Patents Assigned to Taiwan Semiconductor Manufacturing
  • Patent number: 9865331
    Abstract: A circuit includes a plurality of first circuits, a selection circuit, and a second circuit. The selection circuit is configured to selectively couple a first circuit of the plurality of first circuits with the second circuit. The first circuit includes a first data line and a second data line; and a pair of cross-coupled transistors of a first type coupled with the first data line and the second data line. The second circuit includes a first switching circuit and a second switching circuit; and a pair of cross coupled transistors of a second type different from the first type. The pair of cross-coupled transistors of the first circuit and the pair of cross-coupled transistors of the second circuit are configured as part of a sense amplifier when the first switching circuit and the second switching circuit are turned on.
    Type: Grant
    Filed: May 13, 2015
    Date of Patent: January 9, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventor: Mayank Tayal
  • Patent number: 9865566
    Abstract: A semiconductor structure includes a substrate, a redistribution layer (RDL) including a dielectric layer disposed over the substrate and a plurality of conductive members surrounded by the dielectric layer, a first conductive pillar disposed over and electrically connected with one of the plurality of conductive members, a second conductive pillar disposed over and electrically connected with one of the plurality of conductive member, a first die disposed over the RDL and electrically connected with the first conductive pillar, and a second die disposed over the RDL and electrically connected with the second conductive pillar, wherein a height of the second conductive pillar is substantially greater than a height of the first conductive pillar, and a thickness of the first die is substantially greater than a thickness of the second die.
    Type: Grant
    Filed: June 15, 2016
    Date of Patent: January 9, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chi-Yang Yu, Kuan-Lin Ho, Chin-Liang Chen, Yu-Min Liang
  • Patent number: 9865336
    Abstract: A semiconductor memory includes a first data line, a second data line, a first coupling line, a second coupling line, a first plurality of transistors, and a second plurality of transistors. The first coupling line is configured to be capacitively coupled with the first data line. The second coupling line is configured to be capacitively coupled with the second data line. The first plurality of transistors are configured to transmit a first voltage to the first coupling line and the second coupling line in response to a first control signal. The second plurality of transistors are configured to transmit a second voltage to the first coupling line, the second coupling line, or a combination thereof in response to a second control signal and a third control signal.
    Type: Grant
    Filed: February 16, 2017
    Date of Patent: January 9, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventor: Jhon-Jhy Liaw
  • Patent number: 9865500
    Abstract: A method includes forming a hard mask over a base material, and forming an I-shaped first opening in the hard mask. The first opening includes two parallel portions and a connecting portion interconnecting the two parallel portions. Spacers are formed on sidewalls of the first opening. The spacers fill an entirety of the connecting portion, wherein a center portion of each of the two parallel portions is unfilled by the spacers. The hard mask is etched to remove a portion of the hard mask and to form a second opening, wherein the second opening is between the two parallel portions of the first opening. The second opening is spaced apart from the two parallel portions of the first opening by the spacers. The first opening and the second opening are then extended down into the base material.
    Type: Grant
    Filed: March 21, 2017
    Date of Patent: January 9, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Ying Lee, Jyu-Horng Shieh
  • Patent number: 9865601
    Abstract: The present disclosure relates to a semiconductor integrated circuit. The semiconductor integrated circuit includes a substrate, a first transistor and a first patterned conductive layer. The first transistor has a source region, a drain region in the substrate and a gate region on the substrate. The first patterned conductive layer is electrically connected to the drain region of the first transistor. The first patterned conductive layer includes a first section, a second section and a fusible device.
