Patents Assigned to THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATION
  • Publication number: 20230049408
    Abstract: A semiconductor phosphide injection synthesis system and a control method are provided, which belong to the technical field of preparation of semiconductor phosphides. The semiconductor phosphide injection synthesis system includes a furnace body, a shielding carrier box arranged above the furnace body by virtue of a lifting mechanism, a phosphorus source carrier arranged in the shielding carrier box, an injection pipe arranged below the phosphorus source carrier, and a crucible arranged at an inner bottom of the furnace body in a matched manner.
    Type: Application
    Filed: July 5, 2021
    Publication date: February 16, 2023
    Applicant: THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATION
    Inventors: Niefeng SUN, Shujie WANG, Huisheng LIU, Tongnian SUN
  • Patent number: 11456387
    Abstract: The disclosure provides a normally-off gallium oxide field-effect transistor structure and a preparation method therefor, and relates to the technical field of semiconductor device. The normally-off gallium oxide field-effect transistor structure comprises a substrate layer and an n-type doped gallium oxide channel layer from bottom to top. The n-type doped gallium oxide channel layer is provided with a source, a drain, and a gate. The gate is located between the source and the drain. A no-electron channel region is provided in the n-type doped gallium oxide channel layer located below the gate.
    Type: Grant
    Filed: October 1, 2020
    Date of Patent: September 27, 2022
    Assignee: THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATION
    Inventors: Yuanjie Lv, Yuangang Wang, Xingye Zhou, Xin Tan, Xubo Song, Shixiong Liang, Zhihong Feng
  • Patent number: 11417779
    Abstract: The disclosure is applicable for the technical field of semiconductor devices manufacturing, and provides a gallium oxide SBD terminal structure. The gallium oxide SBD terminal structure comprises a cathode metal layer, an N+ high-concentration substrate layer, an N? low-concentration Ga2O3 epitaxial layer and an anode metal layer from bottom to top, wherein the N? low-concentration Ga2O3 epitaxial layer is within a range of certain thickness close to the anode metal layer; and a doping concentration below the anode metal layer is greater than a doping concentration on two sides of the anode metal layer. Namely, only a doping concentration of the part outside the corresponding area of the anode metal layer is changed, so that the breakdown voltage of the gallium oxide SBD terminal structure is improved under the condition of guaranteeing low on resistance.
    Type: Grant
    Filed: October 13, 2020
    Date of Patent: August 16, 2022
    Assignee: The 13th Research Institute of China Electronics Technology Group Corporation
    Inventors: Yuanjie Lv, Yuangang Wang, Xingye Zhou, Xin Tan, Xubo Song, Xuefeng Zou, Shixiong Liang, Zhihong Feng
  • Patent number: 11385175
    Abstract: A calibration method includes: acquiring eight error models obtained after a preliminary calibration of a Terahertz frequency band system; based on the eight error models, determining a first mathematical model according to a first S parameter related to a first calibration piece, the first mathematical model comprising parallel crosstalk terms between probes, and determining a second mathematical model according to a second S parameter related to a second calibration piece, the second mathematical model comprising series crosstalk terms between the probes; determining a third mathematical model according to a third S parameter related to a measured piece; and solving and obtaining a Z parameter of the measured piece based on the first mathematical model, the second mathematical model and the third mathematical model, and acquiring an S parameter of the measured piece according to the Z parameter of the measured piece.
    Type: Grant
    Filed: December 16, 2020
    Date of Patent: July 12, 2022
    Assignee: THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATION
    Inventors: Yibang Wang, Aihua Wu, Faguo Liang, Chen Liu, Peng Luan, Ye Huo, Jing Sun, Yanli Li
  • Patent number: 11349043
    Abstract: The disclosure is related to the technical field of semiconductors, and provides a method for manufacturing a tilted mesa and a method for manufacturing a detector. The method for manufacturing a tilted mesa comprises: coating a photoresist layer on a mesa region of a chip; heating the chip on which the photoresist layer is coated from a first preset temperature to a second preset temperature; performing etching processing on the heated chip, so as to manufacture a mesa having a preset tilting angle; and removing the photoresist layer on the mesa region of the chip after the mesa is manufactured.
    Type: Grant
    Filed: September 24, 2020
    Date of Patent: May 31, 2022
    Assignee: The 13th Research Institute of China Electronics Technology Group Corporation
    Inventors: Xingye Zhou, Zhihong Feng, Yuanjie Lv, Xin Tan, Xubo Song, Jia Li, Yulong Fang, Yuangang Wang
  • Patent number: 11342474
    Abstract: A method for preparing an avalanche photodiode includes preparing a mesa on a wafer, growing a sacrificial layer on an upper surface of the wafer and a side surface of the mesa, removing the sacrificial layer in an ohmic contact electrode region of the wafer, preparing an ohmic contact electrode in the ohmic contact electrode region of the wafer, removing the sacrificial layer in a non-mesa region of the wafer, growing a passivation layer on the upper surface of the wafer and the side surface of the mesa, removing the passivation layer on the upper surface of the mesa of the wafer and the passivation layer in the non-mesa region of the wafer corresponding to the ohmic contact electrode region, and removing the sacrificial layer on the upper surface of the mesa of the wafer.
