Abstract: A substrate alignment and exposure system is disclosed The alignment is performed by capturing an image of the substrate with a pattern recognition system, determining the offset from the alignment and moving the substrate relative to the reticle to be in alignment. A first optical alignment system which captures an image of a position of the substrate off of the primary axis of the exposure optics is used to perform pre-alignment. A second optical alignment system captures an image of the reticle and the substrate through the lens of the exposure optics. The pattern recognition system recognizes the alignment keys on the reticle, alignment targets on the substrate, and computes their positions and displacement from alignment. The relative alignment can be direct or inferred. Any angular and translational misalignment is calculated. The pattern recognition system then moves the substrate to be in alignment with the reticle.

Abstract: A system to transfer a pattern from a reticle to a substrate using a lens array having an arbitrarily wide image field that spans the width of the substrate. The disclosed system incorporates multiple, Wynne Dyson lenses arranged in serial pairs and staggered in position so that each dual serial Wynne Dyson lens system transfers a portion of the overall image from the reticle to the substrate as each are transported past the array of lens pairs. To transfer a complete, unbroken pattern on the substrate, each of the dual serial Wynne Dyson lens pairs are positioned in opposing and side-by-side positions and are staggered with respect to the scan direction. Each lens pair optionally includes individual internal adjustments, so that the pattern produced on the substrate does not contain any breaks or discontinuities.

Abstract: An optical system to project an image from an illuminated object to an image plane with a selected magnification factor. This system includes a lens system having a fixed magnification factor and at least one flat plate that is optically compatible with the lens system and which when bent into a cylindrical shape varies the fixed magnification factor of the lens system along one axis of the image. This variable magnification technique is applicable to all lens system types, including a Wynne Dyson type projection system. In addition, a Wynne Dyson optical projection system that includes an optical block in place of the usual fold prism is discussed. The optical block reduces changes in distortion caused by heat transferred from the reticle. The block permits the inclusion of a dichroic beamsplitter diagonally through the optical block which presents minimal attenuation of the exposure illumination.

Abstract: The reflective projection system has a relatively wide field of view that comprises two concave and two convex spherical mirrors, situated in certain non-light-blocking positions with respect to one another, for deriving, with negligible image aberrations, a projected magnified or demagnified image over at least one of a range of magnification or demagnification power values between 3 and infinity that may be zoomed over this range. Such a reflective projection system, utilizing a high-power excimer laser radiation source, may be employed for ablating the surface of a substrate, such as the surface of the coating of a coated wafer, with a demagnified image of an object pattern defined by a mask, the radiation intensity of the demagnified image being sufficiently high to effect this ablation.

Abstract: An alignment system for a unit magnification system (such as a Half-Field Dyson system) for use in microlithography is provided. The alignment system provides for aligning a pattern on a reticle with a complementary pattern on a wafer.

Abstract: By providing redundant interferometer laser-metering devices, either one of which is capable by itself of providing measurement data of the angular value .theta. of rotation of the X-Y movable stage of a wafer stepper about a vertical Z axis for use by a computer-controlled servo devices that controls the operation of the X-Y movable stage, the servo devices, in a calibration mode, may receive data of specific measurements defining the respective values of undesired departures from flatness or straightness of the nominally-plane mirror surfaces of the the X-Y movable stage. These specific measurements, which may be made quickly at any time without disturbing the stage's mirrors, will also include those departures induced only at the point of use of the mirror and permit the stored control data used by the computer-controlled servo devices to be modified in order to compensate for these undesired departures from flatness or straightness of the nominally-plane mirror surfaces of the X-Y movable stage.

Abstract: Disclosed is tilt-sensing means that employs a point source of alternate 1st or 2nd divergent light beams which, after passing through collimating lenses of the Half-Field Dyson projection optics of the stepper, are separately incident on and reflected from a reflective pattern disposed on the surface of a reticle and from a reflective surface of a wafer, together with two-dimensional position detection means responsive to the position of each of the reflected alternate 1st or 2nd divergent light beams, for independently sensing the angular position of the surface of the reticle and the angular position of the surface of the wafer to determine thereby whether or not the surface of the reticle and the surface of the wafer are substantially parallel to one another.

Abstract: An illumination system for use in a unit magnification optical projection system (such as a Half-Field Dyson system) is provided. In a Half-Field Dyson system, a reticle and a wafer are parallel to each other with a window being provided on the reticle to allow for projection of the reticle pattern onto the wafer. The present invention provides uniform bright illumination over the reticle pattern with little or no spill over through the reticle window.

Abstract: A metering hopper which utilizes an oscillating friction pad to engage and initiate the feeding of successive, bulky newspaper sections or the like from the bottom of a stack may be converted into a machine using a vacuum separating feeder for thin, single-sheet articles by disabling the rocker pad assembly and bolting in place a tray module having an essentially self-contained oscillating vacuum sucker head assembly. When the tray is installed, the self-contained oscillating mechanism for the sucker head assembly makes operable engagement with pre-existing drive means on the machine so as to carry out the necessary rocking action of the sucker heads in timed relationship with other functions of the machine. Connecting the sucker assembly to vacuum control mechanism and a source of vacuum pressure completes the conversion.

Abstract: A microlithographic stepper, employing a Half-Field Dyson projection optical system, achieves focusing of an image of a first-layer reticle pattern on a completely unpatterned reflective wafer surface by including a repetitive diffraction pattern on the reticle which has a configuration in which a particular ordinal diffraction order is normally missing. In response to being simultaneously illuminated with each of two incident monochromatic beams of light, diffraction orders generated by the repetitive diffraction pattern are imaged on the reflective wafer surface and then reflected back to and reimaged on the repetitive diffraction pattern on the reticle. Diffraction orders generated on the first encounter with the repetitive diffraction pattern generate light in the originally missing ordinal diffraction order on the second encounter.

