Patents Assigned to Taiwan Semiconductor Manufacturing Co.
-
Patent number: 10964389Abstract: A cell structure is disclosed. The cell structure includes a first unit comprising a first group of transistors and a first data latch, a second unit comprising a second group of transistors and a second data latch a read port unit comprising a plurality of p-type transistors, a search line and a complementary search line, the search line and the complementary search line function as input of the cell structure, and a master line, the master line functions as an output of the cell structure, the first unit is coupled to the second unit, both the first and the second units are coupled to the read port unit. According to some embodiments, the first data latch comprises a first and a second p-type transistors, a first and a second n-type transistors.Type: GrantFiled: June 24, 2020Date of Patent: March 30, 2021Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Hidehiro Fujiwara, Hung-Jen Liao, Hsien-Yu Pan, Chih-Yu Lin, Yen-Huei Chen, Chien-Chen Lin
-
Patent number: 10962885Abstract: A polarization filter includes a multilayer structure including a first plurality of elements and a second plurality of elements alternating between each other. The first plurality of elements and the second plurality of elements have different thicknesses, and the multilayer structure is configured to interact with unpolarized light incident on the multilayer structure and separate transverse electric (TE) waves and transverse magnetic (TM) waves of the unpolarized light.Type: GrantFiled: September 26, 2019Date of Patent: March 30, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventor: Minfeng Chen
-
Patent number: 10964784Abstract: An integrated circuit device includes a substrate, a fin field-effect transistor (FinFET), and a well strap. The substrate has a first doped region of a first type dopant. The FinFET is over the doped region and includes a first semiconductor fin and a first source/drain region in the first semiconductor fin, in which the first source/drain region is of a second type dopant that has a different conductivity type than the first type dopant. The well strap is over the doped region, includes a second semiconductor fin and a second source/drain region in the second semiconductor fin, in which the second source/drain region is of the first type dopant. A width of the second semiconductor fin is greater than a width of the first semiconductor fin.Type: GrantFiled: April 18, 2019Date of Patent: March 30, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventor: Jhon-Jhy Liaw
-
Patent number: 10964685Abstract: An integrated circuit includes a cell layer, a first metal layer, a first conductive via, and a second conductive via. The cell layer includes first and second cells, in which the first cell is separated from the second cell by a non-zero distance. The first metal layer includes a first conductive feature and a second conductive feature, the first conductive feature overlaps the first cell and does not overlap the second cell, and the second conductive feature overlaps the second cell and does not overlap the first cell, in which the first conductive feature is aligned with the second conductive feature along lengthwise directions of the first and second conductive features. The first conductive via interconnects the cell layer and the first conductive feature of the first metal layer. The second conductive via interconnects the cell layer and the second conductive feature of the first metal layer.Type: GrantFiled: December 20, 2019Date of Patent: March 30, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Fong-Yuan Chang, Kuo-Nan Yang, Chung-Hsing Wang, Lee-Chung Lu, Sheng-Fong Chen, Po-Hsiang Huang, Hiranmay Biswas, Sheng-Hsiung Chen, Aftab Alam Khan
-
Patent number: 10964696Abstract: A semiconductor device includes a first channel region disposed over a substrate, a first source region and a first drain region disposed over the substrate and connected to the first channel region such that the first channel region is disposed between the first source region and the first drain region, a gate dielectric layer disposed on and wrapping the first channel region, a gate electrode layer disposed on the gate dielectric layer and wrapping the first channel region, and a second source region and a second drain region disposed over the substrate and below the first source region and the first drain region, respectively. The second source region and the second drain region are in contact with the gate dielectric layer. A lattice constant of the first source region and the first drain region is different from a lattice constant of the second source region and the second drain region.Type: GrantFiled: April 29, 2019Date of Patent: March 30, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventor: Ka-Hing Fung
-