    Type: Grant
    Filed: September 24, 2020
    Date of Patent: May 24, 2022
    Assignee: The 13th Research Institute of China Electronics Technology Group Corporation
    Inventors: Xingye Zhou, Zhihong Feng, Yuanjie Lv, Xin Tan, Yuangang Wang, Xubo Song, Jia Li, Yulong Fang
  • Patent number: 11275103
    Abstract: The disclosure provides a calibration method, a system and a device of an on-wafer S parameter of a vector network analyzer. The method comprises the steps of: acquiring a first parameter of a first crosstalk calibration piece measured by the vector network analyzer; obtaining a main crosstalk error term based on the first parameter of the first crosstalk calibration piece and a calibration parameter of the first crosstalk calibration piece; acquiring a second parameter of a second crosstalk calibration piece measured by the vector network analyzer based on the main crosstalk error term; and obtaining a secondary crosstalk error term based on the second parameter of the second crosstalk calibration piece and a calibration parameter of the second crosstalk calibration piece, wherein the main crosstalk error term and the secondary crosstalk error term are used for calibrating the vector network analyzer.
    Type: Grant
    Filed: September 19, 2020
    Date of Patent: March 15, 2022
    Assignee: The 13th Research Institute of China Electronics Technology Group Corporation
    Inventors: Yibang Wang, Aihua Wu, Faguo Liang, Chen Liu, Xuefeng Zou, Zhifu Hu, Jian Cao, Ye Huo
  • Patent number: 11242615
    Abstract: The invention provides a growth method for preparing high-yield crystals, belongs to the technical field of single crystal growth. Auxiliary crucibles are arranged on a crucible according to different crystal types and according to the crystal orientation of crystal growth in the main crucible, the relationship between the crystal growth direction and twin crystal orientation. By controlling the angle between the auxiliary crucibles and the main crucible, the relative position between the auxiliary crucibles each other, the auxiliary crucibles realize correction on the crystal orientation of twins generated in the main crucible crystal growth process.
    Type: Grant
    Filed: April 18, 2019
    Date of Patent: February 8, 2022
    Assignee: THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATION
    Inventors: Niefeng Sun, Shujie Wang, Tongnian Sun, Huisheng Liu, Huimin Shao, Yanlei Shi
  • Patent number: 11244821
    Abstract: The present disclosure discloses a method for preparing an isolation area of a gallium oxide device, the method comprising: depositing a mask layer on a gallium oxide material; removing a preset portion region of the mask layer; preparing an isolation area in a position, corresponding to the preset portion region, on the gallium oxide material by using a high-temperature oxidation technique, with the isolation area being located between active areas of the gallium oxide device; and removing the remaining mask layer on the gallium oxide material. In the disclosure, the isolation area is prepared by using the high-temperature oxidation technique, which prevents damage to the gallium oxide device during the preparation of the isolation area, thereby achieving isolation between the active areas of the gallium oxide device.
    Type: Grant
    Filed: September 29, 2020
    Date of Patent: February 8, 2022
    Assignee: The 13th Research Institute of China Electronics Technology Group Corporation
    Inventors: Yuanjie Lv, Yuangang Wang, Xingye Zhou, Xin Tan, Xubo Song, Shixiong Liang, Zhihong Feng
  • Patent number: 11127849
    Abstract: The present disclosure discloses an enhancement-mode field effect transistor. This enhancement-mode field effect transistor includes a substrate, a channel layer formed on an upper surface of the substrate, a source electrode and a drain electrode respectively formed on both sides of the channel layer, and a gate electrode formed on an upper surface of the channel layer, a region outside the corresponding region of the gate electrode in the channel layer is provided with a carrier-free region. Carriers are absent in the carrier-free region, and carriers are present in the remaining portion of the channel layer. The carrier-free region is not disposed below the gate electrode, but is disposed outside the corresponding region of the gate electrode in the channel layer, and the threshold voltage of the device can be regulated by regulating the width and number of the carrier-free region.
    Type: Grant
    Filed: December 27, 2017
    Date of Patent: September 21, 2021
    Assignee: The 13th Research Institute of China Electronics Technology Group Corporation
    Inventors: Yuanjie Lv, Yuangang Wang, Xubo Song, Xin Tan, Xingye Zhou, Zhihong Feng
  • Patent number: 10985258
    Abstract: Disclosed are a preparation method for a diamond-based field effect transistor and a field effect transistor, relating to the technical field of semi-conductors.
