Abstract: A method for depositing a material onto a plurality of features located on a surface of a substrate provides more accurate and consistent control over where the material is deposited. The method comprises evaporating the material to create an evaporant stream, positioning the substrate so that the evaporant stream strikes the plurality of features over a range of exposure angles between the evaporant stream and the substrate, moving the substrate to vary the range of exposure angles over which the evaporant stream strikes the plurality of features, and moving one or more shutters into the evaporant stream to block any part of the evaporant stream that has an exposure angle greater than a critical exposure angle.

Abstract: A structured packing with improved packing elements and method of using the structured packing. Each structured packing element comprises corrugated sheets and planar members alternating with and located between the corrugated sheets The planar members are positioned so that at least the lowermost horizontal edges of the planar members and the corrugated sheets are situated proximal to one another. Perforations provided in the planar members and the corrugated sheets are designed to avoid turbulent flows and bulk fluid flow across the packing element while allowing transverse pressure equalization. Different configurations of corrugated sheets may be used with the planar members to form the structured packing.

Abstract: In an industrial glass furnace, which optionally contains recuperators, regenerators, electric boost or other devices for providing heat to glass batch material, at least one staged combustion oxy-fuel burner is mounted in the roof of the furnace to provide heat to melt the glass batch material by providing a flow of fuel to the oxy-fuel burner; providing a flow of gaseous oxidant in association with said the oxy-fuel burner; injecting the fuel and the oxidant into the furnace; and, combusting the fuel such that at least a portion of combustion is effected in the vicinity of said glass forming material to enhance convective and radiative transfer of heat to said glass forming material without substantially disturbing the glass forming material. In one embodiment, the oxy-fuel burner is adapted for injecting liquid fuels.

Abstract: In an industrial glass furnace which contains recuperators, regenerators, electric boost or other devices for providing heat to glass batch material an oxy-fuel burner mounted in the roof of the furnace provides additional heat to melt the batch material. A method of mounting and using such a roof-mounted oxy-fuel burner including the operating parameters to maximize heat transfer while minimizing the disturbance of the batch material is disclosed.

Abstract: A system is provided that includes a load lock apparatus having an interior configured to receive an object. At least one inlet valve may be flow coupled to the interior of the load lock apparatus, and at least one outlet valve may also be flow coupled to the interior of the load lock apparatus. A controller may be configured to selectively control opening and closing of the at least one inlet valve. The load lock apparatus may include an object receiving mechanism that is movable within the interior of the load lock apparatus to throttle the evacuation of the interior. Several methods of using the system and load lock apparatuses are also disclosed.

Abstract: An apparatus and method for recovering and recycling a coolant gas from a heat exchanger. The apparatus comprises a coolant gas recovery section, and analysis section, and a coolant gas blending section. The coolant gas recovery section recovers a coolant gas containing contaminants from the heat exchanger. The analysis section monitors a condition of an analysis portion of the recovered coolant gas. The coolant gas blending section operates to produce, based on the condition of the recovered coolant gas monitored by the analysis section, a blend coolant gas comprising a virgin coolant gas and a reclaimed coolant gas that comprises at least a portion of the recovered coolant gas. The blend coolant gas has a predetermined contaminant concentration and is recycled into the heat exchanger. Thus, the coolant gas is recovered from, and recycled to, the heat exchanger at the predetermined contaminant concentration without using a purification device.

Abstract: Air separation units are designed and constructed by selecting two or more modules from libraries containing different module designs. Each library comprises at least two modules with standardized interface point layouts. The standardization of interface points for each module in a given library allows for module interchangeabilty and flexibility in the design and construction of air separation units.

Abstract: Methods of providing ozone at a selected pressure above atmospheric pressure include supplying a purge gas supply (22) pressurized above the selected pressure to at least one ozone adsorption apparatus (12); desorbing ozone from the ozone adsorption apparatus (12) with the pressurized purge gas supply (22); and delivering a mixture of ozone and the purge gas supply (24) at the selected pressure without further compression.

Abstract: A system, apparatus and method is disclosed for providing a consistent liquid mixture according to a predetermined recipe for use at a point of use. The apparatus includes a plurality of liquid component reservoirs in which a constant gas pressure is maintained. A plurality of valves are provided, with individual valves connected to an outlet port of each reservoir. An electronic controller controls the valve actuation in a repetitive sequence to discharge predetermined doses of selected liquid components for mixing to form the consistent liquid mixture. A mixing section receives the sequence of doses to mix them together to form the liquid mixture.

Abstract: The present invention relates to chemical delivery systems and methods for delivery of liquid chemicals. In one embodiment, the present invention relate to systems having multi-reservoir load cell assemblies for delivering chemicals used in the semiconductor industry. In one embodiment, the present invention provides a multi-reservoir load cell assembly, including a controller, a buffer reservoir, a main reservoir, one or more load cells, coupled to the assembly and to the controller, operable to weigh the liquid in the reservoir(s), a plurality of supply lines, each supply line having a valve and connecting one of the supply containers to the main reservoir, and a gas and vacuum sources for withdrawing the liquid from the assembly when demanded by the controller and for refilling the assembly from the supply containers.

