Abstract: [Problem] The present invention provides a gas supply method by which a gas in a gas container can be effectively utilized. [Means for Solving the Problem] On the basis of: the maximum flow rate (a first preset flow rate (Q1)) and the minimum flow rate (a second preset flow rate (Q2)) at the place where the gas is used; a first preset pressure (P1) at which the gas can be supplied at a first preset flow rate (Q1); a second preset pressure (P2) at which the gas can be supplied at a second preset flow rate (Q2); a third preset pressure (P3) which is higher than the first preset pressure (P1); residual pressures (PA, PB) in gas containers (SA, SB); a supplied gas flow rate (Q); and the relationship between the residual pressures (PA, PB) and suppliable gas flow rates (QPA and QPB, respectively), the residual pressures (PA, PB) and the supplied gas flow rate (Q) are monitored and the gas supply is switched between the first gas container (SA) and the second gas container (SB).

Abstract: Provided are a method for operating a gas separation device capable of performing gas separation with high separation capability and treatment amount in a small membrane area or in a small number of separation membrane modules, and a method for recovering a residual gas capable of performing more suitable detoxifying treatment or recycling by efficiently separating and recovering a mixed gas remaining in a cylinder, using the operating method. Two or more separation membrane modules are connected with each other in parallel.

Abstract: A gas cutting method is provided which includes: mixing hydrogen gas and hydrocarbon gas to acquire fuel gas; ejecting a preheating flame, which is formed by mixing and igniting the fuel gas and preheating oxygen gas, from an end of a cutting tip to heat a workpiece; and ejecting cutting hydrogen gas to the heated workpiece to cut the workpiece. Here, the content of the hydrocarbon gas in the fuel gas is more than 0 vol % and equal to or less than 4 vol %.

Abstract: A hydrocarbon adsorbent that includes a zeolite with either a H-FER structure or a MOR structure in which the pore diameter has been adjusted by ion exchange. A propane adsorbent that includes a zeolite with a MFI structure having a Si/Al ratio of no more than 20. A hydrocarbon removal unit that includes a TSA pre-purification unit having a column packed with sequential layers of activated alumina, a NaX zeolite, and the hydrocarbon adsorbent. A method of reducing the hydrocarbon content within liquid oxygen inside a cryogenic air separation unit that includes purifying feed air with the above pre-purification unit.

Abstract: A gas purification method of the present invention uses a carbon membrane having a molecular sieving action to purify at least one selected from the group consisting of a hydride gas, a hydrogen halide gas, and a halogen gas, each gas containing an impurity at 10 ppm or less. The present invention can be used for a recovery unit that recoveries a used gas to reuse it as an ultrapure semiconductor material gas, and a unit or equipment that produces or charges an ultrapure semiconductor material gas.

Abstract: The method for concentrating an oxygen isotope or isotopes of the present invention combines the step of concentrating 17O and/or the step of depleting 18O that utilizes photodissociation of ozone by a laser beam with an oxygen distillation step that concentrates the oxygen isotope. At this time, it is preferable to carry out a step of isotope scrambling in addition to the above. When both a step of concentrating 17O and a step of depleting 18O are carried out, whichever thereof may be done first prior to the other. Also these steps may be placed either before or after the oxygen distillation step. Moreover, at least one of said oxygen distillation step, the concentrating 17O step, the depleting 18O step and the isotope scrambling step is preferably carried out twice or more.

Abstract: An outer gas for plasma welding of the present invention is used in plasma welding of a stainless steel with use of a plasma welding torch in which an insert tip (2) is provided in the periphery of a tungsten electrode (1), a shield cap (3) is provided in the periphery of this insert tip (2), a front end part of the tungsten electrode (1) is located inside from a front end part of the insert tip (2), a center gas comprising an inert gas is allowed to flow into a gap between the tungsten electrode (1) and the insert tip (2), and the outer gas is allowed to flow into a gap between the insert tip (2) and the shield cap (3), wherein the outer gas is a mixed gas containing 0.5 to 2% by volume of a carbon dioxide gas with the balance of an inert gas.

