Abstract: A landing gear assembly includes a control system configured to output an amount of operation corresponding to an operated physical amount; a wheel; a landing gear supported by a frame of the aircraft, and configured to rotatably support the wheel; a steering system configured to steer the wheel using the amount of operation as a command value; and a detection sensor configured not to output a detection signal when the aircraft flies in air, and to output the detection signal when the aircraft stays on ground. When the detection sensor does not output the detection signal, or when speed of the aircraft is higher than first limitation speed, the steering system orients rotation of the wheel in a longitudinal direction of the aircraft in disregard of the amount of operation.

Abstract: A pair of meshed gears is disposed in a hydraulic chamber of a housing. Bushes in the chamber contact both end surfaces of the gears. Edge surfaces of the gears are chamfered at intermediate parts between tooth tips and tooth bottoms, and the inclination of the intermediate parts is larger than those of the tooth tips and bottom, thereby protecting the edges from damage due to contact force as the gears mesh and preventing leakage between the gears and the support members. Accordingly, the gears may be operated quietly, at high output efficiency, and increased reliability for an extended period.

Abstract: The present invention relates to a metal filling apparatus which can minimize the thickness of a layer of excess metal formed on an object to be processed after processing and which is capable of filling a molten metal into a minute space (via, through hole) formed to have an opening on the object to be processed. A metal filling apparatus 1 comprises a holding table H holding a semiconductor wafer, a piston P provided facing the holding table H and having a metallic pressing portion formed on the side facing the holding table H, a pressing mechanism 5 provided to be capable of pressing the piston P onto the semiconductor wafer K held on the holding table H and other components, and an airtight processing chamber 2 is formed by the semiconductor wafer held on the holding table H, the housing C and the piston P.

Abstract: A heat sink which is mounted in a movable body and which is to be exposed to a traveling air stream generated while the movable body moves includes a base and a heat dissipating portion having a plurality of fins. At least in a front end portion of the heat dissipating portion, the heat dissipating portion includes a rectifying portion provided so as to extend across a predetermined area in a longitudinal direction in front portions of slit-shaped flow paths at an upstanding end (i.e., an end apart from the base).

Abstract: A metal filling apparatus 1 fills a molten metal M into a minute space formed on a surface of a semiconductor wafer K. The metal filling apparatus 1 has a processor body 2 having a processing chamber 5 in which the semiconductor wafer K is held, a molten metal supply mechanism 10, and a molten metal recovery mechanism 20. The molten metal supply mechanism 10 includes a supply tank 11 in which the molten metal M is stored, a supply pipe 13 connected to the processing chamber 5 of the processor body 11 and the supply tank 11, and a supplier 12 interposed in the supply pipe 13 and supplying the molten metal M in the supply tank 11 into the processing chamber 5 through the supply pipe 13, and the molten metal recovery mechanism 20 recovers the molten metal M supplied into the processing chamber 5 from the processing chamber 5.

Abstract: An electro hydrostatic actuator system for retracting/extending a landing gear includes a plurality of hydraulic actuators and a plurality of hydraulic supply sources each including a single hydraulic pump and a single electric motor and provided in parallel to each other. In a normal state, the hydraulic supply sources together supply operation oil sequentially to the hydraulic actuators. When any of the hydraulic supply sources is failed, the other hydraulic supply source(s) other than the failed hydraulic supply source supplies operation oil sequentially to the hydraulic actuators.

Abstract: The present invention is to provide an electro hydrostatic actuator excellent in a snubbing characteristic including a cylinder type actuator main body 1, a piston 2 having a piston rod, the piston slidingly moving in a cylinder of the actuator main body, a motor 18, a pump 19 for supplying fluid according to the rotation of the motor, a mechanism for adjusting a running amount of the fluid into and from the cylinder according to the motion of the piston, and a reservoir 8 for adjusting the supply of the fluid corresponding to a volume difference generated according to the motion of the piston, and a controller 17 which controls the number of revolutions of the motor according to the calculated load torque, and a snubbing control method used for this. An electro hydrostatic actuator of realizing a snubbing mechanism capable of increasing energy efficiency, when used for a landing gear retraction/extension device of an airplane, can be provided.

