state when the joint section separates the first path and the second path.

Abstract: An electricity generation device includes a permanent-magnet electric generator with three or more phase windings each having an output terminal and connected to a neutral point, and bidirectional semiconductor switching circuits capable of interrupting connections between the respective phase windings and the neutral point. Each switching circuit allows current to flow in both directions. A gate signal generation circuit outputs to one of the switching circuits during a period including the time at which the AC voltage excited in the corresponding phase winding turns from positive to negative and during a period including the time at which the AC voltage excited in the corresponding phase winding turns from negative to positive. A startup gate signal output circuit outputs a startup gate signal to all of the bidirectional semiconductor switching circuits when the permanent-magnet electric generator is to be started.

Abstract: When it is determined that the number of times that motor rotation-indicative quantity has been detected has exceeded a measurement interval, a feedback speed value is calculated from a motor rotation-indicative quantity detected immediately before, a motor rotation-indicative quantity detected immediately before the last time a measurement interval determination means determined that the number of times had exceeded the measurement interval, and time that has elapsed since the last time the measurement interval determination means determined that the number of times had exceeded the measurement interval, and the measurement interval having a length calculated from a greater one between the calculated feedback speed value and a speed command value is set for the measurement interval determination means to refer to.

Abstract: There is provided a device capable of effectively increasing the number of wafers that is conveyed inside a wafer transport chamber and capable of improving the wafer conveyance processing capacity if an EFEM is used, without leading to a marked increase in installation area. A load port includes: a plurality of levels of loading tables are provided in the height direction; and wafers housed inside FOUP on top of each loading table is inserted into and removed from inside wafer transport chambers, in a state wherein each loading table is arranged at a wafer insertion/removal position on the front surface of the wafer transport chambers. The loading tables includes a transport mechanism that moves wafers forward and back in the front/rear direction, between a FOUP passing/receiving position at which the FOUP are handed over to a FOUP transport device and the wafer insertion/removal position.