Abstract: A method of quantifying a target non-peptidic compound having an amino group contained in one or more biological samples, which comprises a step of producing a difference in the mass of the target non-peptidic compound between samples, by using a combination of two or more kinds of stable isotopes of a compound represented by the formula (I): wherein R1, R2 and R3 are the same or different and each is hydrogen, halogen or alkyl, or a salt thereof, as a labeling compound; and a kit and the like usable for such method.

Abstract: Provided is a cryopreservation device which is small-sized and light-weight and has a low price, and also which is easy to get a cryocane in and out of. The cryopreservation device is configured to include first rotation lid 13 rotatably mounted on upper opening of container body 11, second rotation lid 14 rotatably provided on circular opening provided on the first rotation lid, through-hole for getting a cryocane in and out of provided on the second rotation lid, tubular body 15 provided in a protruding manner upward from the second rotation lid, lifting device 16 arranged inside the tubular body, cane gripper 17 provided on the lifting device, and door 18 provided on the tubular body, wherein any of cryocanes held at a center portion to the periphery of the container body on the cryocane holder can be gripped by rotating the first rotation lid with respect to the upper opening and by rotating the second rotation lid with respect to the first rotation lid to adjust the position of the through-hole.

Abstract: A burner for production of inorganic spheroidized particles according to the present invention includes a first raw material supply path (1A) through which a raw material powder is supplied together with a carrier gas; a fuel supply path (4A) disposed around the outer circumference of the first raw material supply path (1A), through which a fuel gas is supplied; a primary oxygen supply path (5A) disposed around the outer circumference of the fuel supply path (4A), through which an oxygen-containing gas is supplied; a second raw material supply path (6A) disposed around the outer circumference of the primary oxygen supply path (5A), through which a raw material powder is supplied together with a carrier gas; and a secondary oxygen supply path (7A) disposed around the outer circumference of the second raw material supply path (6A), through which an oxygen-containing gas is supplied.

Abstract: A method for producing inorganic spheroidized particles according to the present invention includes a step of producing the inorganic spheroidized particles by means of a diffusion type burner (12), wherein the burner (12) comprises a first raw material supply path (1A), a fuel supply path (4A), a raw material diffusion chamber (9), a primary oxygen supply path (5A), a second raw material supply path (6A), a secondary oxygen supply path (7A), and a combustion chamber (8).

Abstract: Disclosed is a rotation/revolution type vapor phase growth apparatus that can maintain constant flow rates of a purge gas and a raw material gas when a raw material gas introducing direction is set to be the same as a susceptor rotation introducing direction. Inside a hollow drive shaft 12 supporting and rotating a disk-shaped susceptor 13, a raw material gas supply tube 20 is coaxially disposed, and between the hollow drive shaft and the raw material gas supply tube, a purge gas flow path 21 is formed. Additionally, in a purge gas introducing nozzle introducing a purge gas in an outer circumferential direction of a flow channel 18 from the purge gas flow path, a gas introducing path 19c is formed in a direction parallel to an upper surface of the susceptor in such a manner as to make a vertical dimension of the gas introducing path constant.

Abstract: Provided are a heat medium heating-cooling apparatus and a heat medium temperature control method, which can control the heat medium temperature stably and more efficiently. The heat medium heating-cooling apparatus includes a heat medium heating unit (12) as well as a bypass line (19) thereof with switching valves 20a, 20b switching the direction of a flow of the heat medium to the heat medium heating unit or the bypass line. Decisions are made based on the present temperature (PV) in a reactor (11), a preset target temperature (SV), stable temperature range (?) and control switching temperature (?). According to the resulted four decisions of “stable heating”, “stable cooling”, “inclined heating” and “inclined cooling”, the temperature control according to either of the heating control at a heating control unit or the cooling control at a cooling control unit is conducted.