    Type: Grant
    Filed: December 16, 2015
    Date of Patent: January 9, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Kai-Chun Lin, Yu-Der Chih, Chia-Fu Lee
  • Patent number: 9865748
    Abstract: A semiconductor structure includes a semiconductor substrate having a first electrical portion, a second electrical portion, and a bridged conductive layer. The first electrical portion includes a first semiconductor well, a second semiconductor well in the first semiconductor well, and a third semiconductor well and a fourth semiconductor well in the second semiconductor well. The second electrical portion includes a fifth semiconductor well, a semiconductor layer in the fifth semiconductor well, and a sixth semiconductor well and a seventh semiconductor well in the fifth semiconductor well. The semiconductor layer has separated first and second portions. The bridged conductive layer connects the fourth semiconductor well and the sixth semiconductor well.
    Type: Grant
    Filed: April 14, 2017
    Date of Patent: January 9, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsin-Chih Chiang, Tung-Yang Lin, Chih-Chang Cheng, Ruey-Hsin Liu
  • Patent number: 9864275
    Abstract: An improved resist material and a technique for patterning a workpiece such as an integrated circuit workpiece that offers improved resistance to environmental contaminants is provided. In an exemplary embodiment, the method includes receiving a workpiece and applying to the workpiece a resist material containing a protectant disbursed throughout. A thermal process is performed on the workpiece that causes the protectant to become concentrated in an upper region of the resist material. The resist material is exposed in a lithographic process and the exposed resist material is developed to define a pattern within the resist material. In some such examples, the protectant is selected to reduce an effect of an environmental contaminant without affecting an acid/base ratio of the resist material. In some such embodiments, the protectant includes a hydrophobic functional group.
    Type: Grant
    Filed: February 26, 2015
    Date of Patent: January 9, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ching-Yu Chang, Chien-Wei Wang, Hsueh-An Chen
  • Patent number: 9865630
    Abstract: Embodiments of the present disclosure include an image sensor device and methods of forming the same. An embodiment is an image sensor device including a first plurality of pickup regions in a photosensor array area of a substrate, each of first plurality of pickup regions having a first width and a first length, a second plurality of pickup regions in a periphery area of the substrate, the periphery area along at least one side of the photosensor array area, each of second plurality of pickup regions having a second width and a second length.
    Type: Grant
    Filed: July 8, 2016
    Date of Patent: January 9, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Dun-Nian Yaung, Ching-Chun Wang, Feng-Chi Hung, Jeng-Shyan Lin, Yan-Chih Lu
  • Patent number: 9865349
    Abstract: Cell layouts for a memory cell, such as for ternary content addressable memory (TCAM), are disclosed. Some cell layouts include a well strap structure. A cell layout may include a p-doped well, an n-doped well, and a p-doped well sequentially along a layout. Another cell layout may include a p-doped well, an n-doped well, a p-doped well, and an n-doped well sequentially along a layout. A well strap structure may be in a p-doped well or an n-doped well. Various metallization layers having a mesh may be used with a memory cell layout. In some disclosed examples, a first metallization layer may have one, two, or four ground traces, and a second metallization layer may have two ground traces. These various ground traces may be electrically coupled together to form a mesh.
    Type: Grant
    Filed: August 1, 2016
    Date of Patent: January 9, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Jhon Jhy Liaw
  • Patent number: 9865589
    Abstract: A mandrel is formed over an active region that includes a first region and a second region. The first region and the second region are reserved for the formation of a source and a drain of a FinFET, respectively. A portion of the mandrel formed over the second region is broken up into a first segment and a second segment separated from the first segment by a gap. Spacers are formed on opposite sides of the mandrel. Using the spacers, fins are defined. The fins protrude upwardly out of the active region. A portion of the second region corresponding to the gap has no fins formed thereover. The source is epitaxially grown on the fins in the first region. At least a portion of the drain is epitaxially grown on the portion of the second region having no fins.
    Type: Grant
    Filed: October 31, 2016
    Date of Patent: January 9, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Tzung-Chi Lee, Tung-Heng Hsieh, Bao-Ru Young, Yung Feng Chang
  • Patent number: 9865609
    Abstract: A one-time programmable (OTP) memory cell with floating gate shielding is provided. A pair of transistors is arranged on a semiconductor substrate and electrically coupled in series, where the transistors comprise a floating gate. An interconnect structure overlies the pair of transistors. A shield is arranged in the interconnect structure, directly over the floating gate. The shield is configured to block ions in the interconnect structure from moving to the floating gate. A method for manufacturing an OTP memory cell with floating gate shielding is also provided.