Abstract: The present invention relates to a plasma etching method with which a wide-gap semiconductor substrate can be etched with high accuracy. An inert gas is supplied into a processing chamber and plasma is generated from the inert gas, a bias potential is applied to a platen on which a wide-gap semiconductor substrate is placed, thereby making ions generated by the generation of plasma from the inert gas incident on the semiconductor substrate on the platen to thereby heat the semiconductor substrate. After the temperature of the semiconductor substrate reaches an etching temperature between 200° C. and 400° C., an etching gas is supplied into the processing chamber and plasma is generated from the etching gas and a bias potential is applied to the platen, thereby etching the semiconductor substrate while maintaining the temperature of the semiconductor substrate at the etching temperature.

Abstract: A landing gear assembly includes a control system configured to output an amount of operation corresponding to an operated physical amount; a wheel; a landing gear supported by a frame of the aircraft, and configured to rotatably support the wheel; a steering system configured to steer the wheel using the amount of operation as a command value; and a detection sensor configured not to output a detection signal when the aircraft flies in air, and to output the detection signal when the aircraft stays on ground. When the detection sensor does not output the detection signal, or when speed of the aircraft is higher than first limitation speed, the steering system orients rotation of the wheel in a longitudinal direction of the aircraft in disregard of the amount of operation.

Abstract: A steering control equipment has a controller having a provisional-target-angular-position calculating section calculating a provisional target angular position of a steering mechanism corresponding to the operation amounts of a steering handle and rudder pedals, a speed setting section setting the aircraft speed on the basis of detected ground speed and airspeed, a target-angular-position limiting section outputting the provisional target angular position as a final target angular position when the calculated provisional target angular position is equal to or lower than a limit value corresponding to the set speed and outputting the limit value as a final target angular position when the calculated provisional target angular position is larger than the limit value, and a actuating control section controlling an actuating mechanism for actuating the steering mechanism so that the output final target angular position and the actual angular position of the steering mechanism detected coincide with each other.

Abstract: A vibrating gyroscope according to this invention includes a ring-shaped vibrating body 11 having a uniform plane, a leg portion 15 flexibly supporting the ring-shaped vibrating body and having a fixed end, a fixed potential electrode 16, and a plurality of electrodes 13a, 13b, . . . , 13h formed on the plane with a piezoelectric film sandwiched between an upper-layer metallic film and a lower-layer metallic film in a thickness direction thereof. In this case, in a representative example shown in FIG. 1, when one of driving electrodes 13a for exciting a primary vibration of the ring-shaped vibrating body 11 in a vibration mode of cos N? is set as a reference driving electrode, the plurality of remaining electrodes 13b, . . . , 13h are disposed at specific positions. Such disposition allows this vibrating gyroscope to detect a uniaxial to triaxial angular velocity by adopting a secondary vibration detector inclusive of an out-of-plane vibration mode.

Abstract: The six direction directing device includes a shaft, a rotation member, a driving source, and a guide member. The shaft extends in an X axis direction. The rotation member is rotatable around an inclined axis inclined at ? deg with respect to the shaft. The rotation member has an xyz rectangular coordinate system. The rotation member further includes a spherical surface and an orbit portion formed around an x axis of the spherical surface. The guide member is fixed to an XYZ rectangular coordinate system. The orbit portion has such a shape that the y axis of the rotation member is sequentially directed in + and ? directions on the U, V, and W axes that cross one another at intervals of 60 deg around the X axis when the rotation member is rotated in contact with the guide member by the rotation of the shaft.

Abstract: A six-direction indicator is provided in an XYZ rectangular coordinate system and includes a shaft on an X axis, a rotation member rotatable around an axis inclined with respect to a rotation axis, guide pins provided upright on the rotation member, and a guide member provided around the X-axis to surround the rotation member. The guide member has a zigzag slit track bent alternately in a mountain-like shape and a valley-like shape in the X direction at intervals of 60° around the X-axis. The guide pins are inserted in the slit track and move around on the slit track by rotation of the shaft. The device indicates one of the positive and negative directions on the U, V, and W axes crossing one another at intervals of 60° around the X-axis.