Patent number: 10964816Abstract: A semiconductor device and a method of forming the same are provided. A semiconductor device according to an embodiment includes a P-type field effect transistor (PFET) and an N-type field effect transistor (NFET). The PFET includes a first gate structure formed over a substrate, a first spacer disposed on a sidewall of the first gate structure, and an unstrained spacer disposed on a sidewall of the first spacer. The NET includes a second gate structure formed over the substrate, the first spacer disposed on a sidewall of the second gate structure, and a strained spacer disposed on a sidewall of the first spacer.Type: GrantFiled: June 14, 2019Date of Patent: March 30, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Kai-Chieh Yang, Li-Yang Chuang, Pei-Yu Wang, Wei Ju Lee, Ching-Wei Tsai, Kuan-Lun Cheng
-
Patent number: 10961118Abstract: The present disclosure relates to a micro-electro mechanical system (MEMS) package and a method of achieving differential pressure adjustment in multiple MEMS cavities at a wafer-to-wafer bonding level. In some embodiments, a ventilation trench and an isolation trench are concurrently within a capping substrate. The isolation trench isolates a silicon region and has a height substantially equal to a height of the ventilation trench. A sealing structure is formed within the ventilation trench and the isolation trench, the sealing structure filing the isolation trench and defining a vent within the ventilation trench. A device substrate is provided and bonded to the capping substrate at a first gas pressure and hermetically sealing a first cavity associated with a first MEMS device and a second cavity associated with a second MEMS device. The capping substrate is thinned to open the vent to adjust a gas pressure of the second cavity.Type: GrantFiled: September 26, 2019Date of Patent: March 30, 2021Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Yi-Chia Lee, Chin-Min Lin, Cheng San Chou, Hsiang-Fu Chen, Wen-Chuan Tai, Ching-Kai Shen, Hua-Shu Ivan Wu, Fan Hu
-
Patent number: 10963609Abstract: Methods for analyzing electromigration (EM) in an integrated circuit (IC) are provided. The layout of the IC is obtained. A metal segment is selected from the layout according to the current simulation result of the IC. It is determined whether to relax the EM rule on the metal segment according to the number of vias over the metal segment in the layout. The vias are in contact with the metal segment.Type: GrantFiled: January 6, 2020Date of Patent: March 30, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chin-Shen Lin, Ming-Hsien Lin, Wan-Yu Lo, Meng-Xiang Lee
-
Patent number: 10962892Abstract: A method of performing a lithography process includes providing a test pattern. The test pattern includes a first set of lines arranged at a first pitch, a second set of lines arranged at the first pitch, and further includes at least one reference line between the first set of lines and the second set of lines. The test pattern is exposed with a radiation source providing an asymmetric, monopole illumination profile to form a test pattern structure on a substrate. The test pattern structure is then measured and a measured distance correlated to an offset of a lithography parameter. A lithography process is adjusted based on the offset of the lithography parameter.Type: GrantFiled: December 20, 2018Date of Patent: March 30, 2021Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chih-Jie Lee, Shih-Chun Huang, Shih-Ming Chang, Ken-Hsien Hsieh, Yung-Sung Yen, Ru-Gun Liu
-
Patent number: 10964569Abstract: An apparatus having a first portion including a first front wall, a first rear wall, and a bottom wall integrally coupled to the first front wall and the first rear wall, and pivotal pin structures integrally coupled to and extending from the first rear wall. The apparatus includes a second portion having a second front wall, a second rear wall, and a top wall integrally coupled to the second front wall and the second rear wall, and pin holders integrally coupled to and extending from the second rear wall and at an offset angle with reference to the top wall. The pivotal pin structure includes a base support connected to the first rear wall and a shaft connected to the base support, and the pin holder defines an opening sized and shaped to accept the shaft. The first and second portions are sized and shaped to be pivotally movable between open and closed configurations.Type: GrantFiled: June 21, 2019Date of Patent: March 30, 2021Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Ping-Cheng Ko, Tzu-Chong Tsai, Jhih-Yuan Yang, Fang-yu Liu
-