    Type: Grant
    Filed: January 28, 2016
    Date of Patent: January 9, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hung-Lin Chen, Shyh-Wei Cheng, Che-Jung Chu
  • Patent number: 9865592
    Abstract: A semiconductor structure comprises a semiconductor substrate and a shallow trench isolation (STI) feature over the substrate. The STI feature includes first and second portions. A top surface of the first portion is lower than a top surface of the second portion. The semiconductor structure further comprises fin active regions; conductive features on the fin active regions and the STI feature; and dielectric features separating the conductive features from the fin active regions. The semiconductor structure further comprises a first gate stack having a first one of the dielectric features and a first one of the conductive features overlying the first one of the dielectric features; and a second gate stack having a second one of the dielectric features and a second one of the conductive features overlying the second one of the dielectric features.
    Type: Grant
    Filed: March 9, 2016
    Date of Patent: January 9, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chia-Hsin Hu, Sun-Jay Chang
  • Patent number: 9865335
    Abstract: A memory device comprises a tracking control circuit for controlling the write operation or the read operation of the memory device. The tracking control circuit comprises a plurality of tracking cells, wherein the timing characteristics of the tracking cells emulate the timing characteristics of a bit cell during a write operation or a read operation of the memory device. The memory device further comprises at least two reference word lines for configuring the number of tracking cells of the tracking control circuit; and a selection circuit configured to activate one or more of the at least two reference word lines.
    Type: Grant
    Filed: February 3, 2017
    Date of Patent: January 9, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD
    Inventors: Pankaj Aggarwal, Jui-Che Tsai, Cheng Hung Lee, Chien-Yuan Chen, Chiting Cheng, Hau-Tai Shieh, Yi-Tzu Chen
  • Patent number: 9865645
    Abstract: A stacked integrated circuit (IC) device and a method are disclosed. The stacked IC device includes a first semiconductor element and a second semiconductor element bonded on the first semiconductor element. The first semiconductor element includes a first substrate, a common conductive feature in the first substrate, a first inter-level dielectric (ILD) layer, a first interconnection feature and a conductive plug connecting the first interconnection feature to the common conductive feature. The second semiconductor element includes a second substrate, a second ILD layers over the second substrate and a second interconnection feature in second ILD layers. The device also includes a conductive deep plug connecting to the common conductive feature in the first semiconductor element and the second interconnection feature. The conductive deep plug is separated with the conductive plug by the first ILD layer.
    Type: Grant
    Filed: May 27, 2016
    Date of Patent: January 9, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chun-Chieh Chuang, Dun-Nian Yaung, Jen-Cheng Liu, Feng-Chi Hung, Tzu-Hsuan Hsu, Shu-Ting Tsai, Min-Feng Kao
  • Patent number: 9865542
    Abstract: In some embodiments, an interconnect structure includes first and second metal lines, and an end-to-end portion. The first metal line is formed in a first interconnect layer, extends in length substantially along a first direction and ends at a first end portion. The second metal line is formed in the first interconnect layer, starts from a second end portion, extends in length substantially along the first direction and is misaligned with the first metal line in the first direction. The end-to-end portion couples the first metal line to the second metal line, is formed in a second interconnect layer different from the first interconnect layer, and is overlapped with the first and second end portions. A width of the end-to-end portion at where the end-to-end portion is overlapped with the first end portion is wider than a width of the first end portion by at least about 10%.