Abstract: An electro hydrostatic actuator includes an actuator body, a hydraulic pump driven to supply operation oil to the actuator body, and an electric motor configured to drive the hydraulic pump. Each of the hydraulic pump and the electric motor is placed so as to surround the outer periphery of the actuator body, and the hydraulic pump and the electric motor are arranged in a direction along a center axis.

Abstract: A landing gear retraction/extension device includes a hydraulic actuator, a hydraulic circuit, a hydraulic pump, an electric motor, and a driver. Part of the hydraulic circuit is provided such that heat is exchangeable between operation oil and each of the electric motor and the driver. The driver supplies power to the electric motor before landing of an aircraft such that an operation oil temperature is higher than a predetermined temperature upon the landing of the aircraft.

Abstract: A vibrating gyroscope comprises a ring-shaped vibrating body (11) a leg portion (15) flexibly supporting the body (11) and having a fixed end, a fixed potential electrode (16), and a plurality of electrodes (13a-13d) with a piezoelectric film sandwiched between an upper and a lower-layer metallic film in a thickness direction thereof. When N is a natural number of 2 or more, the plurality of electrodes (13a-13d) include driving electrodes (13a) for a primary vibration in a vibration mode of cosN?, which are each disposed (360/N)° apart from each other in a circumferential direction, first detection electrodes (13b) and second detection electrodes (13d) for detecting a secondary vibration generated when an angular velocity is applied to the body (11), which are each disposed in a certain region related to the driving electrode (13a) Each of the electrodes is also disposed in a certain region of the body (11).

Abstract: A vibrating gyroscope according to this invention includes a ring-shaped vibrating body 11 having a uniform plane, a leg portion 15 flexibly supporting the ring-shaped vibrating body and having a fixed end, a fixed potential electrode 16, and a plurality of electrodes 13a, 13b, . . . , 13f formed on the plane with a piezoelectric film sandwiched between an upper-layer metallic film and a lower-layer metallic film in a thickness direction thereof. In this case, in a representative example shown in FIG. 1, when one of driving electrodes 13a for exciting a primary vibration of the ring-shaped vibrating body 11 in a vibration mode of cos N? is set as a reference driving electrode, the plurality of remaining electrodes 13b, . . . , 13f are disposed at specific positions.

Abstract: A dielectric 13 is provided on each of opposing surfaces of a pair of electrodes 14. Discharge gaps 20 communicating with a raw material gas supply path and an ozone gas removal path are formed between the pair of dielectrics 13. A functional film 17 is formed on each of the pair of dielectrics 13 so as to face the discharge gaps 20. The functional film 17 contains a first metal oxide of one or more metals selected from a group consisting of niobium, tantalum, molybdenum, and chromium, and a second metal oxide of one or more metals selected from a group consisting of titanium, tungsten, zinc, and iron.

Abstract: A catalytic reactor includes a pair of plates arranged in parallel at a predetermined interval so as to form a path in which fluid flows; a channel member bonded to the plates in the path to divide the path into channels; and a catalyst carrier inserted into each of the channels and extending along the each of the channels. At least one of the pair of plates serves as a first heat-transfer surface when contacting a temperature medium having a temperature zone different from a temperature zone in the path and exchanging heat with the temperature medium. Each of the channels has a cross section for which an aspect ratio (W/H) of a width to a height is equal to or less than 1, and the catalyst carrier includes a wave-shaped base having a single piece structure, and a catalyst formed on a surface of the base.

Abstract: A vibrating gyroscope according to this invention includes a ring-shaped vibrating body 11 having a uniform plane, leg portions 15 flexibly supporting the ring-shaped vibrating body, a plurality of electrodes 13a, 13b, . . . , 13h that are disposed on the plane of or above the ring-shaped vibrating body and are formed with one of an upper-layer metallic film and a lower-layer metallic film, and a piezoelectric film being sandwiched between the upper-layer metallic film and the lower-layer metallic film in a thickness direction thereof. When one of the driving electrodes 13a for exciting a primary vibration of the ring-shaped vibrating body 11 in a vibration mode of cos N? is referred to as a reference driving electrode, the remaining plurality of electrodes 13b, . . . , 13h are disposed at specific positions. Such disposition allows this vibrating gyroscope to detect a secondary vibration inclusive of an out-of-plane vibration mode.