Abstract: A method for operating a first and a second electrical load or consumer in an alternating current network. The method can be operated in an optional first operating mode, in which the positive and negative half waves for each load are controlled with a first leading edge phase angle. In addition, a second operating mode is provided, in which a first part of the positive and negative half waves for the first load and a second part of the positive and negative half waves for the second load are controlled with respective second leading edge phase angles. Furthermore, a device for performing the method, having first and second leading edge phase-angle control for the first and second loads.

Abstract: A device for transporting a substrate (5) into a working area (2, 3, 22) which can be temporarily separated in a vacuum-tight manner, and a corresponding method. A transport element (4) transports a substrate (5) in the plane (XY) to a defined working area (2, 3, 22) of a chamber (1). The transport element (4) has a deflectable sealing frame (6) which can be moved in a Z-direction perpendicular with respect to the XY-plane. The sealing frame (6) has two opposing sealing surfaces (10, 11) in the Z-direction. By pressing a closure element (16, 21, 24) against a first sealing surface (10, 11) and thus pressing the second sealing surface (11, 10) against a chamber wall (32, 31), the space of the working area (2, 3, 22) of the chamber (1) can be sealed.

Abstract: The invention describes a method and a device for introducing and removing substrates. Substrates (5) are transported into a lock (2) by a transport element (4). A collection container (3) is located in the lock below the substrates (5) for collecting possible substrate fragments (19). The substrates (5) are removed together with the collection container (3) and the lock cover (18) once the lock (2) has been flooded. The lock cover (18) and the collection container (3) form an almost closed box around the substrates (5). After the substrates (5) have been replaced and the collection container (3) has been emptied, the new substrates (5) are introduced together with the collection container. All the steps are carried out in the machine cycle to ensure an effective production process.

Abstract: A die stamper assembly comprises a first die part for holding a first stamper and a second die part for mounting a second stamper, the die parts cooperating to define a mould cavity. The first stamper is mounted at a boundary of the first die part and the second stamper is mounted at a boundary of the second die part. The die stamper assembly further comprises a venting ring configured around and moveable with respect to the first die part and defining an outer boundary of the mould cavity. A venting holder arranged for holding the circumference of the first stamper and positioned between the first die part and the venting ring to attach the first stamper on the first die part allows venting of air escaping from the mould cavity and prevents leaking of plastic material out of the mould cavity.

Abstract: It is shown a method and apparatus for distributing a viscous liquid over a surface of a substrate, e.g. a semiconductor wafer or a datastorage media, by conditioning the substrate thermally, locally specific before or during the spin coating process.

Abstract: The invention relates to a sputtering cathode (1) for coating a substrate (6), which comprises a device (5) for generating an external magnetic field with substantially parallel magnetic field lines (8) substantially in the plane of the substrate. The invention further relates to a device and a method for coating a substrate with several layers, whereby several sputtering cathodes are disposed in a circle with their target effective areas pointing radially outward.

Abstract: A method for separating bonded substrates and a respective apparatus used for that method is disclosed. The method comprises positioning the bonded substrates (1) in an evacuable chamber (2) by respective means, detaching a space (10) from that evacuable chamber by means of a sealing arrangement (4) so that said space comprises a partial area of the substrates with at least one gap (5) between the bonded substrates (1), lowering the pressure in the vacuum chamber (2) while maintaining the pressure in the space (10), thereby causing the bonded substrates to separate.

Abstract: The invention relates to a method and a device for regulating the thickness of coatings or layers, in particular of bond coatings, wherein bonding is controlled in a programmed manner thereby taking into account the influence of disturbance variables. The invention can be used especially in the production of DVDs. The advantages of the present invention are reproducible accuracy in adjusting the thickness of the coating/bond coating and thus an increased production output.

Abstract: A device and a method for separately transporting substances are provided. The device and method according to the invention can especially be used in connection with an unit for producing DVDs. Preferably, the device according to the invention has for each substrate an input station, a processing station and an output station, which stations are arranged on the circular arc at given distances &agr;. Furthermore, grippers are provided, which are arranged on said circular arc at given distances &agr; and can be simultaneously rotated around an axis through the center of said circle through an angle &bgr;. Each gripper transports one substrate to the processing and output stations in a rotational movement. It is the advantage of the invention that the mixing-up of substrates is avoided.

Abstract: A method of coating a substrate by magnetron cathode sputtering includes a sputtering cathode having pole shoes and being arranged in a vacuum chamber. A target and a magnetic field are provided in an area of the surface of the target and the magnetic field is varied stepwise and/or continuously to displace the plasma radially such that the erosion groove is likewise displaced radially. The variable magnetic field is generated by coils between the back surface of the target and a yoke plate while a static magnetic field is gernated by an annularly arranged magnet in the area of the yoke plate and a target space between the target and the substrate is shielded by means of an iron core which also increases the field strength of the variable magnetic field.

Abstract: The present invention relates to a device for cathode sputtering for producing coatings on a substrate by means of a sputtering cathode, which can be arranged in a vacuum chamber and comprises pole shoes, a target and at least one magnet or ring magnet 9 arranged concentrically with respect to the center axis of the sputtering cathode, wherein a divided yoke is arranged axially symmetrically with respect to the center axis of the sputtering cathode.

Abstract: A method of preventing bubbles or small bubbles when connecting substrate parts of optical data carriers by means of an adhesive. At least one of the substrate parts and/or the adhesive is provided with electric charges.

Abstract: A target for a cathode sputtering device for producing coatings on a substrate (27) by a sputtering cathode (2), which can be introduced into a vacuum chamber, the target having a center axis (44) and being dynamically balanced with respect to the center axis (44) and having a back surface (40) and a target surface (41), the target surface (41) being spaced from the back surface and being concave as a new target surface. The target surface (41) is formed by at least two concentric target surface portions which are inclined with respect to each other, the target surface portions including an outer, radially inwardly extending target surface portion (49, 76) enlarging conically away from the center axis in a direction away from the back surface, and an inner, radially outwardly extending target surface portion (78') narrowing conically toward the center axis in the direction away from the back surface.