Patents Assigned to Taiwan Semiconductor Manufacturing Co.
  • Patent number: 9947657
    Abstract: A semiconductor device includes a fin field effect transistor. The semiconductor device includes a first gate electrode, a first source/drain (S/D) region disposed adjacent to the first gate electrode, a first S/D contact disposed on the first S/D region, a first spacer layer disposed between the first gate electrode and the first S/D region, a first contact layer in contact with the first gate electrode and the first S/D contact, and a first wiring layer integrally formed with the first contact layer. There is no interface between the first contact layer and the first wiring layer in a cross sectional view, and the first contact layer has a smaller area than the first wiring layer in plan view.
    Type: Grant
    Filed: April 4, 2016
    Date of Patent: April 17, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Fang Chen, Jhon Jhy Liaw, Min-Chang Liang
  • Patent number: 9947658
    Abstract: In a method for manufacturing a semiconductor device, a doped layer doped with a first dopant is formed in a substrate. A semiconductor layer is formed on the doped layer. A fin structure is formed by patterning at least the semiconductor layer and the doped layer such that the fin structure comprises a channel region including the semiconductor layer, and a well region including the doped layer. An isolation insulating layer is formed such that the channel region of the fin structure protrudes from the isolation insulating layer and the well region of the fin structure is embedded in the isolation insulating layer. A gate structure is formed over a part of the fin structure and the isolation insulating layer. The semiconductor layer is at least one of a doped silicon layer or a non-doped silicon layer.
    Type: Grant
    Filed: April 11, 2016
    Date of Patent: April 17, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yu-Sheng Wu, Chen Hua Tsai, Hou-Yu Chen, Chia-Wei Soong, Chih-Pin Tsao
  • Patent number: 9947552
    Abstract: Structures and formation methods of a chip package are provided. The method includes forming multiple conductive structures over a carrier substrate and disposing a semiconductor die over the carrier substrate. The method also includes disposing a mold over the carrier substrate. The method further includes forming a protection layer between the mold and the carrier substrate to surround the semiconductor die and the conductive structures. In addition, the method includes removing the mold.
    Type: Grant
    Filed: June 28, 2016
    Date of Patent: April 17, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Shing-Chao Chen, Chih-Wei Lin, Meng-Tse Chen, Hui-Min Huang, Ming-Da Cheng, Kuo-Lung Pan, Wei-Sen Chang, Tin-Hao Kuo, Hao-Yi Tsai
  • Patent number: 9947392
    Abstract: A memory device includes a first memory array comprising a first bit cell configured to store a first logical state; and a reference signal provision (RSP) unit, coupled to the first memory array, and configured to provide a first reference signal that represents an average of a discharging rate and a leakage rate of a second memory array. In an embodiment, the first logical state stored by the first bit cell is read out using the first reference signal.
    Type: Grant
    Filed: May 12, 2017
    Date of Patent: April 17, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventor: Kuoyuan Hsu
  • Patent number: 9947389
    Abstract: A memory device includes a memory cell that is configured to store a data bit, comprising at least one read transistor that is configured to form either a discharging path or a leakage path when the data bit is read; a conductive line coupled to the read transistor; and at least a first track transistor, coupled to the conductive line, and configured to provide a first current signal having a first current level that tracks a second current level of a second current signal, wherein the second current signal is provided when either one of the discharging and leakage paths is formed, and wherein the first the second current signals are used to determine a logical state of the data bit.
    Type: Grant
    Filed: February 9, 2017
    Date of Patent: April 17, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventor: Kuoyuan Hsu
  • Patent number: 9947594
    Abstract: A semiconductor device includes a first semiconductor channel, a second semiconductor channel, a first gate stack and a second gate stack. The first gate stack includes N-work function metal present on the first semiconductor channel. The second gate stack includes N-work function metal present on the second semiconductor channel. The N-work function metal in the first gate stack and the second gate stack are substantially different. The difference includes at least one of N-work function metal type and N-work function metal amount.
    Type: Grant
    Filed: September 19, 2016
    Date of Patent: April 17, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chih-Yang Yeh, Shun-Jang Liao, Shu-Hui Wang, Chun-Sheng Liang, Kuo-Hua Pan, Jeng-Ya David Yeh
  • Patent number: 9947592
    Abstract: FinFET devices and methods of forming the same are disclosed. One of the FinFET devices includes a substrate, multiple gates and a single spacer wall. The substrate is provided with multiple fins extending in a first direction. The multiple gates extending in a second direction different from the first direction are provided respectively across the fins. Two of the adjacent gates are arranged end to end. The single spacer wall extending in the first direction is located between the facing ends of the adjacent gates and is in physical contact with a gate dielectric material of each of the adjacent gates.