Patent number: 10964590Abstract: The present disclosure describes a method to a metallization process with improved gap fill properties. The method includes forming a contact opening in an oxide, forming a barrier layer in the contact opening, forming a liner layer on the barrier layer, and forming a first metal layer on the liner layer to partially fill the contact opening. The method further includes forming a second metal layer on the first metal layer to fill the contact opening, where forming the second metal layer includes sputter depositing the second metal layer with a first radio frequency (RF) power and a direct current power, as well as reflowing the second metal layer with a second RF power.Type: GrantFiled: April 30, 2018Date of Patent: March 30, 2021Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Tien-Pei Chou, Ken-Yu Chang, Sheng-Hsuan Lin, Yueh-Ching Pai, Yu-Ting Lin
-
Patent number: 10962873Abstract: A method of manufacturing an extreme ultraviolet mask, including forming a multilayer Mo/Si stack including alternating Mo and Si layers over a first major surface of a mask substrate, and forming a capping layer over the multilayer Mo/Si stack. An absorber layer is formed on the capping layer, and a hard mask layer is formed over the absorber layer. The hard mask layer is patterned to form a hard mask layer pattern. The hard mask layer pattern is extended into the absorber layer to expose the capping layer and form a mask pattern. A border pattern is formed around the mask pattern. The border pattern is extended through the multilayer Mo/Si stack to expose the mask substrate and form a trench surrounding the mask pattern. A passivation layer is formed along sidewalls of the trench.Type: GrantFiled: April 30, 2018Date of Patent: March 30, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventor: Yun-Yue Lin
-
Publication number: 20210091329Abstract: An organic light emitting diode display includes an integrated circuit, a first electrode, a spacer, an organic material stack layer, and a second electrode. The first electrode is electrically connected to the integrated circuit and has a top surface, a bottom surface, and an inclined surface connecting the top and bottom surfaces. An angle between the inclined surface and the bottom surface is in a range from about 45 degrees to about 80 degrees. The spacer is disposed to cover the inclined surface of the first electrode. The organic material stack layer is disposed on the first electrode. The second electrode is disposed on the organic material stack layer and the spacers.Type: ApplicationFiled: July 23, 2020Publication date: March 25, 2021Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC CHINA COMPANY LIMITEDInventors: Shui-Liang CHEN, Lin-Chun GUI, Jian HUANG, Lin-Lin TIAN
-
Publication number: 20210091770Abstract: An all-digital phase locked loop (ADPLL) receives an analog input supply voltage which is utilized to operate analog circuitry within the ADPLL. The ADPLL of the present disclosure scales this analog input supply voltage to provide a digital input supply voltage which is utilized to operate digital circuitry within the ADPLL. The analog circuitry includes a time-to-digital converter (TDC) to measure phase errors within the ADPLL. The TDC can be characterized as having a resolution of the TDC which is dependent, at least in part, upon the digital input supply voltage. In some situations, process, voltage, and/or temperature (PVT) variations within the ADPLL can cause the digital input supply voltage to fluctuate, which in turn, can cause fluctuations in the resolution of the TDC. These fluctuations in the resolution of the TDC can cause in-band phase noise of the ADPLL to vary across the PVT variations.Type: ApplicationFiled: December 4, 2020Publication date: March 25, 2021Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Feng Wei KUO, Chewn-Pu JOU, Huan-Neng CHEN, Lan-Chou CHO, Robert Bogdan STASZEWSKI, Seyednaser POURMOUSAVIAN
-
Publication number: 20210086368Abstract: The present disclosure describes a method for replacing a photoresist (PR) bottle using a vehicle. An exemplary vehicle includes a processor configured to receive a request signal to replace a first PR bottle. The processor is also configured to transmit an order based on the request signal. The vehicle also includes a plurality of wheels configured to move the vehicle from the first location to a second location, and from the second location to the first location. The vehicle further includes a robotic arm configured to load, at the first location, the first PR bottle into a first container; load a second PR bottle in a second container; remove a cap from the second PR bottle and a socket from the first PR bottle; couple the socket of the first PR bottle to the second PR bottle; and unload the second PR bottle from the second container.Type: ApplicationFiled: December 7, 2020Publication date: March 25, 2021Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Oliver YU, Huei-Chi CHIU, Shi-Ming WANG, Li-Jen Wu, Yu Kai Chen, Sharon Yang
-
