Abstract: An object of the present invention is to reduce non-uniformity of etching in a plane of a wafer. An electrostatic chuck device includes: an electrostatic chuck part having a sample mounting surface on which a sample is mounted and having a first electrode for electrostatic attraction; a cooling base part placed on a side opposite to the sample mounting surface with respect to the electrostatic chuck part to cool the electrostatic chuck part; and an adhesive layer that bonds the electrostatic chuck part and the cooling base part together, in which the cooling base part has a function of a second electrode that is an RF electrode, a third electrode for RF electrode or LC adjustment is provided between the electrostatic chuck part and the cooling base part, and the third electrode is bonded to the electrostatic chuck part and the cooling base part and insulated from the cooling base part.

Abstract: An optical waveguide element includes a substrate and an optical waveguide that is disposed on the substrate. The optical waveguide has an effective refractive index change portion in which an effective refractive index of the optical waveguide related to a fundamental mode A parallel to a plane of polarization of a light wave propagated through the optical waveguide changes according to propagation of the light wave. In the effective refractive index change portion, a cross-sectional shape of the optical waveguide which is perpendicular to a propagation direction of the light wave is set such that the effective refractive index of the optical waveguide related to the fundamental mode A is higher than an effective refractive index of the optical waveguide related to another fundamental mode B perpendicular to the fundamental mode A.

Abstract: An optical waveguide device including an optical waveguide substrate that has an electro-optic effect, is a crystal having anisotropy in thermal expansion rate, has a thickness set to 10 ?m or lower, and includes an optical waveguide and a holding substrate that holds the optical waveguide substrate, the optical waveguide substrate and the holding substrate being joined to each other, in which the holding substrate is formed of a crystal having a lower dielectric constant than the optical waveguide substrate and having anisotropy in thermal expansion rate, and the optical waveguide substrate and the holding substrate are joined to each other such that differences in thermal expansion rate between the optical waveguide substrate and the holding substrate become small in different axial directions on a joint surface.

Abstract: To provide an optical waveguide device in which damage to a thin plate, particularly damage to an optical waveguide, is prevented. An optical waveguide device includes: a thin plate 1 that has an electro-optic effect and that has a thickness of equal to or thinner than 10 ?m, an optical waveguide 2 being formed on the thin plate; and a reinforcing substrate that supports the thin plate, in which the thin plate 1 has a rectangular shape in a plan view, a dissimilar element layer 3, in which an element different from an element constituting the thin plate is disposed in the thin plate, is formed on at least a portion between an outer periphery of the thin plate and the optical waveguide 2, and a total length over which a cleavage plane of the thin plate traverses a region where the dissimilar element layer is formed, is equal to or longer than 5% of a width of the thin plate in a short side direction.

Abstract: Provided is an optical control element that can minimize an optical path difference between branched waveguides while reducing a difference in structure between the branched waveguides by disposing an input portion and an output portion of an optical waveguide on the same side of a substrate on which the optical waveguide is formed.

Abstract: An optical modulator includes an optical modulation element including an optical waveguide formed on a substrate and a housing that accommodates the optical modulation element, the housing has a bottom surface wall having a quadrilateral shape in a plan view, first and second long side walls that are connected to two opposite edges of the bottom surface wall, and first and second short side walls that are shorter than the first and second long side walls and are connected to two other opposite edges of the bottom surface wall. An average wall thickness of the second long side wall is equal to or larger than an average wall thickness of the first long side wall. At least one of the first and second short side walls has an average thickness that is thinner than the average thickness of the first long side wall.

Abstract: These surface-treated metal oxide particles are metal oxide particles surface-treated with a silane coupling agent having an alkoxy group, in which the metal oxide particles have an ultraviolet shielding property, a weight loss of the surface-treated metal oxide particles on drying at 105° C. for 3 hours is 0.5% by mass or less, a peak derived from the alkoxy group is not detected in a reflection spectrum of the surface-treated metal oxide particles in 900 cm?1 to 1300 cm?1, which is measured by a Fourier transform infrared spectrophotometer, and a value (D98/BET converted diameter) obtained by dividing a dry particle size D98 (?m) thereof by a BET-converted particle diameter (nm) thereof is 0.01 or more and 5.0 or less.

Abstract: A dispersion liquid contains a metal oxide particle surface-modified with a silane compound and a silicone compound, when a transmission spectrum of the metal oxide particles that are obtained by vacuum-drying the dispersion liquid is measured in a wavenumber range of 800 cm?1 or more and 3800 cm?1 or less with FT-IR, IA/IB?3.5 is satisfied (IA is a spectrum value at 3,500 cm?1 and IB is a spectrum value at 1,100 cm?1), and, when the dispersion liquid and methyl phenyl silicone are mixed such that a mass ratio of a total mass of the metal oxide particles and the surface-modifying material to a mass of methyl phenyl silicone becomes 30:70 and the hydrophobic solvent is removed, a viscosity is 9 Pa·s or less.

Abstract: An optical waveguide element includes a substrate having an electro-optic effect, an optical waveguide formed in the substrate, and a control electrode arranged on the substrate to modulate a light wave propagating through the optical waveguide. The control electrode includes a signal electrode and a ground electrode. The signal electrode and the ground electrode are arranged along a modulation effect portion of the optical waveguide that performs modulation. In a shape of a bottom surface of the ground electrode facing the substrate, a slit separating the ground electrode into a first ground electrode close to the signal electrode and a second ground electrode far from the signal electrode is formed in a range corresponding to the modulation effect portion.