    Type: Grant
    Filed: November 16, 2015
    Date of Patent: April 17, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Jie-Cheng Deng, Yi-Jen Chen, Horng-Huei Tseng
  • Patent number: 9947807
    Abstract: A solar module includes a solar panel and a wireless power transmission module coupled to the solar panel for transmitting power generated by the solar panel wirelessly.
    Type: Grant
    Filed: February 6, 2014
    Date of Patent: April 17, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventor: Tzu-Huan Cheng
  • Patent number: 9947617
    Abstract: The present disclosure relates to an integrated circuit configured to mitigate damage to MIM decoupling capacitors. In some embodiments, the integrated chip has a lower metal interconnect layer arranged over a substrate. A plurality of MIM (metal-insulator-metal) structures are arranged over the lower metal interconnect layer, and a plurality of memory cells are arranged over the lower metal interconnect layer at a location laterally offset from the plurality of MIM structures. An upper metal interconnect layer is arranged over the plurality of MIM structures and the plurality of memory cells. One or both of the lower metal interconnect layer and the upper metal interconnect layer are comprised within a conductive path that electrically couples the plurality of MIM structures in a series connection. The plurality of MIM structures and the plurality of memory cells comprise multi-layer structures having a substantially same shape.
    Type: Grant
    Filed: January 30, 2017
    Date of Patent: April 17, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Kuo-Chi Tu, Chin-Chieh Yang, Wen-Ting Chu
  • Patent number: 9947595
    Abstract: A semiconductor device structure and method for forming the same are provided. The semiconductor device structure includes a substrate and a gate stack structure formed on the substrate. The semiconductor device structure also includes gate spacers formed on the sidewall of the gate stack structure, and the gate spacers include a top portion and a bottom portion adjoined to the top portion, and the bottom portion slopes to a top surface of the substrate. The semiconductor device structure further includes an epitaxial structure formed adjacent to the gate spacers, and the epitaxial structure is formed below the gate spacers.
    Type: Grant
    Filed: November 18, 2016
    Date of Patent: April 17, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventor: Yung-Tsun Liu
  • Patent number: 9947766
    Abstract: A semiconductor device includes a substrate, a source/drain region, an etch stop layer, an oxide layer, an interlayer dielectric layer, and a contact plug. The source/drain region is in the substrate. The etch stop layer is over the source/drain region. The oxide layer is over the etch stop layer. The interlayer dielectric layer is over the oxide layer. The contact plug is electrically connected to the source/drain region through the interlayer dielectric layer, the oxide layer, and the etch stop layer.
    Type: Grant
    Filed: July 10, 2017
    Date of Patent: April 17, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Tsung-Yu Chiang, Kuang-Hsin Chen
  • Patent number: 9947753
    Abstract: A semiconductor structure includes a semiconductor substrate, at least one dielectric layer, a dielectric spacer liner (DSL) layer, and at least one conductor. The dielectric layer is present on the semiconductor substrate. The dielectric layer has at least one contact hole exposing at least a portion of the semiconductor substrate. The semiconductor substrate has at least one recess communicating with the contact hole. The recess has a bottom surface and at least one sidewall. The DSL layer is present on at least the sidewall of the recess. The conductor is present at least partially in the contact hole and is electrically connected to the semiconductor substrate.
    Type: Grant
    Filed: September 1, 2015
    Date of Patent: April 17, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chi-Cheng Hung, Kei-Wei Chen, Yu-Sheng Wang, Ming-Ching Chung, Chia-Yang Wu
  • Patent number: 9947610
    Abstract: A semiconductor structure includes a semiconductor substrate, a dielectric layer, a buffer layer, at least one recess, and at least one conductor. The dielectric layer is present on the semiconductor substrate. The buffer layer is present between the semiconductor substrate and the dielectric layer. The recess extends into the semiconductor substrate through the dielectric layer and the buffer layer, in which the buffer layer has a removing rate with respect to an etching process for forming the recess. The removing rate of the buffer layer is between those of the semiconductor substrate and the dielectric layer. The conductor is present in the recess.
    Type: Grant
    Filed: January 28, 2016
    Date of Patent: April 17, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shiang-Chin Lu, Chien-Chih Wu, Jer-Shien Yang, Hung-Wen Chen
  • Patent number: 9944516
    Abstract: A method for performing a high aspect ratio etch is provided. A semiconductor substrate is provided with a hard mask layer arranged over the semiconductor substrate. A first etch is performed into the hard mask layer to form a hard mask opening exposing the semiconductor substrate. The hard mask opening has a bottom width. A second etch is performed into the semiconductor substrate, through the hard mask opening, to form a substrate opening with a top width that is about equal to the bottom width of the hard mask opening. A protective layer is formed lining a sidewall of the substrate opening. A third etch is performed into the semiconductor substrate, through the hard mask opening, to increase a height of the substrate opening. The top width of the substrate opening remains substantially unchanged during the third etch. A semiconductor structure with a high aspect ratio opening is also provided.
