Abstract: A heat sink includes a plurality of extrusions each including a base and a fin, the plurality of extrusions being aligned in a width direction orthogonal to an extrusion direction and joined to each other. The plurality of extrusions include a first extrusion including a plurality of fins, the first extrusion including, in the base, a through-hole in which a heat pipe is mountable, the through-hole extending in the extrusion direction.

Abstract: Provided is a method including at least the thermal treatment step of thermally treating a SOI substrate having a first silicon layer at a first temperature that the diffusion flow rate of an interstitial silicon atom in a silicon single crystal is higher than the diffusion flow rate of an interstitial oxygen atom and the processing step of processing the SOI substrate after the thermal treatment step to obtain a displacement enlarging mechanism.

Abstract: The method for processing a substrate includes the substrate preparation step of preparing the substrate, the pattern formation step of forming dummy patterns extending in an X-direction on the substrate, the mask arrangement step of arranging a stencil mask having multiple opening patterns on the substrate, the coating formation step of forming a metal film on the substrate through the multiple opening patterns, and the separation step of separating the dummy patterns from the substrate to obtain a submount. The dummy pattern has protrusion formed such that a side surface of the submount is exposed and formed close to the side surface with a clearance.

Abstract: A heat exchanger (100) includes a plurality of flow paths (10) each having a tubular shape, the plurality of flow paths including a plurality of first flow paths (11) configured to allow a first fluid (3) to flow therethrough and a plurality of second flow paths (12) configured to allow a second fluid (4) to flow therethrough. The plurality of flow paths extend in a predetermined direction as a whole. A position and an outer shape of each of the plurality of flow paths in a cross-section (CS) orthogonal to the predetermined direction vary according to a position of the each of the plurality of flow paths in the predetermined direction.

Abstract: A diffusion bonding heat exchanger includes a first heat transfer plate and a second heat transfer plate. A high-temperature flow path of the first heat transfer plate includes a connection channel portion configured such that a high-temperature fluid can flow across a plurality of channels within at least a range that overlaps a predetermined range in a stacking direction, the predetermined range being a range from a flow path inlet of the second heat transfer plate to a position downstream of the flow path inlet.

Abstract: A boiling cooler includes a boiling part, a condensing part arranged in a substantially horizontal direction with respect to the boiling part, and a connecting pipe that connects the boiling part to the condensing part. The condensing part includes a plurality of stages of refrigerant passages, a first external passage provided between the refrigerant passages, and a second external passage provided on an outer surface of at least one of an uppermost refrigerant passage and a lowermost refrigerant passage.

Abstract: A gas conditioner 60 comprises: a case 62 that forms a gas flowpath 61 through which gas flows; and resin members 80 that are provided to the gas flowpath 61 and that are water permeable. The resin members 80 are formed of sealed hollow bodies that are filled with water.

Abstract: A landing gear lifting/lowering EHA system includes: a hydraulic actuator configured to lift and lower the leg of an aircraft; at least one electrically operated hydraulic pump; a hydraulic path; a pressure sensor attached to the hydraulic actuator or the hydraulic path and configured to output a measurement signal corresponding to hydraulic pressure; and a controller configured to output a control signal to the electrically operated hydraulic pump, wherein, when a state in which the hydraulic pressure exceeds a set pressure continues for a set time, the control unit stops the electrically operated hydraulic pump in operation and resumes the operation of the electrically operated hydraulic pump after the hydraulic pressure drops to or below a second set pressure after the electrically operated hydraulic pump is stopped.

Abstract: An angular rate sensor includes an annular resonator. The resonator includes an annular base material made of a first material, and an annular first low thermal conductor made of a second material having a lower thermal conductivity than the first material, the first low thermal conductor being sandwiched between an annular first region and an annular second region on an inner side of the first region in the base material over substantially an entire circumference of the resonator.

Abstract: A MEMS element includes a substrate, a fixing portion provided at the substrate, first and second actuators provided at the fixing portion, a drive target member coupled to the first and second actuators, a third actuator provided at the fixing portion, and a restriction member coupled to the third actuator. The first and second actuators drive the drive target member in a direction parallel to or crossing an upper surface of the substrate. The third actuator drives the restriction member in a direction crossing a movement direction of the drive target member to position the restriction member within a movement plane of the drive target member such that the restriction member restricts displacement of the drive target member.

