Patents Assigned to Standard
  • Distributed Ion Source Acceleration Column
    Publication number: 20110210264
    Abstract: An ion beam system uses a separate accelerating electrode, such as a resistive tube, to accelerate the ions while maintaining a low electric field at an extended, that is, distributed ion source, thereby improving resolution. A magneto-optical trap can be used as the ion source.
    Type: Application
    Filed: September 20, 2010
    Publication date: September 1, 2011
    Applicants: FEI COMPANY, Standard
    Inventors: Jabez J. McClelland, Brenton J. Knuffman, Adam V. Steele, Jonathan H. Orloff