    Type: Grant
    Filed: November 6, 2017
    Date of Patent: April 20, 2021
    Assignee: The 13th Research Institute of China Electronics Technology Group Corporation
    Inventors: Zhihong Feng, Jingjing Wang, Cui Yu, Chuangjie Zhou, Jianchao Guo, Zezhao He, Qingbin Liu, Xuedong Gao
  • Patent number: 10868497
    Abstract: An unbalanced terahertz frequency doubler circuit with power handling capacity is provided, and the circuit includes a RF input waveguide, a quartz substrate and a RF output waveguide, where one end of the quartz substrate is disposed in a waveguide groove of the RF input waveguide and the other end of the quartz substrate is disposed in a waveguide groove of the RF output waveguide, where an input transition microstrip is disposed on the quartz substrate, and one end of the transition microstrip is connected to an output transition microstrip sequentially through a first transmission microstrip, a low pass filter, a RF matching microstrip and a second transmission microstrip, where anodes of four GaAs-based terahertz frequency multiplier diode groups are connected to the RF matching microstrip, and a cathode at the outermost position of each of the GaAs-based terahertz frequency multiplier diode groups is connected to a grounding quartz strip.
    Type: Grant
    Filed: August 28, 2017
    Date of Patent: December 15, 2020
    Assignee: THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATION
    Inventors: Junlong Wang, Zhihong Feng, Dabao Yang, Shixiong Liang, Lisen Zhang, Xiangyang Zhao, Dong Xing, Peng Xu
  • Publication number: 20200280283
    Abstract: The present application discloses an unbalanced terahertz frequency doubler circuit with power handling capacity including a RF input waveguide, a quartz substrate and a RF output waveguide, where one end of the quartz substrate is disposed in a waveguide groove of the RF input waveguide and the other end of the quartz substrate is disposed in a waveguide groove of the RF output waveguide, where an input transition microstrip is disposed on the quartz substrate, and one end of the transition microstrip is connected to an output transition microstrip sequentially through a first transmission microstrip, a low pass filter, a RF matching microstrip and a second transmission microstrip, where anodes of four GaAs-based terahertz frequency multiplier diode groups are connected to the RF matching microstrip, and a cathode at the outermost position of each of the GaAs-based terahertz frequency multiplier diode groups is connected to a grounding quartz strip.
    Type: Application
    Filed: August 28, 2017
    Publication date: September 3, 2020
    Applicant: THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATION
    Inventors: Junlong Wang, Zhihong Feng, Dabao Yang, Shixiong Liang, Lisen Zhang, Xiangyang Zhao, Dong Xing, Peng Xu
  • Patent number: 10648100
    Abstract: The present invention discloses a method for carrying out phosphide in-situ injection synthesis by carrier gas, relating to a synthetic method of semiconductor crystal: step A, shielding inert gas is introduced into a furnace body through a carrier gas intake conduit; step B, a crucible is heated in the furnace body to melt a pre-synthesized raw material in the crucible; step C, the heated shielding inert gas is introduced into the furnace body through the carrier gas intake conduit; step D, a phosphorus source furnace loaded with red phosphorus is moved downwards until an injection conduit of the phosphorus source furnace is submerged in the melt; step E, the red phosphorus is heated by the phosphorus source furnace to produce phosphorus gas, and the phosphorus gas is mixed with the shielding inert gas and then injected into the melt through the injection conduit, and the phosphorus gas reacts with the melt to produce phosphide; and step F, each device is turned off after the synthesis is finished.
    Type: Grant
    Filed: December 11, 2017
    Date of Patent: May 12, 2020
    Assignee: THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATION
    Inventors: Niefeng Sun, Shujie Wang, Huisheng Liu, Tongnian Sun
  • Patent number: 10519563
    Abstract: The invention provides a device and method for continuous VGF crystal growth through rotation after horizontal injection synthesis, and belongs to the technical field of semiconductor crystal synthesis and growth.
    Type: Grant
    Filed: December 11, 2017
    Date of Patent: December 31, 2019
    Assignee: THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATION
    Inventors: Shujie Wang, Niefeng Sun, Huisheng Liu, Tongnian Sun, Yanlei Shi, Huimin Shao, Xiaolan Li, Yang Wang, Lijie Fu
  • Patent number: 10505024
    Abstract: A method for preparing a cap-layer-structured gallium oxide field effect transistor, includes: removing a gallium oxide channel layer and a gallium oxide cap layer from a passive area of a gallium oxide epitaxial wafer; respectively removing the gallium oxide cap layer corresponding to a source region of the gallium oxide epitaxial wafer and the gallium oxide cap layer corresponding to a drain region of the gallium oxide epitaxial wafer; respectively doping a portion of the gallium oxide channel layer corresponding to the source region and a portion of the gallium oxide channel layer corresponding to the drain region with an N-type impurity; respectively capping an upper surface of the gallium oxide channel layer corresponding to the source region and an upper surface of the gallium oxide channel layer corresponding to the drain region with a first metal layer to respectively form a source and a drain; and forming a gate.