Abstract: A landing gear lifting/lowering EHA system includes: a hydraulic actuator configured to lift and lower the leg of an aircraft; at least one electrically operated hydraulic pump; a hydraulic path; a pressure sensor attached to the hydraulic actuator or the hydraulic path and configured to output a measurement signal corresponding to hydraulic pressure; and a controller configured to output a control signal to the electrically operated hydraulic pump, wherein, when a state in which the hydraulic pressure exceeds a set pressure continues for a set time, the control unit stops the electrically operated hydraulic pump in operation and resumes the operation of the electrically operated hydraulic pump after the hydraulic pressure drops to or below a second set pressure after the electrically operated hydraulic pump is stopped.

Abstract: A displacement enlarging mechanism includes a substrate, a fixing portion provided at the substrate, an actuator coupled to the fixing portion, a beam extending in a direction substantially parallel to an upper surface of the substrate and having a base end side has been coupled to the actuator and coupled to the fixing portion and having folded back in a direction crossing the upper surface of the substrate, and a coupling portion and a mirror coupled to a folded-back portion formed by folding back of the beam. The actuator drives the beam to push or pull the beam from the base end side in the direction of the folded-back portion.

Abstract: A cooling device includes a main body unit that has, on a surface thereof, a plurality of disposition regions where objects to be cooled are disposed, and a refrigerant flow passage provided in the main body unit. The refrigerant flow passage includes a first flow passage portion and a second flow passage portion. The first flow passage portion is formed at a predetermined position of overlapping a part of an inside of a predetermined disposition region to allow a refrigerant to pass therethrough more intensively than the second flow passage portion.

Abstract: This piezoelectric element includes a lower electrode formed on a substrate, a piezoelectric layer formed on the lower electrode, and an upper electrode formed on the piezoelectric layer. The upper electrode includes a first upper electrode layer made of a metal oxide including an amorphous portion at least at a boundary with the piezoelectric layer and a second upper electrode layer formed on the first upper electrode layer.

Abstract: A target steering angle determining section determines a target steering angle based on the operation amount of the steering gear. A target angle setting section sets a target angle of a steered wheel. A control state switching section switches between an enabled state in which steering control is performed to deflect the steered wheel such that an actual steering angle reaches the target angle and a disabled state in which the steering control is not performed. When the steering control state is switched to the enabled state, the target angle setting section sets the target angle to an angle that was brought closer to the actual steering angle from the target steering angle. After the steering control state is switched to the enabled state, the target angle setting section brings the target angle closer to the target steering angle as time passes.

Abstract: This accelerometer (100) includes a substrate (30) and a bonding member (90) that bonds the substrate (30) and a supporting member (50) to each other, and the bonding member (90) is arranged in a region (R3) that straddles a first region (R1) in which a first sensor element (11) is arranged and a second region (R2) in which a second sensor element (12) is arranged in a plan view.

Abstract: An ozone gas generator includes a first electrode portion that includes a first electrode, and a second electrode portion that faces the first electrode portion, is disposed with a predetermined interval at which discharge between the first electrode portion and the second electrode portion is possible, and includes a second electrode, in which at least one of the first electrode portion and the second electrode portion includes a dielectric that is provided on a surface of the first electrode or the second electrode on sides facing each other, and at least one of the first electrode portion and the second electrode portion includes a layer that is provided on at least a portion of the surface of the first electrode or the second electrode on the sides facing each other, or the dielectric, and includes at least one of a metal or a metal compound, and the first electrode portion and the second electrode portion are configured such that accuracy of an interval between surfaces facing each other is ±3% or more a

Abstract: A heat exchanger includes a first flow path through which a first fluid flows, a second flow path through which a second fluid flows, and an adjustment layer disposed between the first flow path and the second flow path adjacent to each other and that adjusts an amount of heat exchange between the first flow path and the second flow path. The adjustment layer includes a first portion and a second portion having a heat transfer performance lower than that of the first portion, and has a heat transfer performance varied depending on a position in the adjustment layer.

Abstract: A displacement increasing mechanism has a fixing portion, first and second actuators coupled to the fixing portion, a first beam having first and second end portions and coupled to the first actuator at the first end portion, a second beam having third and fourth end portions and coupled to the second actuator at the third end portion, and a drive target member coupled to a parallel arrangement portion at which the first and second beams are arranged in parallel with each other. The first actuator is driven to pull the first beam from a second end portion side in the direction of extending the first beam, and the second actuator is driven to push the second beam form a fourth end portion side in the direction of extending the second beam.

Abstract: In a vibrating structure angular rate sensor, a signal generator generates a phase change suppressing signal in which a phase change according to an amplitude of a rectangular wave signal generated by at least one of a first modulator and a second modulator is suppressed.