Patents Assigned to Speedfam Corporation
  • Patent number: 5123218
    Abstract: A disc finishing method using a machine comprising an annular upper platen, lower platen, a center driving ring, a plurality of a clamping guide rollers, a plurality of stationary guide rollers, a clamping guide roller, and stationary guide roller perpendicularly attached to one of a plurality of a roller stanchions. The polishing machine capable of imparting a circumferential pattern on a plurality of disc-shaped work pieces.
    Type: Grant
    Filed: July 23, 1991
    Date of Patent: June 23, 1992
    Assignee: Speedfam Corporation
    Inventor: Chris E. Karlsrud
  • Patent number: 4821459
    Abstract: A grinding apparatus comprises first and second grinding wheels for grinding the arms of E-cores, or any other desired item, having two different lengths, in a single grinding operation.
    Type: Grant
    Filed: March 11, 1988
    Date of Patent: April 18, 1989
    Assignee: Speedfam Corporation
    Inventor: James V. Keefe
  • Patent number: 4693012
    Abstract: A measuring bar for determining flatness and deviations therefrom comprises a rigid bar, and a plurality of support feet projecting from the bar. The support feet have free ends which occupy a common, flat plane, the free ends of each of the support feet defining a transverse supporting surface of essentially 0.005 to 0.025 inch across. Measuring devices are carried on the bar for measuring the spacing from the flat plane of at least one point on a target surface against which the support feet free ends rest, the measured point being spaced from the support feet.
    Type: Grant
    Filed: July 16, 1985
    Date of Patent: September 15, 1987
    Assignee: Speedfam Corporation
    Inventor: Joseph V. Cesna
  • Patent number: 4593716
    Abstract: A control valve assembly for controlling the flow of abrasive slurry from a supply pump, directing a selected amount of abrasive slurry to the lapping wheel of an associated lapping machine, and recirculating the remainder of the supply of abrasive slurry to the supply pump.
    Type: Grant
    Filed: August 28, 1980
    Date of Patent: June 10, 1986
    Assignee: Speedfam Corporation
    Inventor: Joseph V. Cesna
  • Patent number: 4519168
    Abstract: The disclosure teaches an improved manner of firmly holding a thin brittle wafer, such as a 0.01" thick silicon disc 3" in diameter, so as to allow the wafer to be brought into abrading contact with a moving lap wheel. The fixturing provides a pedestal ground flat and a pad of resilient but firm cellular material bonded on the pedestal and ground flat also. The pedestal and pad are each sized only slightly larger than the wafer to be lapped. A guide ring surrounds the pedestal and pad, leaving only a slight clearance gap therebetween, and further projects away from the pad a distance less than the thickness of the wafer as it will be after lapping. A special liquid is applied as a thin uniform film over the face of the pad, and the wafer is biased against the pad face with a uniform force sufficient to squeeze the film to near zero thickness and into the open cells or pores of the pad.
    Type: Grant
    Filed: December 5, 1983
    Date of Patent: May 28, 1985
    Assignee: Speedfam Corporation
    Inventor: Joseph V. Cesna
  • Patent number: 4270314
    Abstract: This disclosure teaches structure for mounting a pressure plate relative to its supporting shaft in such a manner that axial forces are transmitted between the shaft and pressure plate while yet providing that the plate can freely rotate and swivel relative to the shaft even at varying angles of tilt. The mounting structure includes a pair of angular contact bearings arranged in back to back relationship, the inner races thereof being confined on the shaft and the outer races thereof being confined within a housing block. The housing block is nonrotatably keyed to the pressure plate and a single ball bearing is mounted between the pressure plate and bearing block in axial alignment with the shaft and with the pressure plate.
    Type: Grant
    Filed: September 17, 1979
    Date of Patent: June 2, 1981
    Assignee: Speedfam Corporation
    Inventor: Joseph V. Cesna
  • Patent number: 4047639
    Abstract: The regulator assembly comprises body member carried by a support and defining a cavity for detaining a pool of abrasive slurry. An overflow device is associated with the body member for establishing the upper level of a pool of abrasive slurry in the cavity. At least one flow-restrictive conduit component is secured at one end to the body member, communicates with the cavity at the lower end of the pool of abrasive slurry, and presents an outer end from which abrasive slurry is discharged. One of the above-indicated elements is movable whereby to selectively adjust the vertical distance between the plane of the upper level of the pool of abrasive slurry and the plane of the outer end of the conduit component.
    Type: Grant
    Filed: August 23, 1976
    Date of Patent: September 13, 1977
    Assignee: Speedfam Corporation
    Inventors: David M. McNamara, Stephen A. Boettcher
  • Patent number: 4047640
    Abstract: The regulator assembly comprises body member carried by a support and defining a cavity for detaining a pool of abrasive slurry. An overflow device is associated with the body member for establishing the upper level of a pool of abrasive slurry in the cavity. At least one flow-restrictive conduit component is secured at one end to the body member, communicates with the cavity at the lower end of the pool of abrasive slurry, and presents an outer end from which abrasive slurry is discharged. One of the above-indicated elements is movable whereby to selectively adjust the vertical distance between the plane of the upper level of the pool of abrasive slurry and the plane of the outer end of the conduit component.
    Type: Grant
    Filed: August 23, 1976
    Date of Patent: September 13, 1977
    Assignee: Speedfam Corporation
    Inventors: David M. McNamara, Stephen A. Boettcher
  • Patent number: 3991918
    Abstract: The regulator assembly comprises body means carried by a support and defining a cavity for detaining a pool of abrasive slurry. Overflow means is associated with the body means for establishing the upper level of a pool of abrasive slurry in the cavity. At least one flow-restrictive conduit means is secured at one end to the body means, communicates with the cavity at the lower end of the pool of abrasive slurry, and presents an outer end from which abrasive slurry is discharged. One of the above-indicated means is movable whereby to selectively adjust the vertical distance between the plane of the upper level of the pool of abrasive slurry and the plane of the outer end of the conduit means.
    Type: Grant
    Filed: November 4, 1974
    Date of Patent: November 16, 1976
    Assignee: Speedfam Corporation
    Inventors: David M. McNamara, Stephen A. Boettcher