Abstract: An apparatus and method for taping closed the open edge of a composite newspaper is provided which includes a tape applicator for applying a portion of tape to one side of a newspaper, and a moving member presenting a surface moving downstream with the newspaper but at a greater speed relative thereto, whereby a remainder portion of the tape not adhered to the one side may be wrapped around the open end by temporarily adhering a portion of the remainder of the tape to the moving surface and transferring the tape thus temporarily adhered from the moving surface to the other side of the newspaper as the moving surface passes thereby in close adjacency.

Abstract: An upright hopper has a pair of bottom doors which support one or more newspaper sections in flat, horizontal orientation. The doors shift in opposite directions toward an open position in timed relationship to movement of a conveyor passing beneath the doors to drop the sections onto defined bucket areas of the conveyor. One or more hoppers, associated with a single, horizontally moving conveyor, can be utilized by one or more operators to meter toward downstream processing equipment newspaper editions which have been completely assembled before reception in the hopper. Alternatively, the hoppers may be used for newspaper assembly or collation, wherein each operator contributes respective sections to corresponding hoppers which open at the proper time to assemble the complete edition. A number of sensing devices are provided to ensure reliable, automatic operation with minimal attention.

Abstract: Multiple section, quarter-folded bulky newspapers in flat form are inserted into and sealed within transparent polyethylene bags without first rolling or folding the newspapers into smaller bundles so as to present generally flat, weather-resistant, tamper-deterring packages which may be readily stacked, shipped and otherwise handled. The newspapers are delivered seriatim to an inserting station at which the leading newspaper is fed into the open mouth of the topmost bag in a wicketed stack of the bags, whereupon the bagged newspaper package tears free from the wicket and advances downstream to a heat sealing mechanism. Just prior to passing beneath the heat sealer, a marginal, entry end portion of the bag is folded back on top of the package so that, as the package passes under the sealer, the marginal portion is fused against the top wall of the bag while the encapsulated newspaper serves as a heat sink, thereby securely closing the bag mouth and completing the sealed package.

Abstract: Each interfaced loader and metering hopper combination of a newspaper assembling system includes improvements for producing ridges in the newspapers at various states where separation of the newspapers from one another is required. The ridges enhance separation by stiffening the newspaper and reducing the area of contact and thereby the friction between them. At the receiving region of the loader, an arrangement of parallel side and central conveyors, wherein the central one is at a higher level than the side conveyors, produces ridges when the newspapers in a stack are fanned back into a stream. A pair of superimposed center conveyors and inclined laterally located arms produce ridges in the newspapers as they are discharged one at a time from a discharge region of the loader into a receiving zone in the hopper.

Abstract: Each interfaced loader and metering hopper combination of a newspaper assembling system includes improvements for producing ridges in the newspapers at various stages where separation of the newspapers from one another is required. The ridges stiffen the newspaper and reduce the area of contact and thereby the friction between them. At the receiving region of the loader, an arrangement of parallel side and central conveyors, wherein the central one is at a higher level than the side conveyors, produces ridges when the newspapers in a stack are fanned back into a stream. A pair of superimposed center conveyors and inclined laterally located arms produce ridges in the newspapers as they are discharged one at a time from a discharge region of the loader into a receiving zone in the hopper.

Abstract: Multiple section, quarter-folded bulky newspapers in flat form are inserted into and sealed within transparent polyethylene bags without first rolling or folding the newspapers into smaller bundles so as to present generally flat, weather-resistant, tamper-deterring packages which may be readily stacked, shipped and otherwise handled. The newspapers are delivered seriatim to an inserting station at which the leading newspaper is fed into the open mouth of the topmost bag in a wicketed stack of the bags, whereupon the bagged newspaper package tears free from the wicket and advances downstream to a heat sealing mechanism. Just prior to passing beneath the heat sealer, a marginal, entry end portion of the bag is folded back on top of the package so that, as the package passes under the sealer, the marginal portion is fused against the top wall of the bag while the encapsulated newspaper serves as a heat sink, thereby securely closing the bag mouth and completing the sealed package.

Abstract: The feeder has a device which reciprocates across the bottom of a stack of articles so as to separate and feed the lowermost article of the stack during each feeding stroke of the device. The device has a pair of elongated members which extend in the direction of feed and are provided with friction padding along their uppermost surfaces for making firm contact with the article to be fed. Such members, working together as an integral unit, rise up into engagement with the article to slightly raise it along the engaged portions thereof above the rest of the device as the forward stroke is commenced, thereby warping the article along the leading edge thereof as such leading edge is at the same time tucked beneath a confining element at the front of the stack which is strategically spaced above the device a distance which permits the passage of only the lowermost article during each feed stroke.

Abstract: Friction members, working together as an integral unit, rise up into engagement with the lowermost article in a stack to slightly raise it along the engaged portions thereof above the rest of the device as a forward stroke is commenced, thereby warping the article along its leading edge as such leading edge is at the same time tucked beneath a forwardly located element positioned to permit passage of only the lowermost article during each feed stroke. This combination of actions has the effect of advancing the articles seriatim from the stack into a pair of highspeed nip rollers which grab only the lowermost article and immediately complete its withdrawal. At the instant the nip rollers begin pulling on the article, the raised friction members respond by dropping down to their initial position below the upper surface of the feed device, which thereupon makes its return stroke in preparation for feeding the next article of the stack.