Abstract: Disclosed is an air liquefaction separation method and apparatus by which the apparatus cost can be reduced when liquid products are collected, the method including: a feed air compression step in which the whole amount of a feed air is a pressurized feed air having a first set pressure which is higher than the operating pressure of the intermediate pressure column; an adsorption and purification step in which impurities are adsorbed and removed from the pressurized feed air to obtain a pressurized purified air; a combining step for a circulating air in which the pressurized purified air and the below-described pressurized returned air are combined to obtain a circulating air; a cooling step in which a first branch air stream of the two divided circulating air is cooled at a first set temperature to obtain an air to be introduced into the intermediate pressure column, and a second branch air stream is cooled at a second set temperature which is higher than the first set temperature to obtain an air for exp

Abstract: Disclosed is a rotation/revolution type vapor phase growth apparatus that allows for automatic meshing between an external gear and an internal gear. In the apparatus, on tooth side surfaces of at least one kind of a plurality of external gear members provided rotatably in a circumferential direction of an outer periphery of a disk-shaped susceptor and a ring-shaped fixed internal gear member having an internal gear to mesh with the external gear members, there is provided a guide slope that abuts against a tooth side surface of the other kind of the gear member(s) to guide both kinds of the gear members into a meshed state when both kinds of the gear members move from a non-meshed state to the meshed state.

Abstract: A semiconductor device according to the invention includes a first Cu interconnect and a first barrier insulating film. a The first barrier insulating film is provided on the first Cu interconnect, and prevents Cu from being diffused from the first Cu interconnect. In addition, the semiconductor device includes a second Cu interconnect and a second barrier insulating film on the first barrier insulating film. The second barrier insulating film is provided on a first Cu interconnect, and prevents Cu from being diffused from the second Cu interconnect. The first and second barrier insulating films are made of a silicon-based insulating film having a branched alkyl group and a carbon-carbon double bond.

Abstract: A method for supplying a refined liquefied gas, in which prior to the supply of a liquefied gas stored in a container, the liquefied gas is refined by (1) determining the concentrations of impurities in the gas phase, then estimating the concentration of each impurity in the liquid phase from the ratio between the liquid-phase concentration and the gas-phase concentration of the impurity (gas-liquid equilibrium constant (Kn)), and assuming the amount of the gas to be discharged from the gas phase part within the refinement tank to refine the liquefied gas, (2) discharging the gas from the gas phase part to refine the liquefied gas constituting the liquid phase, (3) sampling the gas phase and ascertaining the quality of the refined liquefied gas, and (4) supplying the refined liquefied gas to a receiver from the refinement tank.

Abstract: The present invention provides a method of remedying deterioration of an insulating film which, during the remedial treatment of an insulating film deteriorated by plasma treatment, does not leave residual remedial agent on the wiring material such as the copper wiring layer, can be conducted using a dry process, and exhibits excellent applicability to mass production. The insulating film that has been deteriorated by plasma treatment is brought into contact with a remedial agent composed of a compound with a molecular structure having at least one of a nitro group and a carbonyl group, and at least one of a hydrocarbon group and a hydrogen group.

Abstract: A method and apparatus for continuously synthesizing oriented carbon nanotubes, with which oriented carbon nanotubes can be stably synthesized in large quantities, is presented. The method and apparatus for continuously synthesizing oriented carbon nanotubes comprise: a coating and drying step in which a catalyst liquid is applied and dried to form a catalyst layer on a substrate surface; a catalyst substrate formation step in which the catalyst layer is heated to form a catalyst substrate having a catalyst particle layer on the substrate surface; a synthesis step in which a raw material gas heated to a temperature equal to or higher than a synthesis temperature for the oriented carbon nanotubes is brought into contact with the surface of the catalyst substrate to synthesize oriented carbon nanotubes; and a collection step in which the oriented carbon nanotubes are collected.

Abstract: It is intended to highly efficiently produce a high-density brush shaped carbon nanostructure useful in the production of CNT assembly, such as rope-shaped CNTs, and provide a catalyst body for production of brush-shaped carbon nanostructure that enables the production. The catalyst body for production of brush-shaped carbon nanostructure is one comprising a substrate (32), an aggregation suppressive layer (34) superimposed on a surface thereof and a catalyst layer superimposed on the aggregation suppressive layer (34). The catalyst layer is a catalyst particle layer (44) consisting of metallic catalyst particles (42) composed mainly of a catalytic metal. The metallic catalyst particles (42) have an average particle diameter, D, satisfying the relationship 0.5 nm?D?80 nm, and individual particles of the metallic catalyst particles (42) have a diameter, d, falling within the range of the above average particle diameter (D).