Abstract: An optical waveguide device includes a substrate on which an optical waveguide is formed, and a reinforcing block disposed on the substrate, along an end surface of the substrate on which an input portion or an output portion of the optical waveguide is disposed, in which an optical component that is joined to both the end surface of the substrate and an end surface of the reinforcing block is provided, a material used for a joining surface of the optical component and a material used for the substrate or the reinforcing block have at least different linear expansion coefficients of a direction parallel to the joining surface, and an area of the joining surface is set to be smaller than a maximum value of a total of areas of cross sections of the substrate and the reinforcing block parallel to the joining surface.

Abstract: A ceramic joined body (1) includes: a pair of ceramic plates (2,3) that include a conductive material; a conductive layer (4) and an insulating layer (5) that are interposed between the pair of ceramic plates (2, 3); and a pair of intermediate layers (6, 7) that are interposed between the pair of ceramic plates (2, 3) and the conductive layer (4) and are in contact with the pair of ceramic plates (2, 3) and the conductive layer (4).

Abstract: A ceramic substrate made of a dielectric material including silicon carbide particles, which is used as a forming material, in which the number of the silicon carbide particles per unit area on the surface of the substrate is smaller than the number of the silicon carbide particles per unit area in a cross section of the substrate.

Abstract: A ceramic joined body (1) includes: a pair of ceramic plates (2,3) that include a conductive material; and a conductive layer (4) and an insulating layer (5) that are interposed between the pair of ceramic plates (2, 3), a porosity at an interface between the pair of ceramic plates (2, 3) and the insulating layer (5) is 4% or less, and a ratio of an average primary particle diameter of an insulating material which forms the insulating layer (5) to an average primary particle diameter of an insulating material which forms the ceramic plates (2, 3) is more than 1.

Abstract: In an optical waveguide element which uses a rib type optical waveguide, light propagating in the rib type optical waveguide is monitored stably and accurately. The optical waveguide element includes a rib type optical waveguide provided on a optical waveguide substrate and configured of a convex portion protruding in a thickness direction of the optical waveguide substrate and extending in a plane direction of the optical waveguide substrate, and a light receiving element configured of a light receiving part formed on a light receiving element substrate disposed on the rib type optical waveguide and configured to receive at least a part of light propagating through the rib type optical waveguide, and the light receiving element substrate is supported by at least one first convex portion having the same height as that of the rib type optical waveguide provided on the optical waveguide substrate.

Abstract: An optical modulator has an optical modulation element including optical waveguides and a housing that accommodates the optical modulation element. The housing has a bottom surface wall having a quadrilateral shape in a plan view, first and second long side walls that are connected to two opposite edges of the bottom surface wall, and first and second short side walls, shorter than the long side walls, and connected to two other opposite edges of the bottom surface wall. The optical modulation element is accommodated in a space surrounded by the bottom surface wall and the side walls. The second long side wall has a wall thickness that is equal to or larger than that of the first long side wall, and at least one of the first and second short side walls has a wall thickness that is thinner than that of the first long side wall.

Abstract: Zinc oxide powder of the present invention contains zinc oxide particles, in which primary particles of the zinc oxide particles have a minor axis of 35 nm or more and 350 nm or less and have a Heywood diameter of 35 nm or more and 400 nm or less, and a coefficient of variation of a number distribution of the Heywood diameters of the primary particles of the zinc oxide powder is 50% or less.

Abstract: An optical waveguide device includes a substrate on which an optical waveguide is formed, and an object that is disposed on the substrate. The optical waveguide includes a mode conversion/branching portion that converts a mode of a light wave propagating through the optical waveguide and branches the light wave, and the object is disposed to cover a part or the whole of the mode conversion/branching portion or not to cover the mode conversion/branching portion when the substrate is viewed in a plan view. In a case where the object is disposed to cover a part of the mode conversion/branching portion, the object is disposed not to consecutively cover a section over a length of a predetermined value or higher in an advancing direction of a light wave.

Abstract: An optical modulator includes a substrate on which an optical waveguide and a modulation electrode that modulates a light wave propagating through the optical waveguide are formed, and a case housing the substrate, the optical waveguide includes at least an optical branching part that branches one light wave into two light waves or an optical combining part that combines two light waves into one light wave, the modulation electrode has a signal electrode and a ground electrode, and a part of the signal electrode is disposed so as to cross the optical branching part or the optical combining part, and the optical modulator is provided with a suppressing unit that suppresses changes in an intensity ratio of the light waves branched at the optical branching part or an intensity ratio of the light waves combined at the optical combining part, by the signal electrode.

Abstract: An electrostatic chuck device comprising a mounting table having a mounting surface, a focus ring; and a cooling element, wherein the mounting table has a holding portion surrounding the mounting surface, the holding portion has an annular groove portion having a through-hole, the holding portion has inner and outer peripheral surfaces which hold the focus ring and are located on both sides of the groove portion, the holding surface satisfies conditions (i) and (ii), (i) a straight line connecting a first point corresponding to an innermost periphery of the holding surface and a second point corresponding to an outermost periphery of the holding surface has a positive or a negative inclination from the innermost periphery toward the outermost periphery, wherein a difference between a height of the first point and a height of the second point is 0 ?m to 10 ?m, and (ii) leak areas of the inner peripheral surface and the outer peripheral surface are less than 0.7 mm2.

Abstract: To provide a positive electrode material for a lithium ion battery from which a lithium ion battery capable of enhancing output characteristics at low temperatures can be obtained, a positive electrode for a lithium ion battery in which the positive electrode material for a lithium ion battery is used, and a lithium ion battery including the positive electrode for a lithium ion battery. A positive electrode material for a lithium ion battery consisting of primary particles coated with a carbonaceous film or an agglomerate of the primary particles, in which a powder resistance Y is 500 ?·cm or more and 50000 ?·cm or less, a mass X of the carbonaceous film per unit specific surface area is 0.7 mg/m2 or more and 1.1 mg/m2 or less, and Formula (1) below is satisfied. Y?4.91×106×e?9.