Publication number: 20210091064Abstract: A method is provided. A bottom tier package structure is bonded to a support substrate through a first bonding structure, wherein the bottom tier package structure includes a first semiconductor die encapsulated by a first insulating encapsulation, and the first bonding structure includes stacked first dielectric layers and at least one stacked first conductive features penetrating through the stacked first dielectric layers. The support substrate is placed on a grounded stage such that the first semiconductor die is grounded through the at least one first stacked conductive features, the support substrate and the grounded stage. A second semiconductor die is bonded to the bottom tier package structure through a second bonding structure, wherein the second bonding structure includes stacked second dielectric layers and at least one stacked second conductive features penetrating through the stacked second dielectric layers. The second semiconductor die is encapsulated with a second insulating encapsulation.Type: ApplicationFiled: May 26, 2020Publication date: March 25, 2021Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Hsien-Wei Chen, Jie Chen, Ming-Fa Chen
-
Publication number: 20210091077Abstract: A semiconductor device may include a substrate, a first transistor disposed on the substrate, and a second transistor disposed on the substrate. The first gate structure of the first transistor may include a first high-k layer, a first capping layer and a first work function layer sequentially disposed on the substrate, wherein a material of the first work function layer includes Ta. The second transistor includes a second gate structure. The second gate structure includes a second high-k layer, a second capping layer and a second work function layer sequentially disposed on the substrate, wherein the first capping layer and the second capping layer are formed of the same layer, and a material of the second work function layer is different from the material of the first work function layer.Type: ApplicationFiled: January 30, 2020Publication date: March 25, 2021Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Hsin-Yi Lee, Cheng-Lung Hung, Weng Chang, Chi-On Chui
-
Publication number: 20210090995Abstract: A package structure includes at least one semiconductor die, an insulating encapsulant and a redistribution structure. The at least one semiconductor die has a plurality of conductive posts, wherein a top surface of the plurality of conductive posts has a first roughness. The insulating encapsulant is encapsulating the at least one semiconductor die. The redistribution structure is disposed on the insulating encapsulant in a build-up direction and is electrically connected to the at least one semiconductor die. The redistribution structure includes a plurality of conductive via portions and a plurality of conductive body portions embedded in dielectric layers, wherein a top surface of the plurality of conductive body portions has a second roughness, and the second roughness is greater than the first roughness.Type: ApplicationFiled: July 14, 2020Publication date: March 25, 2021Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Hung-Jui Kuo, Hui-Jung Tsai, Jyun-Siang Peng
-
Publication number: 20210091005Abstract: A semiconductor package includes a first semiconductor die, a second semiconductor die, a semiconductor bridge, an integrated passive device, a first redistribution layer, and connective terminals. The second semiconductor die is disposed beside the first semiconductor die. The semiconductor bridge electrically connects the first semiconductor die with the second semiconductor die. The integrated passive device is electrically connected to the first semiconductor die. The first redistribution layer is disposed over the semiconductor bridge. The connective terminals are disposed on the first redistribution layer, on an opposite side with respect to the semiconductor bridge. The first redistribution layer is interposed between the integrated passive device and the connective terminals.Type: ApplicationFiled: March 2, 2020Publication date: March 25, 2021Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chen-Hsuan Tsai, Chin-Chuan Chang, Szu-Wei Lu, Tsung-Fu Tsai
-
Publication number: 20210091022Abstract: A semiconductor structure and a manufacturing method thereof are provided. The semiconductor structure includes an integrated circuit (IC) component, an insulating layer laterally encapsulating sidewalls of the IC component, a redistribution structure disposed on the insulating layer and the IC component, and a warpage control portion coupling to a back side of the IC component opposite to the redistribution structure. The redistribution structure is electrically connected to the IC component. The warpage control portion includes a substrate, a patterned dielectric layer disposed between the substrate and the IC component, and a metal pattern embedded in the patterned dielectric layer and electrically isolated from the IC component.Type: ApplicationFiled: July 1, 2020Publication date: March 25, 2021Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Ming-Fa Chen, Hsien-Wei Chen, Jie Chen