Abstract: In an optical modulation element using a thinly processed substrate, cracking of the substrate during electrical connection is prevented, and poor connection or a reduction in manufacturing yield is prevented. An optical waveguide element includes an optical substrate on which an optical waveguide and a conductor pattern are formed, and a support substrate that supports the optical substrate, in which the conductor pattern includes at least one electrical connection area defined as a range in which electrical connection is performed, the optical substrate has a substrate removal portion in which a material of the optical substrate has been removed to penetrate through the optical substrate at a portion corresponding to the electrical connection area, and at least a part of the electrical connection area is formed on the support substrate via the substrate removal portion.

Abstract: An optical waveguide device in which deterioration of characteristics such as velocity matching, characteristic impedance matching, and an optical loss caused by positional deviation of each electrode layer is suppressed even in a case where a control electrode is formed with a plurality of electrode layers is provided.

Abstract: Provided is an optical waveguide device including an optical waveguide, and a spot size converter connected to the optical waveguide, in which a propagation loss is further suppressed even in a case where an insulating layer covering the optical waveguide is disposed. An optical waveguide device includes an optical waveguide 2 formed on a substrate 1, and a spot size converter SSC that changes a mode field diameter of a light wave propagating through the optical waveguide in at least one end of the optical waveguide 2, in which an insulating layer IL that covers at least an upper surface of the optical waveguide is provided, and the insulating layer IL is continuously disposed to the spot size converter SSC along the optical waveguide.

Abstract: An object is to provide an optical waveguide device including a dielectric layer covering an optical waveguide, in which occurrence of a problem such as peeling or cracking of the dielectric layer is suppressed. An optical waveguide device of the present invention includes an optical waveguide 2 formed on a substrate 1, and a dielectric layer IL covering the optical waveguide, in which the optical waveguide 2 is a rib type optical waveguide, and at least a part of a side surface of the rib type optical waveguide along a longitudinal direction has a slope shape formed with a curved surface (R6).

Abstract: An optical waveguide device in which an optical loss is reduced by removing an air bubble inside an adhesive layer for joining a reinforcing member from near an optical waveguide or the like even in a case where a protruding part such as a rib type optical waveguide or a spot size converter is formed on an optical waveguide substrate is provided. An optical waveguide device includes an optical waveguide substrate (1, 2) provided with an optical waveguide (10, 12), and a reinforcing member (3) disposed on an upper side of the optical waveguide (10, 12) near an end portion of the optical waveguide (10, 12), the optical waveguide substrate (1, 2) and the reinforcing member (3) being joined through an adhesive layer (4), in which a protective layer (13) that covers the optical waveguide (10, 12) is provided on the optical waveguide (10, 12) positioned on a lower side of the reinforcing member (3), and the adhesive layer (4) is disposed outside the protective layer (13).

Abstract: Provided is an optical waveguide element that prevents leaked light generated at a forking section from entering a downstream optical waveguide such as another forking section, thereby affording minimal degradation of optical characteristics. The optical waveguide is characterized in that: at least one of two fork waveguides (20a, 20b) forking from a first forking section (20) comprises a second forking section (21, 22); slab waveguides (3c-1 to 3c-3) are formed between the two fork waveguides; and between the first forking section and the second forking section, slits (41, 42) are formed that partition the slab waveguides into a first slab waveguide area (3c-1) close to the first forking section and second slab waveguide areas (3c-2, 3c-3) close to the second forking section(s).

Abstract: An optical waveguide element includes an optical waveguide arranged on a main surface of an optical substrate, and a control electrode configured to control light waves propagating through the optical waveguide. The control electrode includes a first control electrode and a second control electrode facing each other across the optical waveguide on the main surface of the optical substrate. The first control electrode and the second control electrode each include a common electrode extending along the optical waveguide, a plurality of segment electrodes arranged closer to the optical waveguide than the common electrode and divided along an extending direction of the optical waveguide, and a plurality of connection electrodes connecting each of the plurality of segment electrodes to the common electrode. A low dielectric layer having a relative dielectric constant lower than a relative dielectric constant of the optical substrate is arranged between the common electrode and the optical substrate.

Abstract: Provided is an optical waveguide element whereby it is possible to prevent dropout of an optical component due to internal stress that occurs in a joint between the optical component and an optical waveguide member including a substrate on which an optical waveguide is formed, and to simplify a manufacturing step pertaining to polishing of a joining surface.

Abstract: A method of roughening the upper surface of the slab waveguide includes a method of locally forming roughness using an electron beam and a method of roughening the upper surface via etching. As an etching condition for the rough surface, processing is performed under a condition in which roughness is generated compared to a processing condition for the rib top portion. Particularly, since the surface can be simply locally roughened by etching, the rough surface can be formed much more simply than that of the unnecessary light beam removing unit in Patent Literature No. 1. Roughness of the rough surface is preferably 10 nm or larger in arithmetic average roughness Ra.

Abstract: A composite sintered body including: a metal oxide as a main phase; silicon carbide as a sub-phase; and silicate of a metal element that is included in the metal oxide, in which the average aggregation diameter of the silicate in the field of view of 600 ?m2 at a magnification of 1000 times is 5 ?m or lower.