    Type: Grant
    Filed: April 29, 2015
    Date of Patent: April 17, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chung-Yen Chou, Chia-Shiung Tsai, Lee-Chuan Tseng, Ru-Liang Lee
  • Patent number: 9947676
    Abstract: The present disclosure relates to an integrated circuit (IC) that includes a HKMG hybrid non-volatile memory (NVM) device and that provides small scale and high performance, and a method of formation. In some embodiments, the integrated circuit includes a memory region having a NVM device with a pair of control gate electrodes separated from a substrate by corresponding floating gates. A pair of select gate electrodes are disposed at opposite sides of the pair of control gate electrodes. A logic region is disposed adjacent to the memory region and has a logic device with a metal gate electrode disposed over a logic gate dielectric and having bottom and sidewall surfaces covered by a high-k gate dielectric layer. The select gate electrodes or the control gate electrodes comprise metal and have bottom and sidewall surfaces covered by the high-k gate dielectric layer.
    Type: Grant
    Filed: July 8, 2016
    Date of Patent: April 17, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wei Cheng Wu, Chien-Hung Chang
  • Publication number: 20180102278
    Abstract: A semiconductor device is provided. The semiconductor device includes a doped isolation structure formed above a substrate, and the doped isolation structure includes a first doped portion and a second doped portion, and a doped concentration of the second doped portion is different from a doped concentration of the first doped portion. The semiconductor device also includes a first fin partially embedded in the doped isolation structure, and a sidewall surface of the first fin is in direct contact with the first doped portion. The semiconductor device includes a second fin partially embedded in the doped isolation structure, and the doped isolation structure is between the first fin and the second fin, and a sidewall surface of the second fin is in direct contact with the second doped portion.
    Type: Application
    Filed: December 11, 2017
    Publication date: April 12, 2018
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Tsung-Yu CHIANG, Chung-Wei LIN, Kuang-Hsin CHEN, Bor-Zen TIEN
  • Patent number: 9941152
    Abstract: Embodiments of mechanisms for forming a semiconductor device are provided. The semiconductor device includes a semiconductor substrate and a metal gate stack formed over the semiconductor substrate. The semiconductor device also includes an insulating layer formed over the semiconductor substrate and surrounding the metal gate stack, wherein the metal gate stack includes a metal gate electrode. The semiconductor device further includes a metal oxide structure formed over the insulating layer and in direct contact with the insulating layer. The metal oxide structure includes an oxidized material of the metal gate electrode.
    Type: Grant
    Filed: February 6, 2017
    Date of Patent: April 10, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wen-Jia Hsieh, Chih-Lin Wang, Chia-Der Chang
  • Patent number: 9941470
    Abstract: The present disclosure relates to an integrated circuit, which includes a semiconductor substrate and an interconnect structure disposed over the semiconductor substrate. The interconnect structure includes a lower metal layer, an intermediate metal layer disposed over the lower metal layer, and an upper metal layer disposed over the intermediate metal layer. An upper surface of the lower metal layer and a lower surface of the intermediate metal layer are spaced vertically apart by a first distance. A resistive random access memory (RRAM) cell is arranged between the lower metal layer and the upper metal layer. The RRAM cell includes a bottom electrode and a top electrode which are separated by a data storage layer having a variable resistance. The data storage layer vertically spans a second distance that is greater than the first distance.
    Type: Grant
    Filed: January 11, 2017
    Date of Patent: April 10, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Jen-Sheng Yang, Chih-Yang Chang, Chin-Chieh Yang, Kuo-Chi Tu, Sheng-Hung Shih, Wen-Ting Chu, Yu-Wen Liao, Manish Kumar Singh
  • Patent number: 9942062
    Abstract: An unlock detector includes a checker, an accumulator, and a comparator. The accumulator is electrically connected to the checker, and the comparator is electrically connected to the accumulator. The checker includes several checking units. The checker is configured to receive a sampled data signal and a sampled edge signal, and to check the sampled data signal and the sampled edge signal via the checking units to generate several checking results. The accumulator is configured to generate a counting value in a manner of counting according to the checking results. The comparator is configured to compare the counting value with a threshold to generate an unlock-detecting result.
    Type: Grant
    Filed: March 24, 2017
    Date of Patent: April 10, 2018
    Assignees: GLOBAL UNICHIP CORPORATION, TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yu-Chu Chen, Wen-Juh Kang, Cheng-Hung Wu
  • Patent number: 9940424
    Abstract: The present disclosure is directed to systems and methods for a minimum-implant-area (MIA) aware detailed placement. In embodiments, the present disclosure clusters a violation cell with the cells having a same threshold voltage (Vt) and determines an optimal region for a cluster to minimize the wire-length. In further embodiments, an MIA-aware cell flipping technique minimizes a design area while satisfying the MIA constraint.
    Type: Grant
    Filed: May 25, 2016
    Date of Patent: April 10, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yao-Wen Chang, Kai-Han Tseng