    Type: Grant
    Filed: January 18, 2017
    Date of Patent: January 9, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD
    Inventors: Jhon Jhy Liaw, Yen-Huei Chen
  • Patent number: 9865655
    Abstract: Semiconductor structures and methods for forming the same are provided. The semiconductor structure includes a substrate and a memory cell structure formed over the substrate. In addition, the memory cell structure includes a first electrode layer formed over the substrate and a resistance-change material layer formed over the first electrode layer. The memory cell structure further includes a second electrode layer formed over the resistance-change material layer. In addition, the resistance-change material layer includes a semimetal or a semimetal alloy.
    Type: Grant
    Filed: December 15, 2015
    Date of Patent: January 9, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Jean-Pierre Colinge, Carlos H. Diaz
  • Patent number: 9863754
    Abstract: A wafer alignment apparatus includes a light source, a light detection device, and a rotation device configured to rotate a wafer. The light source is configured to provide light directed to the wafer. The light detection device is configured to detect reflected light intensity from the wafer to locate at least one wafer alignment mark of wafer alignment marks separated by a plurality of angles. At least two of those angles are equal.
    Type: Grant
    Filed: September 15, 2014
    Date of Patent: January 9, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wei-Hsiang Tseng, Chin-Hsiang Lin, Heng-Hsin Liu, Jui-Chun Peng, Ho-Ping Cheng
  • Patent number: 9865481
    Abstract: A package for holding a plurality of heterogeneous integrated circuits includes a first chip having a first conductive pad and a first substrate including a first semiconductor, and a second chip having a second conductive pad and a second substrate including a second semiconductor. The second semiconductor is different from the first semiconductor. The package also includes a molding structure in which the first chip and the second chip are embedded, a conductive structure over the first chip and conductively coupled to the first conductive pad and over the second chip and conductively coupled to the second conductive pad, and a passivation layer over the conductive structure. The passivation layer comprises an opening defined therein which exposes a portion of the second chip.
    Type: Grant
    Filed: July 29, 2016
    Date of Patent: January 9, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wan-Yu Lee, Chun-Hao Tseng, Jui Hsieh Lai, Tien-Yu Huang, Ying-Hao Kuo, Kuo-Chung Yee
  • Patent number: 9865732
    Abstract: An integrated circuit includes a gate electrode and spacers along sidewalls of the gate electrode. The integrated circuit further includes a source/drain (S/D) region adjacent to the gate electrode. The S/D region includes a diffusion barrier structure at least partially in a recess of the substrate. The diffusion barrier structure includes an epitaxial layer having a first region and a second region. The first region is thinner than the second region, and the first region is misaligned with respect to the sidewalls of the gate electrode. The S/D region includes a doped silicon-containing structure over the diffusion barrier structure. The first region of the diffusion barrier structure is configured to partially prevent dopants of the doped silicon-containing structure from diffusing into the substrate. The second region of the diffusion barrier structure is configured to substantially completely prevent the dopants of the doped silicon-containing structure from diffusing into the substrate.
    Type: Grant
    Filed: June 2, 2016
    Date of Patent: January 9, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chun Hsiung Tsai, Su-Hao Liu, Chien-Tai Chan, King-Yuen Wong, Chien-Chang Su
  • Patent number: 9865605
    Abstract: A memory circuit includes a first column of memory cells arranged along a first direction, a first supply voltage line extending along the first direction in a first conductive layer of the memory circuit, a second supply voltage line, a first resistive device electrically connecting the first supply voltage line and the second supply voltage line, and a supply voltage source. Each memory cell of the first column of memory cells includes a supply voltage line segment. The first supply voltage line is made of at least the supply voltage line segments of the first column of memory cells. The supply voltage source is electrically coupled with first supply voltage line through one or more conductive paths, and the second supply voltage line and the first resistive device is in a lowest resistance path of the one or more conductive paths.
    Type: Grant
    Filed: January 14, 2016
    Date of Patent: January 9, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yen-Huei Chen, Hung-Jen Liao, Chih-Yu Lin, Jonathan Tsung-Yung Chang, Wei-Cheng Wu