Abstract: The purpose of the present invention is to provide an optical modulator in which propagation loss related to transmission of a high-frequency signal is reduced. An optical modulator, in which an electro-optical conversion element E/OC and a driver circuit DRV for driving the electro-optical conversion element are housed in the same case CA, includes: a multiplexer MUX that converts an input modulation signal, which is input from an outside of the case, into an output modulation signal having a higher frequency than the input modulation signal, and supplies the output modulation signal to the driver circuit, in which the multiplexer is housed in the case CA.

Abstract: An optical waveguide device that enables a location in which an optical loss such as a propagation loss or a coupling loss occurs to be easily specified is provided. An optical waveguide device includes a substrate 1 on which an optical waveguide 2 is formed, and a grating 6 formed in a part of the optical waveguide 2 or a grating 6 connected to a monitoring optical waveguide 5 that merges with or branches from a part of the optical waveguide 2, in which inputting a light wave into the optical waveguide or outputting at least a part of the light wave propagating through the optical waveguide is performed through the grating 6.

Abstract: There is provided an optical waveguide device including: a substrate; an optical waveguide formed on the substrate; and a working electrode that controls a light wave propagating through the optical waveguide, in which the working electrode includes a first base layer made of a first material, a first conductive layer on the first base layer, a second base layer made of a second material different from the first material, which is on the first conductive layer, and a second conductive layer on the second base layer, and an edge of the second base layer is covered with the second conductive layer, in a cross-section perpendicular to an extending direction of the optical waveguide.

Abstract: Surface-modified zinc oxide particles of the disclosure are surface-modified zinc oxide particles in which the particle surfaces of zinc oxide particles are treated with a hydrolyzable surface treatment agent, in which the color difference ?E before and after irradiation with simulated sunlight is 4.0 or lower.

Abstract: An optical waveguide device in which an optical loss is reduced by removing an air bubble inside an adhesive layer for joining a reinforcing member from near an optical waveguide or the like even in a case where a protruding part such as a rib type optical waveguide or a spot size converter is formed on an optical waveguide substrate is provided. An optical waveguide device includes an optical waveguide substrate (1, 2) provided with an optical waveguide (10, 12), and a reinforcing member (3) disposed on an upper side of the optical waveguide (10, 12) near an end portion of the optical waveguide (10, 12), the optical waveguide substrate (1, 2) and the reinforcing member (3) being joined through an adhesive layer (4), in which a protective layer (13) that covers the optical waveguide (10, 12) is provided on the optical waveguide (10, 12) positioned on a lower side of the reinforcing member (3), and the adhesive layer (4) is disposed outside the protective layer (13).

Abstract: An optical modulator includes a relay substrate having signal conductor patterns that connect signal input terminals and signal electrodes of an optical modulation element and ground conductor patterns, and a housing, in which the signal conductor pattern includes a component mounting portion including an electrical circuit element. Two ground conductor patterns sandwiching the signal conductor pattern are formed in an asymmetrical shape in a plan view within a component mounting area having a square shape in the plan view centered on the component mounting portion. A direction of a side of the component mounting area having the square shape is same as the extending direction of the signal conductor pattern and a length of a side of the component mounting area is equal to a distance from a center of the component mounting portion to a portion on an adjacent signal conductor pattern closest to the center.

Abstract: Provided is an optical modulator that can be driven at lower voltage through the use of differential signal output. An optical modulator includes a substrate 1 and optical waveguides (21, 22) and a control electrode that are formed on the substrate, in which the optical waveguide includes Mach-Zehnder type optical waveguide, the control electrode is provided with two ground electrodes sandwiching three signal electrodes; the three signal electrodes are constituted by second and third signal electrodes that sandwich a first signal electrode, and have a wiring structure in which one modulation signal of the differential signal is applied to the first signal electrode, and the other modulation signal of the differential signal is applied to the second and third signal electrodes; and one branched waveguide (21) out of two Mach-Zehnder type optical waveguides is disposed between the first and second signal electrodes, and the other branched waveguide (22) is disposed between the first and third signal electrodes.

Abstract: An electrostatic chuck device comprising: a plate-shaped electrostatic chuck part which has an electrostatic adsorption electrode provided therein and has a mounting surface on which a plate-shaped sample is mounted; and a base part which supports the electrostatic chuck part on a support surface thereof from an opposite side of the mounting surface, wherein the base part has a disk shape which has a central axis at a center thereof, and a coolant channel extending along the support surface is provided inside the base part, wherein the coolant channel includes an outer peripheral channel which overlaps an outer edge of the plate-shaped sample when viewed from an axial direction of the central axis, and an inner peripheral channel which is disposed on an inner side in a radical direction than the outer peripheral channel, wherein at least a portion of the inner peripheral channel extends spirally around the central axis, and a channel cross-sectional area of the inner peripheral channel decreases as a distance

Abstract: Provided is an optical waveguide element including spot size conversion means with suppressed optical insertion loss without complicating a manufacturing process.

Abstract: An optical modulator that can suppress crosstalk of a modulation signal even in a case where a wiring substrate is disposed to overlap with a modulation substrate is provided. An optical modulator includes a modulation substrate 1 that includes an optical waveguide and a modulation electrode 10 for modulating a light wave which propagates through the optical waveguide, and a wiring substrate 2 provided with wiring 22 for relaying a modulation signal to be applied to the modulation electrode 10, in which the wiring substrate is disposed to overlap with the modulation substrate to cover an action portion on which modulation is performed by the modulation electrode, and an electromagnetic wave absorption member SH is disposed at at least a part of a position facing the action portion in the wiring substrate.