Abstract: The present invention relates to a process for removing nitrogen oxides, sulfur dioxides and mercury from gas streams such as furnace or utility boiler flue gas streams, particularly those derived from coal-fired utility boilers. A stream containing relatively low concentration of ozone from an ozone concentrator is feed to a barrier discharge reactor. Nitrogen oxides and mercury in the flue gas are oxidized by oxygen and hydroxyl radicals formed in the reactor. The flue gas is then directed to a reactor duct along with the ozone at a greater concentration wherein the remaining nitrogen oxides and mercury in the gas stream will react with the ozone to form nitric acid, nitric acid precursors, mixtures thereof and mercuric oxide. These impurities can then be removed from the gas stream by use of an aqueous scrubber, a wet electrostatic precipitator, a dry scrubber or a semi-dry scrubber.

Abstract: Methods for depositing a low-k dielectric film on the surfaces of semiconductors and integrated surfaces are disclosed. A substituted organosilane compound precursor is applied to the surface by chemical vapor deposition where it will react with the surface and form a film which will have a dielectric constant, K, less than 2.5.

Abstract: A method and system are disclosed for plating objects. At least one aspect associated with the object plating is monitored to determine the amount of at least one byproduct created during the plating and/or the reduction in the amount of at least one plating component. Based on this monitored aspect, an adjustment is made to the flow rate of substances added to a plating cell and/or the flow rate of used plating substances drained from the plating cell. The used plating substances are purified to remove at least some of the byproduct and then the purified plating substances are combined with at least one component before passing back into the plating cell to reuse at least some of the plating substances. The method and system could be used during the plating of semiconductor wafers with copper.

Abstract: A physical vapor deposition coating system to produce orthogonal lift-off coatings. The system incorporates multiple domes that rotate about the source centerline and about another axis of rotation in order to assure an even coating and to utilize a large percentage of a material evaporated from the source.

Abstract: A system, apparatus and method is disclosed for providing a consistent liquid mixture according to a predetermined recipe for use at a point of use. The apparatus includes a plurality of liquid component reservoirs in which a constant gas pressure is maintained. A plurality of valves are provided, with individual valves connected to an outlet port of each reservoir. An electronic controller controls the valve actuation in a repetitive sequence to discharge predetermined doses of selected liquid components for mixing to form the consistent liquid mixture. A mixing section receives the sequence of doses to mix them together to form the liquid mixture.

Abstract: A vacuum chamber used for processing articles, such as integrated circuit wafers, display panels, and the like, has a small load lock chamber formed at an opening in a wall of the chamber by a moveable article supporting surface within the chamber and a cover outside of the chamber. The supporting surface and cover are sealed to the chamber wall when urged against it. Articles placed into the load lock chamber, when the cover is opened, are moved into the vacuum chamber for processing by moving the supporting surface away from the wall after the cover has been closed and a vacuum established in the load lock chamber. Articles are removed from the vacuum chamber in a reverse manner. Various mechanisms are describe for moving the articles, including a particular robotic device that simultaneously swaps the positions of two articles between the supporting surface and a processing location within the vacuum chamber by first pulling the articles together and then rotating them in a half-circle.

Abstract: Low silicon sodium X zeolite containing little or no sodium A zeolite as by-product, is prepared by direct synthesis from sodium ion-containing hydrogels, the crystallization step being carried out by maintaining the hydrogels at a temperature below about 70° C., and preferably in the range of about 50 to about 70° C. for the duration of the crystallization step. Preferably, the ratios of components in the solutions used to make the hydrogel are such that in the hydrogel the silica/alumina molar ratio will be in the range of about 2.25:1 to about 2.4:1; the sodium oxide to silica molar ratio will be in the range 1.6:1 to about 1.9:1; and the water to sodium oxide molar ratio will be greater than about 60:1.

Abstract: An improved method for preparing monolith adsorbents and activating the adsorbents therein is disclosed. A mixture of lower temperature and higher temperature binders is used in fabricating the paper used to form the monolith structure. The finished monolith structure is heated to a temperature sufficient to remove the lower temperature binder while leaving the higher temperature binder to maintain integrity in the monolith.

Abstract: Zeolites exchanged with lithium, rubidium, cesium cations and trivalent cations are prepared by first partially, fully or excessively ion-exchanging a sodium-containing zeolite, a potassium-containing zeolite or a sodium- and potassium-containing zeolite with trivalent cations, then calcining the partially, fully or excessively trivalent cation-exchanged zeolite, and then ion exchanging the calcined zeolite with lithium rubidium, cesium cations, thereby replacing hydrogen and any sodium and/or potassium cations remaining in the zeolite with lithium, rubidium, cesium cations, whereby trivalent cations present in the zeolite will not be substantially replaced by the lithium ions.

Abstract: A process for regenerating a spent catalyst having coke deposits thereon in a catalyst regeneration vessel having a dense phase and a dilute phase, wherein the process comprises the steps of: (a) contacting the spent catalyst with a primary oxygen-containing gas in the dense phase, thereby combusting the coke, resulting in the formation of a combustion gas comprising nitrogen oxides and carbon monoxide which further reacts, thus reducing a majority of the nitrogen oxides to form elemental nitrogen; and (b) contacting the combustion gas with a secondary oxygen-containing gas, and typically a shield gas, at a location just above the interface between the dense phase and the dilute phase and also in the dilute phase, thereby oxidizing the remaining CO to CO2 without significant temperature rise in the dilute phase due to the after burn.