    Type: Grant
    Filed: October 27, 2017
    Date of Patent: December 10, 2019
    Assignee: The 13th Research Institute of China Electronics Technology Group Corporation
    Inventors: Yuanjie Lv, Xubo Song, Zhihong Feng, Yuangang Wang, Xin Tan, xingye Zhou
  • Patent number: 10410960
    Abstract: The application discloses a parallel seam welding leadless ceramic package, including a ceramic, a sealing ring and a metal cover plate; a back surface of the ceramic is provided with a back grounding metal pattern, and the back grounding metal pattern is provided with several outwardly protruding grounding terminals, a RF signal transmission pad is disposed between every two adjacent grounding terminals, the front grounding metal pattern and the back grounding metal pattern are interconnected by the internal and/or external metallized interconnection holes, the front grounding line and the back grounding metal pattern is interconnected by the internal or external metallized interconnection holes, and the RF signal transmission lines are interconnected to the RF signal transmission pad by a separated external and/or external metallized interconnection hole.
    Type: Grant
    Filed: August 28, 2017
    Date of Patent: September 10, 2019
    Assignee: THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATION
    Inventors: Zhizhuang Qiao, Linjie Liu, Xin F. Zheng
  • Patent number: 9349825
    Abstract: A method for manufacturing a graphene transistor based on self-aligning technology, the method comprising: on a substrate (1), forming sequentially graphene material (4), a metal film (5), and photoresist patterns (6) formed by lithography, removing the metal film and the graphene material uncovered by the photoresist, forming an active area, and metal electrodes (7, 8, 9) of a source, a gate, and a drain of the transistor, wherein the source electrode 7 and drain electrode 9 are connected with a metal of the active region, and forming gate photoresist patterns (10) between the source and the drain by lithography, etching off the exposed metal, forming sequentially a seed layer (11), a gate dielectric layer (12), and gate metal (13) on the exposed graphene surface, and finally forming a graphene transistor.
    Type: Grant
    Filed: July 4, 2013
    Date of Patent: May 24, 2016
    Assignee: THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATION
    Inventors: Zhihong Feng, Jia Li, Cui Wei, Qingbin Liu, Zezhao He, Jingjing Wang
  • Patent number: 9242901
    Abstract: Disclosed is a refined white ceramic material, which belongs to the field of ceramic materials for component packaging, and comprises the following raw materials by weight in percentage: aluminum oxide 87-93, magnesium oxide 0.8-5, silicon dioxide 1-6, calcium oxide 0.6-4, titanium dioxide 0.01-0.5, and zirconium dioxide 0.5-3. The method for preparing same comprises: (1) washing aluminum oxide grinding balls and a ball-milling tank, and drying for later use; (2) weighing a solvent NP-10 of 0.5-4 by weight in percentage, and adding the solvent into the ball-milling tank; (3) weighing raw materials, adding the raw materials into the ball-milling tank, and performing ball milling for 72±0.5 h. By means of the refined white ceramic material of the present invention, the obtained ceramic grains have even sizes, small surface roughness, and high fracture resistance performance of ceramic body.
    Type: Grant
    Filed: February 17, 2012
    Date of Patent: January 26, 2016
    Assignee: THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATION
    Inventors: Hongyu Zheng, Pengyuan Shi, Huajiang Jin, Caihua Ren, Bingqu Zhang, Jinli Zhang
  • Publication number: 20140113800
    Abstract: Disclosed is a refined white ceramic material, which belongs to the field of ceramic materials for component packaging, and comprises the following raw materials by weight in percentage: aluminum oxide 87-93, magnesium oxide 0.8-5, silicon dioxide 1-6, calcium oxide 0.6-4, titanium dioxide 0.01-0.5, and zirconium dioxide 0.5-3. The method for preparing same comprises: (1) washing aluminum oxide grinding balls and a ball-milling tank, and drying for later use; (2) weighing a solvent NP-10 of 0.5-4 by weight in percentage, and adding the solvent into the ball-milling tank; (3) weighing raw materials, adding the raw materials into the ball-milling tank, and performing ball milling for 72±0.5 h. By means of the refined white ceramic material of the present invention, the obtained ceramic grains have even sizes, small surface roughness, and high fracture resistance performance of ceramic body.
    Type: Application
    Filed: February 17, 2012
    Publication date: April 24, 2014
    Applicant: THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATION
    Inventors: Hongyu Zheng, Pengyuan Shi, Huajiang Jin, Caihua Ren, Bingqu Zhang, Jinli Zhang